Quartz surface grinding monitoring device

Abstract

The invention relates to the technical field of quartz piece processing, and discloses a quartz piece plane grinding monitoring device, comprising a grinding disc, a driving motor, and a support frame, wherein the grinding disc is rotatably arranged on the support frame, a driving motor is arranged at the bottom of the grinding disc, a liquid flow groove is arranged between the lower surface of the grinding disc and the upper surface of the support frame, a sealing ring is arranged outside the liquid flow groove, and a plurality of guide grooves are coaxially opened on the surface of the grinding disc; when the guide groove rotates with the grinding disc, the grinding liquid inside will generate centrifugal force, and the grinding liquid will be pushed to the outer edge under the action of the centrifugal force, so that the liquid moves upward along the inclined surface, and when the grinding liquid moves to the surface of the grinding disc, it will continue to be affected by the centrifugal force and move along the surface of the grinding disc, and the action of this centrifugal force makes the grinding liquid be continuously pushed to the outer edge in a ring shape, so that it forms a uniform film on the surface of the grinding disc, thereby realizing uniform grinding of the plane of the quartz piece.

Description

Technical Field

[0001] The invention relates to the technical field of quartz piece processing, in particular to a quartz piece plane grinding monitoring device. Background Art

[0002] Quartz grinding equipment is a high-tech equipment specially designed for processing and precision grinding of quartz materials, which is widely used in semiconductor, optical and electronic fields. These equipment include grinders, polishers and cutters. For example, grinders are used for rough and fine grinding of quartz parts, usually equipped with high-hardness grinding discs and abrasives. These equipment have technical characteristics such as high-precision control, high degree of automation and cooling system. The use of CNC technology can accurately control the grinding process. The equipment is equipped with automatic loading and unloading system, automatic detection system and feedback control system to reduce manual operation and improve production efficiency and consistency. In order to avoid damage to quartz materials caused by heat generated during processing, the equipment is usually equipped with effective cooling system, such as water cooling or air cooling system. The processing technology includes rough grinding, fine grinding and polishing. The quartz parts are initially removed from the excess material by using larger abrasive particles, and fine processing is carried out using finer abrasives. The quartz surface is made to achieve a high finish by chemical or mechanical polishing methods. Before the final product is delivered, the quartz parts are ultrasonically cleaned to remove the residual abrasive and polishing liquid during the processing. These equipment and processes ensure the high precision and quality of quartz parts, and can meet the needs of semiconductor, optical and electronic industries for precision quartz components. The detection device for surface grinding of quartz parts is mainly used to detect the flatness, finish and dimensional accuracy of quartz parts after the grinding process. Such devices are usually equipped with high-precision optical measuring instruments, laser interferometers, collimators and other equipment to ensure the accuracy and reliability of the test results. The detection device can provide real-time feedback on the grinding effect by scanning and analyzing the surface of the quartz parts, and make adjustments based on the test data to optimize the grinding process.

[0003] Although the existing quartz surface grinding is equipped with a temperature sensor, this temperature sensor usually uses a thermocouple or an infrared sensor and only detects the temperature of the quartz surface, and cannot detect the grinding fluid. However, the temperature detection of the grinding fluid is crucial in the quartz surface grinding process. The appropriate grinding fluid temperature can effectively control the grinding temperature and prevent the quartz parts from being deformed or damaged due to overheating. In addition, the grinding fluid with a moderate temperature can maintain the best viscosity, fluidity and lubrication properties, thereby improving the grinding efficiency and processing accuracy. In addition, the system of the existing quartz surface grinding equipment usually lacks an effective waste liquid recovery and reuse mechanism. The grinding fluid will gradually drain during use and eventually be discharged instead of being collected and recycled. As the grinding process proceeds, quartz particles, debris and other impurities will be mixed into the grinding fluid, which will affect the performance of the grinding fluid. If there is no effective filtration and reuse system, these impurities will cause the grinding fluid to fail, which requires frequent replacement. At the same time, the existing liquid supply system usually causes the grinding fluid to be unevenly distributed on the surface of the quartz part. Some areas may not receive adequate lubrication and cooling, and will accumulate in some locations and flow away in other locations. This phenomenon will cause the surface of the quartz part to contact the grinding fluid unevenly, affecting the grinding effect. Summary of the invention

