A recovery device for evaporation material of evaporation machine

Abstract

The present invention discloses a recovery device for vapor deposition materials of a vapor deposition machine, comprising an anti-adhesion plate, wherein the anti-adhesion plate is used to be arranged in the cavity of the vapor deposition machine, wherein the vapor deposition machine is used to place a vapor deposition source, wherein the anti-adhesion plate is used to prevent the material to be vapor deposited in the vapor deposition source from adhering to the inner wall of the vapor deposition machine, and a magnetized magnetic material is arranged on the side wall of the anti-adhesion plate close to the vapor deposition source, wherein the magnetic material is used to adhere to the material to be vapor deposited on the anti-adhesion plate. The above technical scheme has the following advantages: the anti-adhesion plate with magnetic material has a good adsorption force on the material to be vapor deposited, so that the material to be vapor deposited that is not deposited in the correct position can adhere to the anti-adhesion plate, thereby preventing the material to be vapor deposited from being plated on the inner wall of the vapor deposition machine, reducing the frequency of cavity opening and maintenance of the vapor deposition machine, improving the recovery rate of the material to be vapor deposited, and facilitating the reuse of the material to be vapor deposited.

Description

Technical Field

[0001] The invention relates to the technical field of evaporation technology, and in particular to a device for recovering evaporation materials of an evaporation machine. Background Art

[0002] The most important part of the OLED manufacturing process is evaporation, and the corresponding equipment is an evaporation machine. Existing evaporation machines require regular cavity opening for maintenance. This process requires a certain amount of time to open the cavity door, which will cause particles in the outside air to enter the cavity, thus affecting the cleanliness of the cavity environment and polluting the cavity environment. At the same time, equipment maintenance will consume a lot of manpower, material resources, and financial resources. This process slows down production progress and wastes resources. Furthermore, due to the low utilization rate of the materials to be evaporated in existing evaporation machines, most anti-fouling boards have insufficient adsorption capacity for the materials to be evaporated, and the materials to be evaporated on the anti-fouling boards are constantly cleaned, so that most of the materials to be evaporated on the anti-fouling boards are not fully utilized, resulting in material waste. Summary of the invention

[0003] Therefore, it is necessary to provide a device for recovering the evaporated materials of the evaporation machine to solve the problem of insufficient adsorption force of the anti-fouling plate on the evaporated material.

[0004] To achieve the above-mentioned purpose, the inventor provides a device for recovering evaporated materials of an evaporation machine, comprising an anti-adhesion plate, wherein the anti-adhesion plate is used to be arranged in the cavity of the evaporation machine, the evaporation machine is used to place an evaporation source, the anti-adhesion plate is used to prevent the material to be evaporated in the evaporation source from adhering to the inner wall of the evaporation machine, and a magnetized magnetic material is provided on the side wall of the anti-adhesion plate close to the evaporation source, and the magnetic material is used to adhere to the material to be evaporated plated on the anti-adhesion plate.

[0005] Furthermore, it also includes a recovery mechanism, which is arranged below the anti-deposition plate and is used to recover the material to be evaporated on the anti-deposition plate.

[0006] Furthermore, the recovery mechanism includes a recovery trough and a moving track, the moving track is arranged below the anti-deposition plate, and the recovery trough is used to store the to-be-evaporated material on the anti-deposition plate and move on the moving track.

[0007] Furthermore, the recovery mechanism also includes a recovery tank cavity disposed outside the evaporator cavity, and the movable track is connected to the recovery tank cavity.

[0008] Furthermore, it is characterized in that there are multiple anti-fog plates and recovery mechanisms, and one recovery mechanism is respectively arranged under each anti-fog plate.

[0009] Furthermore, a vapor deposition source is included, and the anti-deposition plate is arranged on the side or above the vapor deposition source.

[0010] Furthermore, a demagnetization device is also included. The demagnetization device is arranged next to the anti-attachment plate and is used to eliminate the magnetism of the magnetic material.

[0011] Furthermore, the anti-attachment plate is detachably arranged in the cavity of the evaporation machine.

[0012] Furthermore, the magnetic material is iron, cobalt, nickel, or silicon steel.

