High frequency inductor components

Abstract

The present invention provides a high-frequency inductor component. The high-frequency inductor component comprises: a blank; a coil of a spiral structure, which is arranged in the blank and wound along the axial direction; and a first external electrode and a second external electrode, which are arranged in the blank and electrically connected to the coil, the blank comprises a first end face and a second end face which are opposite to each other, and a bottom face connected between the first end face and the second end face, the first external electrode is formed from the first end face to the bottom face, and the second external electrode is formed from the second end face to the bottom face, the blank has an insulating layer composed of a non-magnetic material, and an internal magnetic component and an external magnetic component which contain a magnetic material, the internal magnetic component exists at the position where the coil exists in the axial direction, and the external magnetic component exists outside the coil in the axial direction, and the inductance value is less than 100nH.

Description

Technical Field

[0001] The present disclosure relates to high frequency inductor components. Background Art

[0002] In the past, as an inductor component, there is a structure described in Japanese Patent Publication No. 2015-15297 (Patent Document 1). The inductor component has a green body, a coil provided in the green body, a first external electrode, and a second external electrode. The coil is formed by forming a coil conductor layer on an insulating paste layer, laminating such insulating paste, and then firing.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2015-015297

[0004] In the case of the inductor component described above, when used at high frequencies, it is difficult to increase the Q value if the efficiency of obtaining the L value per unit outer size is increased in order to obtain a required inductance value (L value) while responding to miniaturization. Summary of the invention

[0005] Therefore, in the present disclosure, a high-frequency inductor component capable of improving the efficiency of obtaining the L value and improving the Q value is provided.

[0006] In order to solve the above-mentioned problems, a high-frequency inductor component as one embodiment of the present disclosure includes:

[0007] green body;

[0008] A coil of a spiral structure is disposed in the blank and wound along the axial direction; and

[0009] The first external electrode and the second external electrode are provided on the above-mentioned body and are electrically connected to the above-mentioned coil.

[0010] The blank includes a first end face and a second end face that are opposite to each other, and a bottom face connected between the first end face and the second end face.

[0011] The first external electrode is formed from the first end surface to the bottom surface,

[0012] The second external electrode is formed from the second end surface to the bottom surface,

[0013] The green body has an insulating layer made of non-magnetic material, and an inner magnetic component and an outer magnetic component made of magnetic material.

[0014] The internal magnetic component is located at the position where the coil is located in the axial direction.

[0015] The external magnetic member is located outside the coil in the axial direction.

[0016] The inductance value is less than 100nH.

[0017] According to the above aspect, in the high-frequency inductor component, it is possible to improve the efficiency of obtaining the L value and to improve the Q value.

[0018] In one embodiment of the high-frequency inductor component, the coil contains Ag.

[0019] The insulating layer includes glass.

[0020] In one embodiment of the high-frequency inductor component, the axial direction is parallel to the bottom surface.

[0021] In one embodiment of the high-frequency inductor component, the size of the inductor component in a direction parallel to the bottom surface and perpendicular to the axial direction is less than 0.7 mm.

[0022] The size of the inductor component in the axial direction is smaller than 0.4 mm.

[0023] According to the above-mentioned embodiment, it can be a preferable form as a high-frequency inductor.

[0024] In one embodiment of the high-frequency inductor component, the size of the inductor component in a direction perpendicular to the bottom surface is larger than the size of the inductor component in the axial direction.

[0025] According to the above embodiment, the diameter of the coil can be increased.

[0026] In one embodiment of the high-frequency inductor component, the internal magnetic component and the external magnetic component are composites of a resin and the magnetic material.

[0027] According to the above-described embodiment, the efficiency of obtaining the L value can be further improved.

[0028] In one embodiment of the high-frequency inductor component, the magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 μm or less.

[0029] According to the above embodiment, since the loss at high frequencies is smaller than when using a general magnetic material such as Ni—Zn ferrite, the Q value of the inductor component can be increased while maintaining high frequency characteristics.

[0030] In addition, in one embodiment of the high-frequency inductor component,

[0031] The first external electrode and the second external electrode are embedded in the body.

[0032] The coil has a plurality of coil wirings, which are arranged in the axial direction and are respectively wound in a direction perpendicular to the axial direction.

[0033] In a cross section perpendicular to the axial direction and where the coil wiring, the first external electrode, and the second external electrode exist, an area of ​​the insulating layer is larger than a total area of ​​the coil wiring, the first external electrode, and the second external electrode.

[0034] According to the above embodiment, since the areas of the coil and the external electrode can be reduced, it is possible to suppress a decrease in the Q value at high frequencies and a decrease in the self-resonant frequency (SRF) due to magnetic loss.

[0035] In one embodiment of the high-frequency inductor component, when the green body and the coil are projected in the axial direction,

[0036] The shortest distance between the internal magnetic member and the coil is greater than or equal to 10 μm and less than or equal to 20 μm.

[0037] According to the above embodiment, by ensuring the distance between the coil and the internal magnetic material, it is possible to suppress a short circuit and current leakage.

[0038] In one embodiment of the high-frequency inductor component, the internal magnetic member is present only on the inner diameter side of the coil.

[0039] According to the above embodiment, there is no internal magnetic component between the coil and the external electrode, which can suppress the reduction of SRF. In addition, since the outside of the coil can be formed integrally by the insulating layer, the strength of the inductor component is enhanced. Furthermore, since there is no internal magnetic component outside the coil, the diameter of the coil can be increased.