[0004] (I) Technical problems to be solved: In view of the deficiencies in the prior art, the present invention provides a quartz workpiece surface grinding monitoring device, which has a device capable of detecting the grinding fluid to improve the grinding efficiency and processing accuracy of the equipment, and the device can efficiently utilize the advantages of the grinding fluid, thereby solving the problems that the prior equipment cannot detect the grinding fluid and the equipment cannot efficiently utilize the grinding fluid. During over-grinding, the grinding fluid is unevenly distributed on the surface of the quartz workpiece, and some areas may not receive sufficient lubrication and cooling, and will accumulate in certain positions and flow away in other positions. This phenomenon will cause the surface of the quartz workpiece to contact the grinding fluid unevenly, affecting the grinding effect.

[0005] (II) Technical solution: In order to achieve the above-mentioned purpose of being able to detect the grinding fluid to improve the grinding efficiency and processing accuracy of the equipment and to efficiently utilize the grinding fluid, the present invention provides the following technical solution: a quartz workpiece plane grinding monitoring device, comprising a grinding disc, a driving motor, and a support frame, wherein the grinding disc is rotatably arranged on the support frame, a driving motor for driving the grinding disc to rotate is fixedly arranged at the bottom of the grinding disc, and the driving motor is fixedly installed at the bottom of the support frame, a liquid flow groove for passing the grinding fluid is arranged between the lower surface of the grinding disc and the upper surface of the support frame, a sealing ring is arranged on the outside of the liquid flow groove, and a plurality of annular guide grooves with successively increasing diameters and connected to the liquid flow grooves are coaxially opened on the surface of the grinding disc, wherein the plurality of guide grooves divide the grinding disc into a plurality of annular grinding discs with successively increasing diameters, and a plurality of connecting plates for fixedly connecting adjacent annular grinding discs are arranged in a circular array along the diameter direction thereof between the plurality of annular grinding discs; when the grinding disc rotates, the grinding fluid in the guide groove generates centrifugal force and flows along the vertical direction of the guide groove to the surface of the grinding disc.

[0006] Preferably, a liquid supply module for conveying grinding liquid to the interior of the liquid flow trough is connected to the inner side thereof, and the liquid supply module includes an infusion tube, a liquid storage tank, and an infusion ring. One end of the infusion tube is connected to a container storing grinding liquid, and the other end of the infusion tube is connected to the liquid storage tank. The top of the liquid storage tank is fixedly arranged at the bottom of the support frame, the infusion ring is coaxially arranged with the grinding disc, and the infusion ring is arranged between the support frame and the axis of the grinding disc, the infusion ring is fixedly arranged on the support frame, and one end of the infusion ring is connected to the liquid storage tank, and the other end of the infusion ring is communicated with the liquid flow trough.

[0007] Preferably, the connecting plate is in the shape of a fan blade as a whole, and when the grinding disc drives the connecting plate to rotate, the direction of the liquid flow generated by the connecting plate is vertically upward.

[0008] Preferably, the cross section of the guide groove is an inclined parallelogram, and the inclination direction of the parallelogram is inclined along the direction in which the diameter of the grinding disc increases.

[0009] Preferably, the bottom of the sealing ring is fixedly connected to the support frame, and the diameter of the sealing ring is smaller than the guide groove with the largest diameter, and the bottom of the guide groove with the largest diameter is connected to a drain port; the direction of the liquid flow generated by the rotation of the connecting plate connected to the guide groove with the largest diameter is vertically downward.

[0010] Preferably, a monitoring module for monitoring and filtering the grinding liquid is provided in the liquid discharge port.

