Microfluidic transfer substrate, microfluidic transfer device and microfluidic transfer equipment

Abstract

The present application discloses a microfluidic transfer substrate, a microfluidic transfer device and a microfluidic transfer equipment. The microfluidic transfer substrate includes: a plurality of first pixel units, a portion of the first pixel units are used as first microfluidic pixels and the first microfluidic pixels have through holes, and another portion of the first pixel units are used as second microfluidic pixels and the second microfluidic pixels do not have through holes; wherein each first microfluidic pixel is arranged adjacent to at least one second microfluidic pixel. By arranging the first microfluidic pixels to have through holes and each first microfluidic pixel to be arranged adjacent to at least one second microfluidic pixel, it is convenient to use the microfluidic transfer substrate to realize the preparation of the light-emitting device layer of the organic light-emitting diode display panel, facilitate improving the film-forming efficiency of the light-emitting device layer, and solve the problem of low film-forming efficiency of the light-emitting device layer of the organic light-emitting diode display panel in the prior art.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a microfluidic transfer substrate, a microfluidic transfer device and a microfluidic transfer equipment. Background Art

[0002] Organic Light Emitting Display (OLED) display panels have many advantages, such as self-luminescence, low driving voltage, high luminous efficiency, short response time, high clarity and contrast, nearly 180° viewing angle, wide operating temperature range, and the ability to achieve flexible display and large-area full-color display. They are recognized by the industry as the display device with the most development potential.

[0003] The structure of an organic light-emitting diode display panel generally includes: a substrate, an anode disposed on the substrate, a cathode disposed on the anode, and a light-emitting device layer sandwiched between the anode and the cathode. The preparation methods of the light-emitting device layer generally include vacuum thermal evaporation and solution film formation. Solution film formation is to process the required materials, such as dispersing them into nano-scale tiny particles, and then dissolving them in the corresponding solution to form ink, and then using a film-forming device to deposit the ink on the surface of the substrate. After the solvent evaporates, the required thin film can be formed on the surface of the substrate.

[0004] In the prior art, the specific methods of solution film formation can be further divided into inkjet printing, continuous printing, roller printing, spin coating, etc. The above film formation methods have the problem of low film formation efficiency. Summary of the invention

[0005] The present application mainly provides a microfluidic transfer substrate, a microfluidic transfer device and a microfluidic transfer equipment to solve the problem of low film forming efficiency of the light emitting device layer of the organic light emitting diode display panel in the prior art.

[0006] In order to solve the above technical problems, a technical solution adopted in the present application is to provide a microfluidic transfer substrate, comprising:

[0007] A plurality of first pixel units; a portion of the first pixel units are used as first microfluidic pixels and the first microfluidic pixels have through holes, and another portion of the first pixel units are used as second microfluidic pixels and the second microfluidic pixels do not have through holes;

[0008] Wherein, each of the first microfluidic pixels is arranged adjacent to at least one of the second microfluidic pixels.

[0009] In some embodiments, the plurality of first pixel units are divided into a plurality of pixel groups; wherein,

[0010] Each of the pixel groups consists of one of the first microfluidic pixels and one of the second microfluidic pixels; or

[0011] Each of the pixel groups is composed of a plurality of the first microfluidic pixels and one of the second microfluidic pixels.

[0012] In some embodiments, a plurality of the first pixel units are arranged in a two-dimensional array; wherein,

[0013] The first pixel units in odd-numbered rows are all the first microfluidic pixels, and the first pixel units in even-numbered rows are all the second microfluidic pixels and serve as transport channels; or

[0014] In every three adjacent rows of the first pixel units, the first pixel units in the two side rows are all the first microfluidic pixels, and the first pixel units in the middle row are all the second microfluidic pixels and serve as transport channels.

[0015] In some embodiments, a plurality of the first pixel units are arranged in a two-dimensional array; wherein, in each three adjacent rows of the first pixel units, the first pixel units in the adjacent row are all the second microfluidic pixels and serve as transport channels, and the first pixel units in the remaining two rows include a plurality of pixel groups alternately arranged along the row direction; each of the pixel groups is composed of three of the first microfluidic pixels and one of the second microfluidic pixels, and the three first microfluidic pixels in each of the pixel groups are adjacent to one of the second microfluidic pixels.

[0016] In some embodiments, the first pixel unit is rectangular, three first microfluidic pixels of each pixel group are adjacent to one side of one second microfluidic pixel respectively, and the graphics of two adjacent pixel groups are symmetrical in center.

[0017] In some embodiments, a plurality of the first pixel units are hexagonally closely packed, and the first pixel units are circular or regular hexagonal; wherein, in each three adjacent rows of the first pixel units, the first pixel units in an adjacent row are all the second microfluidic pixels and serve as transport channels, and the first pixel units in the remaining two rows include a plurality of pixel groups alternately arranged along the row direction; each of the pixel groups is composed of three of the first microfluidic pixels and one of the second microfluidic pixels, and the three first microfluidic pixels and one of the second microfluidic pixels are staggeredly arranged in two rows and two columns, and the three first microfluidic pixels in each of the pixel groups are adjacent to one of the second microfluidic pixels.

[0018] In some embodiments, the microfluidic transfer substrate has a transfer area and a droplet input area located on one side of the transfer area; a plurality of first pixel units are arranged in the transfer area; the droplet input area has a plurality of second pixel units, and the second pixel unit has the same structure as the second microfluidic pixel; wherein the droplet input area is connected to the transport channel for generating and transporting droplets to the transfer area.

[0019] In some embodiments, the first pixel unit includes a substrate, a thin film transistor, a first insulating layer, a planar layer, a microfluidic electrode layer, a second insulating layer, and a hydrophobic layer arranged in sequence;

[0020] The through hole sequentially penetrates the substrate, the first insulating layer, the flat layer, the microfluidic electrode layer, the second insulating layer and the hydrophobic layer, and is staggered with the thin film transistor.

[0021] In order to solve the above technical problems, a technical solution adopted in this application is to provide a microfluidic transfer device, comprising:

[0022] A microfluidic transfer substrate as described above;

[0023] A microfluidic control circuit, electrically connected to the microfluidic transfer substrate;

[0024] The microfluidic control circuit is used to control the droplet on the second microfluidic pixel to move into the through hole of the first microfluidic pixel.

[0025] In order to solve the above technical problems, a technical solution adopted in this application is to provide a microfluidic transfer device, comprising:

[0026] The microfluidic transfer device as described above; the microfluidic transfer device is aligned with the drive back plate when in use;

[0027] A sealing component, used for sealing the space on the side of the microfluidic transfer substrate away from the driving back plate, and / or for sealing the space between the microfluidic transfer substrate and the driving back plate;

[0028] The air pump is used to supply air to the space on the side of the microfluidic transfer substrate away from the driving back plate, and / or to evacuate air from the space between the microfluidic transfer substrate and the driving back plate.

[0029] The beneficial effects of the present application are as follows: Different from the prior art, the present application discloses a microfluidic transfer substrate, a microfluidic transfer device and a microfluidic transfer equipment. The microfluidic transfer substrate includes: a plurality of first pixel units, a portion of the first pixel units are used as first microfluidic pixels and the first microfluidic pixels have through holes, and another portion of the first pixel units are used as second microfluidic pixels and the second microfluidic pixels do not have through holes; wherein each first microfluidic pixel is arranged adjacent to at least one second microfluidic pixel. By arranging the first microfluidic pixel to have a through hole and each first microfluidic pixel to be arranged adjacent to at least one second microfluidic pixel, it is convenient to use the microfluidic transfer substrate to realize the preparation of the light-emitting device layer of the organic light-emitting diode display panel, facilitate improving the film-forming efficiency of the light-emitting device layer, and solve the problem of low film-forming efficiency of the light-emitting device layer of the organic light-emitting diode display panel in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0031] Figure 1 It is a structural schematic diagram of the first embodiment of the microfluidic transfer substrate provided by the present application;

[0032] Figure 2 It is a structural schematic diagram of the second embodiment of the microfluidic transfer substrate provided by the present application;

[0033] Figure 3 is a structural schematic diagram of a third embodiment of a microfluidic transfer substrate provided by the present application;

[0034] Figure 4 is a structural schematic diagram of a fourth embodiment of a microfluidic transfer substrate provided by the present application;

[0035] Figure 5 yes Figure 1 A schematic cross-sectional view of a provided microfluidic transfer substrate;

[0036] Figure 6 yes Figure 1 A cross-sectional schematic diagram of the process of transferring droplets on a microfluidic transfer substrate is provided;

[0037] Figure 7 It is a schematic diagram of the structure of the microfluidic transfer device provided in this application;

[0038] Figure 8 It is a structural schematic diagram of an embodiment of a microfluidic transfer device provided by the present application;

[0039] Fig. 9 is a schematic structural diagram of another embodiment of the microfluidic transfer device provided by the present application;

[0040] Fig.10 It is a schematic flow chart of the first embodiment of the method for transferring droplets provided by the present application;

[0041] Fig.11a yes Fig.10 A schematic diagram of the structure corresponding to step S2 in the provided method for transferring droplets;

[0042] Fig.11b yes Fig.11a AA cross-sectional diagram of ;

[0043] Fig.12a yes Fig.10 A schematic structural diagram corresponding to step S3 in an embodiment of the provided method for transferring droplets;

[0044] Figure 12b yes Fig.12a DD cross-sectional diagram;

[0045] Fig.13a yes Fig.10 A schematic structural diagram corresponding to step S4 in an embodiment of the provided method for transferring droplets;

[0046] Fig.13b yes Fig.13a EE cross-sectional diagram;

[0047] Fig.14 yes Fig.10 A schematic structural diagram corresponding to the first step S3 in another embodiment of the provided method for transferring droplets;

[0048] Fig.15 yes Fig.10 A schematic structural diagram corresponding to the first step S4 in another embodiment of the provided method for transferring droplets;

[0049] Fig.16 yes Fig.10 A schematic structural diagram corresponding to the second step S4 in another embodiment of the provided method for transferring droplets;

[0050] Fig.17 yes Fig.10 A schematic structural diagram corresponding to the first step S3 in another embodiment of the provided method for transferring droplets;

[0051] Fig.18 yes Fig.10 A schematic structural diagram corresponding to the first step S4 in another embodiment of the provided method for transferring droplets;

[0052] Fig.19 yes Fig.10 A schematic structural diagram corresponding to the second step S4 in another embodiment of the provided method for transferring droplets;

[0053] Fig. 20 yes Fig.10 A schematic structural diagram corresponding to the third step S4 in another embodiment of the provided method for transferring droplets;

[0054] Fig.21 yes Fig.10 A schematic structural diagram corresponding to an embodiment of step S1 in the provided method for transferring droplets;

[0055] Fig. 22 yes Fig.10 A schematic flow chart of an embodiment of a method for transferring droplets is provided;

[0056] Fig.23a yes Fig. 22 A structural schematic diagram corresponding to an implementation method of step S31;

[0057] Figure 23b yes Fig.23a FF cross-sectional diagram;

[0058] Fig.24a yes Fig. 22 A structural schematic diagram corresponding to an implementation method of step S32 in FIG.