[0013] Different from the prior art, the above technical solution has the following advantages: the anti-adhesion plate having magnetic material has better adsorption force on the object to be evaporated, so that the object to be evaporated that is not deposited in the correct position can adhere to the anti-adhesion plate, thereby preventing the object to be evaporated from being plated on the inner wall of the vapor deposition machine, reducing the frequency of opening the vapor deposition machine for maintenance, improving the recovery rate of the object to be evaporated, and facilitating the reuse of the object to be evaporated. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic cross-sectional structure diagram of the anti-deposition plate, evaporation source and recovery tank described in this embodiment;

[0015] Figure 2 It is a schematic diagram of the top view of the structure of the recovery device of the vapor deposition machine described in this embodiment.

[0016] Description of reference numerals:

[0017] 1. Prevent board contact;

[0018] 2. Magnetic materials;

[0019] 3. Evaporation source;

[0020] 4. Recycling organization;

[0021] 41. Recovery tank;

[0022] 411. Pulley;

[0023] 42. Mobile track;

[0024] 43. Recovery tank cavity;

[0025] 431, recovery tank waiting position;

[0026] 5. Substrate. DETAILED DESCRIPTION

[0027] In order to explain the technical content, structural features, achieved objectives and effects of the technical solution in detail, the following is a detailed description in conjunction with specific embodiments and accompanying drawings.

[0028] See also Figure 1 to Figure 2This embodiment provides a recovery device for the evaporated material of an evaporation machine, including an anti-adhesion plate 1, wherein the anti-adhesion plate 1 is arranged in the cavity of the evaporation machine, and the evaporation machine is used to place the evaporation source 3, and the evaporation machine can be a line source evaporation machine and a point source evaporation machine. The anti-adhesion plate 1 is used to prevent the object to be evaporated in the evaporation source 3 from adhering to the inner wall of the evaporation machine, and a magnetized magnetic material is arranged on the side wall of the anti-adhesion plate 1 close to the evaporation source, and the magnetized magnetic material is densely covered on the anti-adhesion plate 1, and the magnetic material is used to adhere to the object to be evaporated plated on the anti-adhesion plate 1. The magnetized magnetic material has magnetism, and can better adhere the magnetic object to be evaporated to the anti-adhesion plate 1, so as to prevent the object to be evaporated from being plated on the inner wall of the evaporation machine, reduce the frequency of opening the cavity for maintenance of the evaporation machine, improve the recovery rate of the object to be evaporated, increase the production capacity, and facilitate the reuse of the object to be evaporated.

[0029] In this embodiment, the cavity of the evaporation machine also includes an evaporation source 3, and the evaporation source 3 can be a point source evaporation source and a line source evaporation source. The evaporation source 3 contains an object to be evaporated, and the object to be evaporated will be deposited on the upper substrate 5 after heating, so the anti-adhesion plate 1 is arranged on the side or above the evaporation source 3, so that the anti-adhesion plate 1 can surround the side wall and / or top of the evaporation source 3. Of course, the anti-adhesion plate at the top of the evaporation source 3 does not cover the evaporation path of the nozzle of the evaporation source 3 to spray the object to be evaporated. Such an arrangement allows the anti-adhesion plate 1 with magnetized magnetic material to adhere to the object to be evaporated that has not been properly deposited on the substrate 5, thereby reducing the possibility of the side wall of the evaporation machine being contaminated by the object to be evaporated.

[0030] In this embodiment, a layer of magnetized magnetic material is provided on the side of the anti-deposition plate close to the evaporation source. The magnetic material is iron, cobalt, nickel, or silicon steel. Preferably, the magnetic material is iron (such as in the form of iron powder), and the diameter of the iron powder is 0.05 to 0.5 mm. The iron powder in this diameter range has a better coverage effect. Of course, a layer of magnetized magnetic material can also be provided on the side of the anti-deposition plate away from the evaporation source to adhere to some of the objects to be evaporated that are closer to the outside of the anti-deposition plate and have not been deposited on the substrate.

[0031] In this embodiment, in order to make the anti-adhesion plate easy to replace, the anti-adhesion plate is detachably arranged in the cavity of the evaporation machine. Specifically, a threaded hole can be arranged on the anti-adhesion plate, and a support frame is arranged in the cavity of the evaporation machine. The support frame is used to fix the anti-adhesion plate, and threaded holes are also arranged on the support frame accordingly. Bolts pass through the threaded holes on the anti-adhesion plate and the threaded holes on the support frame to fix the two. Alternatively, the detachable connection between the anti-adhesion plate and the support frame is a snap-on connection. Specifically, the support frame may have a plurality of grooves, and the anti-adhesion plate may have a plurality of protrusions matching the grooves. The anti-adhesion plate is inserted into the grooves on the support frame through the protrusions to fix the two. The anti-adhesion plate located outside the side wall of the evaporation source and the anti-adhesion plate located outside the top of the evaporation source can also be connected by bolts or snaps to form a detachable connection. The detachable anti-adhesion plate makes it easier to disassemble or replace it.