[0040] In one embodiment of the high-frequency inductor component, the green body includes a third end face and a fourth end face, the third end face and the fourth end face are perpendicular to the first end face and the bottom face, and are opposed to each other.

[0041] The axial direction is parallel to the bottom surface and intersects with the third end surface and the fourth end surface.

[0042] The external magnetic component constitutes the third end surface and the fourth end surface.

[0043] According to the above-mentioned embodiment, other components do not need to be provided on the magnetic component, and the size of the blank can be reduced.

[0044] In one embodiment of the high-frequency inductor component, the axial direction is parallel to the bottom surface and the first end surface.

[0045] The blank includes a top surface opposite to the bottom surface,

[0046] The external magnetic component extends on the insulating layer on at least one of the bottom surface, the top surface, the first end surface, and the second end surface.

[0047] According to the above embodiment, the close contact between the external magnetic member and the blank is improved.

[0048] In one embodiment of the high-frequency inductor component, when the base body and the coil are projected in the axial direction, the internal magnetic component has a shape along the coil.

[0049] According to the above embodiment, the internal magnetic component can be enlarged.

[0050] In one embodiment of the high-frequency inductor component, the self-resonant frequency is 1 GHz or more.

[0051] According to the above aspect, it is possible to provide a high-frequency inductor component capable of improving the efficiency of obtaining the L value and improving the Q value. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 It is a perspective view showing an embodiment of an inductor component.

[0053] Figure 2 is a bottom view of the inductor component.

[0054] Figure 3 is a top view of the inductor component.

[0055] Figure 4 It is the front view of the inductor component.

[0056] Figure 5 is a side view of the inductor component.

[0057] Figure 6 This is a cross-sectional view of the inductor component taken along the line X-X.

[0058] Figure 7 It is a perspective stereogram of the inductor components.

[0059] Figure 8 is an exploded view of the inductor components.

[0060] Fig. 9A This is a graph showing the relationship between magnetic permeability and ΔL in an inductor component.

[0061] Fig. 9B This is a graph showing the relationship between magnetic permeability and ΔQ in an inductor component.

[0062] Fig. 9CThis is a graph showing the relationship between magnetic permeability and ΔR in an inductor component.

[0063] Fig.10 It is a perspective front view of the inductor component.

[0064] Fig.11 It is a cross-sectional view showing an embodiment of an inductor component.

[0065] Fig. 12A This is an explanatory diagram for explaining a part of the method for manufacturing the inductor component according to the embodiment.

[0066] Fig. 12B This is an explanatory diagram for explaining a part of the method for manufacturing the inductor component according to the embodiment.

[0067] Description of Reference Numerals

[0068] 1…inductor component; 10…blank; 13…first end surface; 14…second end surface; 15…third end surface; 16…fourth end surface; 17…bottom surface; 18…top surface; 20…coil; 21…coil wiring; 26…through-hole wiring; 30…first external electrode; 40…second external electrode; 31, 41…base electrode layer; 32, 42…plating layer; 61…first external magnetic component; 62…second external magnetic component; 63…internal magnetic component; 64…extension portion; 100…laminate; 110…blank portion; 200…coil portion; 600…through-hole; 610…magnetic slurry; 640…extension portion; 700…mold. DETAILED DESCRIPTION

[0069] Hereinafter, an inductor component as one embodiment of the present disclosure will be described in detail by way of the illustrated embodiment. Note that the drawings include some schematic drawings and may not reflect actual dimensions or ratios.

[0070] (First Embodiment)

[0071] Figure 1 It is a perspective view showing the inductor component 1 according to the first embodiment. Figure 2 It is a bottom view of the inductor component 1 . Figure 3 is a top view of the inductor component 1 . Figure 4 It is a front view of the inductor component 1. Figure 5 It is a side view of the inductor component 1. Figure 6 It is a cross-sectional view of the inductor component 1 taken along the line XX. Figure 7 It is a perspective view of the inductor component 1 . Figure 8 is an exploded view of the inductor component 1.

[0072] like Figures 1 to 8As shown, the inductor component 1 includes a green body 10 , a coil 20 provided on the green body 10 , and a first external electrode 30 and a second external electrode 40 provided on the green body 10 and electrically connected to the coil.

[0073] The inductor component 1 is electrically connected to wiring of a circuit substrate (not shown) via the first external electrode 30 and the second external electrode 40. The inductor component 1 is used, for example, as an impedance matching coil (matching coil) for a high-frequency circuit, and is used in electronic devices such as personal computers, DVD players, digital cameras, TVs, mobile phones, automotive electronics, and medical / industrial machinery. However, the use of the inductor component 1 is not limited thereto, and for example, it can also be used in a tuning circuit, a filter circuit, a rectifier smoothing circuit, etc.

[0074] The blank 10 is formed by laminating a plurality of insulating layers 11 made of non-magnetic materials. The insulating layer 11 includes, for example, glass. More specifically, the insulating layer 11 is formed by a sintered body of glass. As glass, for example, borosilicate glass can be cited. The insulating layer 11 may also include non-magnetic ferrite, alumina, resin, etc. The plurality of insulating layers 11 are laminated in the W direction. The insulating layer 11 is in a layered state extending on the LT plane of the lamination direction perpendicular to the W direction. In addition, there is a case where the interface between two adjacent insulating layers 11 becomes unclear due to firing or the like.

