Device and method for preparing electronic mixed gas

Abstract

The present invention relates to the technical field of electronic mixed gas preparation, and discloses an electronic mixed gas preparation device and method, comprising a device body, a gas supply pipe is fixedly installed on the top of the device body, gas cylinders are symmetrically placed inside the device body, the bottom end of the gas supply pipe is fixedly connected to an air guide pipe, and the drying protection mechanism comprises a first placement groove, a limit strip, a drying plate, a limit frame, a sealing plate, a sealing frame, an extension frame and an extension plate. The structure of the present invention is scientific and reasonable. The drying protection mechanism is set to avoid the deviation of the electronic mixed gas caused by excessive moisture in the air inside the device body. The shock-absorbing protection mechanism is set to avoid the deviation of the internal mixed gas caused by the device body being impacted by the outside world, thereby improving the effect of protecting the device body. The convenient clamping mechanism is set to avoid the limitation of the device in limiting and clamping gas cylinders of different sizes, thereby improving the clamping effect of gas cylinders of different sizes.

Description

Technical Field

[0001] The invention relates to the technical field of electronic mixed gas preparation, and in particular to a device and method for preparing electronic mixed gas. Background Art

[0002] Electronic gas mixture: Electronasmixture refers to a gas containing two or more effective components, or a gas that is a non-effective component but whose content exceeds the prescribed limit. It is a mixture of several gases and is a commonly used working fluid in engineering. Mixed gases are usually studied as ideal gases. With the development of the electronics industry, especially large-scale integrated circuits, the use of mixed gases is increasing. People call the mixed gases used in the semiconductor industry electronic mixed gases. There are many types of electronic mixed gases. The component gases mainly include: silane, arsine, phosphine, borane, germane, hydrogen selenide, hydrogen sulfide and carbon tetrafluoride (the base gas is oxygen); the base gases include: nitrogen, hydrogen, argon, helium, etc.

[0003] When the existing device and method for preparing electronic mixed gas are in use, the gas cylinder inside the device is easily affected by the moisture content of the air inside the device when preparing electronic mixed gas, resulting in deviations in the electronic mixed gas of the gas cylinder and uneven electronic mixed gas. In view of the deficiencies in the prior art, the present invention provides a device and method for preparing electronic mixed gas, which has the advantages of avoiding excessive moisture in the air inside the device body, avoiding deviations in the electronic mixed gas caused by excessive moisture in the air inside the device body, improving the effect of drying and dehumidifying the air inside the device body, and fully mixing the electronic mixed gas inside the gas cylinder in the device, solving the problem that the gas cylinder inside the device is easily affected by the moisture content of the air inside the device when preparing electronic mixed gas, resulting in deviations in the electronic mixed gas of the gas cylinder and uneven electronic mixed gas. Summary of the invention

[0004] In order to achieve the above-mentioned avoidance of excessive moisture in the air inside the device body, avoidance of deviation of the electronic mixed gas caused by excessive moisture in the air inside the device body, improve the effect of drying and dehumidifying the air inside the device body, and fully mix the electronic mixed gas inside the gas cylinder in the device, the present invention provides the following technical solutions:

[0005] An electronic mixed gas preparation device comprises a device body, a gas delivery pipe is fixedly installed on the top of the device body, gas cylinders are symmetrically placed inside the device body, a gas guide pipe is fixedly connected to the bottom end of the gas delivery pipe, gas distribution bottles are symmetrically placed inside the device body, a drying protection mechanism is fixedly installed on the top of the device body, and the drying protection mechanism comprises a first placement groove, a limit strip, a drying plate, a limit frame, a sealing plate, a sealing frame, an extension frame and an extension plate;

[0006] The top of the device body is provided with a first placement groove, a limiting strip is provided inside the first placement groove, a drying plate is provided inside the first placement groove, a limiting frame is provided at the top of the device body, a sealing plate is provided inside the limiting frame, a sealing frame is provided on the inner wall of the top of the device body, an extension frame is provided inside the sealing frame, and an extension plate is provided inside the extension frame;

[0007] Both ends of the device body are fixedly installed with a shock absorbing protection mechanism, which includes a spring telescopic rod, a placement frame, a soft block and a protection plate;

[0008] The two ends of the device body are provided with spring telescopic rods, one end of the spring telescopic rod is provided with a placement frame, a soft block is provided inside the placement frame, and a protective plate is provided inside the placement frame;

[0009] A convenient clamping mechanism is fixedly installed inside the device body, and the convenient clamping mechanism includes a limit ring, a sliding block, a rotating screw and a bevel gear;

[0010] A limit ring is arranged inside the device body, a sliding block is arranged inside the limit ring, a rotating screw is arranged inside the sliding block, and a bevel gear is arranged at one end of the rotating screw.