[0032] In this embodiment, in order to eliminate the magnetism of the magnetic material, a demagnetization device is also included next to the anti-attachment plate. The demagnetization device can be installed in the cavity of the vapor deposition machine or on a recovery mechanism, such as a recovery tank of the recovery mechanism. The demagnetization device can demagnetize the magnetic material by using the attenuation method of the AC demagnetization method, the DC commutation attenuation demagnetization of the DC demagnetization method, the ultra-low frequency current automatic demagnetization, and the heating workpiece demagnetization. Taking the AC demagnetization method as an example, the demagnetization process can be: placing the anti-attachment plate in an alternating magnetic field to generate a hysteresis loop. When the amplitude of the alternating magnetic field gradually decreases, the trajectory of the hysteresis loop also becomes smaller and smaller. When the magnetic field strength drops to zero, the residual magnetism of the magnetic material on the anti-attachment plate is close to zero, that is, the demagnetization of the magnetic material on the anti-attachment plate is completed. After the magnetic material on the anti-attachment plate is demagnetized, the adhered magnetic material and the object to be evaporated will fall down into the recovery tank. Taking DC commutation attenuation demagnetization as an example, the demagnetization steps can be: by continuously changing the direction of the DC current, while reducing the current passing through the anti-fog board to zero, the magnetic material on the anti-fog board is demagnetized. When the evaporation machine finishes evaporation, it only needs to move the recovery tank to the bottom of the anti-fog board.

[0033] In this embodiment, in order to recover the material to be evaporated on the anti-adhesion plate, a recovery mechanism 4 is provided under the anti-adhesion plate. The recovery mechanism may be a simple recovery tank. Or in some embodiments, the recovery mechanism 4 includes a recovery tank 41, a movable track 42 and a recovery tank cavity 43. The recovery tank 41 is made of magnetic material, so that the fallen material to be evaporated can all fall into the recovery tank 41 under the influence of magnetism and gravity, and a pulley is provided at the bottom of the recovery tank 41. One end of the movable track 42 is provided under the anti-adhesion plate 1, and the other end of the movable track 42 is connected to the recovery tank cavity 43, and the recovery tank 41 can move on the movable track 42. The recovery tank cavity 43 is provided outside the cavity of the evaporation machine, and a recovery tank receiving position 431 is provided in the recovery tank cavity 43 for accommodating the recovery tank 41 entering therein. After demagnetizing the magnetic material on the anti-adhesion plate 1, the anti-adhesion plate 1 is moved to the corresponding recovery mechanism 4, that is, the recovery tank 41 is ready to collect the fallen material to be evaporated on the moving track of the anti-adhesion plate 1, and then moves along the moving track to the recovery tank cavity 43 by relying on the pulley at the bottom to complete the recovery of the material to be evaporated. The recovery tank cavity is connected to the evaporator cavity, and an evaporator cavity door is arranged between them. The evaporator cavity is closed and isolated from the atmosphere to maintain a vacuum. When the evaporator cavity door and the recovery tank cavity door are closed, the recovery tank cavity is also isolated from the atmosphere to maintain a vacuum. The moving track 42 passes through the evaporator cavity from the evaporator cavity to the recovery tank cavity. The recovery tank 41 can slide to the recovery tank cavity 43, close the evaporator cavity door, open the recovery tank cavity door to break the vacuum and take out the material in the recovery tank. With this arrangement, the material to be evaporated that has not been deposited on the substrate 5 can be recovered, thereby improving the utilization rate of the material to be evaporated. Of course, the recycling mechanism 4 can also be electrically connected to a control system, and the recycling mechanism 4 can be controlled by the control system, so that the recycling process is automated and labor productivity is liberated.

