A symmetrical double-drum structure photolithography device

Abstract

The present invention discloses a symmetrical double-drum structure photolithography device, comprising a base, a mounting frame is arranged on the base, a roller is arranged on the mounting frame, a fixed plate is arranged on the mounting frame, a roller structure and a pressure plate structure are arranged on the fixed plate, the roller structure and the pressure plate structure are arranged above the roller, the top of the fixed plate is connected to a plate delivery platform through a sliding structure, a conveying structure for conveying a plate is arranged on the plate delivery platform, and a scanning platform for scanning a plate is arranged on the base. The present invention adopts the symmetrical double-drum structure photolithography device of the above structure, which can solve the problem of low efficiency of existing photolithography plate making.

Description

Technical Field

[0001] The present invention relates to the technical field of photolithography machines, and in particular to a photolithography machine device with a symmetrical double-drum structure. Background Art

[0002] The photolithography machine is one of the main production equipment for semiconductor manufacturing, and it is also the core technology machine that determines the level of the entire semiconductor production process. The photolithography machine is also known as: mask alignment exposure machine, exposure system, photolithography system, etc. It is the core equipment for chip manufacturing. It uses a technology similar to photo printing to print the fine patterns on the mask plate onto the silicon wafer through light exposure. Photolithography machines are generally divided into three types according to the ease of operation: manual, semi-automatic and fully automatic. Among them, fully automatic means that everything from the upper and lower plates of the substrate to the exposure time and cycle are controlled by programs. This production method can meet the factory's needs for processing volume. The photolithography platemaking in the prior art usually uses a vacuum adsorption drum, which can only process one plate at a time. The number of plates made is low, the efficiency of the upper and lower plates is affected, and then the efficiency of platemaking is affected. If the platemaking efficiency does not meet the requirements, it will affect the progress of the entire work. Summary of the invention

[0003] The purpose of the present invention is to provide a symmetrical double-drum structure photolithography device to solve the problem of low efficiency of existing photolithography plate making.

[0004] To achieve the above-mentioned purpose, the present invention provides a symmetrical double-drum structure lithography machine device, including a base, a mounting frame is provided on the base, a drum is provided on the mounting frame, a fixed plate is provided on the mounting frame, a roller structure and a pressure plate structure are provided on the fixed plate, the roller structure and the pressure plate structure are arranged above the drum, the top of the fixed plate is connected to a plate feeding platform through a sliding structure, a conveying structure for conveying a plate is provided on the plate feeding platform, and a scanning platform for scanning the plate is provided on the base.

[0005] Preferably, the roller is a vacuum adsorption drum, and two rollers are provided. The two rollers are symmetrically arranged, and two roller structures and a pressure plate structure are arranged above each roller, and the pressure plate structure is arranged in the middle of the two roller structures.

[0006] Preferably, the drum is rotatably connected to the mounting frame via a rotating shaft, a rotating wheel 1 is provided on the rotating shaft, a transmission motor is provided on the base, a rotating wheel 2 is provided on the transmission motor, and the rotating wheel 2 is transmission-connected to the rotating wheel 1 via a belt.

[0007] Preferably, the roller structure includes a pressure arm 1, both ends of which are connected to the cylinder rod of a cylinder 1, the cylinder 1 is arranged on a fixed plate, and a roller is rotatably arranged at the bottom end of the pressure arm 1, and the roller is rotatably connected to the pressure arm 1.

[0008] Preferably, the pressure plate structure includes a second pressure arm, both ends of which are connected to the cylinder rod of a second cylinder, the second cylinder is arranged on a fixed plate, and a pressure plate is fixedly arranged at the bottom end of the second pressure arm.

[0009] Preferably, the sliding structure includes a slider, sliding plates are provided at both ends of the plate feeding platform, the slider is arranged on the sliding plate, a slideway adapted to the slider is provided at the top of the fixed plate, the slider is arranged on the slideway and is slidably connected to the slideway.