[0011] Preferably, the liquid storage bin is annular in shape, and is coaxially arranged with the grinding disc.

[0012] Preferably, a liquid pump module is provided on the infusion tube.

[0013] (III) Beneficial effects: Compared with the prior art, the present invention provides a quartz component plane grinding monitoring device, which has the following beneficial effects: 1. This quartz component plane grinding monitoring device, through the coordinated use of the grinding disc structure, the guide groove structure, and the liquid flow groove structure, is compared with the traditional grinding disc equipment using a spray system. The grinding liquid is evenly sprayed onto the surface of the grinding disc through a nozzle installed above or around the grinding disc. The grinding liquid sprayed by this structure does not evenly cover the entire grinding disc. In this quartz component plane grinding monitoring device, when the guide groove rotates with the grinding disc, the grinding liquid inside will generate centrifugal force, and the grinding liquid will be pushed to the outer edge under the action of the centrifugal force. The inclined design of the guide groove makes this centrifugal force act not only in the horizontal direction of the liquid, but also in the vertical direction. A component is applied upward to make the liquid move upward along the inclined surface. When the grinding liquid moves to the surface of the grinding disk, it will continue to move along the surface of the grinding disk under the influence of centrifugal force. The effect of this centrifugal force prevents the grinding liquid from concentrating at a certain point, but is continuously pushed to the outer edge in a ring shape, so as to be evenly distributed on the entire surface. At the same time, under the action of centrifugal force, the grinding liquid quickly diffuses on the surface of the grinding disk to form a dynamic balance. The existence of this thin film state helps to achieve uniform grinding of the plane of the quartz part. In this process, the flow rate and diffusion rate of the grinding liquid match, so that it forms a uniform film on the surface of the grinding disk without accumulating at a certain position. At the same time, this thin film of grinding liquid will not splash on the surface of the grinding disk, protecting the operating environment.

[0014] 2. This quartz component plane grinding monitoring device, through the coordinated use of a grinding disk structure, a guide groove structure, and a connecting plate structure, has a slower flow rate of the grinding liquid on the grinding disk surface than traditional grinding disk equipment. The connecting plate of the quartz component plane grinding monitoring device adopts a shape similar to a fan blade, so that the connecting plate can generate an upward suction force on the grinding liquid in the guide groove during rotation. When this suction force is superimposed on the centrifugal force generated by the grinding disk, the flow rate of the grinding liquid from the liquid flow groove to the guide groove can be further increased, and the extraction efficiency of the grinding liquid by the device can be improved, so that more grinding liquid can be quickly moved to the grinding disk surface, thereby forming a more uniform and dynamic film. When the flow rate of the grinding liquid on the grinding disk surface is increased, the liquid can diffuse faster on the surface and form a dynamic balance. This fast-flowing film helps to improve the grinding efficiency of quartz components, because the uniform and fast-flowing grinding liquid can more effectively carry away the tiny particles ground off and provide continuous lubrication and cooling.

[0015] 3. A quartz piece plane grinding monitoring device, through the coordinated use of a grinding disc structure, a guide groove structure, a connecting plate structure, a drain port structure, and a monitoring module structure, is compared with a traditional grinding disc device. When the grinding disc rotates at high speed, the grinding liquid will be pushed to the outer edge under the action of centrifugal force. If there is no effective guidance and control, the grinding liquid will splash into the surrounding environment, causing waste and pollution. The outermost connecting plate in the quartz piece plane grinding monitoring device adopts a design opposite to that of the inner connecting plate, that is, a vertical downward suction force is generated during the rotation process. This design makes it possible for the grinding liquid to be subjected to a downward suction force instead of being thrown out when the grinding liquid reaches the guide groove with the largest diameter. The guide groove is connected to the drain port, so that the grinding liquid can be discharged after being filtered and monitored by the monitoring module. This can not only effectively control the grinding liquid, prevent it from being thrown out of the grinding disc by centrifugal force, and prevent splashing, but also enable the grinding liquid to be discharged from the drain port and monitored by the detection module, providing real-time feedback and data support, ensuring the efficiency, stability and safety of the grinding process, optimizing the grinding effect, extending the life of the equipment, and reducing costs and resource consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the quartz piece plane grinding monitoring device in the present invention.

