Automatic gas distribution device and method for mixed gas

Abstract

The present invention relates to an automatic gas distribution device and method for mixed gas, and belongs to the technical field of electronic mixed gas. The gas distribution device includes a filling pipeline, a second gas delivery pipeline, a first gas delivery pipeline, a second gas control valve, a first gas control valve, a pressure sensor before the regulating valve, a regulating valve, a flow meter, a pressure sensor after the regulating valve, a filling control valve, a mixed gas container, an electronic balance, a vacuum pump pipeline, a vacuum pump, a vacuum control valve and a temperature sensor; the gas distribution method is completed by using the gas distribution device. The accuracy of the content of each gas in the mixed gas can be improved by controlling the flow rate of the gas introduced into the filling pipeline and adjusting the gas flow rate to a set flow rate according to specific requirements based on the pressure before and after the regulating valve through DCS; the gas distribution device and method can fully realize the automatic preparation of mixed gas, and the content of each gas component in the mixed gas is accurately controlled.

Description

Technical Field

[0001] The invention relates to an automatic gas distribution device and method for mixed gas, belonging to the technical field of electronic mixed gas. Background Art

[0002] A large amount of electronic mixed gas is required in the production of modern semiconductors, light emitting diodes (LEDs), photovoltaics, etc., and the purity and gas distribution accuracy of the electronic mixed gas are very high. This not only places high requirements on the purity of the raw gas, but also puts higher requirements on the gas filling technology.

[0003] In the semiconductor manufacturing process, in order to ensure the stability and repeatability of the process, the accuracy of the concentration of the electronic mixed gas is required to be high. The weighing method of preparing the mixed gas does not need to consider the compression coefficient and temperature, and has high accuracy, so it is more common in the preparation of electronic mixed gases; but the configuration method is complicated and requires high requirements. For example, the control of the filling end point of the gas component is very critical to accuracy but difficult. The main reason is that the gas flow rate at the filling end point is uncontrollable, and currently manual operation is used during configuration. The operator needs to keep an eye on the weighing indication on site in order to open and close the inflation valve in time. This places very high demands on the quality of the operator. Once an error occurs during manual operation, the filling result will deviate from the predetermined value, which may cause immeasurable consequences. Summary of the invention

[0004] In order to overcome the defects of the prior art, the purpose of the present invention is to provide an automatic gas distribution device and method for mixed gas; to solve the problems of uncontrollable gas flow rate at the gas filling end point, low mixed gas preparation accuracy and operational errors in manual control during the current mixed gas preparation process.

[0005] To achieve the purpose of the present invention, the following technical solutions are provided.

[0006] A mixed gas automatic gas distribution device, the gas distribution device comprises a filling pipeline, a second gas delivery pipeline, a first gas delivery pipeline, a second gas control valve, a first gas control valve, a pressure sensor before the regulating valve, a regulating valve, a flow meter, a pressure sensor after the regulating valve, a filling control valve, a mixed gas container, an electronic balance, a vacuum pump pipeline, a vacuum pump, a vacuum control valve and a temperature sensor.

[0007] The electronic balance adopts an ultra-high precision electronic scale of comparator level, and its typical parameters are 150kg±0.05g.

[0008] The vacuum pump uses a vacuum degree of 1×10 -5 Pa high vacuum two-stage vacuum pump.

[0009] The pressure sensor before the regulating valve and the pressure sensor after the regulating valve are both high-precision vacuum pressure sensors with a measuring range of -0.1 to 40 MPa and an accuracy of ±0.075%.

[0010] The front end of the filling pipeline is divided into two branches, one branch is the second gas delivery pipeline, and the other branch is the first gas delivery pipeline; the end of the filling pipeline is connected to the mixed gas container; the filling pipeline is connected with a pressure sensor before the regulating valve, a regulating valve, a flow meter, a pressure sensor after the regulating valve, a vacuum pump pipeline and a filling control valve in sequence from the front end to the end.

[0011] A second gas control valve is provided on the second gas delivery pipeline, a first gas control valve is provided on the first gas delivery pipeline, one end of the vacuum pump pipeline is connected to the filling pipeline, and the other end is connected to the vacuum pump, and a vacuum control valve is provided on the vacuum pump pipeline; the mixed gas container is placed on an electronic balance.