[0011] According to the above technical features, the drying protection mechanism includes a first placement slot, a limit strip, a second placement slot, a placement frame, a limit block, a spring block, a drying plate, a limit frame, a sealing plate, a first fixing bolt, a sliding frame, a sealing frame, an extension frame and an extension plate;

[0012] The top of the device body is evenly provided with a first placement groove, and the inner wall of one end of the first placement groove is fixedly connected to a limiting strip, a second placement groove is provided at the top of the device body corresponding to the position of the first placement groove, a placement rack is placed inside the second placement groove, the top of the placement rack is evenly fixedly connected to the limiting block at the position of the first placement groove, both ends of the second placement groove are fixedly connected with spring blocks at the positions of both ends of the placement rack, a drying plate is placed inside the first placement groove, the top of the device body is fixedly connected to the limiting rack at the position of the first placement groove, a sealing plate is slidably installed at one end of the limiting rack, and first fixing bolts are embedded and installed at the two ends of the top of the limiting rack, a sliding frame is fixedly connected to the inner wall of the top of the device body corresponding to the position of the first placement groove, a sealing frame is fixedly connected to the inner wall of one end of the sliding frame, an extension frame is slidably installed inside the sealing frame, and an extension plate is slidably installed inside the extension frame.

[0013] According to the above technical features, the first fixing bolt is connected to the limiting frame through threaded engagement, and the outer side of the spring block is a smooth plane.

[0014] According to the above technical features, a slot is provided at the location of the placement frame corresponding to the spring block, and the total length of the sealing frame, the extension frame and the extension plate is the same as the inner length of the sliding frame.

[0015] According to the above technical features, the shock-absorbing protection mechanism includes a spring telescopic rod, a placement frame, a third placement slot, a soft block, a cavity, a connecting block, a second fixing bolt and a protection plate;

[0016] Spring telescopic rods are fixedly connected at the four corners of both ends of the device body, one end of the spring telescopic rod is fixedly connected to a placement frame, a third placement groove is provided at the top of the placement frame, soft blocks are symmetrically and evenly fixedly connected to the inner wall of one end of the third placement groove, a cavity is formed inside the soft block, connecting blocks are fixedly connected at both ends of the placement frame, a second fixing bolt is embedded and installed at one end of the connecting block, and a protective plate is slidably installed inside the third placement groove.

[0017] According to the above technical features, the four spring telescopic rods are fixedly connected via a placement frame, and the second fixing bolt is connected to the connecting block via threaded engagement.

[0018] According to the above technical features, the clamping mechanism includes a limit ring, a sliding frame, a sliding block, a rotating screw, a bevel gear and a gear ring;

[0019] Sliding frames are slidably installed on the inner walls at both ends of the device body, and a limiting ring is fixedly connected between the two sliding frames. A sliding block is evenly slidably installed inside the limiting ring, and a rotating screw is embedded in one end of the sliding block. A bevel gear is fixedly connected to one end of the rotating screw, and a gear ring is rotatably installed at the position of the bevel gear on the outer side of the limiting ring.

[0020] According to the above technical features, the bevel gear and the limiting ring are fixedly connected via a bracket, and the gear ring and the bevel gear are meshedly connected.

[0021] According to the above technical features, the rotating screw rod and the sliding block are connected by threaded engagement, and a third fixing bolt is embedded and installed at one end of the sliding frame.