[0034] In some embodiments, the recovery mechanism provided below the anti-sticking plate may include a recovery tank, a mechanical claw, a mechanical arm, a base, and a recovery tank cavity. The mechanical claw is hinged at the top of the mechanical arm, and the mechanical claw is formed by a plurality of connecting rods hinged together, and the mechanical claw can grab the object. The bottom end of the mechanical arm is hinged on the connecting plate, and a bearing or a motor is provided between the connecting plate and the base, and the mechanical arm can rotate at multiple angles through the bearing or the motor. A pulley is provided under the base, and the mechanical claw can rely on the pulley to realize the movement function of the recovery mechanism. The recovery tank is placed below the anti-sticking plate, and the recovery tank is still made of magnetic material, so that the fallen objects to be evaporated can all fall into the recovery tank under the influence of magnetic force and gravity. The outer wall of the recovery tank is provided with a groove for the mechanical claw to grab, and the recovery tank containing the objects to be evaporated is grabbed by the mechanical claw, and then the mechanical claw moves to the recovery tank cavity by relying on the pulley of the base. Similarly, the recovery mechanism is also electrically connected to a control system, and the control system is used to control the recovery mechanism to realize an automated recovery process.

[0035] In a further embodiment, there are multiple anti-stick plates and recovery mechanisms, and a recovery mechanism is respectively arranged under each anti-stick plate. Taking the embodiment of the recovery trough as an example, a recovery trough is respectively arranged under each anti-stick plate. Taking the embodiment of the recovery trough 41, the movable track 42 and the recovery trough cavity 43 as an example, generally, only one recovery trough cavity is required. A recovery trough is respectively arranged under each anti-stick plate, and multiple movable tracks can be converged into one and connected to the recovery trough waiting position in a recovery trough cavity. Of course, multiple movable tracks can also be respectively connected to the recovery trough waiting position in a recovery trough cavity. Taking the recovery trough, mechanical claw, mechanical arm, base and recovery trough cavity as examples, multiple recovery troughs are also respectively arranged under multiple anti-stick plates, and one or more mechanical claws, mechanical arms, and bases are provided to move the recovery trough to the recovery trough cavity. The specific number of each component depends on actual needs.

[0036] Among them, after the magnetic material is demagnetized, the demagnetized magnetic material is recovered, a new batch of magnetic material is re-magnetized and adhered to the anti-adhesion plate close to the side of the evaporation source, that is, the preparation work for recovering the material to be evaporated in the next evaporation process is completed.

[0037] It should be noted that, although the above embodiments have been described in this article, the scope of patent protection of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, changes and modifications made to the embodiments described herein, or equivalent structures or equivalent process changes made using the contents of the present specification and drawings, directly or indirectly applying the above technical solutions to other related technical fields are all included in the scope of protection of the patent of the present invention.

Claims

1. A device for recovering evaporation materials of an evaporation machine, comprising an anti-adhesion plate, the anti-adhesion plate is used to be arranged in the cavity of the evaporation machine, the evaporation machine is used to place an evaporation source, the anti-adhesion plate is used to prevent the evaporation material in the evaporation source from adhering to the inner wall of the evaporation machine, characterized in that: A magnetized magnetic material is provided on the side wall of the anti-deposition plate close to the evaporation source, and the magnetic material is used to adhere to the object to be evaporated plated on the anti-deposition plate; The device further comprises a recovery mechanism, which is arranged below the anti-deposition plate and is used to recover the material to be evaporated on the anti-deposition plate; the recovery mechanism comprises a recovery tank and a moving track, which is arranged below the anti-deposition plate, and the recovery tank is used to store the material to be evaporated on the anti-deposition plate and move on the moving track; the recovery mechanism further comprises a recovery tank cavity arranged outside the cavity of the evaporation machine, and the moving track is connected to the recovery tank cavity; The recovery tank is made of magnetic material; It also includes a demagnetization device, which is arranged beside the anti-attachment plate and is used to eliminate the magnetism of the magnetic material.

2. The device for recovering evaporation materials of an evaporation machine according to claim 1, characterized in that: There are a plurality of the anti-fall plates and the recovery mechanisms, and one recovery mechanism is disposed under each anti-fall plate.

3. The device for recovering evaporation materials of an evaporation machine according to claim 1, characterized in that: A vapor deposition source is also included, and the anti-deposition plate is arranged on the side or above the vapor deposition source.

4. The device for recovering evaporation materials of an evaporation machine according to claim 1, characterized in that: The anti-attachment plate is detachably arranged in the cavity of the evaporation machine.

5. The device for recovering evaporation materials of an evaporation machine according to claim 1, characterized in that: The magnetic material is iron, cobalt, nickel, or silicon steel.

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