[0012] The temperature sensor is located at the pressure sensor before the regulating valve and the pressure sensor after the regulating valve. By measuring the gas temperature in the filling pipeline, it is measured together with the pressure sensor before the regulating valve and the pressure sensor after the regulating valve to obtain the accurate pressure before and after the regulating valve, so as to control the regulating valve to achieve precise control of the gas flow.

[0013] The second gas control valve, the first gas control valve, the pressure sensor before the regulating valve, the regulating valve, the flow meter, the pressure sensor after the regulating valve, the filling control valve, the electronic balance, the vacuum pump, the vacuum control valve and the temperature sensor are automatically controlled through a distributed control system (DCS).

[0014] Preferably, the second gas control valve, the first gas control valve, the filling control valve and the vacuum control valve are stainless steel pneumatic diaphragm valves.

[0015] Preferably the flow meter is a mass flow meter.

[0016] Preferably, a negative pressure sensor and a high pressure sensor are provided on the second gas delivery pipeline and the first gas delivery pipeline. The negative pressure sensor and the high pressure sensor are respectively connected to the DCS system. The negative pressure sensor is used to replace the gas, and the high pressure sensor is used for intake control. The working condition of each pipeline can be detected by the negative pressure sensor and the positive pressure sensor. When leakage or blockage occurs, the DCS controls the gas distribution device to stop working.

[0017] Preferably, the DCS is also connected to an audible and visual alarm.

[0018] Preferably, the filling pipeline, the second gas delivery pipeline, the first gas delivery pipeline and the vacuum pump pipeline are all made of stainless steel 316L electrolytic polished pipelines.

[0019] Preferably the tubing is 1 / 2 inch or 1 / 8 inch.

[0020] It is preferred that the pipeline between the filling control valve and the mixed gas container use 1 / 8 inch pipeline to reduce the influence of pipeline tension on the measurement accuracy.

[0021] It is preferred that a DN50 bellows valve be used between the vacuum control valve and the vacuum pump.

[0022] A mixed gas automatic gas distribution method, the method adopts a mixed gas automatic gas distribution device according to the present invention, the method steps are as follows:

[0023] (1) The DCS controls the opening and closing of the second gas control valve, the first gas control valve, the filling control valve and the vacuum control valve to perform system inspection.

[0024] (2) The DCS reads the weight of the mixed gas container on the electronic balance.

[0025] (3) The first gas is introduced into the mixed gas container through the first gas delivery pipeline and the filling pipeline. Initially, the DCS controls the regulating valve to open to the maximum. When the gas introduction reaches a certain level, the DCS determines the opening of the regulating valve according to the pressure before and after the regulating valve, so as to accurately control the gas flow to reach the flow set by the flowmeter, so that the first gas slowly enters the mixed gas container, thereby improving the control accuracy of the quality of the filled gas; after the first gas is filled, the DCS closes the first gas control valve and evacuates the gas in the filling pipeline through a vacuum pump.

[0026] (4) The second gas is introduced into the mixed gas container through the second gas delivery pipeline and the filling pipeline. Initially, the DCS controls the regulating valve to the maximum opening. When the gas introduction reaches a certain level, the DCS determines the opening of the regulating valve according to the pressure before and after the regulating valve, so as to accurately control the gas flow to reach the flow set by the flow meter. The gas slowly enters the mixed gas container, thereby improving the control accuracy of the quality of the filled gas. After the gas filling is completed, the DCS closes the second gas control valve and evacuates the filling pipeline through a vacuum pump.

[0027] When the gas flow reaches a certain level, DCS determines the opening of the regulating valve according to the pressure before and after the regulating valve, so as to accurately control the gas flow to reach the flow set by the flow meter. The specific control method is as follows:

[0028] When the remaining gas flow rate is less than 20g, set the flow rate to ≤10g / s;

[0029] When the remaining gas flow rate is greater than or equal to 20g, the flow rate is set to ≤ 20g / s when the gas flow rate reaches 80%, and the flow rate is set to ≤ 10g / s when the gas flow rate reaches 90%.