[0022] A method for preparing an electronic mixed gas is completed by using the above-mentioned electronic mixed gas preparation device of the present invention, and the steps are as follows:

[0023] S1. Place the gas distribution bottle and the gas cylinder on the inner wall of the bottom end of the device body, and use the gas distribution bottle and the gas cylinder position and the inner limit ring to make the gas distribution bottle and the gas cylinder located at both ends of the gas guide pipe respectively, so that the gas guide pipe is connected with the gas distribution bottle and the gas cylinder;

[0024] S2. Then rotate the gear ring to drive the bevel gear and the rotating screw to rotate, so that the sliding block moves to the surface of the gas distribution bottle and the gas cylinder, and the gas distribution bottle and the gas cylinder are stably placed. After the balance gas is injected into the gas guide pipe through the gas transmission pipe, the gas in the gas distribution bottle is injected into the gas cylinder through the gas guide pipe for mixing.

[0025] Compared with the prior art, the present invention provides a device and method for preparing an electronic mixed gas, which has the following beneficial effects:

[0026] 1. The drying protection mechanism can be used to adsorb and dehumidify the moisture in the air inside the device body, and the first placement slot and the drying plate can be sealed. The drying plate can be quickly replaced to avoid excessive moisture in the air inside the device body and deviation of the electronic mixed gas caused by excessive moisture in the air inside the device body, thereby improving the effect of drying and dehumidifying the air inside the device body.

[0027] 2. The shock-absorbing protection mechanism can provide preliminary buffering for the impact of objects, and can also provide shock-absorbing and buffering protection for the impact force generated by the impact of external objects. At the same time, the protection plate can be quickly replaced to avoid the deviation of the internal mixture caused by the external impact on the device body, reduce the time for replacing the protection plate, and improve the protection effect of the device body.

[0028] 3. By setting up a convenient clamping mechanism, the position of the limit ring can be adjusted, and gas cylinders of different sizes can be clamped in a limited manner, thereby avoiding the limitation of the device in clamping gas cylinders of different sizes, reducing the time of the device in clamping gas cylinders of different sizes, and improving the clamping effect of gas cylinders of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0030] In the attached picture:

[0031] Figure 1 It is a schematic diagram of the structure of the present invention;

[0032] Figure 2 It is a schematic diagram of the structure of the explosion of the present invention;

[0033] Figure 3 It is a structural schematic diagram of the drying protection mechanism of the present invention;

[0034] Figure 4 It is a structural schematic diagram of the shock absorbing protection mechanism of the present invention;

[0035] Figure 5 It is a schematic diagram of the structure of the clamping mechanism of the present invention;

[0036] Numbers in the figure: 1, device body; 2, gas pipe; 6, gas cylinder; 7, gas guide pipe; 8, gas distribution cylinder;

[0037] 3. Drying protection mechanism; 301. First placement slot; 302. Limiting strip; 303. Second placement slot; 304. Placement rack; 305. Limiting block; 306. Spring clamp; 307. Drying plate; 308. Limiting rack; 309. Sealing plate; 310. First fixing bolt; 311. Sliding frame; 312. Sealing frame; 313. Extension frame; 314. Extension plate;

[0038] 4. shock-absorbing protection mechanism; 401. spring telescopic rod; 402. placement frame; 403. third placement slot; 404. soft block; 405. cavity; 406. connecting block; 407. second fixing bolt; 408. protection plate;

[0039] 5. Convenient for clamping mechanism; 501. Limiting ring; 502. Sliding frame; 503. Sliding block; 504. Rotating screw; 505. Bevel gear; 506. Gear ring. DETAILED DESCRIPTION

[0040] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0041] Embodiment 1: The present invention provides a technical solution, a device for preparing an electronic mixed gas, such as Figure 1-5 As shown, it includes a device body 1, a gas delivery pipe 2 is fixedly installed on the top of the device body 1, gas cylinders 6 are symmetrically placed inside the device body 1, a gas guide pipe 7 is fixedly connected to the bottom end of the gas delivery pipe 2, gas distribution bottles 8 are symmetrically placed inside the device body 1, and a drying protection mechanism 3 is fixedly installed on the top of the device body 1. The drying protection mechanism 3 includes a first placement groove 301, a limit strip 302, a drying plate 307, a limit frame 308, a sealing plate 309, a sealing frame 312, an extension frame 313 and an extension plate 314;

[0042] A first placement groove 301 is provided at the top of the device body 1, a limiting strip 302 is provided inside the first placement groove 301, a drying plate 307 is provided inside the first placement groove 301, a limiting frame 308 is provided at the top of the device body 1, a sealing plate 309 is provided inside the limiting frame 308, a sealing frame 312 is provided on the inner wall of the top of the device body 1, an extension frame 313 is provided inside the sealing frame 312, and an extension plate 314 is provided inside the extension frame 313;

