Multi-dimensional force and torque sensor arm structure and multi-dimensional force and torque sensor

Abstract

The present invention relates to a multi-dimensional force and torque sensor arm structure and a multi-dimensional force and torque sensor. The multi-dimensional force and torque sensor arm structure includes an outer ring, an inner ring and at least two strain beams. The inner ring is located inside the outer ring and is coaxially arranged with the outer ring. At least two strain beams are evenly spaced along the circumference of the inner ring. Each strain beam includes a main beam and a secondary beam arranged crosswise with each other. Both ends of the secondary beam are connected to the inner wall of the outer ring. Both ends of the main beam are respectively connected to the middle position of the secondary beam and the outer wall of the inner ring. A first strain gauge is arranged on the main beam. A second strain gauge and a third strain gauge are arranged at intervals on the secondary beam. The first strain gauge and the second strain gauge are respectively located on both sides of the main beam. The first strain gauge, the second strain gauge and the third strain gauge are all located on the same side of the inner ring. In the multi-dimensional force and torque sensor arm structure, the production of all the first strain gauges, the second strain gauges and the third strain gauges can be completed at one time, thereby improving the processing efficiency of the multi-dimensional force and torque sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of torque sensors, and in particular to a multi-dimensional force and torque sensor arm structure and a multi-dimensional force and torque sensor. Background Art

[0002] As a torque detection device, torque sensors can be used in applications such as robot joints, medical equipment, and military equipment for real-time detection of force and torque. In particular, multi-dimensional force and torque composite sensors are mostly used in various robot (mechanical arm) force control systems or other devices or systems that need to detect force values. They are used to measure forces in three directions of the X, Y, and Z axes, as well as torques around the X, Y, and Z axes. The currently commonly used technology requires strain gauges to be set on multiple different surfaces of the strain beam at the same time, and they are bonded to the strain beam with organic glue to achieve the measurement of force or torque in different dimensions. The pasting process requires precise positioning, surface treatment, compaction, dry glue, and other processes that require fine operation. It is also inconvenient to achieve automation, which greatly affects the production efficiency of multi-dimensional force and torque composite sensors. Summary of the invention

[0003] Based on this, it is necessary to provide a multi-dimensional force and torque sensor arm structure and a multi-dimensional force and torque sensor with higher processing efficiency to address the problem of low processing efficiency of traditional multi-dimensional force and torque sensors.

[0004] A multi-dimensional force and torque sensor arm structure comprises an outer ring, an annular inner ring and at least two strain beams;

[0005] The inner ring is located inside the outer ring and is coaxially arranged with the outer ring;

[0006] The at least two strain beams are evenly spaced along the circumference of the inner ring; each strain beam comprises a main beam and a secondary beam arranged crosswise with each other; both ends of the secondary beam are connected to the inner wall of the outer ring; both ends of the main beam are respectively connected to the middle position of the secondary beam and the outer wall of the inner ring;

[0007] The main beam is provided with a first strain gauge; the secondary beam is provided with a second strain gauge and a third strain gauge at intervals; the first strain gauge and the second strain gauge are respectively located on both sides of the main beam;

[0008] Wherein, the first strain gauge, the second strain gauge and the third strain gauge are all located on the same side of the inner ring.

[0009] In some embodiments, the first strain gauge, the second strain gauge, and the third strain gauge are located in the same plane.

[0010] In some embodiments, the outer ring, the inner ring, the main beam and the secondary beam are an integrally formed structure;

[0011] The outer ring has a first surface on the same side as the first strain gauge; the inner ring has a second surface on the same side as the first strain gauge; the main beam is provided with a side surface of the first strain gauge, the auxiliary beam is provided with a side surface of the second strain gauge, and the first surface and the second surface are flush with each other.

[0012] In some of the embodiments, each of the main beams and the secondary beams connected thereto are arranged vertically; and / or

[0013] A flexible gap is formed between a surface of the auxiliary beam on one side facing away from the inner ring and an inner wall of the outer ring.

[0014] In some embodiments, the outer ring and the inner ring are both plate-like structures; along the central axis direction of the inner ring, the size of the main beam and the size of the secondary beam are simultaneously smaller than the size of the outer ring and the size of the inner ring.