[0030] It is preferred to use positive and negative pressure maintenance methods to detect leaks in the filling pipeline before filling. The specific steps are as follows:

[0031] Before preparing the mixed gas, use the high and negative pressure holding methods to check for leaks in the filling pipeline, evacuate the filling pipeline to ≤50Pa with a vacuum pump, and determine whether there is any leakage in the filling pipeline through the pressure sensor before the regulating valve and the pressure sensor after the regulating valve. Then open the second gas control valve and the first gas control valve respectively, introduce the first gas and the second gas into the filling pipeline respectively, and pressurize to ≥10MPa. Determine whether there is any leakage in the pipeline through the pressure sensor before the regulating valve and the pressure sensor after the regulating valve. After the leak detection is completed, close the second gas control valve and the first gas control valve, and evacuate the filling pipeline to vacuum with a vacuum pump to remove residual gas.

[0032] The device and method described in the present invention are suitable for the configuration of electronic mixed gases, wherein the second gas is a dilution gas and the first gas is a component gas; they can also be used for mixed gases in other fields that require precise configuration of the content of each gas, and the types of the first gas and the second gas are determined according to specific requirements.

[0033] Beneficial Effects

[0034] 1. The present invention provides an automatic gas distribution device and method for mixed gas, which controls the flow of gas introduced into the filling pipeline, and adjusts the flow to a set flow according to specific requirements based on the pressure before and after the regulating valve through DCS, so as to improve the control accuracy of the quality of the introduced gas, and can improve the accuracy of the content of each gas in the configured mixed gas.

[0035] 2. The present invention provides a mixed gas automatic gas distribution device and method, which detects and controls the gas distribution device through DCS control, can fully realize the automatic distribution process, and the control is precise, avoiding the risk of errors in manual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 This is a schematic structural diagram of an automatic mixed gas distribution device in Example 1.

[0037] Figure 2 This is a DCS control schematic diagram of a mixed gas automatic gas distribution device in Example 1.

[0038] Among them, 1 is a filling pipeline, 2 is a second gas delivery pipeline, 3 is a first gas delivery pipeline, 4 is a second gas control valve, 5 is a first gas control valve, 6 is a pressure sensor before the regulating valve, 7 is a regulating valve, 8 is a flow meter, 9 is a pressure sensor after the regulating valve, 10 is a filling control valve, 11 is a mixed gas container, 12 is an electronic balance, 13 is a vacuum pump, and 14 is a vacuum control valve. DETAILED DESCRIPTION

[0039] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention.

[0040] like Figure 1 As shown, an automatic gas distribution device for mixed gas includes a filling pipeline 1, a second gas delivery pipeline 2, a first gas delivery pipeline 3, a second gas control valve 4, a first gas control valve 5, a pressure sensor before the regulating valve 6, a regulating valve 7, a flow meter 8, a pressure sensor after the regulating valve 9, a filling control valve 10, a mixed gas container 11, an electronic balance 12, a vacuum pump pipeline, a vacuum pump 13, a vacuum control valve 14 and a temperature sensor.

[0041] The electronic balance 12 adopts an ultra-high-precision electronic scale of the comparator level, and its typical parameters are 150kg±0.05g.

[0042] The vacuum pump 13 uses a vacuum degree of 1×10 -5 Pa high vacuum two-stage vacuum pump.

[0043] The pressure sensor 6 before the regulating valve and the pressure sensor 9 after the regulating valve are both high-precision vacuum pressure sensors with a measuring range of -0.1 to 40 MPa and an accuracy of ±0.075%.

[0044] The front end of the filling pipeline 1 is divided into two branches, one branch is the second gas delivery pipeline 2, and the other branch is the first gas delivery pipeline 3; the end of the filling pipeline 1 is connected to the mixed gas container 11; the filling pipeline 1 is connected with a pressure sensor 6 before the regulating valve, a regulating valve 7, a flow meter 8, a pressure sensor 9 after the regulating valve, a vacuum pump pipeline and a filling control valve 10 in sequence from the front end to the end.

[0045] A second gas control valve 4 is provided on the second gas delivery pipeline 2, a first gas control valve 5 is provided on the first gas delivery pipeline 3, one end of the vacuum pump pipeline is connected to the filling pipeline 1, and the other end is connected to the vacuum pump 13, and a vacuum control valve 14 is provided on the vacuum pump pipeline; the mixed gas container 11 is placed on the electronic balance 12.

[0046] The temperature sensor is located at the pressure sensor 6 before the regulating valve and the pressure sensor 9 after the regulating valve. By measuring the gas temperature in the filling pipeline 1, the accurate pressure before and after the regulating valve 7 is measured together with the pressure sensor 6 before the regulating valve and the pressure sensor 9 after the regulating valve, so as to control the regulating valve 7 to achieve precise control of the gas flow.