[0017] Figure 2 It is a structural front view of the quartz piece surface grinding monitoring device in the present invention.

[0018] Figure 3 It is a top view of the structure of the quartz piece surface grinding monitoring device in the present invention.

[0019] Figure 4 It is a structural cross-sectional view of the quartz piece surface grinding monitoring device in the present invention.

[0020] Figure 5 It is a schematic diagram of the bottom three-dimensional structure of the quartz piece plane grinding monitoring device in the present invention.

[0021] Figure 6 It is a top view of the local structure of the grinding disk of the quartz piece plane grinding monitoring device in the present invention.

[0022] Figure 7 It is a schematic diagram of the partial structure B of the quartz piece surface grinding monitoring device in the present invention.

[0023] Figure 8 It is a schematic diagram of the C local structure of the quartz piece surface grinding monitoring device in the present invention.

[0024] Fig. 9 It is a schematic diagram of the inclination direction of the guide groove structure of the quartz piece surface grinding monitoring device in the present invention.

[0025] Fig.10 It is a schematic diagram of the fan blade shape of the connecting plate structure of the quartz piece surface grinding monitoring device in the present invention.

[0026] Fig.11 It is a schematic diagram of the fan blade shape of the outermost connecting plate structure of the quartz piece surface grinding monitoring device in the present invention.

[0027] Fig.12 It is a cross-sectional view of the liquid storage tank structure of the quartz piece surface grinding monitoring device in the present invention.

[0028] In the figure: 1-support frame, 2-drive motor, 30-grinding disc, 31-guide groove, 32-connecting plate, 33-liquid flow groove, 4-sealing ring, 50-liquid storage tank, 51-infusion tube, 52-infusion ring, 60-drainage port, 61-monitoring module. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8A quartz part plane grinding monitoring device includes a grinding disc 30, a drive motor 2, and a support frame 1. The grinding disc 30 is rotatably set on the support frame 1. The support frame 1 provides a stable foundation to ensure that the grinding disc 30 will not shake or deviate during rotation, thereby ensuring the grinding accuracy. Directly installing the grinding disc 30 on the support frame 1 simplifies the overall structure, making the device more compact, and more convenient to install and maintain. A drive motor 2 is fixedly set at the bottom of the grinding disc 30 to drive its rotation. The drive motor 2 is fixedly mounted at the bottom of the support frame 1. Directly installing the drive motor 2 at the bottom of the grinding disc 30 effectively reduces the length and complexity of the transmission chain, improves the transmission efficiency, and reduces energy loss. This design makes the vertical space utilization of the equipment more reasonable and avoids the motor and transmission device occupying too much space. The motor is fixed at the bottom of the support frame 1, making the installation, disassembly and maintenance of the motor more convenient. A liquid flow groove 33 for passing the grinding liquid is provided between the lower surface of the grinding disc 30 and the upper surface of the support frame 1. The liquid flow groove 33 is used to convey the grinding liquid so that the grinding liquid can evenly enter the grinding disc 30, thereby ensuring that the grinding liquid is evenly distributed on the surface of the grinding disc 30. The continuous supply of grinding liquid can effectively cool and lubricate the grinding disc 30 and the workpiece, prevent overheating and wear, improve the grinding effect and extend the service life of the equipment. A sealing ring 4 is provided on the outside of the liquid flow groove 33. The main function of the sealing ring 4 is to prevent the grinding liquid from leaking during the conveying process, and ensure that the grinding liquid can accurately enter the surface of the grinding disc 30 instead of flowing to the outside of the equipment. Effective sealing can ensure that the grinding liquid is circulated in the system, improve the utilization efficiency of the grinding liquid and reduce waste. Please refer to Figure 3 and Figure 6 , a number of annular guide grooves 31 with successively increasing diameters and connected to the liquid flow grooves 33 are coaxially provided on the surface of the grinding disc 30. The design of the annular guide grooves 31 allows the grinding liquid to be evenly distributed to every area of ​​the grinding disc 30. Since the guide grooves 31 are connected to the liquid flow grooves 33, the grinding liquid can be evenly transported to the surface of the grinding disc 30 through these guide grooves 31, ensuring that the grinding liquid is evenly covered on the grinding disc 30, thereby achieving a more uniform grinding effect. When the grinding disc 30 rotates, the centrifugal force pushes the grinding liquid to the outer edge. The presence of the annular guide grooves 31 allows the grinding liquid to move along the guide grooves 31 under the action of centrifugal force, thereby forming a uniform liquid film on the surface of the grinding disc 30. This liquid film can effectively lubricate and cool the grinding disc 30 and the workpiece, thereby improving the grinding efficiency. A number of guide grooves 31 divide the grinding disc 30 into a number of annular grinding discs 30 with successively increasing diameters. Please refer to Figure 3 , Figure 6 , Figure 7 and Figure 8A plurality of connecting plates 32 are arranged in a circumferential array along the diameter direction between the plurality of annular grinding discs 30 to fix the adjacent annular grinding discs 30. The design of the connecting plates 32 can enhance the structural stability between the annular grinding discs 30, ensuring that each annular grinding disc 30 can maintain a stable working state during high-speed rotation; when the grinding disc 30 rotates, the grinding liquid in the guide groove 31 generates centrifugal force and flows vertically along the guide groove 31 to the surface of the grinding disc 30.