[0059] Figure 24b yes Fig.24a Schematic diagram of HH cross section;

[0060] Fig.25a yes Fig. 22 A structural schematic diagram corresponding to an implementation method of step S33;

[0061] Fig.25b yes Fig.25a Schematic diagram of section II;

[0062] Fig.25c yes Fig.25b Schematic diagram of the cross section of the droplet after solidification;

[0063] Fig.26 yes Fig.10 A schematic flow chart of another embodiment of the method for transferring droplets is provided;

[0064] Fig. 27 yes Fig.26 A structural schematic diagram corresponding to an implementation method of step S302;

[0065] Fig.28is a schematic flow chart of a second embodiment of the method for transferring droplets provided by the present application;

[0066] Fig.29 yes Fig.28 A schematic structural diagram corresponding to an embodiment of step S4A in the provided method for transferring droplets;

[0067] Fig.30 yes Fig.28 A schematic structural diagram corresponding to an embodiment of step S5A in the provided method for transferring droplets;

[0068] Fig.31 yes Fig.28 A schematic structural diagram corresponding to another embodiment of step S5A in the provided method for transferring droplets;

[0069] Fig.32 is a schematic flow chart of a third embodiment of the method for transferring droplets provided by the present application;

[0070] Fig.33 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S2B in the provided method for transferring droplets;

[0071] Fig.34 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S3B in the provided method for transferring droplets;

[0072] Fig.35 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S4B in the provided method for transferring droplets;

[0073] Fig.36 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S5B in the provided method for transferring droplets.

[0074] Figure Number:

[0075] Microfluidic transfer device 1000; driving backplane 700; groove 701; substrate 702; pixel definition layer 703; anode 704; sub-pixel area 705; first sub-pixel area 706; second sub-pixel area 707; third sub-pixel area 708; air pump 500; sealing component 400; microfluidic transfer device 300; microfluidic control circuit 200; microfluidic transfer substrate 100; pixel group 1; first pixel unit 11; substrate 12; thin film transistor 13; gate metal layer 131; gate insulation layer 132; active layer 133; source and drain metal layer 134; first insulation layer 14; flat layer 15; via 151; microfluidic electrode layer 16; second insulation layer 17; hydrophobic layer 18; first microfluidic pixel 2; through hole 21; first A first microfluidic pixel 22 of a color; a first microfluidic pixel 23 of a second color; a first microfluidic pixel 24 of a third color; a second microfluidic pixel 3; a light-emitting device layer 4; a hole injection layer 41; a hole transport layer 42; an organic light-emitting layer 43; an electron transport layer 44; an electron injection layer 45; an organic light-emitting layer 431 of a first color; an organic light-emitting layer 432 of a second color; an organic light-emitting layer 433 of a third color; a droplet 5; a first droplet 51; a second droplet 52; a third droplet 53; a droplet input area Y; a transfer area Z; a droplet entry area J; a droplet generation area C; a first droplet generation area C1; a second droplet generation area C2; a third droplet generation area C3; a cleaning droplet generation area X; a blank area K; a second pixel unit 6; a cleaning droplet 7. DETAILED DESCRIPTION

[0076] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0077] The terms "first", "second", "third" in the embodiments of the present application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first", "second", "third" can expressly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or devices.

[0078] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0079] See also Figures 1 to 6 , Figure 1 is a schematic structural diagram of the first embodiment of the microfluidic transfer substrate provided by the present application, Figure 2 is a schematic structural diagram of a second embodiment of a microfluidic transfer substrate provided by the present application, Figure 3 is a schematic structural diagram of the third embodiment of the microfluidic transfer substrate provided by the present application, Figure 4 is a schematic structural diagram of a fourth embodiment of a microfluidic transfer substrate provided by the present application, Figure 5 yes Figure 1 A schematic cross-sectional view of a microfluidic transfer substrate is provided. Figure 6 yes Figure 1 A cross-sectional schematic diagram of the process of transferring droplets on a microfluidic transfer substrate is provided.

[0080] See also Figures 1 to 6 The present application provides a microfluidic transfer substrate 100, which includes a plurality of first pixel units 11, a portion of the first pixel units 11 serving as first microfluidic pixels 2 and having through holes 21, and another portion of the first pixel units 11 serving as second microfluidic pixels 3 and having no through holes 21, wherein each first microfluidic pixel 2 is arranged adjacent to at least one second microfluidic pixel 3.

[0081] It can be understood that by setting the first microfluidic pixel 2 of the microfluidic transfer substrate 100 to have a through hole 21 and each first microfluidic pixel 2 is arranged adjacent to at least one second microfluidic pixel 3, it is possible to facilitate the transfer of droplets 5 using the microfluidic transfer substrate 100 to prepare a light-emitting device layer on the driving backplane of the organic light-emitting diode display panel, thereby improving the film-forming efficiency of the light-emitting device layer and solving the problem of low film-forming efficiency of the light-emitting device layer of the organic light-emitting diode display panel in the prior art.

[0082] Specifically, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are divided into a plurality of pixel groups 1, see Figure 1 In some embodiments, each pixel group 1 is composed of a first microfluidic pixel 2 and a second microfluidic pixel 3. Figure 1As shown, in a specific embodiment, the number of the first microfluidic pixels 2 of the microfluidic transfer substrate 100 is the same as the number of the second microfluidic pixels 3 , and the first microfluidic pixels 2 and the second microfluidic pixels 3 are arranged in a one-to-one correspondence.

[0083] In a specific embodiment, Figure 1 As shown, the multiple first pixel units 11 of the microfluidic transfer substrate 100 are distributed in a two-dimensional array, and the first microfluidic pixel 2 and the second microfluidic pixel 3 of each pixel group 1 are located in the same column. In other embodiments, the first microfluidic pixel 2 and the second microfluidic pixel 3 of each pixel group 1 may also be located in the same row, or the multiple first pixel units 11 of the microfluidic transfer substrate 100 may not be distributed in an array, and the first microfluidic pixel 2 and the second microfluidic pixel 3 of each pixel group 1 may not be located in the same row or the same column.

[0084] See also Figure 2 In other embodiments, each pixel group 1 is composed of a plurality of first microfluidic pixels 2 and a second microfluidic pixel 3. Figure 2 As shown, in a specific embodiment, each pixel group 1 is composed of two first microfluidic pixels 2 and one second microfluidic pixel 3 , that is, two first microfluidic pixels 2 are arranged corresponding to one second microfluidic pixel 3 .

[0085] In a specific embodiment, Figure 2 As shown, the multiple first pixel units 11 of the microfluidic transfer substrate 100 are distributed in a two-dimensional array, and the two first microfluidic pixels 2 and one second microfluidic pixel 3 of each pixel group 1 are located in the same column, and one second microfluidic pixel 3 is located between the two first microfluidic pixels 2. In other embodiments, the two first microfluidic pixels 2 and one second microfluidic pixel 3 of each pixel group 1 may also be located in the same row, or the multiple first pixel units 11 of the microfluidic transfer substrate 100 may not be distributed in an array, and the two first microfluidic pixels 2 and one second microfluidic pixel 3 of each pixel group 1 may not be located in the same row or the same column.

[0086] See also Figure 1In some embodiments, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are arranged in a two-dimensional array, the first pixel units 11 of the odd rows are all first microfluidic pixels 2, and the first pixel units 11 of the even rows are all second microfluidic pixels 3 and serve as transport channels. It can be understood that the plurality of first pixel units 11 are arranged in a two-dimensional array, and the structures of the first pixel units 11 of the odd rows and the even rows are different. All the first pixel units 11 of the even rows are set as second microfluidic pixels 3 as transport channels, which can facilitate the transport of droplets 5 through the second microfluidic pixels 3 of the even rows, so that each second microfluidic pixel 3 of the even rows corresponding to each first microfluidic pixel 2 of the odd rows can be transferred with a corresponding droplet 5, thereby making it easier to transfer the droplets 5. In other embodiments, the first pixel units 11 in odd rows may all be set as second microfluidic pixels 3 and used as transport channels, and the first pixel units 11 in even rows may all be first microfluidic pixels 2 , so as to facilitate the transport and transfer of the droplets 5 .

[0087] See also Figure 2 In other embodiments, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are arranged in a two-dimensional array, and in each of the three adjacent rows of first pixel units 11, the first pixel units 11 in the two side rows are all first microfluidic pixels 2, and the first pixel units 11 in the middle row are all second microfluidic pixels 3 and serve as transport channels. It can be understood that the plurality of first pixel units 11 are arranged in a two-dimensional array, and the first pixel units 11 in the middle row of each of the three adjacent rows of first pixel units 11 are all second microfluidic pixels 3 and serve as transport channels, which can facilitate the transport of droplets 5 to the first microfluidic pixels 2 in the two side rows through the second microfluidic pixels 3 in the middle row, and is also beneficial to improving the pixel density of the first microfluidic pixels 2 of the microfluidic transfer substrate 100, thereby facilitating the improvement of the pixel density of the organic light emitting diode display panel.

[0088] See also Figure 3 In some embodiments, a plurality of first pixel units 11 are arranged in a two-dimensional array, and in each of three adjacent rows of first pixel units 11, the first pixel units 11 in an adjacent row are all second microfluidic pixels 3 and serve as transport channels, and the first pixel units 11 in the remaining two rows include a plurality of pixel groups 1 alternately arranged along the row direction, each pixel group 1 is composed of three first microfluidic pixels 2 and one second microfluidic pixel 3, and the three first microfluidic pixels 2 in each pixel group 1 are adjacent to one second microfluidic pixel 3.