[0075] The blank 10 is formed in a substantially rectangular parallelepiped shape. The blank 10 includes a first end face 13 and a second end face 14 facing each other, a third end face 15 and a fourth end face 16 facing each other, a bottom face 17 connected between the first end face 13 and the second end face 14 and between the third end face 15 and the fourth end face 16, and a top face 18 facing the bottom face 17. That is, the outer surface of the blank 10 is composed of the first end face 13, the second end face 14 facing the first end face 13, the third end face 15 connected between the first end face 13 and the second end face 14, the fourth end face 16 facing the third end face 15, the bottom face 17 connected between the third end face 15 and the fourth end face 16, and the top face 18 facing the bottom face 17. As shown in the figure, the L direction is perpendicular to the first end face 13 and the second end face 14, the W direction is perpendicular to the third end face 15 and the fourth end face 16, and the T direction is perpendicular to the bottom face 17 and the top face 18. The L direction, the W direction, and the T direction are perpendicular to each other.

[0076] The coil 20 is axially parallel to the bottom surface 17 of the blank 10, and is wound along the axial direction into a spiral structure intersecting the third end surface 15 and the fourth end surface 16 of the blank 10. More specifically, in the inductor component 1, the axial direction of the coil 10 is parallel to the W direction, that is, the axial direction of the coil 10 is parallel to the first end surface 13, the second end surface 14, the bottom surface 17 and the top surface 18, and is perpendicular to the third end surface 15 and the fourth end surface 16.

[0077] When viewed from the axial direction, the coil 20 is formed into a roughly rectangular shape, but is not limited to this shape. The shape of the coil 20 may be, for example, circular, elliptical, rectangular, or other polygonal shapes. The so-called axial direction of the coil 20 refers to the direction parallel to the central axis of the spiral wound around the coil 20. The axial direction of the coil 20 and the stacking direction of the insulating layer 11 are in the same direction. The so-called "parallel" in this application is not limited to an exact parallel relationship, and also includes a substantially parallel relationship taking into account the range of actual deviations.

[0078] The coil 20 includes a coil wiring 21 wound along a plane. A plurality of coil wirings 21 are stacked and arranged along the axial direction. The coil wiring 21 is formed by winding on the main surface (LT plane) of the insulating layer 11 perpendicular to the axial direction. That is, the coil wiring 21 is respectively wound in a direction perpendicular to the axial direction. The coil wirings 21 adjacent in the stacking direction are electrically connected in series via the through-hole wiring 26 that penetrates the insulating layer 11 in the thickness direction (W direction). That is, the coil 20 includes the coil wiring 21 and the through-hole wiring 26. In this way, the plurality of coil wirings 21 are electrically connected to each other in series and form a spiral. Specifically, the coil 20 has a structure in which a plurality of coil wirings 21 are stacked and electrically connected to each other in series, and the number of windings is less than one week. The coil wiring 21 is composed of a single layer of coil conductor layers. In addition, the coil wiring 21 can also be composed of multiple layers of coil conductor layers stacked in surface contact with each other. In this case, a coil wiring 21 with a high aspect ratio and a high rectangularity can be formed. In addition, the coil wiring 21 can also be a spiral shape of more than one week.

[0079] The coil 20 includes Ag. The coil 20 may include a conductive material other than Ag (for example, Cu, Au, etc.) and glass.

[0080] The first external electrode 30 is L-shaped and is provided from the first end surface 13 to the bottom surface 17. The second external electrode 40 is L-shaped and is provided from the second end surface 14 to the bottom surface 17. That is, both the first external electrode 30 and the second external electrode 40 are exposed at the bottom surface 17. The first external electrode 30 is connected to the first end of the coil 20, and the second external electrode 40 is connected to the second end of the coil 20.

[0081] The first external electrode 30 includes two layers, namely, a base electrode layer 31 and a plating layer 32. The second external electrode 40 includes two layers, namely, a base electrode layer 41 and a plating layer 42.

[0082] The base electrode layer 31 is composed of a plurality of external electrode conductor layers 33 stacked in surface contact with each other. The base electrode layer 41 is composed of a plurality of external electrode conductor layers 43 stacked in surface contact with each other. The base electrode layers 31 and 41 may be composed of, for example, a conductive material such as Ag, Cu, Au, and glass particles, or may be formed of the same material as the coil 20. In addition, the external electrode conductor layers 33 and 43 may be embedded in the green body 10 or may be formed on the outer surface of the green body 10.

[0083] The plated film layers 32 and 42 are formed of, for example, Ni, Sn, Au, Cu plating or the like, and more specifically, are formed of Ni and Sn plating.

[0084] The blank 10 further includes a first outer magnetic component 61 , a second outer magnetic component 62 , and an inner magnetic component 63 .