[0010] Preferably, a rotating motor is arranged on the sliding plate at one end of the plate sending platform, a gear 1 is arranged on the rotating motor, the plate sending platform is rotatably connected to the sliding plate through a rotating column, a gear 2 is arranged at one end of the rotating column, and the rotating motor is transmission-connected to the rotating column through gear 1 and gear 2.

[0011] Preferably, the conveying structure includes a rotating rod, which is arranged on both sides of the plate sending platform. The rotating rod is rotatably connected to the plate sending platform, and a plurality of rotating wheels are fixedly arranged on the rotating rod. The rotating wheels on both sides of the plate sending platform are connected through a conveyor belt transmission, and one end of the rotating rod is connected to a conveying motor for driving the rotating rod to rotate.

[0012] Preferably, a track is provided on the base, a slide groove matched with the track is provided at the bottom end of the scanning platform, the track is arranged in the slide groove, and the scanning platform is slidably connected to the track.

[0013] Therefore, the present invention adopts the symmetrical double-drum structure of the above-mentioned structure. The double drum can be used to process two groups of plates, which not only saves time, but also improves the efficiency of upper and lower plates, doubles the number of plate making, and greatly improves the plate making efficiency. The rotating wheel 2 on the transmission motor drives the rotating wheel 1 to rotate through the belt, and then drives the drum to rotate. The cylinder 1 can drive the pressure arm 1 to rise and fall. The plate can be transported under the action of the roller and the drum, making the transportation of the plate more convenient. The cylinder 2 can drive the pressure plate to rise or fall, and the plate can be fixed by the mutual cooperation between the pressure plate and the drum. The plate delivery platform can slide on the fixed plate to facilitate the transportation of the plate. The plate delivery platform can transport the plate to the two symmetrical rollers. The conveying structure on the plate delivery platform automatically transports the plate through the conveyor belt, which is more convenient. The scanning platform can slide on the track to change its position, and the scanning platform can rotate 180° at the same time, so the plates on the two rollers can be photolithographically plated.

[0014] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a photolithography device embodiment of a symmetrical double-drum structure of the present invention;

[0016] Figure 2 A side view of an embodiment of a symmetrical double-drum structure photolithography machine of the present invention;

[0017] Figure 3 A roller structure diagram of a symmetrical double-roller structure photolithography device embodiment of the present invention;

[0018] Figure 4 This is a schematic diagram of the pressure plate structure of an embodiment of a symmetrical double-drum structure photolithography machine device of the present invention.

[0019] Reference numerals

[0020] 1. Base; 2. Mounting frame; 3. Roller; 4. Fixed plate; 5. Rotating shaft; 6. Rotating wheel 1; 7. Rotating wheel 2; 8. Belt; 9. Transmission motor; 10. Pressing arm 1; 11. Pressing arm 2; 12. Cylinder 1; 13. Cylinder 2; 14. Roller; 15. Pressing plate; 16. Plate feeding platform; 17. Sliding plate; 18. Sliding block; 19. Slide; 20. Rotating motor; 21. Gear 1; 22. Gear 2; 23. Rotating column; 24. Conveyor belt; 25. Rotating rod; 26. Rotating wheel; 27. Scanning platform; 28. Track. DETAILED DESCRIPTION

[0021] The technical solution of the present invention is further described below through the accompanying drawings and embodiments.

[0022] Unless otherwise defined, the technical terms or scientific terms used in the present invention should be understood by people with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0023] Example

[0024] Figure 1 It is a structural schematic diagram of a photolithography device embodiment of a symmetrical double-drum structure of the present invention; Figure 2 A side view of an embodiment of a symmetrical double-drum structure photolithography machine of the present invention; Figure 3 A roller structure diagram of a symmetrical double-roller structure photolithography device embodiment of the present invention; Figure 4This is a schematic diagram of the pressure plate structure of an embodiment of a symmetrical double-drum structure photolithography machine device of the present invention.