[0031] See also Figure 1 , Figure 4 , Figure 7 and Fig.12, the inner side of the liquid flow groove 33 is connected to a liquid supply module for conveying grinding liquid to the inside thereof. The liquid supply module can accurately control the supply amount of grinding liquid to avoid excessive or insufficient situations, thereby ensuring the uniform distribution of grinding liquid on the surface of the grinding disc 30 and improving grinding efficiency and effect. Through the design of the liquid supply module, the automatic delivery and recycling of grinding liquid can be realized, manual intervention can be reduced, and the automation and work efficiency of the equipment can be improved. The liquid supply module includes an infusion tube 51, a liquid storage bin 50, and an infusion ring 52. One end of the infusion tube 51 is connected to a container containing grinding liquid, and the other end of the infusion tube 51 is connected to the liquid storage bin 50. The infusion tube 51 connects the grinding liquid container and the liquid storage bin 50 to ensure that the grinding liquid can be continuously and stably supplied to the liquid storage bin 50, avoiding the interruption of the grinding liquid during the grinding process, thereby ensuring the continuity of the grinding process. Through the connection of the infusion tube 51, the system can automatically replenish the grinding liquid from the grinding liquid container to the liquid storage bin 50, reducing manual operations and improving work efficiency and automation. The top of the liquid storage tank 50 is fixedly arranged at the bottom of the support frame 1. The liquid storage tank 50 is annular in shape and is coaxially arranged with the grinding disc 30. The liquid storage tank 50 is fixed at the bottom of the support frame 1 and is designed to be annular and coaxially arranged with the grinding disc 30. This can effectively utilize the space inside the equipment, make the structure more compact, and save floor space. The annular liquid storage tank 50 can evenly supply liquid to the grinding disc 30, avoiding the problem of local excess or deficiency, ensuring that the grinding liquid is evenly distributed on the surface of the grinding disc 30, and improving the grinding effect. The infusion ring 52 is coaxially arranged with the grinding disc 30, and the infusion ring 52 is arranged between the support frame 1 and the axis of the grinding disc 30. The infusion ring 52 is fixedly arranged on the support frame 1, and one end of the infusion ring 52 is connected to the liquid storage tank 50, and the other end of the infusion ring 52 is connected to the liquid flow groove 33. The infusion ring 52 is coaxially arranged to ensure that the grinding liquid is evenly transported from the liquid storage tank 50 to the liquid flow groove 33 through the infusion ring 52, avoiding the problem of unstable liquid supply caused by rotation and centrifugal force. The infusion ring 52 is fixed on the support frame 1, so that the liquid delivery path is fixed and stable, reducing vibration and flow fluctuations during the liquid delivery process, and improving the liquid supply efficiency and stability. A liquid pump module is arranged on the infusion tube 51, and the liquid pump module can provide sufficient pressure to pump the grinding liquid from the container to the liquid storage tank 50 and the infusion ring 52, ensuring the smoothness of the liquid supply process, which is particularly important when long-distance or high-level delivery is required. The liquid pump module can realize automatic management of grinding liquid supply, reduce manual intervention, and improve work efficiency and equipment automation level.