[0089] It can be understood that the multiple first pixel units 11 are arranged in a two-dimensional array, and the first pixel units 11 in the upper row of each of the three adjacent rows are all set as second microfluidic pixels 3, and the three first microfluidic pixels 2 of each pixel group 1 are adjacent to a second microfluidic pixel 3. The second microfluidic pixels 3 in the upper row are used as transportation channels, and the droplets 5 can be transported to the three first microfluidic pixels 2 positions of the pixel group 1 via the second microfluidic pixels 3 in the upper row and a second microfluidic pixel 3 in each pixel group 1, so as to facilitate the transportation and transfer of the droplets 5; and the first pixel units 11 in the remaining two rows include multiple pixel groups 1 alternately arranged along the row direction, which can also further improve the density of the first microfluidic pixels 2 of the microfluidic transfer substrate 100, thereby facilitating the improvement of the pixel density of the organic light emitting diode display panel.

[0090] like Figure 3 As shown, in a specific embodiment, the first pixel unit 11 is rectangular, and the three first microfluidic pixels 2 of each pixel group 1 are adjacent to one edge of a second microfluidic pixel 3, and the graphics of two adjacent pixel groups 1 are centrally symmetrically arranged. That is, the three first microfluidic pixels 2 of each pixel group 1 are arranged corresponding to one edge of a second microfluidic pixel 3. Specifically, the multiple first pixel units 11 of the microfluidic transfer substrate 100 have the same shape and are all square. The four first pixel units 11 in each pixel group 1 are distributed in two rows and three columns, wherein the three first microfluidic pixels 2 are distributed in three columns, and one second microfluidic pixel 3 is located in the middle column, wherein two first microfluidic pixels 2 and one second microfluidic pixel 3 are distributed in the same row, and another first microfluidic pixel 2 is distributed in another row, and one second microfluidic pixel 3 in each pixel group 1 is surrounded by the three first microfluidic pixels 2 of the pixel group 1 and one second microfluidic pixel 3 located in a row on the side. In other embodiments, the first pixel unit 11 may also be set to any other shape such as a rectangle, a circle, a diamond, etc., as long as the droplet 5 can be transported through the second microfluidic pixels 3 in the next row to the first microfluidic pixels 2 in the remaining two rows of pixel groups 1.

[0091] See also Figure 4 In some embodiments, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are hexagonally closely packed, and the first pixel units 11 are circular or regular hexagonal, such as Figure 4As shown, exemplarily, the first pixel unit 11 is a regular hexagon. Among them, in each of three adjacent rows of first pixel units 11, the first pixel units 11 in the side row are all second microfluidic pixels 3 and serve as transport channels, and the first pixel units 11 in the remaining two rows include a plurality of pixel groups 1 alternately arranged along the row direction, each pixel group 1 is composed of three first microfluidic pixels 2 and one second microfluidic pixel 3, and the three first microfluidic pixels 2 and one second microfluidic pixel 3 are arranged in two rows and two columns in a staggered manner, and the three first microfluidic pixels 2 of each pixel group 1 are adjacent to one second microfluidic pixel 3.

[0092] like Figure 4 As shown, in a specific embodiment, the first pixel unit 11 is a regular hexagon, and the multiple pixel groups 1 in the other two rows each include four first pixel units 11, and the four first pixel units 11 are arranged in two rows and two columns in a staggered manner. The three first microfluidic pixels 2 of each pixel group 1 are respectively arranged corresponding to one edge of a second microfluidic pixel 3, and the three first microfluidic pixels 2 of each pixel group 1 correspond to three adjacent edges of a second microfluidic pixel 3, that is, the three first microfluidic pixels 2 of each pixel group 1 are arranged around a second microfluidic pixel 3, and a second microfluidic pixel 3 of each pixel group 1 is adjacent to the second microfluidic pixel 3 located in a row on the edge.

[0093] It can be understood that by setting the first pixel unit 11 to be circular or regular hexagonal, and the multiple first pixel units 11 are distributed in a hexagonal close-packed manner, the density of the first microfluidic pixels 2 in the multiple first pixel units 11 of the microfluidic transfer substrate 100 can be further improved, thereby facilitating the improvement of the pixel density of the organic light-emitting diode display panel. At the same time, the first pixel units 11 in the upper row are all second microfluidic pixels 3 and serve as transport channels, which can transport the droplets 5 through the second microfluidic pixels 3 in the upper row and one second microfluidic pixel 3 in each pixel group 1 to the three first microfluidic pixels 2 positions of the pixel group 1, thereby facilitating the transportation and transfer of the droplets 5.

[0094] See also Figures 1 to 4 In some embodiments, the microfluidic transfer substrate 100 has a transfer area Z and a droplet input area Y located on one side of the transfer area Z, a plurality of first pixel units 11 are disposed in the transfer area Z, and the droplet input area Y has a plurality of second pixel units 6, and the second pixel unit 6 has the same structure as the second microfluidic pixel 3. The droplet input area Y is connected to the transport channel for generating and transporting droplets 5 to the transfer area Z.

[0095] In some specific embodiments, Figures 1 to 4As shown, the microfluidic transfer substrate 100 includes a transfer zone Z and a droplet input zone Y. The droplet input zone Y includes two droplet entry zones J and two droplet generation zones C that are interconnected. The two droplet entry zones J are located on opposite sides of the transfer zone Z along the row direction and are connected to the transport channel of the transfer zone Z. The two droplet generation zones C are located on opposite sides of the transfer zone Z and the droplet entry zone J along the column direction. The droplet generation zone C is used to generate and transport droplets 5 to the droplet entry zone J. The droplet entry zone J is connected to the transport channel and is used to transport droplets 5 to the transfer zone Z. That is, the droplet entry zone J is only used to transport droplets 5 to the transfer zone Z, but does not generate droplets 5.

[0096] Specifically, both the droplet entry area J and the droplet generation area C have multiple second pixel units 6, the second pixel unit 6 has the same structure as the second microfluidic pixel 3, the multiple second pixel units 6 of the droplet generation area C are connected to the multiple second pixel units 6 of the droplet entry area J, the multiple second pixel units 6 of the droplet entry area J are connected to the transport channel of the transfer area Z, the droplet generation area C generates droplets 5 and transports the droplets 5 to the droplet entry area J, and the droplets 5 are transported to the position corresponding to the first microfluidic pixel 2 of the transfer area Z via the second pixel units 6 of the droplet entry area J and the transport channel of the transfer area Z.

[0097] For details, see Figures 1 to 3 In some embodiments, the first pixel unit 11 of the transfer zone Z is rectangular, and the plurality of first pixel units 11 are distributed in an array, and the plurality of second pixel units 6 of the droplet input zone Y, i.e., the droplet entry zone J and the droplet generation zone C, are also rectangular, and the plurality of second pixel units 6 of the droplet entry zone J and the droplet generation zone C and the plurality of first pixel units 11 of the transfer zone Z are distributed in an array together. Figure 4 In other embodiments, the first pixel unit 11 of the transfer zone Z is circular or a regular hexagon, and the multiple first pixel units 11 are distributed in a hexagonal close-packed manner, and the multiple second pixel units 6 of the droplet input zone Y, i.e., the droplet entry zone J and the droplet generation zone C are correspondingly circular or regular hexagonal, and the multiple second pixel units 6 of the droplet entry zone J and the droplet generation zone C and the multiple first pixel units 11 of the transfer zone Z are distributed in a hexagonal close-packed manner.

[0098] In other embodiments, the microfluidic transfer substrate 100 may not be provided with a droplet generation area C, but only with a droplet entry area J. The droplet entry area J may be located on one side of the transfer area Z or may be arranged around the transfer area Z. As long as the second pixel unit 6 of the droplet entry area J is connected to the transport channel of the droplet input area Y, the droplets 5 can be transported to the transport channel of the transfer area Z. Specifically, other structural parts may be used to directly generate the droplets 5 and transport the droplets 5 to the droplet entry area J. For example, the structural part may be a print head, which may be located above the microfluidic transfer substrate 100 to directly generate the droplets 5. The droplet 5 drops onto the droplet entry area J of the microfluidic transfer substrate 100, so that the droplet 5 is transported to the transport channel of the transfer area Z by the droplet entry area J; alternatively, the microfluidic transfer substrate 100 may not be provided with the droplet entry area J, and only the droplet generation area C may be provided, and the droplet generation area C is provided around the transfer area Z to directly generate and transport the droplet 5 to the transport channel of the transfer area Z; alternatively, the microfluidic transfer substrate 100 may not be provided with the droplet generation area C and the droplet entry area J, and other structural parts may be used to directly generate the droplet 5 and transport the droplet 5 to the transport channel of the transfer area Z, which can be designed as needed.

[0099] See also Figure 5 and Figure 6 In some embodiments, the first pixel unit 11 includes a substrate 12, a thin film transistor 13 (TFT), a first insulating layer 14, a flat layer 15, a microfluidic electrode layer 16, a second insulating layer 17 and a hydrophobic layer 18 arranged in sequence. In some embodiments, the microfluidic electrode layer 16 is a transparent conductive layer, and specifically, the microfluidic electrode layer 16 can be an indium tin oxide transparent conductive layer (ITO). Specifically, the through hole 21 sequentially penetrates the substrate 12, the first insulating layer 14, the flat layer 15, the microfluidic electrode layer 16, the second insulating layer 17 and the hydrophobic layer 18, and is staggered with the thin film transistor 13, so that when the droplet 5 is transferred using the microfluidic transfer substrate 100, the droplet 5 transported to the transfer area Z enters the through hole 21, and drips through the through hole 21 to the driving backplane located on one side of the microfluidic transfer substrate 100, completing the transfer of the droplet 5. In some embodiments, the microfluidic electrode layer 16 can also partially cover the side wall of the through hole 21.

