A positioning device for silicon wafer inserting flower basket

Abstract

The present invention provides a positioning device for a silicon wafer inserting flower basket, comprising a lifting frame, characterized in that an upper positioning mechanism is provided on the upper part of the lifting frame, a lower positioning mechanism is provided on the bottom part, and at least one shift guide plate is provided on the lifting frame between the upper and lower positioning mechanisms. While conveniently realizing the moving in of an empty flower basket and the moving out of a loaded flower basket, under the joint action of a first locking mechanism and a second locking mechanism, a flower basket with slight deformation can be positioned, locked and calibrated so that it will not tilt due to slight deformation, thereby greatly reducing the card failure rate during the inserting process of the inserting machine. In addition, the load-bearing ball head rod is conducive to the rapid translation of the bottom of the flower basket to a fixed position under the action of other positioning mechanisms, and at the same time, all the forces applied to position, fix and (or) limit the flower basket are all applied to the metal parts, which can better ensure the positioning effect, and also greatly reduce the force loss of the particle rod used to carry the silicon wafer.

Description

Technical Field

[0001] The invention relates to a positioning device and method, in particular to a device and method for accurately positioning a silicon chip inserting basket, belonging to the technical field of mechanical positioning. Background Art

[0002] In the silicon wafer production process, the cut silicon wafers need to be divided into batches and slices and inserted into a special basket by a silicon wafer inserter before subsequent cleaning and other treatments can be carried out. The silicon wafer inserter has changed the current situation where silicon wafers need to be manually sliced ​​and inserted into silicon wafer baskets, and has realized automatic material separation and automatic loading of silicon wafers. However, since the silicon wafer basket used in the existing silicon wafer inserter is positioned by a bottom flat plate support and left and right side clamps, the following problems may occur during operation: 1) The silicon wafer basket is prone to slight deformation during use, which will cause the basket supported by the bottom flat plate to have a certain tilt angle, making it difficult to insert the silicon wafer accurately when the inserter inserts the silicon wafer, resulting in card failure; 2) The clamping force on the left and right sides directly acts on the particle rod on the basket for carrying the silicon wafer. At the same time, because the particle rod is processed by a casting process, its rigidity and strength are relatively poor, so the positioning effect of the clamping force cannot be guaranteed, and it will also accelerate the force loss of the particle rod; 3) The silicon wafer basket has no positioning and (or) limiting in the front and rear directions, and its relative position is out of control, which is not conducive to the execution of the silicon wafer inserting process. Therefore, it is necessary to improve the existing technology. Summary of the invention

[0003] The invention aims to provide a silicon chip inserting basket positioning device with high accuracy, reliability and stability.

[0004] The present invention is completed through the following technical scheme: a positioning device for a silicon wafer inserting basket, including a lifting frame, characterized in that an upper positioning mechanism is provided on the upper part of the lifting frame, a lower positioning mechanism is provided on the bottom, and at least one shift guide plate is provided on the lifting frame between the upper and lower positioning mechanisms.

[0005] The lower positioning mechanism includes a horizontal positioning plate fixed to the bottom of the lifting frame and a horizontal support frame extending outward. A first locking mechanism is arranged on the horizontal positioning plate and fixed to the horizontal support frame, and is used to translate the lower part of the flower basket with slight deformation to a specific position. At the same time, the load-bearing ball head rod facilitates the bottom of the flower basket to quickly translate to a fixed position under the action of other positioning mechanisms.

[0006] The horizontal support frame of the lower positioning mechanism includes left and right longitudinal rods and a middle cross rod. The front ends and middle parts of the left and right longitudinal rods are symmetrically provided with multiple positioning guide vertical plates with slopes on the inner upper ends, so that the flower basket can be more easily inserted into the multiple positioning guide vertical plates.

[0007] The load-bearing ball head rods on the horizontal support frame of the lower positioning mechanism are arranged to form at least three triangle distributions.

[0008] The first locking mechanism includes a first power cylinder fixed on the horizontal positioning plate, a front push plate arranged at the end of the piston rod of the first power cylinder, and left and right push plates hinged to the horizontal positioning plate through a hinge shaft in the middle thereof, the front ends of the left and right push plates respectively extending forward, and the rear ends respectively hinged to the front ends of the piston rods of the second power cylinder and the end of the cylinder body through hinge shafts, so that after the flower basket is placed on the horizontal support frame in front of the horizontal positioning plate, the front push plate is driven by the extension of the piston rod of the first power cylinder to push the flower basket forward to the positioning guide vertical plate tightly attached to the front ends of the left and right longitudinal rods, and then the piston rods at the left and right ends of the second power cylinder are extended to drive the left and right push plates to push the bottom of the flower basket to the central positioning position from both sides.