[0032] See also Figure 4 , Figure 7 , Figure 8 and Fig.10The connecting plate 32 is in the shape of a fan blade as a whole, and when the grinding disc 30 drives the connecting plate 32 to rotate, the direction of the liquid flow generated by the connecting plate 32 is vertically upward. The connecting plate 32 is in the shape of a fan blade, similar to a fan blade. When the grinding disc 30 rotates, the fan-shaped connecting plate 32 can generate an upward suction force. This suction force is superimposed on the centrifugal force of the grinding disc 30, which can further increase the flow rate of the grinding liquid from the liquid flow groove 33 to the guide groove 31, so that more grinding liquid can be quickly moved to the surface of the grinding disc 30. The upward liquid flow direction helps to push the grinding liquid to the surface of the grinding disc 30, increase the coverage of the grinding liquid, ensure that the grinding liquid forms a uniform film on the surface of the grinding disc 30, and improve the grinding effect. Please refer to Fig. 9 The cross section of the guide groove 31 is an inclined parallelogram, and the inclination direction of the parallelogram is inclined along the direction of increasing diameter of the grinding disc 30. The inclined parallelogram cross section design can make the centrifugal force not only act in the horizontal direction, but also exert a component in the vertical direction, so that the grinding liquid moves upward along the inclined surface. This design helps the grinding liquid to spread quickly and be evenly distributed on the surface of the grinding disc 30. This inclined design can effectively guide the flow path of the grinding liquid on the surface of the grinding disc 30, so that it covers the entire surface more evenly, prevents the grinding liquid from accumulating at a certain position, and thus achieves uniform grinding of the quartz parts.

[0033] See also Figure 7 and Figure 8 The bottom of the sealing ring 4 is fixedly connected to the support frame 1. The sealing ring 4 can isolate the guide groove 31 with the largest diameter from other guide grooves 31, so that the guide groove 31 with the largest diameter can draw the grinding liquid on the surface of the grinding disk 30 downward when rotating. The diameter of the sealing ring 4 is smaller than the guide groove 31 with the largest diameter. The bottom of the guide groove 31 with the largest diameter is connected to a drain port 60. The bottom of the guide groove 31 with the largest diameter is connected to the drain port 60, so that the used grinding liquid can be discharged through the drain port 60 to avoid excessive accumulation of the grinding liquid on the grinding disk 30 and affect the grinding effect. The sealing ring 4 can effectively isolate the guide groove 31 with the largest diameter from other guide grooves 31 to prevent the grinding liquid from being thrown out by centrifugal force during high-speed rotation, causing waste and pollution. The design of the sealing ring 4 enables the guide groove 31 with the largest diameter to generate a downward suction force when rotating, and guide the grinding liquid to the drain port 60, which is filtered and monitored by the monitoring module 61 to improve the control and stability of the grinding process; please refer to Fig.11 The blade structure of the connecting plate 32 connected to the guide groove 31 with the largest diameter is opposite to that of the other connecting plates 32, and the direction of the liquid flow generated by the rotation is vertically downward. Figure 7A monitoring module 61 for monitoring and filtering the grinding liquid is provided in the liquid discharge port 60. The monitoring module 61 is connected to the liquid discharge port 60, so that the grinding liquid can be monitored and filtered in real time, and feedback data support can be provided to ensure the high efficiency, stability and safety of the grinding process, optimize the grinding effect, extend the life of the equipment, and reduce costs and resource consumption.