[0015] In some embodiments, the surface of the main beam facing away from the first strain gauge is a first surface; a first groove recessed inwards is provided at a position where the first surface is aligned with the first strain gauge;

[0016] A side surface of the sub-beam facing the outer ring and a side surface away from the outer ring are respectively defined as a second surface and a third surface; positions of the second surface aligned with the second strain gauge and the third strain gauge are respectively provided with a second groove recessed inwardly; positions of the third surface aligned with the second strain gauge and the third strain gauge are respectively provided with a third groove recessed inwardly.

[0017] In some embodiments, the inner ring is a circular plate-like structure; the extension direction of the main beam is consistent with the diameter direction of the inner ring.

[0018] In some embodiments, the first strain gauge, the second strain gauge and the third strain gauge are electrically connected to a control chip in the multi-dimensional force and torque sensor through a flip-chip process.

[0019] In some embodiments, the first strain gauge is a nano-thin film strain resistor formed on the main beam by sputtering thin film deposition technology; the second strain gauge and the third strain gauge are both nano-thin film strain resistors formed on the sub-beam by sputtering thin film deposition technology; and / or

[0020] The strain beam is made of precipitated martensitic stainless steel.

[0021] A multi-dimensional force and torque sensor, characterized by comprising the multi-dimensional force and torque sensor force arm structure as described above.

[0022] The above-mentioned multi-dimensional force and torque sensor arm structure and multi-dimensional force and torque sensor, because the first strain gauge, the second strain gauge and the third strain gauge used to measure the force values ​​or torques of different dimensions are located on the same side of the inner ring, during the processing of the multi-dimensional force and torque sensor, all strain gauges can be made on the strain beam at one time, which is conducive to improving the processing efficiency of the multi-dimensional force and torque sensor. Furthermore, the first strain gauge, the second strain gauge and the third strain gauge are all arranged at a position with a larger processing space, making the production of the strain gauge easier and faster, further improving the processing efficiency of the multi-dimensional force and torque sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of a force arm structure of a multi-dimensional force and torque sensor in one embodiment of the present invention;

[0024] Figure 2 It is a structural schematic diagram of a force arm structure of a multi-dimensional force and torque sensor in another embodiment of the present invention;

[0025] Figure 3 for Figure 1 A rear view of the force arm structure of the multi-dimensional force and torque sensor shown;

[0026] Figure 4 for Figure 3 AA cross-sectional view of the arm structure of the multi-dimensional force and torque sensor shown;

[0027] Figure 5 for Figure 3 The BB partial cross-sectional view of the arm structure of the multi-dimensional force and torque sensor shown;

[0028] Figure 6 for Figure 3 The CC partial cross-sectional view of the force arm structure of the multi-dimensional force and torque sensor is shown.

[0029] Explanation of reference numerals: 100, force arm structure of multi-dimensional force and torque sensor; 110, outer ring; 120, inner ring; 130, strain beam; 131, main beam; 1311, first surface; 1312, first groove; 132, secondary beam; 1321, second surface; 1322, third surface; 1323, second groove; 1324, third groove; 141, first strain gauge; 142, second strain gauge; 143, third strain gauge; 150, flexible gap. DETAILED DESCRIPTION

[0030] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Preferred embodiments of the present invention are provided in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0032] When describing positional relationships, unless otherwise specified, when an element is referred to as being "on" another element, it can be directly on the other element or there can be an intermediate element. It is also understood that when an element is referred to as being "between" two elements, it can be the only one between the two elements, or there can be one or more intermediate elements.

[0033] In the case of using “including”, “having”, and “comprising” described herein, another component may be added unless a clear limiting term such as “only”, “consisting of”, etc. is used. Unless mentioned otherwise, a term in the singular form may include a plural form and should not be understood as being one in number.

[0034] In addition, the drawings are not drawn to a 1:1 scale, and the relative sizes of the elements in the drawings are drawn only as examples and not necessarily according to the true scale.

