Evaporation device capable of avoiding leakage of toxic gas particles

Abstract

The utility model relates to an evaporation device capable of avoiding leakage of toxic gas particles, which comprises an evaporation cavity, a first isolation door and a second isolation door are arranged on the side wall of the evaporation cavity, the first isolation door and the second isolation door are positioned on two sides of one corner of the evaporation cavity, and a positioning rod is arranged on the inner side of the evaporation cavity; the aluminum film winding device is arranged on the outer wall of the evaporation cavity and located on the outer side of the first isolation door and the outer side of the second isolation door. An aluminum film is arranged in the aluminum film winding device, penetrates out of the aluminum film winding device, enters the evaporation cavity through the first isolation door, penetrates through a gap between the positioning rod and the inner wall of the evaporation cavity anticlockwise, and then returns into the aluminum film winding device through the second isolation door. The glove box is arranged below the evaporation cavity and is used for adding an evaporation source and replacing a crystal oscillator; and the lifting supporting mechanism is arranged in the glove box and used for driving the evaporation source and the crystal oscillator to move up and down. According to the utility model, automatic replacement of the cavity lining of the evaporation cavity is realized through the aluminum film winding device, evaporation materials are added through the lifting support mechanism in the glove box, a crystal oscillator is replaced, the cavity opening frequency is reduced, and people are prevented from inhaling toxic gas.

Description

Technical Field

[0001] The utility model relates to a vapor deposition device, in particular to a vapor deposition device which can prevent toxic gas particles from leaking out. Background Art

[0002] Vacuum evaporation, referred to as evaporation, refers to a process method in which a coating material (or film material) is evaporated and vaporized by a certain heating evaporation method under vacuum conditions, and the particles fly to the surface of the substrate to condense into a film. Evaporation is an earlier and more widely used vapor deposition technology with the advantages of simple film formation method, high film purity and density, and unique film structure and performance. Vacuum evaporation coating is widely used in semiconductor, optoelectronics, optics, decoration, automobile and other industries. Among them, in the semiconductor industry, vacuum evaporation coating can be used to produce wafers, LEDs, solar cells and other devices. In the evaporation process, it is often necessary to evaporate some toxic and harmful materials in a vacuum environment (such as PbI2 lead iodide and FAI formamidine iodine, which need to be evaporated in the preparation process of perovskite batteries). After evaporation and vaporization, such chemical materials often remain in the cavity, causing corrosion of the cavity, and the residual particles will also fly after the cavity is opened, causing human inhalation harm.

[0003] Most of the lead iodide components in the lead iodide waste liquid and solid generated during the production of industrial perovskite solar cells are recovered and purified using solution / chemical methods, which require a large amount of cleaning solution and inevitably require manual opening of the cavity and removal of the plate for cleaning, which can also cause harm to the human body and inevitably lead to low production efficiency. Utility Model Content

[0004] To this end, the technical problem to be solved by the utility model is to overcome the leakage of toxic gases caused by replacing the crystal oscillator 101 in the evaporation chamber in the prior art, and to provide an evaporation device that avoids the leakage of toxic gas particles. The lining of the evaporation chamber can be automatically replaced through an aluminum film winding device, and evaporation materials can be added and the crystal oscillator 101 can be replaced through a lifting support mechanism in the glove box, thereby reducing the number of times the chamber is opened and preventing people from inhaling toxic gases.

[0005] In order to solve the above technical problems, the utility model provides a vapor deposition device for preventing the leakage of toxic gas particles, comprising:

[0006] An evaporation chamber, wherein a first isolation door and a second isolation door are provided on the side wall of the evaporation chamber, the first isolation door and the second isolation door are located on both sides of a corner of the evaporation chamber, and a positioning rod is provided inside the evaporation chamber;

[0007] An aluminum film winding device is arranged on the outer wall of the evaporation chamber and is located outside the first isolation door and the second isolation door; wherein an aluminum film is arranged inside the aluminum film winding device, and the aluminum film passes through the first isolation door and enters the evaporation chamber from the aluminum film winding device, passes through the gap between the positioning rod and the inner wall of the evaporation chamber in a counterclockwise direction, and then returns to the aluminum film winding device through the second isolation door;

[0008] A glove box, arranged below the evaporation chamber, for adding evaporation sources and replacing crystal oscillators;

[0009] The lifting support mechanism is arranged in the glove box and is used to drive the evaporation source and the crystal oscillator to move up and down.

[0010] In one embodiment of the present invention, the widths of the first isolation gate and the second isolation gate are greater than the thickness of the aluminum film.

