Deoxidation device

Abstract

The utility model relates to the technical field of high-purity water treatment, and discloses a deoxidation device which comprises a reaction kettle, a water pump is fixedly connected to the top end face of the reaction kettle, and a precipitation assembly is arranged on the inner wall of the reaction kettle. According to the deoxidizing device, water passes through the screen, a deoxidizing agent conveyed from the deoxidizing agent input pump is flushed into the inner bottom of the reaction kettle along the flow dividing groove, the reaction of dissolved oxygen in the water and the deoxidizing agent is promoted, the content of the dissolved oxygen in high-purity water is reduced, and water-insoluble compounds generated by the reaction of the deoxidizing agent and oxygen precipitate at the inner bottom of the reaction kettle; the deoxidized high-purity water is discharged out of the reaction kettle through the delivery pump, so that impurities are prevented from being contained in the water delivered by the delivery pump, the blockage of the reaction kettle is avoided, and a filter plate blocks compounds in the water while reducing the flow velocity of the water and promoting the precipitation of the compounds; the whole filter plate is obliquely arranged, so that the compound cannot block the filter plate.

Description

Technical Field

[0001] The utility model relates to the technical field of high-purity water treatment, in particular to a deoxidation device. Background Art

[0002] In current process production, fields such as semiconductor manufacturing and biomedicine production have very strict requirements for high-purity water. In semiconductor manufacturing, dissolved oxygen in water can cause oxidation of the wafer surface during the rinsing process, forming an oxide layer. Therefore, in the production process of semiconductor manufacturing, the concentration of dissolved oxygen in water is required to be lower than 10ppb. To meet such requirements, traditional deoxygenation methods include chemical deoxygenation, vacuum water deoxygenation, membrane deoxygenation and desorption water deoxygenation. Among them, chemical deoxygenation is an efficient method that can achieve deep deoxygenation.

[0003] According to a disclosed deoxygenation device for an ultrapure water system (publication number: CN219072286U), the deoxygenation device for the ultrapure water system in the above application is composed of a deoxygenation component and a filtration component. The deoxygenation component is mainly a deoxygenation kettle body, which is used to deoxygenate ultrapure water. The filtration component includes a filter plate, which is used to filter out impurities in the ultrapure water during pipeline transportation.

[0004] However, in actual use of the above-mentioned deoxygenation device, since the deoxidizer is usually ferrous sulfate or sulfite, these chemicals can react with oxygen to generate water-soluble compounds. These compounds will accumulate on the inner bottom surface of the reactor and then be discharged along with the delivery pump together with the water. Excessive accumulation of compounds poses a risk of clogging the delivery pump. In view of this, we propose a deoxygenation device. Utility Model Content

[0005] The purpose of the utility model is to provide a deoxidation device to solve the problems raised in the above background technology.

[0006] To achieve the above object, the utility model provides the following technical solution: a deoxidation device, comprising a reactor, a water pump is fixedly connected to the top end surface of the reactor, and a precipitation component is arranged on the inner wall of the reactor, and the precipitation component comprises:

[0007] A partition, wherein the inner wall of the reactor is fixedly connected with the partition, and the partition divides the inner wall of the reactor into a first chamber and a second chamber, and the first chamber and the second chamber are connected through the bottom of the partition;

[0008] A screen, wherein the inner wall of the reactor is fixedly connected with a screen;

[0009] A diverter plate, the inner wall of the reactor is fixedly connected with the diverter plate, one end of the diverter plate away from the inner wall of the reactor is fixedly connected with an arc-shaped portion, the side of the arc-shaped portion away from the diverter plate is fixedly connected with the oblique portion, the top end surface of the diverter plate is provided with a diverter groove, and the inner bottom surface of the diverter groove is fixedly connected with a protrusion;

[0010] An arc-shaped plate, the side wall of the partition being fixedly connected with the arc-shaped plate;

[0011] The side wall of the partition is fixedly connected with the oblique plate one, and the inner wall of the reactor is fixedly connected with the oblique plate two.

[0012] Preferably, a filter plate is fixedly connected to the top end surface of the first oblique plate, and the top of the filter plate is fixedly connected to the second oblique plate.

[0013] Preferably, the output end of the water pump is located above the first chamber, and the water pump delivers the high-purity water into the first chamber to react with the deoxidizer to reduce the dissolved oxygen content in the water.

[0014] Preferably, a deoxidizer input pump is fixedly connected to the side wall of the reactor, and the output end of the deoxidizer input pump is located between the screen and the diverter plate. A deoxidizer discharge pump is fixedly connected to the bottom end face of the reactor. The deoxidizer input pump transports the deoxidizer to the diverter plate, and the water flow passing through the screen flushes the deoxidizer along the diverter groove, and the high-purity water and the deoxidizer are fully mixed through the set diverter groove.

[0015] Preferably, a delivery pump is fixedly connected to the side wall of the reactor, and the delivery pump is located above the inclined plate 2. When the water level is higher than the inclined plate 2, the deoxygenated high-purity water can be discharged through the delivery pump.