[0035] As described in the background technology, in traditional multi-dimensional force and torque sensors, in order to measure the force or torque of different dimensions, it is necessary to make corresponding strain gauges on different surfaces of the strain beam. Therefore, it is necessary to make multiple strain gauges during the processing of the multi-dimensional force and torque sensor. Moreover, based on the strain beam and torque sensor arm structure, some strain gauges are likely to be set in a relatively narrow position, which not only increases the difficulty of making the strain gauges, but also affects the production speed of the strain gauges. Therefore, the processing efficiency of traditional multi-dimensional force and torque sensors is low.

[0036] Based on the above reasons, the present invention discloses a multi-dimensional force and torque sensor arm structure and a multi-dimensional force and torque sensor. The multi-dimensional force and torque sensor includes a multi-dimensional force and torque sensor arm structure.

[0037] Figure 1 and Figure 2The structural schematic diagrams of the arm structures of the multi-dimensional force and torque sensors in the first embodiment and the second embodiment of the present invention are respectively shown. For the convenience of description, the drawings only show the structures related to the embodiments of the present invention.

[0038] See also Figure 1 and Figure 2 In a preferred embodiment of the present invention, a multi-dimensional force and torque sensor arm structure 100 includes an outer ring 110, an annular inner ring 120 and at least two strain beams 130.

[0039] The inner ring 120 is located inside the outer ring 110 and is coaxially arranged with the outer ring 110. Specifically, the outer ring 110 is concentrically arranged with the inner ring 120. The structure of the outer ring 110 and the structure of the inner ring 120 may be the same or different, and the structure may be a plate-like or cylindrical structure with the same inner wall shape and outer wall shape, or a plate-like or cylindrical structure with different inner wall shapes and outer wall shapes.

[0040] At least two strain beams 130 are evenly spaced along the circumference of the inner ring 120. Each strain beam 130 includes a main beam 131 and a sub-beam 132 that are arranged crosswise. The cross-sectional shape of the main beam 131 along the vertical direction and the cross-sectional shape of the sub-beam 132 along the vertical direction can be rectangular, trapezoidal, a special shape with a side line formed by curves, T-shaped, U-shaped, etc.

[0041] Both ends of the sub-beam 132 are connected to the inner wall of the outer ring 110. Both ends of the main beam 131 are connected to the middle position of the sub-beam 132 and the outer wall of the inner ring 120 respectively. Thus, the outer ring 110 is fixedly connected to the inner ring 120 through the strain beam 130. The main beam 131, the sub-beam 132, the outer ring 110 and the inner ring 120 can be fixedly connected by welding, screwing, riveting, etc., or can be integrally formed by machining, casting, etc. In the actual application of the multi-dimensional force and torque sensor, after the rotation load is input to the outer ring 110 or the inner ring 120, there will be a tendency for the outer ring 110 and the inner ring 120 to rotate relative to each other, so as to drive the main beam 131 and the sub-beam 132 to strain.

[0042] It should be noted that, in each strain beam 130 , the main beam 131 and the auxiliary beam 132 are cross-arranged with each other, which means that the main beam 131 and the auxiliary beam 132 are vertically arranged, or the main beam 131 and the auxiliary beam 132 have an angle less than 90 degrees.

[0043] Specifically, the strain beam 130 is made of precipitated martensitic stainless steel to improve the fatigue resistance and corrosion resistance of the strain beam 130 , effectively extending the service life of the strain beam 130 , thereby extending the service life of the multi-dimensional force and torque sensor.

[0044] A first strain gauge 141 is provided on each main beam 131. A second strain gauge 142 and a third strain gauge 143 are provided on each sub-beam 132 at intervals. In each strain beam 130, the first strain gauge 141 and the second strain gauge 142 are respectively located on both sides of the corresponding main beam 131. Among them, the first strain gauge 141 is used to detect the first strain information of the corresponding position on the main beam 131, and the second strain gauge 142 and the third strain gauge 143 are used to detect the second strain information and the third strain information of the corresponding position on the sub-beam 132, respectively. In a multi-dimensional force and torque sensor, the torque value or force value of different dimensions of the part to be detected is obtained through the first strain information, the second strain information and the third strain information, for example, the force values ​​on the X, Y, and Z axes are respectively obtained through the first strain information, the second strain information and the third strain information, or the torque values ​​around the X, Y, and Z axes are respectively obtained.