[0043] The drying protection mechanism 3 includes a first placement groove 301, a limiting strip 302, a second placement groove 303, a placement frame 304, a limiting block 305, a spring block 306, a drying plate 307, a limiting frame 308, a sealing plate 309, a first fixing bolt 310, a sliding frame 311, a sealing frame 312, an extension frame 313 and an extension plate 314;

[0044] The top of the device body 1 is evenly provided with a first placement groove 301, and the inner wall of one end of the first placement groove 301 is fixedly connected to a limiting strip 302. The top of the device body 1 is provided with a second placement groove 303 at a position corresponding to the first placement groove 301. A placement rack 304 is placed inside the second placement groove 303. A limiting block 305 is evenly fixedly connected to the top of the placement rack 304 at a position corresponding to the first placement groove 301. Spring blocks 306 are fixedly connected at both ends of the second placement groove 303 at positions corresponding to both ends of the placement rack 304. A drying plate 307 is placed inside the first placement groove 301. A limiting rack 308 is fixedly connected to the top of the device body 1 at a position corresponding to the first placement groove 301, and one end of the limiting rack 308 is slidably installed There is a sealing plate 309, and first fixing bolts 310 are embedded and installed at the two ends of the top of the limit frame 308. A sliding frame 311 is fixedly connected to the inner wall of the top of the device body 1 at the position corresponding to the first placement groove 301, and a sealing frame 312 is fixedly connected to the inner wall of one end of the sliding frame 311. An extension frame 313 is slidably installed inside the sealing frame 312, and an extension plate 314 is slidably installed inside the extension frame 313. The first fixing bolt 310 and the limit frame 308 are connected by threaded engagement, the outer side of the spring block 306 is a smooth plane, and a slot is opened at the position of the placement frame 304 corresponding to the spring block 306. The total length of the sealing frame 312, the extension frame 313 and the extension plate 314 is the same as the inner length of the sliding frame 311.

[0045] Both ends of the device body 1 are fixedly installed with a shock absorbing protection mechanism 4, which includes a spring telescopic rod 401, a placement frame 402, a soft block 404 and a protection plate 408;

[0046] The two ends of the device body 1 are provided with spring telescopic rods 401, one end of the spring telescopic rod 401 is provided with a placement frame 402, a soft block 404 is provided inside the placement frame 402, and a protective plate 408 is provided inside the placement frame 402;

[0047] The shock-absorbing protection mechanism 4 includes a spring telescopic rod 401, a placement frame 402, a third placement slot 403, a soft block 404, a cavity 405, a connecting block 406, a second fixing bolt 407 and a protection plate 408;

[0048] Spring telescopic rods 401 are fixedly connected at the four corners of both ends of the device body 1, one end of the spring telescopic rod 401 is fixedly connected to a placement frame 402, a third placement groove 403 is provided at the top of the placement frame 402, a soft block 404 is symmetrically and evenly fixedly connected to the inner wall of one end of the third placement groove 403, a cavity 405 is formed inside the soft block 404, both ends of the placement frame 402 are fixedly connected to a connecting block 406, one end of the connecting block 406 is embedded with a second fixing bolt 407, a protective plate 408 is slidably installed inside the third placement groove 403, the four spring telescopic rods 401 are fixedly connected through the placement frame 402, and the second fixing bolt 407 and the connecting block 406 are connected by threaded engagement.

[0049] A convenient clamping mechanism 5 is fixedly installed inside the device body 1, and the convenient clamping mechanism 5 includes a limit ring 501, a sliding block 503, a rotating screw 504 and a bevel gear 505;

[0050] A limit ring 501 is arranged inside the device body 1 , a sliding block 503 is arranged inside the limit ring 501 , a rotating screw 504 is arranged inside the sliding block 503 , and a bevel gear 505 is arranged at one end of the rotating screw 504 .