[0016] Preferably, the partition plate, the diverter plate and the arc-shaped plate are located in the first chamber, and the inclined plate 1 and the inclined plate 2 are located in the second chamber.

[0017] Compared with the prior art, the utility model provides a deoxidation device with the following beneficial effects:

[0018] 1. The deoxidation device is provided with a screen, a diverter plate, a diverter slot, an arc plate, an inclined plate 1 and an inclined plate 2. Water passes through the screen, and the deoxidizer delivered from the deoxidizer input pump is flushed into the inner bottom of the reactor along the diverter slot, so as to promote the reaction between the dissolved oxygen in the water and the deoxidizer, and reduce the content of dissolved oxygen in the high-purity water. The water-insoluble compounds produced by the reaction of the deoxidizer and oxygen are precipitated on the inner bottom of the reactor, and then discharged from the reactor through the deoxidizer discharge pump. The deoxygenated high-purity water is discharged from the reactor through the delivery pump, so as to avoid impurities in the water delivered by the delivery pump and avoid clogging of the reactor.

[0019] 2. The deoxygenation device can block the compounds in the water by setting up the filter plate, while reducing the flow rate of water and promoting the precipitation of compounds. Since the water is filtered from bottom to top, the filter plate is tilted as a whole, so the compounds cannot accumulate on the filter plate, thereby improving the purity of the water in the delivery pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the cross-sectional structure of the reaction kettle of the utility model;

[0022] Figure 3 This is a schematic diagram of the position relationship between the diverter plate and the deoxidizer input pump of the utility model.

[0023] In the figure: 1, reaction kettle; 2, water pump; 3, deoxidizer input pump; 4, deoxidizer discharge pump; 5, delivery pump; 6, partition; 7, screen; 8, diverter plate; 9, arc portion; 10, oblique portion; 11, diverter trough; 12, convex block; 13, arc plate; 14, oblique plate 1; 15, oblique plate 2; 16, filter plate. DETAILED DESCRIPTION

[0024] like Figure 1-Figure 3 As shown, the utility model provides a technical solution: a deoxygenation device, including a reactor 1, a water pump 2 is fixedly connected to the top end face of the reactor 1, and a precipitation component is arranged on the inner wall of the reactor 1, and the precipitation component includes a partition 6, a screen 7, a diverter plate 8, an arc portion 9, an oblique portion 10, a diverter trough 11, a protrusion 12, an arc plate 13, an oblique plate 14, an oblique plate 2 15, and a filter plate 16.

[0025] In one embodiment of the utility model, the inner wall of the reactor 1 is fixedly connected with a partition 6, and the partition 6 divides the inner wall of the reactor 1 into a first chamber and a second chamber. The first chamber and the second chamber are connected through the bottom of the partition 6. The output end of the water pump 2 is located above the first chamber. The water pump 2 transports the high-purity water delivered to the first chamber to react with the deoxidizer to reduce the dissolved oxygen content in the water. The inner wall of the reactor 1 is fixedly connected with a screen 7, and the inner wall of the reactor 1 is fixedly connected with a diverter plate 8. The end of the diverter plate 8 away from the inner wall of the reactor 1 is fixedly connected with an arc portion 9, and the side of the arc portion 9 away from the diverter plate 8 is fixedly connected to the oblique portion 10. The top end surface of the diverter plate 8 is provided with a diverter groove 11, and the inner bottom surface of the diverter groove 11 is fixedly connected with a protrusion 12. The side wall of the reactor 1 is fixedly connected with a deoxidizer input pump 3, and the output end of the deoxidizer input pump 3 is located between the screen 7 and the diverter plate 8. The bottom end face of the kettle 1 is fixedly connected with a deoxidizer discharge pump 4, the deoxidizer input pump 3 delivers the deoxidizer to the diverter plate 8, the water flow passing through the screen 7 flushes the deoxidizer along the diverter slot 11, and the high-purity water and the deoxidizer are fully mixed through the provided diverter slot 11, the side wall of the partition 6 is fixedly connected with an arc plate 13, the partition 6, the diverter plate 8 and the arc plate 13 are located in the first chamber, the side wall of the partition 6 is fixedly connected with an oblique plate 14, the inner wall of the reactor 1 is fixedly connected with an oblique plate 2 15, the oblique plate 14 and the oblique plate 2 15 are located in the second chamber, the side wall of the reactor 1 is fixedly connected with a delivery pump 5, the delivery pump 5 is located above the oblique plate 2 15, when the water level is higher than the oblique plate 2 15, the deoxygenated high-purity water can be discharged through the delivery pump 5, the top end face of the oblique plate 14 is fixedly connected with a filter plate 16, and the top of the filter plate 16 is fixedly connected to the oblique plate 2 15.