[0025] As shown in the figure, a symmetrical double-drum structure photolithography device described in the present invention includes a base 1, on which a mounting frame 2 is arranged. A drum 3 is arranged on the mounting frame 2, and the drum 3 is a vacuum adsorption drum, and the vacuum adsorption drum adopts an existing structure. The drum 3 is rotatably connected to the mounting frame 2 through a rotating shaft 5, and a rotating wheel 1 6 is arranged on the rotating shaft 5. A transmission motor 9 is arranged on the base 1, and a rotating wheel 2 7 is arranged on the transmission motor 9, and the rotating wheel 2 7 is connected to the rotating wheel 1 6 through a belt 8. The rotating wheel 2 7 is arranged on the output shaft of the transmission motor 9, and the output shaft of the transmission motor 9 drives the rotating wheel 2 7 to rotate, and the rotating wheel 2 7 rotates through the belt 8 to drive the rotating wheel 1 6 to rotate, thereby driving the drum 3 to rotate.

[0026] The mounting frame 2 is provided with a fixed plate 4, and a roller structure and a pressure plate structure are provided on the fixed plate 4, and the roller structure and the pressure plate structure are provided above the roller 3. The roller structure includes a pressure arm 10, and the two ends of the pressure arm 10 are connected to the cylinder rod of a cylinder 12. The cylinder 12 is provided on the fixed plate 4, and a roller 14 is rotatably provided at the bottom end of the pressure arm 10, and the roller 14 is rotatably connected to the pressure arm 10. The cylinder 12 can drive the pressure arm 10 to rise or fall through the cylinder rod, and the roller 14 can rotate on the pressure arm 10, and the plate is transported and moved between the roller 14 and the roller 3. The pressure plate structure includes a pressure arm 2 11, and the two ends of the pressure arm 11 are connected to the cylinder rod of a cylinder 2 13. The cylinder 2 13 is provided on the fixed plate 4, and a pressure plate 15 is fixedly provided at the bottom end of the pressure arm 2 11. The cylinder 2 13 can drive the pressure arm 2 11 to rise or fall through the cylinder rod, and the pressure plate 15 cooperates with the roller 3 to clamp the plate. There are two rollers 3, and the two rollers 3 are symmetrically arranged. Two roller structures and a pressure plate structure are arranged above each roller 3, and the pressure plate 15 structure is arranged between the two roller 14 structures.

[0027] The top of the fixed plate 4 is connected to the plate delivery platform 16 through a sliding structure. The sliding structure includes a slider 18, and sliding plates 17 are provided at both ends of the plate delivery platform 16. The slider 18 is provided on the sliding plate 17. A slideway 19 adapted to the slider 18 is provided at the top of the fixed plate 4, and the slider 18 is provided on the slideway 19 and is slidably connected with the slideway 19. The slideway 19 is at the top of the fixed plate 4, and the slider 18 slides on the slideway 19, thereby driving the sliding plate 17 to move, so that the plate delivery platform 16 can slide on the fixed plate 4. A rotating motor 20 is provided on the sliding plate 17 at one end of the plate delivery platform 16, and a gear 1 21 is provided on the rotating motor 20. The plate delivery platform 16 is rotatably connected to the sliding plate 17 through a rotating column 23. A gear 2 22 is provided at one end of the rotating column 23, and the rotating motor 20 is transmission-connected to the rotating column 23 through gear 1 21 and gear 2 22. The output shaft of the rotating motor 20 drives the gear 1 21 to rotate, and the rotation of the gear 1 21 drives the gear 2 22 to rotate, and then drives the rotating column 23 to rotate, so that the plate delivery platform 16 can be tilted. A conveying structure for conveying plates is provided on the plate delivery platform 16. The conveying structure includes a rotating rod 25, which is arranged on both sides of the plate delivery platform 16, and the rotating rod 25 is rotatably connected to the plate delivery platform 16. A plurality of rotating wheels 26 are fixedly arranged on the rotating rod 25, and the rotating wheels 26 on both sides of the plate delivery platform 16 are connected through a conveyor belt 24. One end of the rotating rod 25 is connected to the conveying motor. The output shaft of the conveying motor drives the rotating rod 25 to rotate and then drives the conveyor belt 24 to rotate, and the plates can be conveyed through the conveyor belt 24.