[0011] In one embodiment of the utility model, the aluminum film winding device includes a feeding chamber, a winding chamber, a support column and a first motor arranged at the bottom of the feeding chamber, the evaporation chamber is arranged at the first isolation door, and the winding chamber is arranged at the second isolation door. The feeding chamber and the winding chamber are respectively provided with support columns for winding the aluminum film, and the two support columns are driven by the first motor to realize synchronous rotation. The first motor drives the support column installed in the feeding chamber to rotate, and the support column in the winding chamber is driven by the synchronous pulley assembly and the first motor to realize driven rotation. The aluminum film passes through the first isolation door from the feeding chamber and enters the evaporation chamber, passes through the gap between the positioning rod and the inner wall of the evaporation chamber counterclockwise, and then returns to the winding chamber through the second isolation door. The first motor drives the support column to rotate, thereby controlling the automatic replacement of the aluminum film in the evaporation chamber.

[0012] In one embodiment of the present invention, a group of glove openings are provided on one side of the glove box.

[0013] In one embodiment of the utility model, the lifting support mechanism includes a base, a top plate, a support column, a lifting platform, a support platform and a lifting drive mechanism, the base and the top plate are connected by the support column, the lifting platform is arranged between the base and the top plate and moves up and down along the support column under the control of the lifting drive mechanism, the support platform is arranged above the top plate, and its bottom is connected to the lifting platform through a connecting column, and the lifting action is synchronized with the lifting platform.

[0014] In one embodiment of the present invention, limit baffles are provided on both sides of the support platform.

[0015] In one embodiment of the present invention, a through hole is provided in the middle of the top plate.

[0016] In one embodiment of the utility model, the lifting drive mechanism includes a second motor, a first screw rod, a second screw rod, a synchronous pulley assembly 1, and a synchronous pulley assembly 2. The output shaft of the second motor is connected to the first screw rod through the synchronous pulley assembly 1, and the first screw rod and the second screw rod are connected to the synchronous pulley assembly 2.

[0017] In one embodiment of the utility model, the synchronous pulley assembly 1 and the synchronous pulley assembly 2 both include a synchronous wheel 1, a synchronous wheel 2 and a synchronous belt, and a synchronous belt is provided between the synchronous wheel 1 and the synchronous wheel 2.

[0018] In an embodiment of the present invention, the number of the positioning rods includes 3, which are respectively arranged at three corners of the inner side of the evaporation chamber away from the first isolation door and the second isolation door.

[0019] The above technical solution of the utility model has the following advantages compared with the prior art:

[0020] The utility model discloses a vapor deposition device for preventing the leakage of toxic gas particles. An aluminum film winding device is arranged on the outer side of the vapor deposition chamber, which can realize the automatic replacement of the cavity lining of the vapor deposition chamber, so that the interior of the vapor deposition chamber is clean and corrosion is reduced. It also avoids the need to frequently open the cavity for cleaning, reduces the number of times the cavity is opened for cleaning, reduces the cost of solution cleaning and the leakage of toxic gases. In addition, the lifting support mechanism in the glove box can be used to add an evaporation source and replace a crystal oscillator without opening the cavity of the vapor deposition chamber, thereby further reducing the number of times the cavity is opened and preventing the staff from inhaling toxic gases. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

[0022] Figure 1 It is a schematic structural diagram of a vapor deposition device for preventing the leakage of toxic gas particles in a preferred embodiment of the utility model;

[0023] Figure 2 yes Figure 1 A side view of a vapor deposition device for preventing leakage of toxic gas particles is shown;

[0024] Figure 3 yes Figure 1 A schematic diagram of the structure of a vapor deposition chamber of a vapor deposition device for preventing the leakage of toxic gas particles is shown;

[0025] Figure 4 yes Figure 1 A schematic structural diagram of a lifting support mechanism of a vapor deposition device for preventing the leakage of toxic gas particles is shown;