[0047] like Figure 2As shown, the second gas control valve 4, the first gas control valve 5, the pressure sensor 6 before the regulating valve, the regulating valve 7, the flow meter 8, the pressure sensor 9 after the regulating valve, the filling control valve 10, the electronic balance 12, the vacuum pump 13, the vacuum control valve 14 and the temperature sensor are automatically controlled through a distributed control system (DCS).

[0048] The second gas control valve 4, the first gas control valve 5, the filling control valve 10 and the vacuum control valve 14 are stainless steel pneumatic diaphragm valves.

[0049] The flow meter 8 is a mass flow meter.

[0050] Negative pressure sensors and high pressure sensors are provided on the second gas delivery pipeline 2 and the first gas delivery pipeline 3. The negative pressure sensors and high pressure sensors are connected to the DCS system respectively. The negative pressure sensors are used for replacing gas, and the high pressure sensors are used for intake control. The working conditions of each pipeline can be detected by the negative pressure sensors and the positive pressure sensors. When leakage or blockage occurs, the DCS controls the gas distribution device to stop working.

[0051] The DCS is also connected to an audible and visual alarm.

[0052] The filling pipeline 1, the second gas delivery pipeline 2, the first gas delivery pipeline 3 and the vacuum pump pipeline are all made of stainless steel 316L electrolytically polished pipelines.

[0053] The tubing is either 1 / 2 inch or 1 / 8 inch.

[0054] The pipeline between the filling control valve 10 and the mixed gas container 11 adopts a 1 / 8 inch pipeline to reduce the influence of pipeline tension on the measurement accuracy.

[0055] A DN50 bellows valve is used between the vacuum control valve 14 and the vacuum pump 13.

[0056] A method for automatically distributing a mixed gas, wherein the method uses an automatic mixed gas distribution device described in this embodiment for distributing an electronic mixed gas, and takes the preparation of a hydrogen-nitrogen mixed gas as an example, wherein the second gas is a diluent gas nitrogen, and the first gas is a component gas hydrogen; the method steps are as follows:

[0057] (1) Before preparing the mixed gas, the filling pipeline 1 is leak-checked by using the high and negative pressure holding methods, and the filling pipeline 1 is evacuated to ≤50Pa by using the vacuum pump 13. Whether there is leakage in the filling pipeline 1 is determined by using the pressure sensor 6 before the regulating valve and the pressure sensor 9 after the regulating valve. Then, the second gas control valve 4 and the first gas control valve 5 are opened respectively, and the first gas and the second gas are introduced into the filling pipeline 1 respectively, and the pressure is charged to ≥10MPa. Whether there is leakage in the pipeline is determined by using the pressure sensor 6 before the regulating valve and the pressure sensor 9 after the regulating valve. After the leak detection is completed, the second gas control valve 4 and the first gas control valve 5 are closed, and the filling pipeline 1 is evacuated to vacuum by using the vacuum pump 13 to remove the residual gas.

[0058] (2) The DCS controls the opening and closing of the second gas control valve 4, the first gas control valve 5, the filling control valve 10 and the vacuum control valve 14 to perform a system inspection.

[0059] (3) The DCS reads the weight of the mixed gas container 11 on the electronic balance 12.

[0060] (4) The first gas, hydrogen, is introduced into the mixed gas container 11 through the first gas delivery pipeline 3 and the filling pipeline 1. The theoretical filling mass is about 30 g. Initially, the DCS controls the regulating valve 7 to open to the maximum. When the remaining amount introduced reaches 20 g, the DCS determines the opening of the regulating valve 7 according to the pressure before and after the regulating valve, so as to accurately control the gas flow rate to reach the flow rate set by the flowmeter 8 of 5 g / s, so that the first gas slowly enters the mixed gas container 11, thereby improving the control accuracy of the filling gas mass. After the first gas is filled, the DCS closes the first gas control valve 5 and evacuates the gas in the filling pipeline 1 through the vacuum pump 13.