[0028] A scanning platform 27 for scanning the plate is provided on the base 1. A track 28 is provided on the base 1, and a slide groove adapted to the track 28 is provided at the bottom of the scanning platform 27. The track 28 is provided in the slide groove, and the scanning platform 27 is slidably connected with the track 28. The slide 19 and the track 28 adopt a robot moving track, and the robot moving track adopts an existing structure, so that the plate feeding platform 16 can move on the slide 19, and the scanning platform 27 can move on the track 28. The scanning platform 27 can rotate, and the scanning angle of the scanning platform 27 is 0°-180°. The scanning platform 27 adopts an existing structure, and the plates on the two rollers 3 can be photolithographically plated through the scanning platform 27.

[0029] When in use, the plate is first placed on the plate delivery platform 16, and the conveyor belt 24 transports the plate to the roller 3. The roller 3 is provided with a plate clamp, which includes a head plate clamp and a tail plate clamp, and the tail plate clamp can slide in the dovetail groove on the roller 3.

[0030] Directions:

[0031] 1. Cylinder 2 13 drives pressing arm 2 11 to descend, so that pressing plate 15 presses open the first plate clamp, and the plate is transported to between the first plate clamp and roller 3. The first plate clamp clamps the plate, and pressing plate 15 rises.

[0032] 2. The cylinder 12 drives the pressing arm 10 to descend, and the roller 14 presses down the plate to make the plate close to the roller 3. At the same time, the roller 3 rotates counterclockwise to the set size of the plate.

[0033] 3. Cylinder 2 13 drives the pressure plate 15 to press open the tail plate clamp on the roller 3. The roller 3 rotates clockwise about 6 mm to allow the tail end of the plate to enter between the tail plate clamp and the roller 3. The pressure plate 15 rises, the tail plate clamp clamps the plate, the roller 3 rotates, and the scanning platform 27 rotates to start scanning the photolithography plate. During the scanning process, the symmetrical roller 3 repeats the previous plate loading action.

[0034] 4. After the board is made, the tail board clamp stops at the position of the pressure plate 15, the pressure plate 15 is pressed down, the tail board clamp opens, and the roller 3 rotates counterclockwise about 6 mm to make the tail end of the board leave between the tail board clamp and the roller 3; the roller 14 is pressed down and then the roller 3 rotates counterclockwise to make the first board clamp turn to the position of the pressure plate 15, the pressure plate 15 is pressed down, the first board clamp opens, and finally the board is sent out of the roller 3 through the conveying structure and returned to the board sending platform 16. The board sending platform 16 moves to send the board out of the machine, and then continues to put the board on the upper plate. At the same time, the scanning platform 27 lens rotates 180 degrees to scan the symmetrical roller 3, and the above actions are repeated.