[0045] Specifically, each main beam 131 and the sub-beam 132 connected thereto are arranged vertically, so that the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 can simultaneously measure the force values ​​in the mutually perpendicular X direction, Y direction and Z direction, or simultaneously measure the torque values ​​around the X axis, Y axis and Z axis, so as to facilitate the subsequent measurement work of the multi-dimensional force and torque sensor and improve the measurement accuracy.

[0046] Specifically, a flexible gap 150 is formed between the side surface of the sub-beam 132 facing away from the inner ring 120 and the inner wall of the outer ring 110. The provision of the flexible gap 150 makes it easier for the sub-beam 132 to be strained and deformed, so that the subsequent measurement of the torque value or the torsional force is easier and more sensitive, thereby improving the measurement sensitivity and measurement accuracy of the multi-dimensional force and torque sensor.

[0047] The first strain gauge 141, the second strain gauge 142, and the third strain gauge 143 are all located on the same side of the inner ring 120. That is, the first strain gauge 141, the second strain gauge 142, and the third strain gauge 143 are located on the same side of the strain beam 130, so the first strain gauge 141, the second strain gauge 142, and the third strain gauge 143 have the same orientation. Specifically, the first strain gauge 141, the second strain gauge 142, and the third strain gauge 143 are all perpendicular to the central axis of the inner ring 120.

[0048] In the above-mentioned multi-dimensional force and torque sensor, since the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 used to detect strain information of different dimensions are all located on the same side of the strain beam 130, the production of all strain gauges can be completed on the strain beam 130 at one time. Compared with the traditional multi-dimensional force and torque sensor processing, which requires multiple strain gauges to be produced on different surfaces of the strain beam 130, the above-mentioned method of producing all strain gauges at one time can greatly shorten the strain gauge production time, thereby effectively improving the processing efficiency of the multi-dimensional force and torque sensor.

[0049] Furthermore, since the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are located on the same side of the inner ring 120, the positions of the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are relatively wide, making it easier and faster to manufacture each strain gauge on the strain beam 130, further improving the processing efficiency of the multi-dimensional force and torque sensor.

[0050] In some embodiments, the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are located in the same plane. Thus, the surface of one side of the main beam 131 provided with the first strain gauge 141 is flush with the surface of one side of the secondary beam 132 provided with the second strain gauge 142 and the third strain gauge 143, and the manufacturing quality of all strain gauges can be ensured in the process of completing the manufacturing of all strain gauges at one time, so that the above-mentioned multi-dimensional force torque sensor takes into account both high processing efficiency and product quality.

[0051] Further, in some embodiments, the outer ring 110, the inner ring 120, the main beam 131 and the auxiliary beam 132 are an integrally formed structure. The outer ring 110 has a first surface on the same side as the first strain gauge 141. The inner ring 120 has a second surface on the same side as the first strain gauge 141. The main beam 131 is provided with a side surface of the first strain gauge 141, the auxiliary beam 132 is provided with a side surface of the second strain gauge 142, and the first surface and the second surface are flush with each other.

[0052] The outer ring 110, the inner ring 120, the main beam 131 and the auxiliary beam 132 are integrally formed, which not only makes the connection between the main beam 131 and the auxiliary beam 132, between the main beam 131 and the inner ring 120, and between the auxiliary beam 132 and the outer ring 110 more solid, but also improves the structural stability of the multi-dimensional force and torque sensor arm structure 100, thereby making the multi-dimensional force and torque sensor have a longer service life and higher reliability. Furthermore, since the main beam 131 is provided with a side surface of the first strain gauge 141, the auxiliary beam 132 is provided with a side surface of the second strain gauge 142, the first surface and the second surface are flush with each other, so during processing, while ensuring that the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are located in the same plane, the processing of the multi-dimensional force and torque sensor arm structure 100 can also be simplified, which is conducive to further improving the processing efficiency of the multi-dimensional force and torque sensor.

[0053] Please also read Figure 3 and Figure 4In some embodiments, the outer ring 110 and the inner ring 120 are both plate-shaped structures. Along the central axis of the inner ring 120, the size of the main beam 131 and the size of the sub-beam 132 are both smaller than the size of the outer ring 110 and the size of the inner ring 120. Therefore, the thickness of the strain beam 130 is smaller than the thickness of the outer ring 110 and the thickness of the inner ring 120, so compared with the outer ring 110 and the inner ring 120, the main beam 131 and the sub-beam 132 are more likely to be strained, which is conducive to improving the sensitivity of the multi-dimensional force and torque sensor.