[0026] High-purity water is input into the first chamber through the water pump 2, the water is dispersed through the screen 7, and then the water washes the deoxidizer downward along the diverter trough 11. The diverter trough 11 improves the mixing degree of water and deoxidizer, which can reduce the dissolved oxygen content in the high-purity water. The convex blocks 12 arranged on the bottom surface of the diverter trough 11 can better guide the water to the diverter troughs 11 on both sides, so that the water flows evenly from the diverter plate 8 to the arc-shaped part 9 and the oblique part 10. The arc-shaped part 9 and the oblique part 10 guide the water to the arc plate 13 to prevent the water from falling directly into the bottom of the reactor 1 to stir up large waves, and the deoxidizer The water-insoluble compounds generated by the reaction with oxygen are precipitated at the bottom of the reactor 1. When the deoxygenated high-purity water accumulates to a certain height, the water level of the high-purity water is higher than the inclined plate 15, and can be discharged through the delivery pump 5. The inclined plate 14 and the inclined plate 15 reduce the flow rate of water, further promoting the precipitation of the compounds. When the compounds accumulate to a certain level, the water pump 2 is turned off, and the water and sediment at the bottom of the reactor 1 are discharged from the reactor 1 through the deoxidizer discharge pump 4 to avoid blockage of the reactor 1 and avoid discharging the compounds together with the water, thereby reducing the impurities in the high-purity water.

[0027] In addition, a filter plate 16 is fixedly connected to the top end face of the oblique plate 14, and the top of the filter plate 16 is fixedly connected to the oblique plate 2 15. The filter plate 16 can reduce the flow rate of water, promote the precipitation of compounds, and at the same time block the compounds in the water. Since the water is filtered from bottom to top, the filter plate 16 is tilted as a whole. The oblique plate 14 is located below the filter plate 16. The blocked compounds slide to the bottom of the reactor 1 through the oblique plate 14, and the compounds cannot accumulate on the filter plate 16.

[0028] In the utility model, when in use, high-purity water is input into the first chamber through the water pump 2, and the water passes through the screen 7, and the deoxidizer delivered from the deoxidizer input pump 3 is flushed into the inner bottom of the reactor 1 along the diversion groove 11, and the water-insoluble compounds produced by the reaction of the deoxidizer and oxygen are precipitated on the inner bottom of the reactor 1, and then discharged from the reactor 1 through the deoxidizer discharge pump 4, and the deoxygenated high-purity water is discharged from the reactor 1 through the delivery pump 5. Furthermore, the filter plate 16 reduces the flow rate of water while blocking the compounds.

[0029] The above generally describes the present invention in detail, but it is obvious to a person skilled in the art that some modifications or improvements can be made to the present invention. Therefore, modifications or improvements that do not deviate from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A deoxidation device, comprising a reactor (1), wherein a water pump (2) is fixedly connected to the top end surface of the reactor (1). Features: The inner wall of the reaction kettle (1) is provided with a precipitation component, and the precipitation component comprises: a partition (6), wherein the inner wall of the reaction kettle (1) is fixedly connected with the partition (6), and the partition (6) divides the inner wall of the reaction kettle (1) into a first chamber and a second chamber, and the first chamber and the second chamber are connected through the bottom of the partition (6); A screen (7), the inner wall of the reaction kettle (1) is fixedly connected with the screen (7); A diverter plate (8), the inner wall of the reaction kettle (1) is fixedly connected with the diverter plate (8), one end of the diverter plate (8) away from the inner wall of the reaction kettle (1) is fixedly connected with an arc portion (9), the side of the arc portion (9) away from the diverter plate (8) is fixedly connected with an oblique portion (10), a top end surface of the diverter plate (8) is provided with a diverter groove (11), and a protrusion (12) is fixedly connected to the inner bottom surface of the diverter groove (11); An arc-shaped plate (13), the side wall of the partition plate (6) being fixedly connected with the arc-shaped plate (13); The first inclined plate (14) is fixedly connected to the side wall of the partition (6), and the second inclined plate (15) is fixedly connected to the inner wall of the reaction kettle (1).

2. A deoxidation device according to claim 1, Features: The top end surface of the first oblique plate (14) is fixedly connected to a filter plate (16), and the top of the filter plate (16) is fixedly connected to the second oblique plate (15).

3. A deoxidation device according to claim 1, Features: The output end of the water pump (2) is located above the first chamber.

4. A deoxidation device according to claim 1, Features: A deoxidizer input pump (3) is fixedly connected to the side wall of the reactor (1), the output end of the deoxidizer input pump (3) is located between the screen (7) and the diverter plate (8), and a deoxidizer discharge pump (4) is fixedly connected to the bottom end surface of the reactor (1).

5. A deoxidation device according to claim 1, Features: A delivery pump (5) is fixedly connected to the side wall of the reaction kettle (1), and the delivery pump (5) is located above the second inclined plate (15).

6. A deoxidation device according to claim 1, Features: The partition plate (6), the diverter plate (8) and the arc plate (13) are located in the first chamber, and the inclined plate 1 (14) and the inclined plate 2 (15) are located in the second chamber.

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