[0009] Two symmetrical limit columns are respectively provided at the middle and rear parts of the left and right push plates of the first locking mechanism, which are used to limit the opening and clamping of the two left and right push plates, ensuring that the empty flower basket is allowed to move into the channel or the loaded flower basket is allowed to move out of the channel when the left and right push plates are opened, and the bottom of the flower basket is moved to a specific position when the left and right push plates are clamped.

[0010] The upper positioning mechanism comprises left and right brackets symmetrically and spaced apart on the lifting frame, and a turning frame hinged to the left and right brackets respectively through two hinge shafts, one of the hinge shafts being connected to the piston rod of the third power cylinder through a connecting rod, so that when the turning frame is driven by the third power cylinder to swing to a horizontal position by pushing the connecting rod through the piston rod and the hinge shaft, the flower basket is positioned from the top, and when it swings to a vertical position, an empty flower basket is allowed to move into the channel or a loaded flower basket is allowed to move out of the channel.

[0011] The flip frame of the upper positioning mechanism includes a second locking mechanism, so that when the flip frame swings to a horizontal position, the second locking mechanism clamps the positioning pin on the top of the flower basket to achieve the upper positioning of the flower basket. Release the second locking mechanism to facilitate the flip frame to swing to a vertical position, thereby facilitating the movement of the flower basket in or out. The second locking mechanism is driven by an air claw installed on the flip frame.

[0012] Under the joint action of the first locking mechanism and the second locking mechanism, the slightly deformed flower basket can be positioned, locked and calibrated so that it will not tilt due to the slight deformation, thereby greatly reducing the card failure rate during the insertion process of the inserting machine.

[0013] The present invention has the following advantages and effects: adopting the above scheme, while conveniently realizing the moving in of the empty flower basket and the moving out of the loaded flower basket, under the joint action of the first locking mechanism and the second locking mechanism, the slightly deformed flower basket can be positioned, locked and calibrated, so that it will not tilt due to slight deformation, greatly reducing the card failure rate during the insertion process of the inserting machine. In addition, the load-bearing ball head rod is conducive to the rapid translation of the bottom of the flower basket to a fixed position under the action of other positioning mechanisms, and all the forces applied to position, fix and (or) limit the flower basket are all applied to the metal parts, which can better ensure the positioning effect, and also greatly reduce the force loss of the particle rod used to carry the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A structural schematic diagram showing the flower basket positioning completed by the present invention;

[0015] Figure 2 A structural schematic diagram showing an unfinished flower basket positioning of the present invention;

[0016] Figure 3 A schematic diagram showing the structure of the upper positioning mechanism of the present invention is shown;

[0017] Figure 4 The schematic diagram of the lower positioning mechanism structure of the present invention is shown;

[0018] Figure 5 A schematic diagram of the structure of the horizontal support frame of the present invention is shown;

[0019] Figure 6 A schematic diagram of the flower basket structure is shown. DETAILED DESCRIPTION

[0020] The present invention is further described below in conjunction with the accompanying drawings.

[0021] The positioning device for the silicon wafer inserting basket provided by the present invention comprises a lifting frame 1, which is driven by a conventional hoist and a lifting machine to rise or fall, wherein: an upper positioning mechanism 2 is provided on the upper part of the lifting frame 1, and a lower positioning mechanism is provided on the bottom part of the lifting frame 1, and a shift guide plate 3 is provided on the lifting frame 1 between the upper and lower positioning mechanisms, such as Figure 1 , Figure 2 .

[0022] The lower positioning mechanism includes a horizontal positioning plate 4 fixed to the bottom of the lifting frame 1 and a horizontal support frame 5 extending outward, a first locking mechanism arranged on the horizontal positioning plate 4, and a load-bearing ball head rod 53 fixed on the horizontal support frame 5 for carrying a flower basket. The horizontal support frame 5 includes left and right longitudinal rods and a middle cross bar. The front ends and middle parts of the left and right longitudinal rods are symmetrically provided with a total of four positioning guide vertical plates 51, 52 with slopes on the inner upper ends, so that the flower basket 6 can be more easily inserted into the four positioning guide vertical plates 51, 52; there are three load-bearing ball head rods 53 on the horizontal support frame 5, which are respectively fixed to the ends of the left and right longitudinal rods and the middle part of the middle cross bar to form a triangular distribution; the locking mechanism includes a first power cylinder 47 fixed to the horizontal positioning plate 4, and a piston arranged on the first power cylinder 47 The front push plate 41 at the end of the rod, and the left and right push plates 42 hinged to the horizontal positioning plate 4 through the hinge shaft 43 in the middle, the front ends of the left and right push plates 42 are respectively extended forward, and the rear ends are respectively hinged to the front end of the piston rod and the end of the cylinder body of the second power cylinder 46 through the hinge shafts 48 and 45, so that after the flower basket 6 is placed on the horizontal support frame 5 in front of the horizontal positioning plate 4, the piston rod of the first power cylinder 47 is extended to drive the front push plate 41 to push the flower basket 6 forward to the positioning guide vertical plate 52 close to the front ends of the left and right longitudinal rods, and then the left and right push plates 42 are driven by the extension of the second power cylinder 46 to push the flower basket 6 to the central positioning position from both sides; the middle and rear parts of the left and right push plates 42 are respectively provided with two symmetrical limit columns 44, which are used to limit the opening and holding of the two left and right push plates 42, such as Figure 4 , Figure 5 , used to move the bottom of the flower basket to a specific position.