[0100] Specifically, Figure 5 and Figure 6As shown, the thin film transistor 13 is arranged on the substrate 12, and the thin film transistor 13 includes a gate metal layer 131, a gate insulating layer 132, an active layer 133 and a source-drain metal layer 134 which are stacked in sequence. The gate insulating layer 132 is arranged on the side of the gate metal layer 131 away from the substrate 12 and covers the gate metal layer 131 and the substrate 12. The active layer 133 is arranged corresponding to the position of the gate metal layer 131 and partially covers the gate insulating layer 132. The source-drain metal layer 134 is arranged on the side of the active layer 133 away from the substrate 12 and covers part of the active layer 133 and the gate insulating layer 132. The source-drain metal layer 134 includes a source electrode (not marked in the figure) and a drain electrode (not marked in the figure) arranged at intervals, and a part of the active layer 133 is exposed at the interval between the source electrode and the drain electrode. The first insulating layer 14 is arranged on the side of the source-drain metal layer 134 away from the substrate 12 and covers the source-drain metal layer 134, the active layer 133 and the gate insulating layer 132. The flat layer 15, the microfluidic electrode layer 16, the second insulating layer 17 and the hydrophobic layer 18 cover the surface of the first insulating layer 14 away from the substrate 12. The flat layer 15 also has a via hole 151 spaced apart from the through hole 21, and the via hole 151 sequentially penetrates the flat layer 15 and the first insulating layer 14 and exposes a portion of the source and drain metal layer 134. The microfluidic electrode layer 16 covers the side wall of the via hole 151 and is in contact with the source and drain metal layer 134.

[0101] In other embodiments, the microfluidic transfer substrate 100 may also be configured in other forms, the first pixel unit 11 may be in any other shape, and multiple first pixel units 11 may be distributed at will, as long as each first microfluidic pixel 2 is arranged adjacent to at least one second microfluidic pixel 3 to facilitate the transfer of the droplet 5 through the second microfluidic pixel 3 to the through hole 21 of the first microfluidic pixel 2, and can be designed as needed.

[0102] See also Figure 7 , Figure 7 It is a schematic diagram of the structure of the microfluidic transfer device provided in this application.

[0103] See also Figure 7 The present application also provides a microfluidic transfer device 300, which includes a microfluidic transfer substrate 100 and a microfluidic control circuit 200, wherein the microfluidic transfer substrate 100 can be the microfluidic transfer substrate 100 in any of the above embodiments. The microfluidic control circuit 200 is electrically connected to the microfluidic transfer substrate 100, and the microfluidic control circuit 200 is used to control the droplet 5 on the second microfluidic pixel 3 of the microfluidic transfer substrate 100 to move to the through hole 21 of the first microfluidic pixel 2, so as to facilitate the transportation and transfer of the droplet 5, and then facilitate the use of the microfluidic transfer device 300 provided by the present application to transfer the droplet 5 to the driving backplane 700.

[0104] Specifically, the microfluidic control circuit 200 is also used to drive the movement of the droplets 5 on the microfluidic transfer substrate 100, so that the droplets 5 generated in the droplet input area Y enter the transport channel of the transfer area Z through the second pixel unit 6 of the droplet input area Y, and stay on the second microfluidic pixel 3 corresponding to the first microfluidic pixel 2, so as to facilitate the subsequent further control of the movement of the droplets 5 staying on the second microfluidic pixel 3.

[0105] See also Figures 8 to 9 , Figure 8 is a schematic structural diagram of an embodiment of a microfluidic transfer device provided by the present application, Fig. 9 It is a schematic structural diagram of another embodiment of the microfluidic transfer device provided in the present application.

[0106] See also Figure 8 and Fig. 9 The present application also provides a microfluidic transfer device 1000, which includes a microfluidic transfer device 300, a sealing assembly 400 and an air pump 500. The microfluidic transfer device 300 can be the microfluidic transfer device 300 described above. During the use of the microfluidic transfer device 300, the microfluidic transfer device 300 is aligned with the driving back plate 700. Specifically, the driving back plate 700 has a plurality of grooves 701. During the use of the microfluidic transfer device 300, the through holes 21 of the microfluidic transfer substrate 100 of the microfluidic transfer device 300 are aligned with the grooves 701 of the driving back plate 700, so that when the microfluidic transfer device 300 is used to transfer the droplets 5 to the driving back plate 700, the droplets 5 can drip into the grooves 701 of the driving back plate 700 through the through holes 21 of the microfluidic transfer substrate 100.

[0107] See also Figure 8 In some embodiments, the sealing component 400 is disposed on the side of the microfluidic transfer substrate 100 away from the driving back plate 700, and is used to seal the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700. The air pump 500 is used to supply air to the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700, so as to increase the air pressure in the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 sealed by the sealing component 400. The air pressure in the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 presses the droplets 5 in the through holes 21 of the microfluidic transfer substrate 100 away from the through holes 21, so that the droplets 5 moved into the through holes 21 of the microfluidic transfer substrate 100 can drip into the grooves 701 of the driving back plate 700 more smoothly and efficiently, so as to ensure the transfer effect of the droplets 5 and facilitate improving the transfer efficiency of the droplets 5.

[0108] See also Fig. 9In some embodiments, the sealing component 400 is disposed between the microfluidic transfer substrate 100 and the driving back plate 700. The sealing component 400 is used to seal the space between the microfluidic transfer substrate 100 and the driving back plate 700. The air pump 500 is used to evacuate the space between the microfluidic transfer substrate 100 and the driving back plate 700 to reduce the air pressure in the space between the microfluidic transfer substrate 100 and the driving back plate 700 sealed by the sealing component 400, and form a negative pressure in this space. The negative pressure in the space between the microfluidic transfer substrate 100 and the driving back plate 700 absorbs the droplets 5 in the through holes 21 of the microfluidic transfer substrate 100 away from the through holes 21, so that the droplets 5 moved into the through holes 21 of the microfluidic transfer substrate 100 can drip into the grooves 701 of the driving back plate 700 more smoothly and efficiently, so as to ensure the transfer effect of the droplets 5 and facilitate improving the transfer efficiency of the droplets 5.

[0109] In other embodiments, a sealing assembly 400 may be provided on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 and between the microfluidic transfer substrate 100 and the driving back plate 700. At the same time, two air pumps 500 may be provided at the same time, one air pump 500 being used to supply air to the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700, and the other air pump 500 being used to evacuate air from the space between the microfluidic transfer substrate 100 and the driving back plate 700. By simultaneously increasing the air pressure in the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 and reducing the air pressure in the space between the microfluidic transfer substrate 100 and the driving back plate 700, the efficiency of the droplets 5 in the through holes 21 of the microfluidic transfer substrate 100 dripping into the grooves 701 of the driving back plate 700 is further improved, further ensuring that the droplets 5 can drip into the grooves 701 of the driving back plate 700 more smoothly and efficiently, thereby improving the transfer efficiency of the droplets 5. Alternatively, a sealing assembly 400 may be provided on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 and between the microfluidic transfer substrate 100 and the driving back plate 700, but only one air pump 500 may be provided. Alternatively, the microfluidic transfer device 1000 may not be provided with a sealing assembly 400 and an air pump 500, and other methods may be used to accelerate the droplets 5 to fall off from the through hole 21, such as by electrostatic adsorption, so that the droplets 5 in the through hole 21 fall off from the through hole 21 and drip into the groove 701 of the driving back plate 700. It can be designed as needed, and this application is not limited thereto.

[0110] See also Figure 10 to Figure 13b , Fig.10 is a schematic flow chart of the first embodiment of the method for transferring droplets provided in the present application, Fig.11a yes Fig.10 A schematic diagram of the structure corresponding to step S2 in the provided method for transferring droplets, Fig.11b yes Fig.11aAA cross-section diagram, Fig.12a yes Fig.10 A schematic diagram of the structure corresponding to step S3 in an embodiment of the method for transferring droplets provided, Figure 12b yes Fig.12a DD cross-sectional diagram, Fig.13a yes Fig.10 A schematic structural diagram corresponding to step S4 in an embodiment of the method for transferring droplets provided, Fig.13b yes Fig.13a Schematic diagram of EE cross section.

[0111] See also Fig.10 The present application provides a method for transferring a droplet 5, that is, a method for preparing a display panel, for realizing the transfer of the droplet 5, and then preparing a display panel. Specifically, the method for transferring the droplet 5 includes:

[0112] S1: providing a microfluidic transfer substrate 100 .

[0113] Specifically, a microfluidic transfer substrate 100 is first provided. The microfluidic transfer substrate 100 may be the microfluidic transfer substrate 100 in any of the above embodiments, that is, may be Figures 1 to 4 The microfluidic transfer substrate 100 is any one of the above. Specifically, the microfluidic transfer substrate 100 includes a plurality of first pixel units 11, a portion of the first pixel units 11 are used as first microfluidic pixels 2 and the first microfluidic pixels 2 have through holes 21, and another portion of the first pixel units 11 are used as second microfluidic pixels 3 and the second microfluidic pixels 3 do not have through holes 21, wherein each first microfluidic pixel 2 is arranged adjacent to at least one second microfluidic pixel 3.

[0114] S2: Align the microfluidic transfer substrate 100 with the carrier substrate.

[0115] Specifically, a carrier substrate is provided, and the microfluidic transfer substrate 100 is aligned with the carrier substrate. Specifically, the microfluidic transfer substrate 100 has the same shape and size as the carrier substrate, the carrier substrate is located at the bottom of the microfluidic transfer substrate 100, and the droplet 5 is located at the top of the microfluidic transfer substrate 100, that is, the droplet 5 is located on the surface of the microfluidic transfer substrate 100 away from the carrier substrate. In this embodiment, the carrier substrate is taken as an example of a driving backplane 700. The driving backplane 700 has a groove 701. Specifically, the driving backplane 700 includes a substrate 702 and a pixel definition layer 703 arranged on the substrate 702, and an anode 704 located in a space defined by the pixel definition layer 703. The groove 701 is formed by surrounding the pixel definition layer 703 and the anode 704 of the driving backplane 700. The microfluidic transfer substrate 100 is aligned with the carrier substrate so that the through hole 21 of the microfluidic transfer substrate 100 is aligned with the groove 701 of the carrier substrate, i.e., the driving back plate 700 , to facilitate the subsequent transfer of the droplet 5 into the groove 701 of the driving back plate 700 .

[0116] Specifically, in one embodiment, after step S2, the following can be obtained: Fig.11a and Fig.11b The structure shown.

[0117] S3 : placing a droplet 5 on the second microfluidic pixel 3 .

[0118] Specifically, a droplet 5 is arranged on the second microfluidic pixel 3 of the microfluidic transfer substrate 100. In this embodiment, the droplet 5 containing an organic light-emitting material is taken as an example, and it can also be a droplet 5 containing a quantum dot light-emitting material, or a droplet 5 containing a color filter material. Specifically, the droplet 5 can be generated by the droplet input area Y of the microfluidic transfer substrate 100, and the droplet input area Y can transport the generated droplet 5 to the transport channel of the transfer area Z and transport it to the second microfluidic pixel 3 through the transport channel; or, other structural parts such as a print head can be used to directly generate the droplet 5 and transport the droplet 5 to the second microfluidic pixel 3 of the transfer area Z.