[0051] The clamping mechanism 5 includes a limit ring 501, a sliding frame 502, a sliding block 503, a rotating screw 504, a bevel gear 505 and a gear ring 506;

[0052] Sliding frames 502 are slidably installed on the inner walls of both ends of the device body 1, and a limiting ring 501 is fixedly connected between the two sliding frames 502. A sliding block 503 is evenly slidably installed inside the limiting ring 501. A rotating screw 504 is embedded in one end of the sliding block 503, and a bevel gear 505 is fixedly connected to one end of the rotating screw 504. A gear ring 506 is rotatably installed at the outer side of the limiting ring 501 corresponding to the position of the bevel gear 505. The bevel gear 505 and the limiting ring 501 are fixedly connected by a bracket, the gear ring 506 and the bevel gear 505 are meshed, the rotating screw 504 and the sliding block 503 are threadedly meshed, and a third fixing bolt is embedded in one end of the sliding frame 502.

[0053] Embodiment 2: A method for preparing an electronic mixed gas is completed using the above-mentioned electronic mixed gas preparation device of the present invention, and the steps are as follows:

[0054] S1. Place the gas distribution bottle 8 and the gas cylinder 6 on the inner wall of the bottom end of the device body 1, and use the gas distribution bottle 8 and the gas cylinder 6 to be inside the limiting ring 501, so that the gas distribution bottle 8 and the gas cylinder 6 are respectively located at the two ends of the air guide pipe 7, so that the air guide pipe 7 is connected with the gas distribution bottle 8 and the gas cylinder 6;

[0055] S2. Then rotate the gear ring 506 to drive the bevel gear 505 and the rotating screw 504 to rotate, so that the sliding block 503 moves to the surface of the gas distribution bottle 8 and the gas cylinder 6, and the gas distribution bottle 8 and the gas cylinder 6 are stably placed. After the balance gas is injected into the air guide pipe 7 through the gas delivery pipe 2, the gas in the gas distribution bottle 8 is injected into the gas cylinder 6 through the air guide pipe 7 for mixing.

[0056] Working principle: When using the electronic mixed gas preparation device, the moisture contained in the air inside the device body 1 is adsorbed and dehumidified by using the drying plate 307 through the first placement groove 301. When it is not necessary to dry and dehumidify the inside of the device body 1, the extension frame 313 is used to slide the extension frame 313 along the inside of the sealing frame 312, and the extension plate 314 is slid along the inside of the extension frame 313 so that one end of the extension plate 314 contacts the inner wall of the sliding frame 311 to seal the first placement groove 301. Then, the first fixing bolt 310 is rotated in the opposite direction, and the sealing plate 309 is taken out by sliding along the inside of the limiting frame 308. Then, the placement frame 304 is lifted to make the spring block 306 contract and separate from the placement frame 304, so that the drying plate 307 on the surface of the placement frame 304 moves to the surface of the device body 1, and then the drying plate 307 on the surface of the placement frame 304 is taken out, and a new drying plate 307 is placed The drying plate 307 is placed on the surface of the placement rack 304, and the position of the drying plate 307 is limited by the limit block 305. The spring block 306 is slid along the second placement groove 303 to stretch the spring block 306 to the inside of the placement rack 304, so that the drying plate 307 is placed inside the first placement groove 301. The position of the drying plate 307 is limited and placed by the limit strip 302. The sealing plate 309 is slid along the limit rack 308 to the inner wall of one end of the limit rack 308. The first fixing bolt 310 is rotated to the surface of the sealing plate 309 to fix the position of the sealing plate 309, fix the position of the drying plate 307, and quickly replace the drying plate 307, thereby avoiding the situation where there is too much moisture in the air inside the device body 1, and avoiding the situation where the electronic mixed gas is deviated due to the excessive moisture in the air inside the device body 1, thereby improving the effect of drying and dehumidifying the air inside the device body 1.

[0057] Then, when the device is hit by an external object, the protection plate 408 is used to intercept the impact of the external object, and at the same time, the protection plate 408 is made to slide along the inside of the third placement groove 403, so that the soft block 404 is deformed along the internal cavity 405, and the impact of the object is initially buffered, and then the protection plate 408 and the placement frame 402 are driven to move, so that the spring telescopic rod 401 is contracted, and the impact force generated by the impact of the external object is shock-absorbing and buffered. Then, the second fixing bolt 407 is rotated in the opposite direction, and the protection plate 408 is slid out along the third placement groove 403, and the new protection plate 408 is slid and installed into the placement frame 402 along the third placement groove 403, so that the protection plate 408 contacts the surface of the soft block 404, and the second fixing bolt 407 is rotated to the surface of the protection plate 408 to fix the position of the protection plate 408, and the protection plate 408 is quickly replaced, thereby avoiding deviation of the internal mixed gas when the device body 1 is hit by the outside world, reducing the time for replacing the protection plate 408, and improving the effect of protecting the device body 1.