[0054] See also Figures 3 to 6 In some embodiments, the surface of the main beam 131 facing away from the first strain gauge 141 is a first surface 1311. A first groove 1312 is provided inwardly concave at a position where the first surface 1311 is aligned with the first strain gauge 141. A surface of the side of the sub-beam 132 facing the outer ring 110 and a surface of the side facing away from the outer ring 110 are defined as 1321 and a third surface 1322, respectively. A second groove 1323 is provided inwardly concave at a position where the second surface 1321 is aligned with the second strain gauge 142 and the third strain gauge 143, respectively. A third groove 1324 is provided inwardly concave at a position where the third surface 1322 is aligned with the second strain gauge 142 and the third strain gauge 143, respectively. Specifically, the second groove 1323 and the third groove 1324 are both located on the surface of the sub-beam 132 facing away from the second strain gauge 142, so as to simplify the processing of the sub-beam 132.

[0055] The setting of the first groove 1312 can reduce the axial dimension of the position where the first strain gauge 141 is provided on the main beam 131, and the setting of the second groove 1323 and the third groove 1324 can respectively reduce the dimension of the position where the second strain gauge 142 and the third strain gauge 143 are provided on the sub-beam 132 along the axial direction of the outer ring 110 to the inner ring 120, so as to ensure that the position where the first strain gauge 141 is provided on the main beam 131 is more likely to be strained in the first direction, and the two ends of the sub-beam 132 are strained in the second direction and the third direction perpendicular to the first direction, respectively, which is conducive to improving the sensitivity of the multi-dimensional force and torque sensor.

[0056] In the above embodiment, it should be noted that the axial dimension of the main beam 131 refers to the thickness of the main beam 131 along the central axis of the inner ring 120, and the dimension of the sub-beam 132 along the direction from the outer ring 110 to the inner ring 120 refers to the dimension of the sub-beam 132 in the direction perpendicular to the central axis of the inner ring 120.

[0057] Specifically, the first groove 1312, the second groove 1323 and the third groove 1324 are rectangular grooves or trapezoidal grooves. In the longitudinal direction of the auxiliary beam 132, the bottom wall thickness of the second groove 1323 and the bottom wall thickness of the third groove 1324 gradually decrease in the direction pointing to the main beam 131. In the longitudinal direction of the main beam, the bottom wall thickness of the first groove 1312 gradually decreases in the direction pointing to the auxiliary beam 132. With such an arrangement, the main beam 131 is more likely to be strained in the first direction at the location where the first groove 1312 is provided, and the auxiliary beam 132 is more likely to be strained at the locations where the second groove 1323 and the third groove 1324 are provided, respectively, so that the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are more likely to detect strain information, further improving the measurement sensitivity of the multi-dimensional force and torque sensor.

[0058] In some embodiments, the inner ring 120 is a circular plate-like structure. The extension direction of the main beam 131 is consistent with the diameter direction of the inner ring 120. Therefore, the main beam 131 extends along the diameter direction of the inner ring 120 to ensure that the main beam 131 can be strained in a timely and accurate manner when the outer ring 110 and the inner ring 120 rotate relative to each other, so as to improve the measurement sensitivity and measurement accuracy of the multi-dimensional force and torque sensor.

[0059] In some embodiments, the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 are all electrically connected to the control chip in the multi-dimensional force and torque sensor through a flip-chip process. The flip-chip process refers to a relatively mature flip-chip process in the chip packaging industry. The adoption of the flip-chip process allows the first strain gauge 141, the second strain gauge 142 and the third strain gauge 143 to be electrically connected to the control chip without welding or connecting a large number of wires, making it easier to operate and more easily automated, which is conducive to further improving the processing efficiency of the multi-dimensional force and torque sensor.

