A micro-nano substrate transfer method based on water-soluble polyacrylic acid
By using water-soluble polyacrylic tape to glue and transfer the polystyrene micro-nano substrate to the target substrate, the problem of insufficient transfer accuracy of micro-nano substrates in the prior art is solved, and rapid, lossless and customized transfer is achieved. The printing process retains the substrate structure and improves utilization efficiency.
Patent Information
- Application Number
- CN202110381114.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-04-09
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2041-04-09
AI Technical Summary
The prior art is difficult to achieve rapid, lossless, customized transfer of micro-nano substrates based on polystyrene colloids, especially in the problem of insufficient accuracy in channel position control of microfluidic chips.
The micro-nano substrate is glued and transferred to the target substrate using water-soluble polyacrylic tape, bonded to the substrate by heating, and then removed in a polar solvent, and the non-destructive transfer is achieved using the viscosity and water solubility of the polyacrylic acid.
The rapid, lossless and customized transfer of micro-nano substrates is achieved, and the complete structure of the substrate is retained, and the utilization efficiency is improved. The substrate and the substrate are closely combined with the substrate through enhanced adhesion after heating, adapting to various morphology and simplifying The transfer process.
Smart Images
Figure CN113264499B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a micro-nano substrate transfer method based on water-soluble polyacrylic acid, belonging to the technical field of nano ordered substrate transfer. Background Art
[0002] In recent years, various substrates based on polystyrene colloid self-assembly technology have become one of the hottest cutting-edge micro-nano processing technologies in recent years due to their many advantages such as low cost, simple preparation, good uniformity, high reproducibility, and good adjustability. It provides technical support for the research of optical metasurfaces, controllable wetting interfaces, fluorescence enhancement, surface enhanced Raman scattering and other fields.
[0003] By adjusting the size of polystyrene microspheres, various types of monolayer ordered substrates can be prepared. By stacking multiple layers of polystyrene microspheres or other self-assembled monolayers of nano- and micron-particles, large-area ordered micro-nano substrates based on polystyrene can be prepared with special morphologies. The low melting point and high plasticity of polystyrene itself further enrich the operational space of such substrates.
[0004] However, self-assembly technology often cannot control the area where colloidal particles are deposited, which limits the application of such ordered substrates in some fields. For example, the channels of microfluidic chips are often in the micrometer range, which far exceeds the accuracy range of position control of general self-assembly technology. In order to cope with similar difficulties and inherit and give full play to the existing various self-assembly technologies, it is urgent to develop a transfer method that can customize, quickly and non-destructively transfer polystyrene-based ordered micro-nano substrates. Summary of the invention
[0005] Technical problem: In order to overcome the shortcomings of the existing technology, rapid, non-destructive and customized transfer of micro-nano substrates based on polystyrene colloid self-assembly is achieved.
[0006] Technical solution: A micro-nano substrate transfer method based on water-soluble polyacrylic acid, which utilizes the viscosity and water solubility of polyacrylic acid to non-destructively transfer and release a polystyrene-based micro-nano substrate. It includes the following steps:
[0007] Step 1: Use polyacrylic tape to stick the micro-nano substrate;
[0008] Step 2: Fix the tape to the target substrate for transfer;
[0009] Step 3: Heat the substrate and the tape to bond the micro-nano substrate to the substrate;
[0010] Step 4: Immerse the substrate and the tape in a polar solvent and remove the tape after the polyacrylic acid loses its stickiness.
[0011] The polyacrylic acid tape is a single-sided or double-sided tape whose adhesive layer is hydrophilically modified polypropylene.
[0012] The heating temperature is the melting point or softening temperature of the micro-nano substrate.
[0013] The polar solvent includes any one of water, methanol and ethanol which can dissolve polyacrylic acid.
[0014] The tape removal operation is carried out in a polar solvent.
[0015] Beneficial effects:
[0016] 1. The stickiness of polyacrylic tape in a dry environment is used to stick the micro-nano substrate. The micro-nano substrate after transfer can retain a complete and fine structure.
[0017] 2. Effectively improve the utilization efficiency of the colloidal self-assembly substrate.
[0018] 3. Using the water solubility of polyacrylic acid, the composite obtained in the third step is immersed in water, so that the polypropylene tape therein loses its stickiness, and then the tape is removed. This simplifies the steps and technical requirements of transfer.
[0019] 4. The adhesion of polystyrene is enhanced after heating, so that the micro-nano substrate and the substrate are closely attached and firmly combined after cooling, which has good adaptability to substrates with a series of morphologies.
[0020] 5. The technical parameters are easy to adjust, and the shape of the tape can be designed by laser engraving and other methods. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 The schematic diagram of the micro-nano substrate transfer method based on water-soluble polyacrylic acid proposed in the present invention is shown in FIG. 1 , the micro-nano substrate, 2 , the original substrate, 3 , the polystyrene microspheres, 4 , the polyacrylic acid tape, and 5 , the target substrate.
[0022] Figure 2 This is a design drawing of the customized tape of Example 1.
[0023] Figure 3 Photograph of the micro-nano substrate after transfer in Example 1.
[0024] Figure 4 SEM of the micro-nano substrate of Example 1 before transfer.
[0025] Figure 5 SEM of the micro-nano substrate after transfer in Example 1.