[0035] Therefore, the present invention adopts the symmetrical double-drum structure of the lithography machine equipment to solve the problem of low efficiency of existing lithography plate making.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A symmetrical double-drum structure photolithography machine, Features: The utility model comprises a base, a mounting frame is arranged on the base, a roller is arranged on the mounting frame, a fixing plate is arranged on the mounting frame, a roller structure and a pressure plate structure are arranged on the fixing plate, the roller structure and the pressure plate structure are arranged above the roller, the top of the fixing plate is connected to the plate delivery platform through a sliding structure, a conveying structure for conveying plates is arranged on the plate delivery platform, and a scanning platform for scanning plates is arranged on the base; The roller is a vacuum adsorption drum, and two rollers are provided. The two rollers are symmetrically arranged, and two roller structures and a pressure plate structure are arranged above each roller, and the pressure plate structure is arranged in the middle of the two roller structures; The drum is rotatably connected to the mounting frame through a rotating shaft, a rotating wheel 1 is arranged on the rotating shaft, a transmission motor is arranged on the base, a rotating wheel 2 is arranged on the transmission motor, and the rotating wheel 2 is transmission-connected to the rotating wheel 1 through a belt; The roller structure includes a pressure arm 1, both ends of which are connected to the cylinder rod of the cylinder 1, the cylinder 1 is arranged on a fixed plate, a roller is rotatably arranged at the bottom end of the pressure arm 1, and the roller is rotatably connected to the pressure arm 1; The pressure plate structure includes a pressure arm 2, both ends of which are connected to the cylinder rod of the cylinder 2, the cylinder 2 is arranged on a fixed plate, and a pressure plate is fixedly arranged at the bottom end of the pressure arm 2; The sliding structure includes a slider, sliding plates are arranged at both ends of the plate feeding platform, the slider is arranged on the sliding plate, a slideway adapted to the slider is arranged at the top of the fixed plate, the slider is arranged on the slideway and is slidably connected to the slideway; A rotating motor is arranged on the sliding plate at one end of the plate-feeding platform, a gear 1 is arranged on the rotating motor, the plate-feeding platform is rotationally connected with the sliding plate through a rotating column, a gear 2 is arranged at one end of the rotating column, and the rotating motor is transmission-connected with the rotating column through gears 1 and 2; The conveying structure includes a rotating rod, which is arranged on both sides of the plate-feeding platform, the rotating rod is rotatably connected to the plate-feeding platform, a plurality of rotating wheels are fixedly arranged on the rotating rod, the rotating wheels on both sides of the plate-feeding platform are connected by a transmission belt, and one end of the rotating rod is connected to a conveying motor for driving the rotating rod to rotate; A track is arranged on the base, a slide groove matching the track is arranged at the bottom of the scanning platform, the track is arranged in the slide groove, and the scanning platform is slidably connected with the track; The drum is provided with plate clamps, which include a head plate clamp and a tail plate clamp, and the tail plate clamp can slide in the dovetail groove on the drum; The method for using the symmetrical double-drum structure photolithography device comprises the following steps: Cylinder 2 drives pressing arm 2 to descend, so that the pressing plate presses open the first plate clamp, and the plate is transported between the first plate clamp and the roller. The first plate clamp clamps the plate, and the pressing plate rises; The cylinder drives the pressing arm to descend, and the roller presses down the plate to make it close to the roller. At the same time, the roller rotates counterclockwise to the set size of the plate. Cylinder 2 drives the pressure plate to press open the tail plate clamp on the roller. The roller rotates clockwise about 6mm to allow the tail end of the plate to enter between the tail plate clamp and the roller. The pressure plate rises, the tail plate clamp clamps the plate, the roller rotates, and the scanning platform rotates to start scanning the photolithography plate. During the scanning process, the symmetrical roller repeats the previous plate loading action. After the board is made, the tail board clamp stops at the position of the pressure plate, the pressure plate is pressed down, the tail board clamp opens, and the roller rotates counterclockwise about 6mm to make the tail end of the board leave between the tail board clamp and the roller; the roller is pressed down and then the roller rotates counterclockwise to make the first board clamp turn to the position of the pressure plate, the pressure plate is pressed down, the first board clamp opens, and finally the board is sent out of the roller through the conveying structure and returned to the board sending platform. The board sending platform moves to send the board out of the machine, and then the board continues to be placed on the upper plate. At the same time, the scanning platform lens rotates 180 degrees to scan the symmetrical roller, and the above actions are repeated.

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