[0026] Explanation of the reference numerals in the drawings in the specification: 1. Evaporation chamber; 11. First isolation door; 12. Second isolation door; 13. Positioning rod; 3. Glove box; 4. Lifting support mechanism; 41. Base; 42. Top plate; Support column 43. Lifting platform; 44. Support platform; 45. Second motor; 461. First screw rod; 462. Second screw rod 463. DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0028] Reference Figure 1 and 2 As shown, the utility model is a vapor deposition device for preventing toxic gas particles from leaking out, comprising: a vapor deposition chamber 1, a first isolation door 11 and a second isolation door 12 are arranged on the side wall of the vapor deposition chamber 1, the first isolation door 11 and the second isolation door 12 are located on both sides of a corner of the vapor deposition chamber 1, and a positioning rod 13 is arranged on the inner side of the vapor deposition chamber 1; the number of the positioning rods 13 includes 3, which are respectively arranged at three corners of the inner side of the vapor deposition chamber 1 away from the first isolation door and the second isolation door 12; an aluminum film winding device 2 is arranged on the outer wall of the vapor deposition chamber 1 and is located at the first isolation door An isolation door 11 and an outer side of a second isolation door 12; wherein, an aluminum film is arranged in the aluminum film winding device 2, and the aluminum film passes through the first isolation door 11 from the aluminum film winding device 2 to enter the evaporation chamber 1, passes through the gap between the positioning rod 13 and the inner wall of the evaporation chamber 1 in a counterclockwise direction, and then returns to the aluminum film winding device 2 through the second isolation door 12; a glove box 3 is arranged below the evaporation chamber 1, and is used for adding an evaporation source 100 and replacing a crystal oscillator 101; a lifting support mechanism 4 is arranged in the glove box 3, and is used for driving the evaporation source 100 and the crystal oscillator 101 to move up and down.

[0029] In an embodiment of the present invention, the width of the first isolation door 11 and the second isolation door 12 is greater than the thickness of the aluminum film.

[0030] like Figure 3As shown, the aluminum film winding device 2 includes a feeding chamber 21, a winding chamber 22, a support column 23 and a first motor arranged at the bottom of the feeding chamber 21, the evaporation chamber is arranged at the first isolation door 11, and the winding chamber 22 is arranged at the second isolation door 12. The feeding chamber 21 and the winding chamber 22 are respectively provided with support columns 23 for winding aluminum film, and the two support columns 23 are driven by the first motor to realize synchronous rotation. The first motor drives the support column 23 installed in the feeding chamber 21 to rotate, and the support column 23 in the winding chamber 22 is connected to the first motor through the synchronous pulley assembly 3 to realize driven rotation. The aluminum film passes through the feeding chamber 21 through the first isolation door 11 and enters the evaporation chamber 1, passes through the gap between the positioning rod 13 and the inner wall of the evaporation chamber 1 in a counterclockwise direction, and then returns to the winding chamber 22 through the second isolation door 12. The first motor drives the support column 23 to rotate, thereby controlling the automatic replacement of the aluminum film in the evaporation chamber 1.

[0031] Preferably, a group of glove openings 31 are provided on one side of the glove box 3. The glove box 3 is connected to the bottom plate of the evaporation chamber 1, and the glove box 3 is sealed and installed. A space is provided in the glove box 3 for the lifting support mechanism 4 to switch between the evaporation chamber 1 and the glove box 3.

[0032] like Figure 4 As shown, the lifting support mechanism 4 includes a base 41, a top plate 42, a support column 43, a lifting platform 44, a support platform 45 and a lifting drive mechanism. The base 41 and the top plate 42 are connected by the support column 43. The lifting platform 45 is arranged between the base 41 and the top plate 42 and moves up and down along the support column 43 under the control of the lifting drive mechanism. The support platform 45 is arranged above the top plate 42, and its bottom is connected to the lifting platform 45 through a connecting column 47, and the lifting and lowering action is synchronized with the lifting platform 45. The evaporation source 100 and the crystal oscillator 101 are placed on the support platform 45. When it is necessary to open the cavity to add the evaporation source 100, the lifting support mechanism 4 controls the evaporation source 100 and the crystal oscillator 101 to be lowered into the glove box 3. The staff stands on both sides of the glove box 3 (open the door on either side) to realize the addition of the evaporation source 100 and the replacement of the crystal oscillator 101 through the glove port 31.

[0033] Furthermore, the support platform 45 includes a substrate 450, a limit baffle 451 and a connecting plate 453. The substrate 450 includes two groups, which are connected by the connecting plate 453. A limit baffle 451 is provided on each substrate 450. The evaporation source 100 and the crystal oscillator 101 are fixedly mounted on the substrate 450, and the lifting drive mechanism 4 is used to drive the support platform 45 to move. The evaporation source 100 can be added and the crystal oscillator 101 can be replaced without opening the cavity of the evaporation chamber 1, thereby reducing the number of cavity openings and preventing people from inhaling toxic gases.

[0034] Furthermore, a through hole is provided in the middle of the top plate 42. The through hole is designed to realize air circulation in the glove box 3.