[0085] The first external magnetic component 61 and the second external magnetic component 62 as external magnetic components are present outside the coil 20 in the axial direction of the coil 20. The first external magnetic component 61 constitutes the third end face 15 of the blank 10, and the second external magnetic component 62 constitutes the fourth end face 16 of the blank 10. The first external magnetic component 61 and the second external magnetic component 62 may also contain magnetic materials and be composed of a composite of resin and magnetic materials. In addition, in this specification, the so-called magnetic component means a component containing magnetic materials, and may not contain resin. In addition, for the purpose of insulation and protection, other components such as insulating layers stacked (coated) by resin materials and inorganic materials may be used on the outer surface side of the first external magnetic component 61 and the second external magnetic component 62. In other words, by providing other components, it is possible to suppress the peeling of the first external magnetic component 61 and the second external magnetic component 62, the generation of cracks, the short circuit between the first external electrode 30 and the second external electrode 40, and the generation of current leakage.

[0086] The internal magnetic component 63 is connected to the first external magnetic component 61 and the second external magnetic component 62. The internal magnetic component 63 is present at the position where the coil 20 is present in the axial direction of the coil 20. That is, the internal magnetic component 63 is formed on the insulating layer 11 where the coil wiring 21 and the through-hole wiring 26 are formed. The internal magnetic component 63 may also include a magnetic material and be composed of a composite of a resin and a magnetic material. The internal magnetic component 63 may also be composed of the same material as the first external magnetic component 61 and the second external magnetic component 62.

[0087] The size of the inductor component 1 in a direction parallel to the bottom surface 17 and perpendicular to the axial direction of the coil 20 is less than 0.7 mm, and the size of the coil 20 in the axial direction is less than 0.4 mm. For example, the size of the inductor component 1 (L direction×W direction×T direction) is 0.6 mm×0.3 mm×0.3 mm, 0.4 mm×0.2 mm×0.2 mm, 0.2 mm×0.1 mm×0.1 mm, etc. In addition, the lengths in the W direction and the T direction may not be equal, for example, they may be 0.4 mm×0.2 mm×0.3 mm, etc.

[0088] The inductor component 1 is a high-frequency inductor component used in a high-frequency circuit, and the L value is 100 nH or less. Here, in the present disclosure, the so-called high-frequency inductor component means that the SRF of the inductor component 1 is 500 MHz or more. In addition, the SRF of the inductor component 1 is preferably 1 GHz or more, thereby enabling the inductor component 1 to be used in a variety of high-frequency circuits.

[0089] According to the inductor component 1 , in order to cope with miniaturization and obtain a desired L value, it is possible to improve the efficiency of obtaining the L value per unit outer size and to improve the Q value.

[0090] In the inductor component, it is difficult to obtain the L value because the inner diameter of the coil cannot be increased by miniaturization, that is, the outer dimensions become smaller. That is, the efficiency of obtaining the L value per unit outer dimension is reduced. In this case, in order to obtain the required L value, as one of the methods to improve the efficiency of obtaining the L value, it is considered to increase the number of turns of the coil, but if the number of turns of the coil is increased, the line length of the coil is extended, so the DC resistance value (R value) of the inductor component increases, and it is difficult to increase the Q value. The size of the inductor component in the L direction is less than 0.7mm, and the size in the W direction is less than 0.4mm, etc. The smaller the outer dimensions, the stronger the above trend.

[0091] In addition, as another method of improving the efficiency of obtaining the L value, there is a case where a magnetic material is used as a blank in an inductor component other than a high-frequency inductor component. However, in a high-frequency inductor component, if a magnetic material is used as a blank, the magnetic loss of the magnetic material increases at high frequencies, and it is difficult to improve the Q value. As such, in a high-frequency inductor component, if the efficiency of obtaining the L value is improved in order to cope with miniaturization and obtain the required L value, it is difficult to improve the Q value.

[0092] Furthermore, since magnetic materials are usually used in the blank to obtain a larger L value, it is not expected to use magnetic materials in the blank in high-frequency inductor parts with relatively small L values ​​such as 100nH or less. Similarly, due to the limitation of snoke, the magnetic materials that can be used for high frequencies are limited to materials with low magnetic permeability, and the effect of improving the efficiency of obtaining the L value is relatively low, which is also a factor in not using magnetic materials in the blank in high-frequency inductor parts.

[0093] On the other hand, the inventors of the present application studied the structure in which the base body has a magnetic material in a high-frequency inductor component, and found that the Q value can be improved in a specific structure. The experiments conducted by the inventors of the present application are as follows.

[0094] First, as a reference example of a high-frequency inductor component, an inductor component having a blank, a coil disposed in the blank, and a first external electrode and a second external electrode disposed in the blank and electrically connected to the coil was manufactured in the same manner as in the above-mentioned embodiment. In the reference example, the first external electrode is formed from the first end face of the blank to the bottom face, and the second external electrode is formed from the second end face to the bottom face. The coil of the reference example is such that the axis of the coil is parallel to the bottom face, and the coil is wound along the axial direction of the coil into a spiral structure intersecting the third end face and the fourth end face. In addition, in the reference example, the coil contains Ag, the blank is formed only of glass, and the coil is formed so that the size in the L direction is 0.6 mm, the size in the W direction is 0.3 mm, and the L value is 100 nH.