[0119] Among them, there is no time sequence for setting the droplet 5 on the second microfluidic pixel 3 as described in step S3 and aligning the microfluidic transfer substrate 100 with the supporting substrate as described in step S2, that is, step S3 and step S2 can be performed simultaneously, or step S3 can be performed after step S2, or step S2 can be performed after step S3.

[0120] S4: controlling the liquid droplet 5 on the second microfluidic pixel 3 to move into the through hole 21 of the first microfluidic pixel 2 , so that the liquid droplet 5 passes through the through hole 21 and drops onto the carrier substrate.

[0121] Specifically, the droplet 5 on the second microfluidic pixel 3 of the microfluidic transfer substrate 100 is controlled to move into the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 passes through the through hole 21 and drips onto the carrier substrate to complete the transfer of the droplet 5. Specifically, taking the carrier substrate as the driving backplane 700 as an example, the driving backplane 700 has a groove 701, and specifically, the groove 701 is formed by the pixel definition layer 703 and the anode 704 of the driving backplane 700, and the droplet 5 on the second microfluidic pixel 3 is controlled to move into the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 passes through the through hole 21 and drips into the groove 701 formed by the pixel definition layer 703 and the anode 704 of the carrier substrate, i.e., the driving backplane 700, to complete the transfer of the droplet 5.

[0122] Further, after the droplet 5 on the second microfluidic pixel 3 is controlled to move into the through hole 21 of the first microfluidic pixel 2, and the droplet 5 in the through hole 21 of the first microfluidic pixel 2 passes through the through hole 21 and drips into the groove 701 formed by the pixel definition layer 703 and the anode 704 of the carrier substrate, the droplet 5 in the groove 701 of the carrier substrate, i.e., the driving backplane 700, is dried. Specifically, light curing or thermal curing can be used to evaporate or volatilize the solvent in the droplet 5, so that the droplet 5 is transformed into a solid film structure. For example, the droplet 5 is a droplet 5 containing an organic light-emitting material, and the droplet 5 in the groove 701 is dried to form an organic light-emitting layer 43 in the groove 701.

[0123] In some embodiments, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are divided into a plurality of pixel groups 1, each pixel group 1 being composed of a first microfluidic pixel 2 and a second microfluidic pixel 3 (e.g. Figure 1 In the above method for transferring a droplet 5, in step S3, a droplet 5 may be firstly arranged on the second microfluidic pixel 3 of each pixel group 1, and then, in step S4, the droplets 5 on all the second microfluidic pixels 3 may be simultaneously driven to move into the through hole 21 of the corresponding first microfluidic pixel 2.

[0124] Specifically, in one embodiment, the microfluidic transfer substrate 100 is as follows Figure 1 For the microfluidic transfer substrate 100 shown in FIG. 1 , step S3 and step S4 are performed only once. After step S3, the following can be obtained: Fig.12a and Figure 12b After step S4, the structure shown in FIG. Fig.13a and Fig.13b The structure shown.

[0125] See also Figures 14 to 16 , Fig.14 yes Fig.10A schematic diagram of a structure corresponding to the first step S3 in another embodiment of the provided method for transferring droplets, Fig.15 yes Fig.10 A schematic diagram of a structure corresponding to the first step S4 in another embodiment of the provided method for transferring droplets, Fig.16 yes Fig.10 A schematic structural diagram of another embodiment of the method for transferring droplets provided herein corresponding to the second step S4.

[0126] In other embodiments, the plurality of first pixel units 11 of the microfluidic transfer substrate 100 are divided into a plurality of pixel groups 1, each pixel group 1 being composed of a plurality of first microfluidic pixels 2 and a second microfluidic pixel 3 (e.g. Figures 2 to 4 In the above method for transferring the droplet 5, step S3 and step S4 may be repeated alternately. Specifically, the above method for transferring the droplet 5 may include:

[0127] First, a droplet 5 is set on the second microfluidic pixel 3 of each pixel group 1; then, the droplets 5 on all the second microfluidic pixels 3 are driven to move to the through hole 21 of the first first microfluidic pixel 2 of multiple pixel groups 1; repeat the above steps to set a droplet 5 in the through hole 21 of each first microfluidic pixel 2 of each pixel group 1.

[0128] Specifically, in step S3, a droplet 5 may be firstly arranged on the second microfluidic pixel 3 of each pixel group 1, and then, in step S4, the droplets 5 on all the second microfluidic pixels 3 may be simultaneously driven to move into the through hole 21 of the first first microfluidic pixel 2 of the plurality of pixel groups 1; the above steps may be repeated, i.e., steps S3 and S4 may be repeated, and droplets 5 may be arranged in the through hole 21 of each first microfluidic pixel 2 of each pixel group 1. Steps S3 and S4 may be repeated alternately, so that droplets 5 may be arranged in the through hole 21 of each first microfluidic pixel 2 of each pixel group 1 in the end.

[0129] Specifically, in one embodiment, the microfluidic transfer substrate 100 is as follows Figure 2 In the microfluidic transfer substrate 100 shown in FIG. 1 , each pixel group 1 is composed of two first microfluidic pixels 2 and one second microfluidic pixel 3. Step S3 and step S4 need to be repeated twice alternately. After the first step S3, the following can be obtained: Fig.14 When step S4 is performed for the first time, the following can be obtained: Fig.15The structure shown; after the first step S4, the droplet 5 in the through hole 21 of the first first microfluidic pixel 2 of the pixel group 1 has dripped onto the corresponding position of the supporting substrate, i.e., the driving backplane 700, and there is no droplet 5 in the through hole 21 of the first first microfluidic pixel 2. Therefore, the structure obtained by the second step S3 is the same as the structure corresponding to the first step S3; when the step S4 is performed for the second time, the droplets 5 on all the second microfluidic pixels 3 are driven to move into the through hole 21 of the second first microfluidic pixel 2 of the plurality of pixel groups 1, and the structure shown as follows can be obtained. Fig.16 The structure shown.

[0130] See also Figures 17 to 20 , Fig.17 yes Fig.10 A schematic diagram of a structure corresponding to the first step S3 in another embodiment of the provided method for transferring droplets, Fig.18 yes Fig.10 A schematic diagram of a structure corresponding to the first step S4 in another embodiment of the provided method for transferring droplets, Fig.19 yes Fig.10 A schematic diagram of a structure corresponding to the second step S4 in another embodiment of the provided method for transferring droplets, Fig. 20 yes Fig.10 A schematic structural diagram of step S4 performed for the third time in another embodiment of the provided method for transferring droplets.

[0131] In another embodiment, the microfluidic transfer substrate 100 is as follows Figure 3 In the microfluidic transfer substrate 100 shown in FIG. 1 , each pixel group 1 is composed of three first microfluidic pixels 2 and one second microfluidic pixel 3. Step S3 and step S4 need to be repeated three times alternately. After the first step S3, the following can be obtained: Fig.17 The structure shown, specifically, the first pixel unit 11 in the adjacent row of each three adjacent rows of first pixel units 11 is a transport channel. In a specific embodiment, a droplet 5 is also provided on the second microfluidic pixel 3 in the transport channel in step S3, so that after the droplet 5 on the second microfluidic pixel 3 of pixel group 1 is moved into the through hole 21 of the first first microfluidic pixel 2 of pixel group 1 in step S4, the droplet 5 on the second microfluidic pixel 3 of the transport channel is immediately moved and supplemented to the second microfluidic pixel 3 of pixel group 1, which is beneficial to improve the transfer efficiency of the droplet 5. In other embodiments, in step S3, the droplet 5 may be provided only on the second microfluidic pixel 3 of pixel group 1, and the droplet 5 may not be provided on the second microfluidic pixel 3 in the adjacent row of each three adjacent rows of first pixel units 11 as the transport channel. When step S4 is performed for the first time, the following can be obtained: Fig.18Similarly, after the first step S4, the droplet 5 in the through hole 21 of the first first microfluidic pixel 2 of the pixel group 1 has dripped onto the corresponding position of the supporting substrate, i.e., the driving backplane 700, and there is no droplet 5 in the through hole 21 of the first first microfluidic pixel 2. Therefore, the structure obtained by the second step S3 is the same as the structure corresponding to the first step S3; when the step S4 is performed for the second time, the droplets 5 on all the second microfluidic pixels 3 are driven to move into the through hole 21 of the second first microfluidic pixel 2 of the plurality of pixel groups 1, and the structure shown in FIG. Fig.19 Similarly, the structure obtained by the third step S3 is the same as the structure corresponding to the first step S3; when the third step S4 is performed, the droplets 5 on all the second microfluidic pixels 3 are driven to move to the through hole 21 of the third first microfluidic pixel 2 of the plurality of pixel groups 1, and the structure can be obtained as shown in FIG. Fig. 20 The structure shown.

[0132] In another embodiment, the microfluidic transfer substrate 100 is as follows Figure 4 In the microfluidic transfer substrate 100 shown in FIG. 1 , each pixel group 1 is composed of three first microfluidic pixels 2 and one second microfluidic pixel 3. Step S3 and step S4 need to be repeated three times alternately. The structures corresponding to the three steps of step S3 and step S4 can refer to the above Figures 17 to 20 The structure shown will not be described in detail here.

[0133] In some embodiments, after the step of controlling the droplet 5 on the second microfluidic pixel 3 to move into the through hole 21 of the first microfluidic pixel 2 in step S4, the method further includes:

[0134] The liquid droplets 5 are caused to fall off from the through holes 21 by air pressure.

[0135] Specifically, Figure 8 or Fig. 9 As shown, the microfluidic transfer substrate 100 and the driving back plate 700 are spaced apart. Figure 8 As shown, in some embodiments, a sealing component 400 is provided on the side of the microfluidic transfer substrate 100 away from the driving back plate 700, and the sealing component 400 seals the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700, and air is supplied to the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 by an air pump 500, that is, the top of the microfluidic transfer substrate 100 is inflated to increase the air pressure in the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 sealed by the sealing component 400, and the air pressure in the space on the side of the microfluidic transfer substrate 100 away from the driving back plate 700 presses the droplets 5 in the through holes 21 of the microfluidic transfer substrate 100 away from the through holes 21, so that the droplets 5 fall off from the through holes 21, thereby improving the transfer efficiency of the droplets 5.