[0023] The upper positioning mechanism 2 includes two left and right brackets symmetrically and spaced apart on the lifting frame 1, and a turning frame 21 hingedly connected to the left and right brackets through two hinge shafts 24, one of which is connected to the piston rod of the third power cylinder 25 through a connecting rod 23; the turning frame 21 includes a second locking mechanism 22, so that when the turning frame 21 swings to a horizontal position, the second locking mechanism 22 clamps the positioning pin 63 on the top of the flower basket 6, as shown in FIG. Figure 3 , Figure 1 , Figure 2 , realizing the upper positioning of the flower basket 6, loosening the second locking mechanism 22 facilitates the turning frame 21 to swing to a vertical position, thereby facilitating the moving in or out of the flower basket 6, and the second locking mechanism 22 is driven by an air claw installed on the turning frame 21.

[0024] The silicon wafer inserting basket is an existing device, which is composed of a bottom frame 61, a top frame and a plurality of vertical rods 62 therebetween to form a U-shaped basket, and the front side, top and bottom of the basket are open. Figure 6 .

[0025] The above description is only a specific example of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be within the protection scope of the present invention.

Claims

1. A positioning device for a silicon wafer inserting basket, comprising a lifting frame, characterized in that: An upper positioning mechanism is provided on the upper part of the lifting frame, and a lower positioning mechanism is provided on the bottom part. At least one shift guide plate is provided on the lifting frame between the upper and lower positioning mechanisms. The lower positioning mechanism includes a horizontal positioning plate fixed to the bottom of the lifting frame and a horizontal support frame extending outward, a first locking mechanism arranged on the horizontal positioning plate, and a load-bearing ball head rod fixed to the horizontal support frame for carrying the flower basket; The horizontal support frame includes left and right longitudinal bars and a middle cross bar. The front ends and middle parts of the left and right longitudinal bars are symmetrically provided with a plurality of positioning guide vertical plates with a slope at the inner upper ends, so that the flower basket can be more easily inserted into the plurality of positioning guide vertical plates. The first locking mechanism comprises a first power cylinder fixed on the horizontal positioning plate, a front push plate arranged at the end of the piston rod of the first power cylinder, and left and right push plates whose middle parts are hinged to the horizontal positioning plate through a hinge shaft, the front ends of the left and right push plates respectively extending forward, and the rear ends of the left and right push plates respectively hinged to the front end of the piston rod of the second power cylinder and the end of the cylinder body through the hinge shaft; The upper positioning mechanism comprises two left and right brackets symmetrically and spaced apart on the lifting frame, and a flip frame hinged to the left and right brackets through two hinge shafts, one of which is connected to the piston rod of the third power cylinder through a connecting rod; The turning frame of the upper positioning mechanism includes a second locking mechanism, so that when the turning frame swings to a horizontal position, the second locking mechanism clamps the positioning pin on the top of the flower basket to achieve the upper positioning of the flower basket, and the second locking mechanism is released to facilitate the turning frame to swing to a vertical position, thereby facilitating the moving in or out of the flower basket, and the second locking mechanism is driven by an air claw installed on the turning frame; Under the joint action of the first locking mechanism and the second locking mechanism, the flower basket with slight deformation can be positioned, locked and calibrated; The silicon wafer inserting flower basket is composed of a bottom frame, a top frame and a plurality of vertical rods therebetween to form a U-shaped basket, and the front side, the top and the bottom of the basket are open.

2. The positioning device for the silicon wafer inserting basket according to claim 1, characterized in that: The load-bearing ball head rods on the horizontal support frame are arranged to be at least three, forming a triangular distribution.

3. The positioning device for the silicon wafer inserting basket according to claim 1, characterized in that: Two symmetrical limiting columns are respectively provided at the middle and rear parts of the left and right push plates of the first locking mechanism.

4. The positioning device for the silicon wafer inserting basket according to claim 1, characterized in that: The second locking mechanism of the turning frame is directly driven by an air claw installed on the turning frame.

Images