[0095] Next, as a comparative example of a high-frequency inductor component, a blank is manufactured so that, in addition to an insulating layer made of glass, in the W direction (the axial direction of the coil), there is an internal magnetic component made of a magnetic material, which is located on the inner side of both ends of the coil. In addition, as an embodiment of a high-frequency inductor component, similar to the above-mentioned embodiment, a blank is manufactured so that, in addition to an insulating layer and an internal magnetic component, there is a first external magnetic component and a second external magnetic component made of a magnetic material, which are located on the outer side of both ends of the coil in the W direction. In addition, the comparative example and the embodiment have the same structure as the reference example except for the structure of the magnetic component of the above-mentioned blank. In addition, for the comparative example and the embodiment, a structure is manufactured so that the magnetic permeability (real part μ' of the complex magnetic permeability) of the magnetic material varies from 1.2 to 4.

[0096] Fig. 9A , Fig. 9B , Fig. 9C The graphs are respectively showing the increase rates (ΔL, ΔQ, ΔR) of the L value, Q value, and R value of the comparative example and the embodiment, respectively, with the L value, Q value, and R value in the reference example as the reference value (0%). Fig. 9A , Fig. 9B , Fig. 9CIn the figure, the magnetic permeability μ' is set on the horizontal axis, and ΔL, ΔQ, and ΔR are set on the vertical axis. In addition, ΔL represents the increase rate of the L value of the reference example (when μ' of the blank is 1) in which no magnetic material is used. The same is true for ΔQ and ΔR. Fig. 9A , Fig. 9B , Fig. 9C In FIG. 1 , the graph of the above-described embodiment is represented by a solid line S1 , and the graph of the comparative example is represented by a two-dot chain line S0 .

[0097] First, if Fig. 9A As shown, the L value of both the embodiment and the comparative example increases with the increase of magnetic permeability. In addition, the L value of the embodiment is higher than that of the comparative example as a whole, because, in the path (magnetic circuit) surrounded by the magnetic flux generated by the current flowing to the coil due to the presence of the first and second external magnetic components, the ratio of the magnetic components in the embodiment is greater than that in the comparative example, the magnetic resistance is lower, and the leakage magnetic flux is reduced.

[0098] However, if Fig. 9B As shown in the comparative example, as the magnetic permeability increases, the rate of increase of the Q value decreases. If the magnetic permeability exceeds a certain value (μ'=2-3), the Q value no longer increases. This is because, Fig. 9C As shown in FIG. 1 , in the comparative example, as the magnetic permeability increases, the R value also increases, and the effect of the increase in the R value offsets the effect of the increase in the L value in the Q value. Fig. 9B As shown in FIG. 1 , in the embodiment, as the magnetic permeability increases, the Q value also increases. This is because, as Fig. 9C As shown, in the example, even if the magnetic permeability is increased, the R value does not increase to the level of the comparative example.

[0099] As described above, in the high-frequency inductor component, by having the inner magnetic component, the first outer magnetic component, and the second outer magnetic component including magnetic materials in addition to the insulating layer as in the embodiment, the efficiency of obtaining the L value can be improved and the Q value can be improved.

[0100] In addition, it is believed that in the comparative example, the R value increases as the magnetic permeability increases, while in the embodiment, even if the magnetic permeability increases, the R value does not increase to the extent of the comparative example because of the following reasons. In the comparative example, the inventors of the present application confirmed the current density in the coil when a high-frequency signal was input, and found that the current was concentrated at both ends of the coil in the W direction (the axial direction of the coil), and the current density increased. In addition, it was also confirmed that as the magnetic permeability increases, the current density at this position further increases. If the current density increases, the temperature at this position rises and the resistivity of the conductor increases. That is, in the comparative example, due to the increase in magnetic permeability, the current is concentrated at both ends of the coil in the W direction, and it is speculated that the R value has increased.

[0101] On the other hand, in the embodiment, the current density when the high-frequency signal is input is also confirmed, and the result is that the concentration of current at both ends of the coil in the W direction is reduced compared with the comparative example. That is, it can be seen that the first external magnetic component and the second external magnetic component located near both ends of the coil have the effect of alleviating the concentration of current at both ends of the coil. Therefore, in the embodiment, the current concentration at both ends of the coil in the W direction caused by the increase in magnetic permeability is alleviated, and it is inferred that the R value will not increase to the extent of the comparative example.

[0102] As described above, in the inductor component 1 of the present embodiment, by using the first external magnetic component 61 and the second external magnetic component 62 together with the internal magnetic component 63, the concentration of current toward the two ends of the coil 20 can be alleviated in the W direction, and by reducing the increase rate of the R value relative to the increase in magnetic permeability, the acquisition efficiency of the L value can be improved and the Q value can be improved.

[0103] In addition, if Fig. 9A As shown, the L value of the embodiment is higher than that of the comparative example throughout the entire range of the changing magnetic permeability. This is considered to be because the ratio of the magnetic components in the path (magnetic circuit) surrounded by the magnetic flux generated by the current flowing to the coil due to the presence of the first and second external magnetic components is greater in the embodiment than in the comparative example, and the magnetic resistance is reduced and the leakage magnetic flux is reduced. In this way, in the embodiment, by not only reducing the increase rate of the R value but also increasing the increase rate of the L value, a higher Q value than the comparative example can be obtained.

[0104] like Figure 8 As shown, preferably, in the first external magnetic component 61, the second external magnetic component 62, and the internal magnetic component 63, the magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 μm or less. If such a magnetic material is used, the high-frequency magnetic loss is smaller than when using a general magnetic material such as Ni-Zn ferrite, so the Q value of the inductor component can be improved, and the high-frequency characteristics can also be maintained.