[0034] Working principle: When the equipment is used, first connect the infusion tube 51 to the container containing the grinding liquid, connect the discharge port 60 to the container of the reflux grinding liquid, and place the quartz piece to be ground on the grinding disc 30 so that the plane of the quartz piece to be ground is close to the surface of the grinding disc 30. Start the drive motor 2 to drive the grinding disc 30 to rotate. When the grinding disc 30 rotates, since the cross section of the guide groove 31 is an inclined parallelogram, and the inclination direction of the parallelogram is inclined along the direction of the increasing diameter of the grinding disc 30, when the guide groove 31 rotates with the grinding disc 30, centrifugal force will be generated, and the grinding liquid will be pushed to the outer edge under the action of the centrifugal force. The inclined design of the guide groove 31 makes this centrifugal force not only act on the horizontal direction of the liquid, but also exert a component in the vertical direction, so that the liquid moves upward along the inclined surface. After the grinding liquid moves to the surface of the grinding disc 30, it will continue to be affected by the centrifugal force and move along the surface of the grinding disc 30. The action of this centrifugal force makes the grinding liquid not concentrate at a certain point, but is continuously pushed to the outer edge in a ring shape, so as to be evenly distributed on the entire surface. At the same time, under the action of centrifugal force, the grinding liquid quickly diffuses on the surface of the grinding disc 30 to form a dynamic balance. The existence of this film state helps to achieve uniform grinding of the plane of the quartz piece. In this process, the flow rate and diffusion rate of the grinding liquid match each other, so that it forms a uniform film on the surface of the grinding disc 30 without accumulating at a certain position. Conventional equipment usually adopts a spray system, which sprays the grinding liquid evenly onto the surface of the grinding disc 30 through nozzles installed above or around the grinding disc 30. The grinding liquid sprayed by this structure does not evenly cover the entire grinding disc 30.

[0035] At the same time, when the grinding disc 30 rotates, the connecting plate 32 adopts a shape similar to a fan blade, so that the connecting plate 32 can generate an upward suction force on the grinding liquid in the guide groove 31 during the rotation process. When this suction force is superimposed on the centrifugal force generated by the grinding disc 30, the flow rate of the grinding liquid from the liquid flow groove 33 to the guide groove 31 can be further increased, and the extraction efficiency of the device for the grinding liquid can be improved, so that more grinding liquid can be quickly moved to the surface of the grinding disc 30, thereby forming a more uniform and more dynamic film. When the flow rate of the grinding liquid on the surface of the grinding disc 30 is increased, the liquid can spread faster on the surface and form a dynamic balance. This fast-flowing film helps to improve the grinding efficiency of quartz parts, because the uniform and fast-flowing grinding liquid can more effectively carry away the tiny particles ground off and provide continuous lubrication and cooling.

[0036] When the grinding disc 30 rotates at high speed, the grinding liquid will be pushed to the outer edge under the action of centrifugal force. If there is no effective guidance and control, the grinding liquid will splash into the surrounding environment, causing waste and pollution. The outermost connecting plate 32 in the device adopts a design opposite to the inner connecting plate 32, that is, a vertical downward suction force is generated during the rotation process. This design makes it possible for the grinding liquid to be subjected to a downward suction force instead of being thrown out when it reaches the guide groove 31 with the largest diameter. The guide groove 31 is then connected to the drain port 60, so that the grinding liquid can be discharged after being filtered and monitored by the monitoring module 61. This can not only effectively control the grinding liquid, prevent it from being thrown out of the grinding disc 30 by centrifugal force, and prevent splashing, but also enable the grinding liquid to be discharged from the drain port 60 and monitored by the detection module, providing real-time feedback and data support, ensuring the efficiency, stability and safety of the grinding process, optimizing the grinding effect, extending the life of the equipment, and reducing costs and resource consumption.