[0136] like Fig. 9 As shown, in other embodiments, a sealing component 400 is provided between the microfluidic transfer substrate 100 and the driving back plate 700, and the sealing component 400 seals the space between the microfluidic transfer substrate 100 and the driving back plate 700, and the space between the microfluidic transfer substrate 100 and the driving back plate 700 is evacuated by an air pump 500, that is, the bottom of the microfluidic transfer substrate 100 is evacuated to reduce the air pressure in the space between the microfluidic transfer substrate 100 and the driving back plate 700 sealed by the sealing component 400, that is, a negative pressure is formed in this space, and the droplets 5 in the through holes 21 of the microfluidic transfer substrate 100 are sucked away from the through holes 21 by the negative pressure in the space between the microfluidic transfer substrate 100 and the driving back plate 700, so that the droplets 5 fall off from the through holes 21, thereby improving the transfer efficiency of the droplets 5.

[0137] In other embodiments, a sealing assembly 400 may be provided on the side of the microfluidic transfer substrate 100 facing away from the driving back plate 700 and between the microfluidic transfer substrate 100 and the driving back plate 700, and air may be inflated at the top of the microfluidic transfer substrate 100 and air may be evacuated at the bottom of the microfluidic transfer substrate 100, so that the droplets 5 fall off from the through holes 21 by air pressure, thereby improving the transfer efficiency of the droplets 5.

[0138] See also Figure 21 to Figure 27 , Fig.21 yes Fig.10 A schematic structural diagram corresponding to an embodiment of step S1 in the provided method for transferring droplets, Fig. 22 yes Fig.10 A schematic diagram of a process for transferring droplets according to an embodiment of the present invention is provided. Fig.23a yes Fig. 22 The structural diagram corresponding to the implementation method of step S31 in FIG. Figure 23b yes Fig.23a FF cross-sectional diagram, Fig.24a yes Fig. 22 The structural diagram corresponding to the implementation method of step S32 in FIG. Figure 24b yes Fig.24a Schematic diagram of HH cross section, Fig.25a yes Fig. 22 The structural diagram corresponding to the implementation method of step S33 in FIG. Fig.25b yes Fig.25a Schematic diagram of the II cross section, Fig.25c yes Fig.25b Schematic diagram of the cross section of the droplet after solidification. Fig.26 yes Fig.10 A schematic flow chart of another embodiment of the method for transferring droplets is provided, Fig. 27 yes Fig.26 A structural schematic diagram corresponding to an implementation method of step S302 in FIG.

[0139] In some other embodiments, the carrier substrate is a driving backplane 700, and the driving backplane 700 includes a plurality of sub-pixel areas 705, and the plurality of sub-pixel areas 705 include a plurality of first sub-pixel areas 706, a plurality of second sub-pixel areas 707, and a plurality of third sub-pixel areas 708. The plurality of first pixel units 11 of the microfluidic transfer substrate 100 are divided into a plurality of pixel groups 1, and each pixel group 1 is composed of three first microfluidic pixels 2 and one second microfluidic pixel 3 (e.g., Figure 3 , Figure 4 and Fig.21 As shown), in some embodiments, as Fig.21 As shown, the three first microfluidic pixels 2 are respectively a first microfluidic pixel 22 of a first color, a first microfluidic pixel 23 of a second color, and a first microfluidic pixel 24 of a third color.

[0140] In the above method for transferring the droplet 5, step S3 and step S4 can be performed alternately, such as Fig. 22 As shown, the method for transferring the droplet 5 may specifically be:

[0141] S31: First, a first liquid droplet 51 is set on the second microfluidic pixel 3 of each pixel group 1, and the first liquid droplet 51 contains an organic light-emitting material of a first color; at the same time, the first liquid droplets 51 on all the second microfluidic pixels 3 are driven to move into the through holes 21 of multiple first microfluidic pixels 22 of the first color, so that the first liquid droplet 51 drops on the first sub-pixel area 706.

[0142] Specifically, a first droplet 51 is arranged on the second microfluidic pixel 3 of each pixel group 1 of the microfluidic transfer substrate 100, and the first droplet 51 contains an organic light-emitting material of a first color. At the same time, the first droplets 51 on all the second microfluidic pixels 3 are driven to move into the through holes 21 of multiple first microfluidic pixels 22 of the first color, so that the first droplet 51 falls on the first sub-pixel area 706.

[0143] Specifically, in one embodiment, Fig.21 As shown, the microfluidic transfer substrate 100 has a transfer area Z and a droplet input area Y located on one side of the transfer area Z, a plurality of first pixel units 11 are arranged in the transfer area Z, and the droplet input area Y includes a droplet entry area J and a first droplet generation area C1, a second droplet generation area C2, and a third droplet generation area C3 respectively connected to the droplet entry area J. The transfer area Z also has a transport channel, the transport channel includes a plurality of second microfluidic pixels 3, and each pixel group 1 is connected to the droplet entry area J through the transport channel. The step of setting a first droplet 51 on the second microfluidic pixel 3 of each pixel group 1 in step S31 includes:

[0144] The first droplet 51 is generated by the first droplet generation area C1 , and the first droplet 51 is moved to the second microfluidic pixel 3 of the pixel group 1 through the droplet entry area J and the transport channel.

[0145] Specifically, the first droplet generating area C1 is used to generate a first droplet 51 containing an organic light-emitting material of a first color. The first droplet generating area C1 is connected to the droplet entering area J, and the first droplet 51 is moved to the second microfluidic pixel 3 of each pixel group 1 through the transport channel of the droplet entering area J and the transfer area Z.

[0146] In some implementations, after step S31, the following can be obtained: Fig.23a and Figure 23b The structure shown.

[0147] S32: Secondly, a second droplet 52 is arranged on the second microfluidic pixel 3 of each pixel group 1, and the second droplet 52 contains an organic light-emitting material of a second color; at the same time, the second droplets 52 on all the second microfluidic pixels 3 are driven to move into the through holes 21 of the plurality of first microfluidic pixels 23 of the second color, so that the second droplet 52 drops on the second sub-pixel area 707.

[0148] Specifically, after the first droplet 51 is moved into the through hole 21 of multiple first microfluidic pixels 22 of the first color and the first droplet 51 falls on the first sub-pixel area 706, a second droplet 52 is set on the second microfluidic pixel 3 of each pixel group 1, and the second droplet 52 contains an organic light-emitting material of the second color. The second droplets 52 on all the second microfluidic pixels 3 are simultaneously driven to move into the through hole 21 of multiple first microfluidic pixels 23 of the second color, so that the second droplet 52 falls on the second sub-pixel area 707.

[0149] Similarly, in some embodiments, the step of setting a second droplet 52 on the second microfluidic pixel 3 of each pixel group 1 in step S32 includes:

[0150] The second droplet 52 is generated by the second droplet generation area C2 , and is moved to the second microfluidic pixel 3 of the pixel group 1 through the droplet entry area J and the transport channel.

[0151] Specifically, the second droplet generating area C2 is used to generate second droplets 52 containing an organic light-emitting material of a second color. The second droplet generating area C2 is connected to the droplet entering area J, and the second droplet 52 is moved to the second microfluidic pixel 3 of each pixel group 1 through the transport channel of the droplet entering area J and the transfer area Z.

[0152] In some implementations, after step S32, the following can be obtained: Fig.24a and Figure 24bThe structure shown.

[0153] S33: Then, a third liquid droplet 53 is arranged on the second microfluidic pixel 3 of each pixel group 1, and the third liquid droplet 53 contains an organic light-emitting material of a third color; at the same time, the third liquid droplets 53 on all the second microfluidic pixels 3 are driven to move into the through holes 21 of the plurality of first microfluidic pixels 24 of the third color, so that the third liquid droplet 53 drops on the third sub-pixel area 708.

[0154] After the second droplet 52 is moved into the through-hole 21 of the multiple first microfluidic pixels 23 of the second color and the second droplet 52 drops on the first sub-pixel area 706, a third droplet 53 is arranged on the second microfluidic pixel 3 of each pixel group 1, and the third droplet 53 contains an organic light-emitting material of the third color. The third droplet 53 on all the second microfluidic pixels 3 is simultaneously driven to move into the through-hole 21 of the multiple first microfluidic pixels 24 of the third color, so that the third droplet 53 drops on the third sub-pixel area 708.

[0155] Similarly, in some embodiments, the step of setting a third droplet 53 on the second microfluidic pixel 3 of each pixel group 1 in step S33 includes:

[0156] A third droplet 53 is generated by the third droplet generation zone C3 , and the third droplet 53 is moved to the second microfluidic pixel 3 of the pixel group 1 through the droplet entry zone J and the transport channel.

[0157] Specifically, the third droplet generating area C3 is used to generate third droplets 53 containing an organic light-emitting material of a third color. The third droplet generating area C3 is connected to the droplet entering area J, and the third droplet 53 is moved to the second microfluidic pixel 3 of each pixel group 1 through the transport channel of the droplet entering area J and the transfer area Z.

[0158] In some implementations, after step S33, the following can be obtained: Fig.25a and Fig.25b The structure shown.

[0159] Further, after the first droplet 51 is dropped into the first sub-pixel region 706, the solvent in the first droplet 51 can be directly removed to form an organic light-emitting layer 431 of a first color in the first sub-pixel region 706; after the second droplet 52 is dropped into the second sub-pixel region 707, the solvent in the second droplet 52 can be directly removed to form an organic light-emitting layer 432 of a second color in the second sub-pixel region 707; after the third droplet 53 is dropped into the third sub-pixel region 708, the solvent in the third droplet 53 can be directly removed to form an organic light-emitting layer 432 of a second color in the third sub-pixel region 708. Alternatively, after the first liquid droplet 51 is dropped into the first sub-pixel area 706, the second liquid droplet 52 is dropped into the second sub-pixel area 707, and the third liquid droplet 53 is dropped into the third sub-pixel area 708, the first liquid droplet 51, the second liquid droplet 52, and the third liquid droplet 53 are uniformly dried by light curing or heat curing to remove the solvent of the first liquid droplet 51, the second liquid droplet 52, and the third liquid droplet 53, so as to respectively form the organic light emitting layer 431 of the first color, the organic light emitting layer 432 of the second color, and the organic light emitting layer 433 of the third color (such as Fig.25c can be designed as required.