[0058] Finally, the gas cylinder 6 is placed on the inner wall of the bottom end of the device body 1, and the limiting ring 501 is moved to drive the limiting ring 501 to slide along the inner wall of the device body 1, and the third fixing bolt is rotated to the inner wall of the device body 1 to adjust the position of the limiting ring 501, and at the same time, the gas cylinder 6 is located inside the limiting ring 501, and the gear ring 506 is rotated along the outer side of the limiting ring 501 to drive the bevel gear 505 to rotate along the bracket through meshing connection, and at the same time drive the rotating screw 504 to rotate, and drive the sliding block 503 to slide along the inside of the limiting ring 501 through meshing connection, so that the sliding block 503 contacts the surface of the gas cylinder 6, and the gas cylinders 6 of different sizes are limited and clamped, thereby avoiding the limitation of the device for limiting and clamping gas cylinders 6 of different sizes, reducing the time of the device for limiting and clamping gas cylinders 6 of different sizes, and improving the clamping effect of gas cylinders 6 of different sizes;

[0059] In the process of preparing the electronic mixed gas, firstly, the gas distribution bottle 8 and the gas bottle 6 are placed on the inner wall of the bottom end of the device body 1, and at the same time, the gas distribution bottle 8 and the gas bottle 6 are positioned inside the limiting ring 501, so that the gas distribution bottle 8 and the gas bottle 6 are respectively located at the two ends of the gas guide pipe 7, so that the gas guide pipe 7 is connected with the gas distribution bottle 8 and the gas bottle 6;

[0060] Then rotate the gear ring 506 to drive the bevel gear 505 and the rotating screw 504 to rotate, so that the sliding block 503 moves to the surface of the gas distribution bottle 8 and the gas cylinder 6, and the gas distribution bottle 8 and the gas cylinder 6 are stably placed. After the balance gas is injected into the air guide pipe 7 through the gas supply pipe 2, the gas in the gas distribution bottle 8 is injected into the gas cylinder 6 through the air guide pipe 7 for mixing.

[0061] Finally, it should be noted that the above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A device for preparing an electronic mixed gas, comprising a device body (1), characterized in that: A gas delivery pipe (2) is fixedly mounted on the top of the device body (1), gas cylinders (6) are symmetrically placed inside the device body (1), a gas guide pipe (7) is fixedly connected to the bottom of the gas delivery pipe (2), gas distribution cylinders (8) are symmetrically placed inside the device body (1), and a drying protection mechanism (3) is fixedly mounted on the top of the device body (1); The drying protection mechanism (3) comprises a first placement groove (301), a limiting strip (302), a drying plate (307), a limiting frame (308), a sealing plate (309), a sealing frame (312), an extension frame (313) and an extension plate (314); the first placement groove (301) is provided at the top of the device body (1), the limiting strip (302) is provided inside the first placement groove (301), the drying plate (307) is provided inside the first placement groove (301), the limiting frame (308) is provided at the top of the device body (1), the sealing plate (309) is provided inside the limiting frame (308), the sealing frame (312) is provided on the inner wall of the top of the device body (1), the extension frame (313) is provided inside the sealing frame (312), and the extension plate (314) is provided inside the extension frame (313); Both ends of the device body (1) are fixedly mounted with a shock absorbing protection mechanism (4), the shock absorbing protection mechanism (4) comprising a spring telescopic rod (401), a placement frame (402), a soft block (404) and a protection plate (408); both ends of the device body (1) are provided with a spring telescopic rod (401), one end of the spring telescopic rod (401) is provided with a placement frame (402), a soft block (404) is provided inside the placement frame (402), and a protection plate (408) is provided inside the placement frame (402); A convenient clamping mechanism (5) is fixedly installed inside the device body (1), and the convenient clamping mechanism (5) comprises a limit ring (501), a sliding frame (502), a sliding block (503), a rotating screw (504), a bevel gear (505) and a gear ring (506); sliding frames (502) are slidably installed on the inner walls of both ends of the device body (1), and the two sliding frames (502) are fixedly connected between the limit rings (501), and the sliding blocks (503) are evenly slidably installed inside the limit rings (501), and one end of the sliding block (503) is embedded A rotating screw rod (504) is installed in the housing, one end of the rotating screw rod (504) is fixedly connected to a bevel gear (505), and a gear ring (506) is rotatably installed on the outer side of the limiting ring (501) at a position corresponding to the bevel gear (505); the bevel gear (505) and the limiting ring (501) are fixedly connected via a bracket, and the gear ring (506) and the bevel gear (505) are meshedly connected; the rotating screw rod (504) and the sliding block (503) are meshedly connected via a thread, and a third fixing bolt is embedded and installed at one end of the sliding frame (502).