[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A quartz workpiece plane grinding monitoring device, comprising a grinding disc (30), a driving motor (2), and a support frame (1), wherein the grinding disc (30) is rotatably arranged on the support frame (1), and a driving motor (2) is fixedly arranged at the bottom of the grinding disc (30) to drive the grinding disc (30) to rotate, characterized in that: A liquid flow groove (33) for passing grinding liquid is arranged between the lower surface of the grinding disc (30) and the upper surface of the support frame (1); a sealing ring (4) is arranged on the outer side of the liquid flow groove (33); a plurality of annular guide grooves (31) with successively increasing diameters and connected to the liquid flow groove (33) are coaxially opened on the surface of the grinding disc (30); the plurality of guide grooves (31) divide the grinding disc (30) into a plurality of annular grinding discs (30) with successively increasing diameters; the plurality of annular grinding discs (30) are A plurality of connecting plates (32) for fixedly connecting adjacent annular grinding discs (30) are arranged in a circumferential array along the diameter direction of the discs (30); the cross section of the guide groove (31) is an inclined parallelogram, and the inclination direction of the parallelogram is inclined along the direction in which the diameter of the grinding disc (30) increases; when the grinding disc (30) rotates, the grinding liquid in the guide groove (31) generates centrifugal force and flows along the guide groove (31) in the vertical direction to the surface of the grinding disc (30).

2. A quartz surface grinding monitoring device according to claim 1, characterized in that: The inner side of the liquid flow groove (33) is connected to a liquid supply module for conveying grinding liquid into the inner side of the liquid flow groove (33), and the liquid supply module comprises a liquid infusion tube (51), a liquid storage tank (50), and a liquid infusion ring (52). One end of the liquid infusion tube (51) is connected to a container storing grinding liquid, and the other end of the liquid infusion tube (51) is connected to the liquid storage tank (50). The top of the liquid storage tank (50) is fixedly arranged at the bottom of the support frame (1). The liquid infusion ring (52) is coaxially arranged with the grinding disc (30), and the liquid infusion ring (52) is arranged between the axes of the support frame (1) and the grinding disc (30). The liquid infusion ring (52) is fixedly arranged on the support frame (1), and one end of the liquid infusion ring (52) is connected to the liquid storage tank (50), and the other end of the liquid infusion ring (52) is in communication with the liquid flow groove (33).

3. A quartz surface grinding monitoring device according to claim 1, characterized in that: The connecting plate (32) is in the shape of a fan blade as a whole, and when the grinding disc (30) drives the connecting plate (32) to rotate, the direction of the liquid flow generated by the connecting plate (32) is vertically upward.

4. A quartz surface grinding monitoring device according to claim 1, characterized in that: The bottom of the sealing ring (4) is fixedly connected to the support frame (1), and the diameter of the sealing ring (4) is smaller than the largest diameter of the guide groove (31), and the bottom of the largest diameter guide groove (31) is connected to a liquid discharge port (60); the connecting plate (32) connected to the largest diameter guide groove (31) has a fan blade structure in the opposite direction to the fan blade structure of the other connecting plates (32), and the direction of the liquid flow generated by the rotation is vertically downward.

5. A quartz surface grinding monitoring device according to claim 4, characterized in that: A monitoring module (61) for monitoring and filtering the grinding liquid is arranged in the liquid discharge port (60).

6. A quartz surface grinding monitoring device according to claim 2, characterized in that: The liquid storage bin (50) is annular in shape, and the liquid storage bin (50) is coaxially arranged with the grinding disc (30).

7. A quartz surface grinding monitoring device according to claim 2, characterized in that: The liquid infusion tube (51) is provided with a liquid pump module.

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