[0105] Furthermore, when the magnetic material is composed of a composite of a resin and a magnetic material, the resin is, for example, an epoxy resin.

[0106] like Figure 8 As shown, preferably, when the first external electrode 30 and the second external electrode 40 are buried in the blank 10, in a cross-section perpendicular to the axial direction of the coil 20 and where the coil wiring 21, the first external electrode 30, and the second external electrode 40 exist, the area of ​​the insulating layer 11 is larger than the total area of ​​the coil 20, the first external electrode 30, and the second external electrode 40.

[0107] By adopting such a method, since the total area of ​​the coil 20, the first external electrode 30, and the second external electrode 40 on the cross section, that is, the area of ​​the conductor part, can be reduced, it is possible to suppress the reduction of Q and SRF at high frequencies caused by eddy current loss caused by magnetic flux incident on the conductor. In addition, the area of ​​the insulating layer 11 does not need to be larger than the above total area in all cross sections, and it only needs to be larger in at least one cross section.

[0108] Fig.10 This is a perspective front view of the portion where the first external magnetic component 61, the second external magnetic component 62, and the plated layers 32 and 42 are removed from the inductor component 1. In the present disclosure, the term "front view" refers to a view of the inductor component 1 viewed from the stacking direction (W direction). Fig.10 In the embodiment, the coil wirings 21 overlap each other, and surround a portion of the insulating layer and the internal magnetic member 63. The term "overlap each other" also includes a case where the coil wirings 21 are slightly misaligned due to manufacturing differences or the like.

[0109] like Fig.10 As shown, when the blank 10 and the coil 20 are projected to the third end face 15 along the axial direction of the coil 20, the shortest distance between the internal magnetic component 63 and the coil 20, specifically, the shortest distance x between the outer circumferential surface of the internal magnetic component 63 and the inner circumferential surface of the coil 20 is greater than 10 μm and less than 20 μm. In addition, at this time, a part of the insulating layer 11 exists between the outer circumferential surface of the internal magnetic component 63 and the inner circumferential surface of the coil 20.

[0110] According to the above embodiment, since the shortest distance x is less than 20 μm, the Q value can be further improved by increasing the area of ​​the internal magnetic component 63. In addition, since the shortest distance x is greater than 10 μm, by ensuring the interval between the coil 20 and the internal magnetic component 63, short circuits and current leakage through the internal magnetic component 63 can be suppressed. In addition, since the shortest distance x is greater than 10 μm, the influence of high-frequency magnetic loss in the internal magnetic component 63 can be reduced, and the Q value can be further improved.

[0111] Preferably, the inner magnetic component 63 is present only on the inner diameter side of the coil 20 .

[0112] According to the above embodiment, the internal magnetic component 63 does not exist between the coil 20 and the first external electrode 30 and the second external electrode 40, and the reduction of the SRF can be suppressed. In addition, since the outside of the coil 20 can be integrally formed with the insulating layer 11, the strength of the inductor component 1 is enhanced. Furthermore, since the internal magnetic component 63 does not exist outside the coil 20, the diameter of the coil 20 can be increased.

[0113] Preferably, the size of the inductor component 1 in the direction perpendicular to the bottom surface 17 of the base body 10 (T direction) is larger than the size of the inductor component 1 in the axial direction (W direction) of the coil 20. In this manner, the inner diameter of the coil 20 can be increased.

[0114] In addition, the size of the inductor component 1 in the axial direction (W direction) of the coil 20 may be larger than the size of the inductor component 1 in the direction (T direction) perpendicular to the bottom surface 17 of the body 10. By adopting such a configuration, the number of turns of the coil 20 (in other words, the number of coil wirings 21) can be increased.

[0115] Preferably, when the blank 10 and the coil 20 are projected onto the third end face 15 along the axial direction of the coil 20, the internal magnetic component 63 is in a shape along the coil 20. More specifically, the outer peripheral surface of the portion of the inner diameter side of the coil 20 of the internal magnetic component 63 is in a shape corresponding to the inner peripheral surface of the coil 20. For example, the inner peripheral surface of the coil has a concave-convex shape, and the outer peripheral surface of the magnetic component has a shape along the concave-convex shape. The concave-convex shape can also be formed by the end of the coil wiring 21, in other words, the through-hole pad.

[0116] By adopting the above-described configuration, the internal magnetic member 63 can be enlarged.

[0117] (Method of Manufacturing Inductor Component 1)

[0118] Next, an example of a method for manufacturing the inductor component 1 will be described. In addition, the method for manufacturing the inductor component 1 is not limited to the following method, and other manufacturing methods may be used.

[0119] First, an insulating paste with borosilicate glass as the main component and a conductive paste with Ag as the main component are prepared. After the firing described below, the insulating paste becomes an insulating layer. After the firing described below, the conductive paste becomes a coil wiring, a through-hole wiring, and a base electrode layer according to the coating position.

[0120] Next, an insulating paste is applied by screen printing to form a portion that becomes an insulating layer.

[0121] A required amount of conductive paste is applied on the applied insulating paste by screen printing, and a portion to be a coil wiring and a base electrode layer is formed by a patterning process using photolithography.

[0122] Next, a required amount of insulating paste is applied by screen printing on the insulating paste after the conductive paste is applied and patterned, and openings are provided in the insulating paste by a patterning process using photolithography.

