System and method for controlling temperature of industrial processing devices
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[0016]To overcome the disadvantage of the existing system and also satisfy the different temperature requirements of different processing machines, a new system configuration as shown in FIG. 2 is proposed. In the industry processing temperature control system 10 of the present invention, conventional or solid state chillers are eliminated. The present invention would be connected to a chilled liquid providing system 100 which includes a main liquid circulation system 102 having a main liquid supply loop section 104 and a main return section 106, the liquid being, in the ordinary case, water which is provided at an adjustable set temperature by any appropriate water chilling device of the kind used with HVAC systems and the like.
[0017]The industry processing temperature control system 10 of the present invention includes a plurality of processing device temperature control subsystems 12, 14, and 16, each of which are generally identical in basic format, and thus the following descri...
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