[0061] (5) The second gas nitrogen is introduced into the mixed gas container 11 through the second gas delivery pipeline 2 and the filling pipeline 1. The theoretical filling mass is about 7661g. Initially, the DCS controls the regulating valve 7 to open to the maximum. When the amount introduced reaches 80%, the remaining amount introduced is about 1532g. The DCS adjusts the flow rate to 20g / s. When the amount introduced reaches 90%, the remaining amount introduced is about 766g. The DCS adjusts the flow rate to 10g / s, so that the gas flow rate is accurately controlled to reach the set flow rate of the flow meter 8. The gas slowly enters the mixed gas container 11, thereby improving the control accuracy of the quality of the filled gas. After the gas filling is completed, the DCS closes the second gas control valve 4 and evacuates the filling pipeline 1 through the vacuum pump 13.

[0062] The gas distribution device and method described in this embodiment solve the problems of uncontrollable gas flow rate at the gas filling end point, low mixed gas preparation accuracy and manual control operation errors in the current mixed gas preparation process; the accuracy of the hydrogen and nitrogen contents in the hydrogen-nitrogen mixed gas configured in the mixed gas container 11 meets the accuracy requirements of electronic mixed gases required in the production of semiconductors, light-emitting diodes (LEDs), photovoltaics, etc.

[0063] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A mixed gas automatic gas distribution device, characterized in that: The gas distribution device comprises a filling pipeline (1), a second gas delivery pipeline (2), a first gas delivery pipeline (3), a second gas control valve (4), a first gas control valve (5), a pressure sensor before the regulating valve (6), a regulating valve (7), a flow meter (8), a pressure sensor after the regulating valve (9), a filling control valve (10), a mixed gas container (11), an electronic balance (12), a vacuum pump pipeline, a vacuum pump (13), a vacuum control valve (14) and a temperature sensor; The front end of the filling pipeline (1) is divided into two branches, one branch is the second gas delivery pipeline (2), and the other branch is the first gas delivery pipeline (3); the end of the filling pipeline (1) is connected to the mixed gas container (11); the filling pipeline (1) is connected to a pressure sensor (6) before the regulating valve, a regulating valve (7), a flow meter (8), a pressure sensor (9) after the regulating valve, a vacuum pump pipeline and a filling control valve (10) in sequence from the front end to the end; A second gas control valve (4) is provided on the second gas delivery pipeline (2), a first gas control valve (5) is provided on the first gas delivery pipeline (3), one end of the vacuum pump pipeline is connected to the filling pipeline (1), and the other end is connected to the vacuum pump (13), and a vacuum control valve (14) is provided on the vacuum pump pipeline; the mixed gas container (11) is placed on an electronic balance (12); and temperature sensors are located at the pressure sensor (6) before the regulating valve and the pressure sensor (9) after the regulating valve; The second gas control valve (4), the first gas control valve (5), the pressure sensor before the regulating valve (6), the regulating valve (7), the flow meter (8), the pressure sensor after the regulating valve (9), the filling control valve (10), the electronic balance (12), the vacuum pump (13), the vacuum control valve (14) and the temperature sensor are automatically controlled through the DCS; The electronic balance (12) adopts an ultra-high precision electronic scale of comparator level; The vacuum pump (13) has a vacuum degree of 1×10 -5 Pa high vacuum two-stage vacuum pump; The pressure sensor (6) before the regulating valve and the pressure sensor (9) after the regulating valve are both high-precision vacuum pressure sensors with a measuring range of -0.1~40MPa and an accuracy of ±0.075%; The second gas control valve (4), the first gas control valve (5), the filling control valve (10) and the vacuum control valve (14) are stainless steel pneumatic diaphragm valves; the flow meter (8) is a mass flow meter; The second gas delivery pipeline (2) and the first gas delivery pipeline (3) are both provided with a negative pressure sensor and a high pressure sensor, which are respectively connected to the DCS system.

2. The automatic mixed gas distribution device according to claim 1, characterized in that: The DCS is connected with an audible and visual alarm.

3. The automatic mixed gas distribution device according to claim 1, characterized in that: The filling pipeline (1), the second gas delivery pipeline (2), the first gas delivery pipeline (3) and the vacuum pump pipeline are all made of stainless steel 316L electrolytically polished pipelines; the pipeline size is 1 / 2 inch or 1 / 8 inch; and a DN50 bellows valve is used between the vacuum control valve (14) and the vacuum pump (13).