[0123] Next, a required amount of conductive paste is applied by screen printing on the insulating paste with the opening. At this time, the opening is filled with the conductive paste to form the portion that will become the through-hole wiring and the base electrode layer. In addition, similarly to the above, the portion that will become the coil wiring and the base electrode layer is formed by a patterning process using photolithography.

[0124] Next, a through hole for setting the internal magnetic component is provided on the inner diameter side of the coil wiring of the mother laminate using laser, sandblasting, etc. In addition, as a method for setting the through hole, a method of opening by photolithography or a method of forming a virtual conductor on the inner diameter side and opening by metal etching may also be used.

[0125] Next, the mother laminate is cut into a plurality of unfired laminates by dicing or the like. In the step of cutting the mother laminate, a portion to be the base electrode layer is exposed from the laminate on a cut surface formed by dicing.

[0126] Next, the through holes are filled with magnetic paste to form the inner magnetic member, and the end surfaces of the laminate are coated with magnetic paste to form the outer magnetic member.

[0127] Next, the unfired laminate is fired under specified conditions to obtain coil wiring, through-hole wiring, and base electrode layers from the conductive paste, the insulating layer from the insulating paste, and the internal magnetic components and external magnetic components from the magnetic paste. In this way, a green body having an insulating layer, internal magnetic components, and external magnetic components is obtained.

[0128] The green body is further subjected to barrel polishing, and then, nickel plating with a thickness of 2 μm to 10 μm and tin plating with a thickness of 2 μm to 10 μm are formed by barrel plating on the portion where the base electrode layer is exposed from the green body to form a plated film layer. Through the above steps, the inductor component 1 is completed.

[0129] In addition, in the above, the unfired laminate is fired, but instead of this, the mother laminate may be fired after the through hole is provided, and then the through hole is filled with magnetic slurry to form the internal magnetic component. In this case, after the magnetic slurry is filled, the laminate is cut into layers by thermosetting or the like. In this case, the internal magnetic component and the external magnetic component can be formed by thermosetting the magnetic slurry.

[0130] (Second Embodiment)

[0131] Fig.11 It is a cross-sectional view taken along the WT direction of the inductor component 1A according to the second embodiment.

[0132] The shapes of the first and second external magnetic components of the inductor component 1A are different from those of the inductor component 1 of the first embodiment. This difference will be described below. The other structures are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment are used and their description is omitted.

[0133] The first external magnetic component 61 of the inductor component 1A extends on the bottom surface 17 and the top surface 18 of the blank 10, respectively, on the insulating layer 11. That is, the extension portion 64 of the first external magnetic component 61 exists on the third end surface 15 side of the bottom surface 17 and the top surface 18. The second external magnetic component 62 extends on the bottom surface 17 and the top surface 18 of the blank 10, respectively, on the insulating layer 11. That is, the extension portion 64 of the second external magnetic component 62 exists on the fourth end surface 16 side of the bottom surface 17 and the top surface 18.

[0134] As described above, the close contact between the first external magnetic member 61 , the second external magnetic member 62 and the blank 10 is improved.

[0135] In addition, the first external magnetic component 61 may also extend on the insulating layer 11 of at least one of the bottom surface 17, top surface 18, first end surface 13 and second end surface 14 of the blank 10, and the second external magnetic component 62 may also extend on the insulating layer 11 of at least one of the bottom surface 17, top surface 18, first end surface 13 and second end surface 14 of the blank 10.

[0136] (Method of Manufacturing Inductor Component 1A)

[0137] Next, an example of a method for manufacturing the inductor component 1A will be described. Note that the method for manufacturing the inductor component 1A is not limited to the following method, and other manufacturing methods may be used.

[0138] The inductor component 1A is manufactured in the same manner as the inductor component 1 until the mother laminate is formed.

[0139] Next, through holes 600 for installing the internal magnetic component are provided on the inner diameter side of the coil wiring of the mother laminate using laser, sandblasting or the like.

[0140] Next, the mother laminate is cut into a plurality of unfired laminates 100 by dicing or the like. In the step of cutting the mother laminate, a portion to be the base electrode layer is exposed from the laminate 100 on a cut surface formed by dicing.

[0141] Next, the through holes are filled with magnetic slurry. Fig. 12A , Fig. 12B The filling method is described.

[0142] Fig. 12AThis is an explanatory diagram for explaining a method of filling the through-hole 600 of the inductor component 1A after the dicing step with the magnetic paste 610 and providing the extending portion 640 to be the extending portion 64 . Fig. 12B This is an explanatory diagram for explaining the state where the through hole 600 is filled with magnetic paste 610 and the above-mentioned extension portion 640 is provided. Fig. 12A , Fig. 12B In FIG. 1 , the laminate 100 is described as a schematic cross-sectional view in the WT direction. The laminate 100 includes a coil portion 200 , a green body portion 110 , and a through hole 600 . The coil portion 200 and the green body portion 110 become the coil 20 and the green body 10 , respectively, after being fired.

[0143] like Fig. 12A As shown, magnetic paste 610 is placed on both end surfaces of the stacked body 100 , and is sandwiched and pressed from both sides by a pair of dies 700 .

[0144] like Fig. 12B As shown, by pressing, a portion of the magnetic slurry 610 is filled into the through hole 600 to form an internal magnetic component, and a portion of the magnetic slurry 610 is left on the end surface of the stack to form an external magnetic component, and a portion of the magnetic slurry 610 is inserted into the opening side of the gap between adjacent stacks 100 to form an extension portion 640.