[0160] In some embodiments, Fig.21 As shown, the droplet input area Y also includes a cleaning droplet generation area X connected to the droplet entry area J. The cleaning droplet generation area X is located on one side of the droplet entry area J. Fig.26 As shown, before the step of moving the droplet 5 to the second microfluidic pixel 3 of the pixel group 1 through the droplet entry area J and the transport channel in the above steps S31, S32 and S33, the following steps are also included:

[0161] S301: The cleaning droplet generation area X generates cleaning droplets 7 .

[0162] Specifically, the cleaning droplets 7 are generated by the cleaning droplet generation area X. The cleaning droplets 7 do not contain any functional layer material and are only used to clean the microfluidic transfer substrate 100 .

[0163] S302 : Control the cleaning droplets 7 to clean the transport channel and the second microfluidic pixel 3 of the pixel group 1 .

[0164] Specifically, the cleaning droplets 7 generated in the cleaning droplet generation area X are controlled to clean the transport channel and the second microfluidic pixel 3 of the pixel group 1, and the transport channel of the transfer area Z and the second microfluidic pixel 3 of the pixel group 1 are cleaned, so that other droplets containing functional layer materials can be avoided to remain on the transport channel of the transfer area Z and the second microfluidic pixel 3 of the pixel group 1, thereby affecting the subsequent transfer of the first droplet 51, the second droplet 52 and the third droplet 53, and avoiding other residual droplets containing functional layer materials mixed in the first droplet 51, the second droplet 52 and the third droplet 53 during the transfer process, thereby affecting the structure of the prepared first color organic light-emitting layer 431, the second color organic light-emitting layer 432, and the third color organic light-emitting layer 433, and affecting the luminescent properties of the organic light-emitting layers 43 of different colors.

[0165] Specifically, steps S301 and S302 may be performed before the first droplet 51 is moved to the second microfluidic pixel 3 of pixel group 1 through the droplet entry area J and the transport channel in step S31, before the second droplet 52 is moved to the second microfluidic pixel 3 of pixel group 1 through the droplet entry area J and the transport channel in step S32, and before the third droplet 53 is moved to the second microfluidic pixel 3 of pixel group 1 through the droplet entry area J and the transport channel in step S33, so as to clean the droplet entry area J and the transport channel of the transfer area Z and the second microfluidic pixel 3 of the pixel group 1 before the first droplet 51, the second droplet 52 and the third droplet 53 are transferred to ensure the transfer effect.

[0166] In one embodiment, after step S302, the following can be obtained: Fig. 27 The structure shown.

[0167] In some embodiments, Fig.21 As shown, the droplet input area Y further includes a blank area K connected to the droplet entry area J, wherein the step of controlling the cleaning droplet 7 to clean the transport channel and the second microfluidic pixel 3 of the pixel group 1 in step S302 further includes:

[0168] The cleaning liquid droplets 7 are controlled to enter the blank area K.

[0169] Specifically, Fig.21As shown, in one embodiment, the two droplet entry areas J are located on opposite sides of the transfer area Z, the two cleaning droplet generation areas X are respectively located on the side of the corresponding droplet entry area J away from the transfer area Z and are connected to the cleaning droplet generation area X, and the two blank areas K are also respectively located on the side of the corresponding droplet entry area J away from the transfer area Z, the blank area K is connected to the droplet entry area J, and is not connected to the cleaning droplet generation area X. After the cleaning droplets 7 are controlled to clean the transport channel and the second microfluidic pixel 3 of the pixel group 1, that is, after the cleaning droplets 7 of the two cleaning droplet generation areas X pass through the transport channel of the transfer area Z and the second microfluidic pixel 3 of the pixel group 1, the cleaning droplets 7 return to the blank area K, and the blank area K receives the cleaning droplets 7 after cleaning the transport channel and the second microfluidic pixel 3 of the pixel group 1, so as to avoid the cleaning droplets 7 after cleaning containing other functional layer materials and directly returning to the first droplet generation area C1, the second droplet generation area C2, and the third droplet generation area C3, or directly returning to the cleaning droplet generation area X, resulting in the first droplet generation area C1, the second droplet generation area C2, and the third droplet generation area C3 being mixed with other functional layer materials, or resulting in the cleaning droplets 7 of the cleaning droplet generation area X being mixed with other functional layer materials, thereby affecting the generation and transfer of the first droplet 51, the second droplet 52, and the third droplet 53 and the cleaning effect of the cleaning droplet 7 on the transport channel and the second microfluidic pixel 3 of the pixel group 1.

[0170] See also Figure 28 to Figure 31 , Fig.28 is a schematic flow chart of a second embodiment of the method for transferring droplets provided in the present application, Fig.29 yes Fig.28 A schematic structural diagram corresponding to an embodiment of step S4A in the provided method for transferring droplets, Fig.30 yes Fig.28 A schematic structural diagram corresponding to an embodiment of step S5A in the provided method for transferring droplets, Fig.31 yes Fig.28 A schematic structural diagram corresponding to another embodiment of step S5A in the method for transferring droplets is provided.

[0171] See also Fig.28 The present application also provides another method for transferring the droplets 5. In this embodiment, the carrier substrate is a driving backplane 700. The method for transferring the droplets 5 is used to prepare a display panel. Specifically, the method for transferring the droplets 5 includes:

[0172] S1A: Provide multiple microfluidic transfer substrates 100 with the same structure, and set a droplet 5 on the second microfluidic pixel 3 of each microfluidic transfer substrate 100, wherein the droplets 5 on different microfluidic transfer substrates 100 contain different functional layer materials, and the droplets 5 on the same microfluidic transfer substrate 100 contain the same functional layer material; the functional layer material is used to prepare the light-emitting device layer 4.

[0173] Specifically, a plurality of microfluidic transfer substrates 100 are provided, and the structures of the plurality of microfluidic transfer substrates 100 are the same. The microfluidic transfer substrate 100 may be the microfluidic transfer substrate 100 in any of the above embodiments. A droplet 5 is arranged on the second microfluidic pixel 3 of each microfluidic transfer substrate 100, and the specific method may refer to the method in step S3 of the first embodiment of the method for transferring the droplet 5, which will not be repeated here. Among them, the droplets 5 on different microfluidic transfer substrates 100 contain different functional layer materials, and the droplets 5 on the same microfluidic transfer substrate 100 contain the same functional layer material, that is, the droplets 5 on the same microfluidic transfer substrate 100 form the same functional layer on the driving backplane 700, and the droplets 5 on different microfluidic transfer substrates 100 form different functional layers on the driving backplane 700. The functional layer material is used to prepare the light-emitting device layer 4 in the groove 701 of the driving backplane 700.

[0174] Specifically, in some embodiments, Fig.30 As shown, the light-emitting device layer 4 in the groove 701 is specifically five layers, namely, a hole injection layer 41, a hole transport layer 42, an organic light-emitting layer 43, an electron transport layer 44, and an electron injection layer 45. The droplets 5 on different microfluidic transfer substrates 100 contain different functional layer materials to prepare different light-emitting device layers 4. Among them, the organic light-emitting layer 43 can be any one or more of an organic light-emitting layer 431 of a first color, an organic light-emitting layer 432 of a second color, and an organic light-emitting layer 433 of a third color. The first color, the second color, and the third color can be red (R), green (G), and blue (B), respectively.

[0175] S2A: Align the driving backplate 700 with the first microfluidic transfer substrate 100 .

[0176] Specifically, in this embodiment, the carrier substrate is a driving backplane 700, and the driving backplane 700 includes a plurality of sub-pixel regions 705. The driving backplane 700 is aligned with the first microfluidic transfer substrate 100 of the plurality of microfluidic transfer substrates 100 provided in step S1A, so that the plurality of through holes 21 of the first microfluidic transfer substrate 100 are aligned with the plurality of sub-pixel regions 705 of the driving backplane 700. The structure corresponding to step S2A can refer to the structure corresponding to step S2 in the first embodiment of the method for transferring droplets 5. Fig.11a and Fig.11b The structure shown will not be described in detail.

[0177] S3A: Control the liquid droplet 5 on the second microfluidic pixel 3 of the first microfluidic transfer substrate 100 to move into the through hole 21 of the first microfluidic pixel 2 , so that the liquid droplet 5 falls into the sub-pixel area 705 .

[0178] Specifically, after the driving back plate 700 is aligned with the first microfluidic transfer substrate 100 in S2A, the droplet 5 on the second microfluidic pixel 3 of the first microfluidic transfer substrate 100 is controlled to move into the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 falls into the sub-pixel area 705 of the driving back plate 700. The structure corresponding to step S3A can refer to the corresponding structure of step S4 in the first embodiment of the method for transferring the droplet 5. Fig.13a and Fig.13b The structure shown will not be described in detail.

[0179] S4A: removing the solvent of the droplet 5 and forming a functional layer in the sub-pixel region 705 .

[0180] Specifically, the droplets 5 dropped into the sub-pixel area 705 of the driving backplane 700 are dried and other operations are performed to remove the solvent of the droplets 5. For example, the droplets 5 in the sub-pixel area 705 are dried by thermal curing or photocuring, so that the solvent of the droplets 5 is evaporated or volatilized, and the droplets 5 are converted into a solid film layer, thereby forming a functional layer in the sub-pixel area 705 of the driving backplane 700.

[0181] In a specific embodiment, the droplet 5 on the second microfluidic pixel 3 of the first microfluidic transfer substrate 100 is a droplet 5 containing a hole injection material. The droplet 5 moves into the through hole 21 of the first microfluidic pixel 2 and drips into the sub-pixel area 705. After removing the solvent of the droplet 5, a hole injection layer 41 is formed in the sub-pixel area 705.

[0182] In one embodiment, after step S4A, the following can be obtained: Fig.29 The structure shown.

[0183] S5A: Align the driving backplane 700 with other microfluidic transfer substrates 100 in turn, drop the droplets 5 on other microfluidic transfer substrates 100 into the sub-pixel area 705 in turn and remove the solvent of the droplets 5, so as to form multiple stacked functional layers in the sub-pixel area 705.