[0035] Preferably, the lifting drive mechanism includes a second motor 461, a first screw rod 462, a second screw rod 463, a synchronous pulley assembly 1, and a synchronous pulley assembly 2. The output shaft of the second motor 461 is connected to the first screw rod 462 through the synchronous pulley assembly 1, and the first screw rod and the second screw rod 463 are connected to the synchronous pulley assembly 2. The second motor 461 moves the lifting platform 44 up and down along the first screw rod 462 and the second screw rod 463, and lowers it into the glove box 3. The descent of the lifting platform 44 drives the synchronous descent of the support platform 45, which is convenient for the staff to add the evaporation source 100 or replace the crystal oscillator 101 from the glove port 31 of the glove box 3, without opening the cavity of the evaporation chamber 1, further reducing the number of cavity openings and preventing the staff from inhaling toxic gases.

[0036] Preferably, the synchronous pulley assembly 1 and the synchronous pulley assembly 2 both include a synchronous wheel 1, a synchronous wheel 2 and a synchronous belt, and a synchronous belt is provided between the synchronous wheel 1 and the synchronous wheel 2.

[0037] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims

1. A vapor deposition device for preventing the leakage of toxic gas particles, characterized in that: include: An evaporation chamber, wherein a first isolation door and a second isolation door are provided on the side wall of the evaporation chamber, the first isolation door and the second isolation door are located on both sides of a corner of the evaporation chamber, and a positioning rod is provided inside the evaporation chamber; An aluminum film winding device is arranged on the outer wall of the evaporation chamber and is located outside the first isolation door and the second isolation door; wherein an aluminum film is arranged inside the aluminum film winding device, and the aluminum film passes through the first isolation door and enters the evaporation chamber from the aluminum film winding device, passes through the gap between the positioning rod and the inner wall of the evaporation chamber in a counterclockwise direction, and then returns to the aluminum film winding device through the second isolation door; A glove box, arranged below the evaporation chamber, for adding evaporation sources and replacing crystal oscillators; The lifting support mechanism is arranged in the glove box and is used to drive the evaporation source and the crystal oscillator to move up and down.

2. The evaporation device for preventing toxic gas particles from leaking out according to claim 1, characterized in that: The widths of the first isolation gate and the second isolation gate are greater than the thickness of the aluminum film.

3. The evaporation device for preventing toxic gas particles from leaking out according to claim 1, characterized in that: The aluminum film winding device includes a feeding chamber, a winding chamber, a support column and a first motor arranged at the bottom of the feeding chamber, the evaporation chamber is arranged at the first isolation door, and the winding chamber is arranged at the second isolation door. Support columns for winding the aluminum film are respectively arranged in the feeding chamber and the winding chamber, and the two support columns are driven by the first motor to achieve synchronous rotation.

4. The evaporation device for preventing toxic gas particles from leaking out according to claim 1, characterized in that: A group of glove openings are arranged on one side of the glove box.

5. The evaporation device for preventing toxic gas particles from leaking out according to claim 1, characterized in that: The lifting support mechanism includes a base, a top plate, a support column, a lifting platform, a support platform and a lifting drive mechanism. The base and the top plate are connected by the support column. The lifting platform is arranged between the base and the top plate and moves up and down along the support column under the control of the lifting drive mechanism. The support platform is arranged above the top plate, and its bottom is connected to the lifting platform through a connecting column, and the lifting action is synchronized with the lifting platform.

6. The evaporation device for preventing toxic gas particles from leaking out according to claim 5, characterized in that: Limit baffles are arranged on both sides of the support platform.

7. The evaporation device for preventing toxic gas particles from leaking out according to claim 5, characterized in that: A through hole is provided in the middle of the top plate.

8. The evaporation device for preventing toxic gas particles from leaking out according to claim 5, characterized in that: The lifting drive mechanism includes a second motor, a first screw rod, a second screw rod, a synchronous pulley assembly 1, and a synchronous pulley assembly 2. The output shaft of the second motor is connected to the first screw rod through the synchronous pulley assembly 1, and the first screw rod and the second screw rod are connected to the synchronous pulley assembly 2.

9. The evaporation device for preventing toxic gas particles from leaking out according to claim 8, characterized in that: The synchronous pulley assembly 1 and the synchronous pulley assembly 2 both include a synchronous wheel 1, a synchronous wheel 2 and a synchronous belt, and a synchronous belt is arranged between the synchronous wheel 1 and the synchronous wheel 2.

10. The evaporation device for preventing toxic gas particles from leaking out according to claim 1, characterized in that: The number of the positioning rods includes 3, which are respectively arranged at three corners of the inner side of the evaporation chamber away from the first isolation door and the second isolation door.

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