4. The automatic mixed gas distribution device according to claim 1, characterized in that: The second gas control valve (4), the first gas control valve (5), the filling control valve (10) and the vacuum control valve (14) are stainless steel pneumatic diaphragm valves; the flow meter (8) is a mass flow meter; The second gas delivery pipeline (2) and the first gas delivery pipeline (3) are both provided with a negative pressure sensor and a high pressure sensor, and the negative pressure sensor and the high pressure sensor are respectively connected to the DCS system; DCS is connected with sound and light alarm; The filling pipeline (1), the second gas delivery pipeline (2), the first gas delivery pipeline (3) and the vacuum pump pipeline are all made of stainless steel 316L electrolytically polished pipelines; the size of the pipelines is 1 / 2 inch or 1 / 8 inch; A DN50 bellows valve is used between the vacuum control valve (14) and the vacuum pump (13); The pipeline between the filling control valve (10) and the mixed gas container (11) adopts a 1 / 8 inch pipeline.

5. A method for automatically distributing mixed gas, characterized in that: The method adopts a mixed gas automatic gas distribution device as claimed in any one of claims 1 to 4, and the method steps are as follows: (1) The DCS controls the opening and closing of the second gas control valve (4), the first gas control valve (5), the filling control valve (10) and the vacuum control valve (14) to perform a system check; (2) The DCS reads the weight of the mixed gas container (11) on the electronic balance (12); (3) The first gas is introduced into the mixed gas container (11) through the first gas delivery pipeline (3) and the filling pipeline (1). Initially, the DCS controls the opening of the regulating valve (7) to be adjusted to the maximum. When the gas introduction reaches a certain level, the DCS determines the opening of the regulating valve (7) according to the pressure before and after the regulating valve, so as to accurately control the gas flow rate to reach the flow rate set by the flow meter (8), so that the first gas slowly enters the mixed gas container (11), thereby improving the control accuracy of the quality of the filled gas; after the first gas is filled, the DCS closes the first gas control valve (5) and evacuates the gas in the filling pipeline (1) through the vacuum pump (13); (4) The second gas is introduced into the mixed gas container (11) through the second gas delivery pipeline (2) and the filling pipeline (1). Initially, the DCS controls the opening of the regulating valve (7) to be adjusted to the maximum. When the gas introduction reaches a certain level, the DCS determines the opening of the regulating valve (7) according to the pressure before and after the regulating valve (7), so as to accurately control the gas flow rate to reach the flow rate set by the flow meter (8). The gas slowly enters the mixed gas container (11), thereby improving the control accuracy of the quality of the filled gas. After the gas filling is completed, the DCS closes the second gas control valve (4) and evacuates the filling pipeline (1) through the vacuum pump (13); When the gas flow reaches a certain level, the DCS determines the opening of the regulating valve (7) according to the pressure before and after the regulating valve (7) so as to accurately control the gas flow to reach the flow set by the flow meter (8). The specific control method is as follows: When the remaining gas flow rate is less than 20g, set the flow rate to ≤10g / s; When the remaining gas flow rate is greater than or equal to 20g, the flow rate is set to ≤20g / s when the gas flow rate reaches 80%, and the flow rate is set to ≤10g / s when the gas flow rate reaches 90%.

6. The method for automatically distributing mixed gas according to claim 5, characterized in that: Before filling, the filling pipeline (1) is leak-checked by using positive and negative pressure maintenance methods. The steps are as follows: Before preparing the mixed gas, the filling pipeline (1) is leak-checked by using the high and negative pressure holding methods, the filling pipeline (1) is evacuated to ≤50 Pa by using the vacuum pump (13), and the filling pipeline (1) is judged to have leakage by using the pressure sensor (6) before the regulating valve and the pressure sensor (9) after the regulating valve, then the second gas control valve (4) and the first gas control valve (5) are opened, the first gas and the second gas are introduced into the filling pipeline (1) respectively, and the pressure is charged to ≥10 MPa, and the pressure sensor (6) before the regulating valve and the pressure sensor (9) after the regulating valve are judged to have leakage, and the leak-check is completed, then the second gas control valve (4) and the first gas control valve (5) are closed, and the filling pipeline (1) is evacuated to vacuum by using the vacuum pump (13) to remove residual gas.

7. The method for automatically distributing mixed gas according to claim 5, characterized in that: The first gas is a component gas, and the second gas is a dilution gas.

Images