[0145] Next, after removing the mold 700 , the unfired laminated body 100 is fired under predetermined conditions, and then the extending portion 640 is divided into two to divide the adjacent laminated bodies. At this time, the two divided portions of the extending portion 640 form the extending parts 64 , respectively.

[0146] In this manner, the green body 10 including the insulating layer 11 , the inner magnetic member 63 , the first outer magnetic member 61 , and the second outer magnetic member 62 is obtained.

[0147] Next, similarly to the first embodiment, the base body 10 is barrel polished, and the plated film layers 32 and 42 are provided by barrel plating, thereby completing the inductor component 1A.

[0148] In addition, the present disclosure is not limited to the above-mentioned first embodiment and second embodiment, and design changes can be made within the scope that does not depart from the gist of the present disclosure.

[0149] Each material is not limited to the above-exemplified structure, and a known structure can be used.

[0150] The step of filling the through-holes with the magnetic slurry may be performed before the mother laminate is cut by dicing, etc. Alternatively, the mother laminate may be completely cut after the magnetic slurry is filled in a state where only a part of the mother laminate is cut.

[0151] In the above-mentioned embodiment, the first external electrode 30 and the second external electrode 40 are L-shaped, but they may be five-sided electrodes, for example. In other words, the first external electrode 30 may be provided on the entire surface of the second end surface 14, the third end surface 15, the fourth end surface 16, the bottom surface 17, and a part of the top surface 18, and the second external electrode 40 may be provided on the entire surface of the first end surface 13, the third end surface 15, the fourth end surface 16, the bottom surface 17, and a part of the top surface 18.

Claims

1. A high-frequency inductor component, comprising: green body; A coil of a spiral structure is disposed in the blank and wound along the axial direction; and The first external electrode and the second external electrode are disposed on the above-mentioned body and are electrically connected to the above-mentioned coil. The blank includes a first end face and a second end face that are opposite to each other, and a bottom face connected between the first end face and the second end face. The first external electrode is formed from the first end surface to the bottom surface, The second external electrode is formed from the second end surface to the bottom surface, The green body has an insulating layer made of non-magnetic material, and an inner magnetic component and an outer magnetic component made of magnetic material. The internal magnetic component is located at the position where the coil is located in the axial direction. The external magnetic member is located outside the coil in the axial direction. The inductance value is below 100nH. The coil has a plurality of coil wirings, which are arranged in the axial direction and are respectively wound in a direction perpendicular to the axial direction. In at least one cross section perpendicular to the axial direction and where the coil wiring, the first external electrode and the second external electrode exist, the area of ​​the insulating layer is larger than the total area of ​​the coil wiring, the first external electrode and the second external electrode.

2. The high-frequency inductor component according to claim 1, wherein: The above coil contains Ag, The insulating layer includes glass.

3. The high-frequency inductor component according to claim 1 or 2, wherein: The axial direction is parallel to the bottom surface.

4. The high-frequency inductor component according to claim 3, wherein: The size of the inductor component in a direction parallel to the bottom surface and perpendicular to the axial direction is less than 0.7 mm, The size of the inductor component in the axial direction is smaller than 0.4 mm.

5. The high-frequency inductor component according to claim 3, wherein: The size of the inductor component in a direction perpendicular to the bottom surface is larger than the size of the inductor component in the axial direction.

6. The high-frequency inductor component according to claim 4, wherein: The size of the inductor component in a direction perpendicular to the bottom surface is larger than the size of the inductor component in the axial direction.

7. The high-frequency inductor component according to claim 1 or 2, wherein: The internal magnetic component and the external magnetic component are composites of resin and the magnetic material.

8. The high-frequency inductor component according to claim 1 or 2, wherein: The magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 μm or less.

9. The high-frequency inductor component according to claim 1 or 2, wherein: The first external electrode and the second external electrode are buried in the body.

10. The high-frequency inductor component according to claim 1 or 2, wherein: When the above-mentioned blank and the above-mentioned coil are projected in the above-mentioned axial direction, The shortest distance between the internal magnetic member and the coil is greater than or equal to 10 μm and less than or equal to 20 μm.

11. The high-frequency inductor component according to claim 1 or 2, wherein: The internal magnetic component is present only on the inner diameter side of the coil.

12. The high-frequency inductor component according to claim 1 or 2, wherein: The blank includes a third end face and a fourth end face, the third end face and the fourth end face are perpendicular to the first end face and the bottom face, and are opposite to each other. The axial direction is parallel to the bottom surface and intersects with the third end surface and the fourth end surface. The external magnetic component constitutes the third end surface and the fourth end surface.

13. The high-frequency inductor component according to claim 1 or 2, wherein: The axial direction is parallel to the bottom surface and the first end surface. The blank includes a top surface opposite to the bottom surface, The external magnetic component extends on the insulating layer on at least one of the bottom surface, the top surface, the first end surface, and the second end surface.

14. The high-frequency inductor component according to claim 1 or 2, wherein: When the blank and the coil are projected in the axial direction, the internal magnetic component follows the shape of the coil.

15. The high-frequency inductor component according to claim 1 or 2, wherein: The self-resonance frequency is above 1 GHz.

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