2. The device for preparing an electronic mixed gas according to claim 1, characterized in that: A second placement groove (303) is provided at a position corresponding to the first placement groove (301) at the top of the device body (1); a placement rack (304) is placed inside the second placement groove (303); a limiting block (305) is evenly fixedly connected to the top of the placement rack (304) at a position corresponding to the first placement groove (301); spring clamping blocks (306) are fixedly connected to the two ends of the second placement groove (303) at positions corresponding to the two ends of the placement rack (304); and the limiting rack is fixedly connected to the top of the device body (1) at a position corresponding to the first placement groove (301). (308), a sealing plate (309) is slidably mounted on one end of the limiting frame (308), first fixing bolts (310) are embedded and mounted at both ends of the top end of the limiting frame (308), a sliding frame (311) is fixedly connected to the inner wall of the top end of the device body (1) at a position corresponding to the first placement groove (301), a sealing frame (312) is fixedly connected to the inner wall of one end of the sliding frame (311), an extension frame (313) is slidably mounted inside the sealing frame (312), and an extension plate (314) is slidably mounted inside the extension frame (313).

3. The device for preparing an electronic mixed gas according to claim 2, characterized in that: The first fixing bolt (310) is connected to the limiting frame (308) through threaded engagement, and the outer side of the spring clamping block (306) is a smooth plane.

4. The method for preparing an electronic mixed gas according to claim 2, characterized in that: The placement frame (304) is provided with a slot at a position corresponding to the spring block (306), and the total length of the sealing frame (312), the extension frame (313) and the extension plate (314) is the same as the inner length of the sliding frame (311).

5. The device for preparing an electronic mixed gas according to claim 1, characterized in that: The device body (1) is fixedly connected to spring telescopic rods (401) at four corners at both ends, one end of the spring telescopic rod (401) is fixedly connected to a placement frame (402), a third placement slot (403) is provided at the top of the placement frame (402), a soft block (404) is symmetrically and evenly fixedly connected to the inner wall of one end of the third placement slot (403), a cavity (405) is formed inside the soft block (404), both ends of the placement frame (402) are fixedly connected to connecting blocks (406), one end of the connecting block (406) is embedded with a second fixing bolt (407), and a protective plate (408) is slidably installed inside the third placement slot (403).

6. The device for preparing an electronic mixed gas according to claim 5, characterized in that: The four spring telescopic rods (401) are fixedly connected via a placement frame (402), and the second fixing bolt (407) is connected to the connection block (406) via threaded engagement.

7. A method for preparing an electronic mixed gas, using the electronic mixed gas preparation device according to any one of claims 1 to 6, comprising the following steps: S1. Place the gas distribution bottle (8) and the gas cylinder (6) on the inner wall of the bottom end of the device body (1), and make the gas distribution bottle (8) and the gas cylinder (6) located inside the limiting ring (501), so that the gas distribution bottle (8) and the gas cylinder (6) are located at the two ends of the gas guide pipe (7) respectively, and connect the gas guide pipe (7) with the gas distribution bottle (8) and the gas cylinder (6); S2. Then, the gear ring (506) is rotated to drive the bevel gear (505) and the rotating screw (504) to rotate, so that the sliding block (503) moves to the surface of the gas distribution bottle (8) and the gas cylinder (6), and the gas distribution bottle (8) and the gas cylinder (6) are stably placed. After the balance gas is injected into the gas guide pipe (7) through the gas transmission pipe (2), the gas in the gas distribution bottle (8) is injected into the gas cylinder (6) through the gas guide pipe (7) for mixing.

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