[0060] In some embodiments, the first strain gauge 141 is a nano-thin film strain resistor formed on the main beam 131 by sputtering thin film deposition technology. The second strain gauge 142 and the third strain gauge 143 are both nano-thin film strain resistors formed on the sub-beam 132 by sputtering thin film deposition technology. Therefore, by sputtering thin film deposition technology, the bonding force between the first strain gauge 141 and the main beam 131 is greatly increased, and the bonding force between the second strain gauge 142 and the third strain gauge 143 and the sub-beam 132 is also increased, which reduces the probability of the strain gauge detaching from the strain beam 130, and effectively extends the service life of the multi-dimensional force and torque sensor. Moreover, the use of the above-mentioned sputtering thin film deposition technology can make the multi-dimensional force and torque sensor have the advantages of low temperature coefficient, no creep, small hysteresis and better overall accuracy, and can be suitable for higher temperature working environment.

[0061] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0062] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A multi-dimensional force and torque sensor arm structure, characterized in that: It includes an outer ring, an inner ring in an annular shape and at least two strain beams; The inner ring is located inside the outer ring and is coaxially arranged with the outer ring; The at least two strain beams are evenly spaced along the circumference of the inner ring; each strain beam comprises a main beam and a secondary beam arranged crosswise with each other; both ends of the secondary beam are connected to the inner wall of the outer ring; both ends of the main beam are respectively connected to the middle position of the secondary beam and the outer wall of the inner ring; The main beam is provided with a first strain gauge; the secondary beam is provided with a second strain gauge and a third strain gauge at intervals; the second strain gauge and the third strain gauge are respectively located on both sides of the main beam; Wherein, the first strain gauge, the second strain gauge and the third strain gauge are all located on the same side of the inner ring; The surface of the main beam facing away from the first strain gauge is the first surface; the first surface is provided with a first groove recessed inwardly at a position aligned with the first strain gauge; the surface of the side of the sub-beam facing the outer ring and the surface of the side away from the outer ring are respectively defined as the second surface and the third surface; the second surface is provided with a second groove recessed inwardly at a position aligned with the second strain gauge and the third strain gauge; the third surface is provided with a third groove recessed inwardly at a position aligned with the second strain gauge and the third strain gauge; The first groove, the second groove and the third groove are rectangular grooves or trapezoidal grooves; in the longitudinal direction of the secondary beam, the bottom wall thickness of the second groove and the bottom wall thickness of the third groove gradually decrease along the direction pointing to the main beam; in the longitudinal direction of the main beam, the bottom wall thickness of the first groove gradually decreases along the direction pointing to the secondary beam.

2. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: The first strain gauge, the second strain gauge and the third strain gauge are located in the same plane.

3. The multi-dimensional force and torque sensor arm structure according to claim 2 is characterized in that: The outer ring, the inner ring, the main beam and the auxiliary beam are an integrally formed structure; The outer ring has a first surface on the same side as the first strain gauge; the inner ring has a second surface on the same side as the first strain gauge; the main beam is provided with a side surface of the first strain gauge, the auxiliary beam is provided with a side surface of the second strain gauge, and the first surface and the second surface are flush with each other.

4. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: Each of the main beams and the secondary beams connected thereto are arranged vertically; and / or A flexible gap is formed between a surface of the auxiliary beam on one side facing away from the inner ring and an inner wall of the outer ring.

5. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: The outer ring and the inner ring are both plate-like structures; along the central axis direction of the inner ring, the size of the main beam and the size of the secondary beam are both smaller than the size of the outer ring and the size of the inner ring.

6. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: The inner ring is a circular plate-like structure; the extension direction of the main beam is consistent with the diameter direction of the inner ring.

7. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: The first strain gauge, the second strain gauge and the third strain gauge are all electrically connected to the control chip in the multi-dimensional force and torque sensor through a flip-chip process.

8. The multi-dimensional force and torque sensor arm structure according to claim 1, characterized in that: The first strain gauge is a nano-thin film strain resistor formed on the main beam by sputtering thin film deposition technology; the second strain gauge and the third strain gauge are both nano-thin film strain resistors formed on the sub-beam by sputtering thin film deposition technology; and / or The strain beam is made of precipitated martensitic stainless steel.

9. A multi-dimensional force and torque sensor, characterized in that: It comprises a multi-dimensional force and torque sensor arm structure as described in any one of claims 1 to 8.

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