[0026] Figure 6 This is the SEM of the micro-nano substrate after transfer in Example 2. DETAILED DESCRIPTION
[0027] The present invention is further explained below in conjunction with the examples and drawings. The following examples are only used to illustrate the present invention, but are not intended to limit the scope of the invention.
[0028] An ordered substrate transfer method based on water-soluble polyacrylic acid utilizes the viscosity and water solubility of polyacrylic acid to non-destructively transfer and release a polystyrene-based micro-nano substrate. The method includes the following steps:
[0029] Step 1: Use polyacrylic tape to stick the micro-nano substrate; the polyacrylic tape is in direct contact with the micro-nano substrate.
[0030] Step 2: Fix the tape to the target substrate for transfer; the polystyrene is in direct contact with the target substrate.
[0031] Step 3: Heat the substrate and the tape to bond the micro-nano substrate to the substrate;
[0032] Step 4: Soak the substrate and tape in water and remove the tape after the polyacrylic acid is dissolved.
[0033] Example 1
[0034] Taking the polystyrene / gold film / silver nanocube substrate with a quasi-net structure and tesa 64437 modified polypropylene tape as examples, the micro-nano substrate was prepared on a PET sheet by a layer-by-layer self-assembly method.
[0035] Step 1: Use acrylic tape to stick the ordered substrate. Specifically, lay the laser-engraved tape in a specified shape on the substrate, press gently to make the tape fit, and peel off the tape at a uniform speed. Figure 2 shown.
[0036] Step 2: Attach the tape to the designated location on the silicon wafer to be transferred, and press gently to make the tape fit.
[0037] Step 3: Heat the silicon wafer and the tape to bond the ordered substrate to the silicon wafer and keep them at 120°C for 20 seconds. Specifically, place the silicon wafer on a substrate preheated to 120°C, use a soft rubber block to gently press the tape for 20 seconds, and then remove the heating plate.
[0038] Step 4: Immerse the silicon wafer and tape in water, and remove the tape after the polyacrylic acid dissolves. Specifically, immerse the silicon wafer in deionized water at 70°C and keep it for 20 minutes. As the polyacrylic acid dissolves, the tape gradually loses its stickiness and detaches from the ordered substrate. The transfer process is completed by washing the silicon wafer and blowing it dry.
[0039] Comparison of designed tape shape and transfer results ( Figure 2 , Figure 3 ), customized design is reflected. Comparison of the substrate morphology before and after the implementation of this method ( Figure 4 , Figure 5 ), the complex micro-nano structure of the substrate is completely preserved. This embodiment fully proves that the invention can be used to quickly and non-destructively transfer customized micro-nano substrates.
[0040] Example 2
[0041] Taking the polystyrene / gold film substrate with a quasi-net structure and the tesa 64437 modified polypropylene tape as examples, the micro-nano substrate was prepared on the PET sheet by a layer-by-layer self-assembly method.
[0042] Step 1: Use acrylic tape to stick the ordered substrate. Specifically, lay the tape with a specified shape engraved by laser on the substrate, press it gently to make the tape fit, and peel it off at a uniform speed. The shape of the tape is designed to be a small square block with 3 columns and 2 rows.
[0043] Step 2: Attach the tape to the designated location on the silicon wafer to be transferred, and press gently to make the tape fit.
[0044] Step 3: Heat the silicon wafer and the tape to bond the ordered substrate to the silicon wafer and keep them at 120°C for 20 seconds. Specifically, place the silicon wafer on a substrate preheated to 120°C, use a soft rubber block to gently press the tape for 20 seconds, and then remove the heating plate.
[0045] Step 4: Immerse the silicon wafer and tape in water, and remove the tape after the polyacrylic acid dissolves. Specifically, immerse the silicon wafer in 70°C ethanol and keep it for 20 minutes. As the polyacrylic acid dissolves, the tape gradually loses its stickiness and detaches from the ordered substrate. The transfer process is completed by washing the silicon wafer and blowing it dry.
[0046] Comparison of designed tape shape and transfer results ( Figure 6 ), the customized design is embodied. This embodiment fully proves that the invention can be used to quickly and non-destructively transfer customized micro-nano substrates.
Claims
1. A micro-nano substrate transfer method based on water-soluble polyacrylic acid, It is characterized in that Utilizing the viscosity and water solubility of polyacrylic acid, the polystyrene-based micro-nano substrate is transferred and released non-destructively, including the following steps: The first step: using polyacrylic acid tape to stick the micro-nano substrate; the polyacrylic acid tape is a single-sided or double-sided tape with an adhesive layer of hydrophilically modified polypropylene; Step 2: Fix the tape to the target substrate for transfer; Step 3: Heat the substrate and the tape to bond the micro-nano substrate to the substrate; Step 4: Immerse the substrate and the tape in a polar solvent, and remove the tape after the polyacrylic acid loses its stickiness. The polar solvent includes any one of water, methanol, and ethanol that can dissolve polyacrylic acid.
2. The micro-nano substrate transfer method based on water-soluble polyacrylic acid according to claim 1, It is characterized in that In the third step, the heating temperature is the melting point or softening temperature of the micro-nano substrate.
3. The micro-nano substrate transfer method based on water-soluble polyacrylic acid according to claim 1, It is characterized in that In the fourth step, the tape is removed in a polar solvent.