A preparation method of transition metal disulfide film and thermal annealing furnace
By using carbon sheet sandwich structure in a thermal annealing furnace for rapid annealing treatment, the efficiency and quality problems of the preparation of multi-layer transition metal disulfide films in the prior art are solved, and efficient and continuous film preparation is achieved, which is suitable for large-scale production. .
CN117446864BActive Publication Date: 2024-12-13JIMEI UNIV
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Patent Information
- Application Number
- CN202311393521.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-10-25
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2043-10-25
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Figure CN117446864B_ABST
Abstract
The present invention provides a method for preparing a transition metal disulfide film and a thermal annealing furnace, and belongs to the technical field of thin film material preparation. The present invention mixes a precursor compound corresponding to the transition metal disulfide with a composite solvent, and coats the obtained precursor compound solution on the surface of an insulating substrate I. After solidification, a precursor compound film is formed on the surface of the insulating substrate I, and then an insulating substrate II is placed on the surface of the precursor compound film to obtain an insulating substrate I / precursor compound film / insulating substrate II workpiece, which is stacked and placed in a sandwich structure formed by a first carbon sheet and a second carbon sheet, and annealing is performed to convert the precursor compound into a transition metal disulfide by reaction, to obtain a transition metal disulfide film. The method of the present invention can quickly prepare a continuous transition metal disulfide film, and the prepared transition metal disulfide film has good quality.
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