[0184] Specifically, the driving backplane 700 is aligned with other microfluidic transfer substrates 100 provided in step S1A in sequence, and the droplets 5 on other microfluidic transfer substrates 100 are sequentially dropped into the sub-pixel area 705 and the solvent of the droplets 5 is removed, so as to form a plurality of stacked functional layers in the sub-pixel area 705, so as to finally form the light-emitting device layer 4. It should be noted that the driving backplane 700 is aligned with one of the microfluidic transfer substrates 100, and the droplets 5 on the microfluidic transfer substrate 100 are dropped into the sub-pixel area 705 and the solvent of the droplets 5 is removed. After the corresponding functional layer is formed in the sub-pixel area 705, the driving backplane 700 is aligned with the next microfluidic transfer substrate 100, and subsequent steps are performed to sequentially form different stacked functional layers, instead of first sequentially dropping the droplets 5 on all the microfluidic transfer substrates 100 into the sub-pixel area 705, and then removing the solvent of the droplets 5 to form the stacked functional layer, i.e., the light-emitting device layer 4.

[0185] For example, in one specific embodiment, step S1A provides five microfluidic transfer substrates 100 with the same structure, which are respectively used to prepare a hole injection layer 41, a hole transport layer 42, an organic light-emitting layer 43, an electron transport layer 44, and an electron injection layer 45 in the sub-pixel area 705 of the driving backplane 700.

[0186] Specifically, in step S4A, after removing the solvent of the droplet 5 dripped from the first microfluidic transfer substrate 100 to the sub-pixel area 705 to form the hole injection layer 41, the driving backplane 700 is aligned with the second microfluidic transfer substrate 100, and the droplet 5 on the second microfluidic pixel 3 of the second microfluidic transfer substrate 100 is moved to the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 drips into the sub-pixel area 705. Specifically, the droplet 5 on the second microfluidic pixel 3 is a droplet 5 containing a hole transport material. The solvent of the droplet 5 is removed, and the hole injection layer 41 is formed in the sub-pixel area. A hole transport layer 42 is formed in the sub-pixel region 705 on one side of the hole injection layer 41; then, the driving backplane 700 is aligned with the third microfluidic transfer substrate 100, and the droplet 5 on the second microfluidic pixel 3 of the third microfluidic transfer substrate 100 is moved into the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 falls into the sub-pixel region 705. Specifically, the droplet 5 on the third microfluidic pixel is a droplet 5 containing an organic light-emitting material. The solvent of the droplet 5 is removed, and an organic light-emitting layer 43 stacked on one side of the hole transport layer 42 is formed in the sub-pixel region 705. The organic light-emitting layer 43 can be any one of the organic light-emitting layer 431 of the first color, the organic light-emitting layer 432 of the second color, and the organic light-emitting layer 433 of the third color; then, the driving backplane 700 is aligned with the fourth microfluidic transfer substrate 100, and the droplet 5 on the second microfluidic pixel 3 of the fourth microfluidic transfer substrate 100 is moved to the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 drops into the sub-pixel area 705. Specifically, the droplet 5 on the fourth microfluidic pixel is a droplet 5 containing an electron transport material, and the solvent of the droplet 5 is removed. 705, an electron transport layer 44 is formed in a stacked manner on one side of the organic light-emitting layer 43; finally, the driving backplane 700 is aligned with the fifth microfluidic transfer substrate 100, and the droplet 5 on the second microfluidic pixel 3 of the fifth microfluidic transfer substrate 100 is moved to the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 drops into the sub-pixel area 705. Specifically, the droplet 5 on the fifth microfluidic pixel is a droplet 5 containing an electron injection material. The solvent of the droplet 5 is removed, and an electron injection layer 45 is formed in a stacked manner on one side of the electron transport layer 44 in the sub-pixel area 705. After step S5A, the following can be obtained: Fig.30 The structure shown.

[0187] In other embodiments, step S1A may also provide other numbers of microfluidic transfer substrates 100. For example, step S1A may provide fifteen microfluidic transfer substrates 100. The multiple sub-pixel areas 705 of the driving backplane 700 may include multiple first sub-pixel areas 706, multiple second sub-pixel areas 707, and multiple third sub-pixel areas 708.

[0188] Specifically, the first microfluidic transfer substrate 100 to the fifth microfluidic transfer substrate 100 have the same structure and when aligned with the driving back plate 700, the multiple through holes 21 of the first microfluidic transfer substrate 100 to the fifth microfluidic transfer substrate 100 correspond one-to-one to the multiple first sub-pixel areas 706 of the driving back plate 700, so that the first microfluidic transfer substrate 100 to the fifth microfluidic transfer substrate 100 are aligned with the driving back plate 700 in sequence, and the droplets 5 on the first microfluidic transfer substrate 100 to the fifth microfluidic transfer substrate 100 are sequentially dropped into the multiple first sub-pixel areas 706 and the solvent of the droplets 5 are removed. , thereby sequentially forming a stacked hole injection layer 41, a hole transport layer 42, an organic light-emitting layer 431 of a first color, an electron transport layer 44, and an electron injection layer 45 in the multiple first sub-pixel regions 706; similarly, the sixth microfluidic transfer substrate 100 to the tenth microfluidic transfer substrate 100 have the same structure and when aligned with the driving backplane 700, the multiple through holes 21 of the sixth microfluidic transfer substrate 100 to the tenth microfluidic transfer substrate 100 correspond one-to-one to the multiple second sub-pixel regions 707 of the driving backplane 700, so as to sequentially align the sixth microfluidic transfer substrate 100 to the tenth microfluidic transfer substrate 100 with the driving backplane 700. The sixth microfluidic transfer substrate 100 to the tenth microfluidic transfer substrate 100 are aligned with the driving back plate 700, and the droplets 5 on the sixth microfluidic transfer substrate 100 to the tenth microfluidic transfer substrate 100 are sequentially dropped into the plurality of second sub-pixel areas 707 and the solvent of the droplets 5 is removed, thereby sequentially forming a stacked hole injection layer 41, a hole transport layer 42, an organic light-emitting layer 432 of a second color, an electron transport layer 44, and an electron injection layer 45 in the plurality of second sub-pixel areas 707; similarly, the eleventh microfluidic transfer substrate 100 to the fifteenth microfluidic transfer substrate 100 have the same structure and when aligned with the driving back plate 700, the eleventh microfluidic transfer substrate 100 to the fifteenth microfluidic transfer substrate The multiple through holes 21 of the board 100 all correspond one by one to the multiple third sub-pixel areas 708 of the driving backplane 700, so that by aligning the eleventh microfluidic transfer substrate 100 to the fifteenth microfluidic transfer substrate 100 with the driving backplane 700 in turn, the droplets 5 on the eleventh microfluidic transfer substrate 100 to the fifteenth microfluidic transfer substrate 100 are dropped into the multiple third sub-pixel areas 708 in turn and the solvent of the droplets 5 is removed, thereby forming a stacked hole injection layer 41, a hole transport layer 42, a third color organic light-emitting layer 433, an electron transport layer 44, and an electron injection layer 45 in the multiple third sub-pixel areas 708 in turn. That is, the colors of the organic light-emitting layers 43 prepared and formed in the first sub-pixel area 706, the second sub-pixel area 707 and the third sub-pixel area 708 of the driving backplane 700 are different. The first sub-pixel area 706 contains an organic light-emitting layer 431 of the first color, the second sub-pixel area 707 contains an organic light-emitting layer 432 of the second color, and the third sub-pixel area 708 contains an organic light-emitting layer 433 of the third color.In a specific implementation manner, after step S5A, the following can be obtained. Fig.31 The structure shown.

[0189] Different microfluidic transfer substrates 100 are used to transfer droplets 5 containing organic light-emitting materials of different colors to the first sub-pixel area 706 , the second sub-pixel area 707 and the third sub-pixel area 708 of the driving backplane 700 , so as to form three organic light-emitting layers 43 of different colors in three different sub-pixel areas 705 .

[0190] In other embodiments, the multiple sub-pixel areas 705 of the driving backplane 700 may include multiple first sub-pixel areas 706, multiple second sub-pixel areas 707 and multiple third sub-pixel areas 708. The same microfluidic transfer substrate 100 can be used to prepare the multiple first sub-pixel areas 706, multiple second sub-pixel areas 707 and multiple third sub-pixel areas 708 of the driving backplane 700 to form a hole injection layer 41; similarly, the same microfluidic transfer substrate 100 can also be used to prepare the multiple first sub-pixel areas 706, multiple second sub-pixel areas 707 and multiple third sub-pixel areas 708 of the driving backplane 700 to form a hole transport layer 42, an electron transport layer 44, and an electron injection layer 45. When only the organic light-emitting layer 431 of the first color is prepared in the plurality of first sub-pixel regions 706, the organic light-emitting layer 432 of the second color is prepared in the plurality of second sub-pixel regions 707, and the organic light-emitting layer 433 of the third color is prepared in the plurality of third sub-pixel regions 708, different microfluidic transfer substrates 100 are used for preparation, and while the organic light-emitting layers 43 of different colors are prepared on the driving backplane 700, the number of microfluidic transfer substrates 100 can be reduced, cost can be saved, and the transfer efficiency of the droplets 5 and the preparation efficiency of the display panel can be improved. The specific design can be based on the needs, and this application is not limited to this.

[0191] See also Figure 32 to Figure 36 , Fig.32 is a schematic flow chart of a third embodiment of the method for transferring droplets provided in the present application, Fig.33 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S2B in the provided method for transferring droplets, Fig.34 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S3B in the provided method for transferring droplets, Fig.35 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S4B in the provided method for transferring droplets, Fig.36 yes Fig.32 A schematic structural diagram corresponding to an embodiment of step S5B in the provided method for transferring droplets.

[0192] See also Fig.32The present application also provides another method for transferring the droplets 5. In this embodiment, the carrier substrate is a driving backplane 700. The method for transferring the droplets 5 is used to prepare a display panel. Specifically, the method for transferring the droplets 5 includes:

[0193] S1B: Provide multiple microfluidic transfer substrates 100 with the same structure, and set a droplet 5 on the second microfluidic pixel 3 of each microfluidic transfer substrate 100; wherein the droplets 5 on different microfluidic transfer substrates 100 contain different functional layer materials, and the droplets 5 on the same microfluidic transfer substrate 100 contain the same functional layer material; the functional layer material is used to prepare the light-emitting device layer 4.

[0194] Specifically, reference may be made to the specific manner of step S1A in the second embodiment of the method for transferring the droplet 5 , which will not be described in detail here.

[0195] S2B: Multiple microfluidic transfer substrates 100 are stacked and arranged at intervals on the same side of the driving back plate 700 and are aligned with the driving back plate 700 .

[0196] Specifically, different from the second embodiment of the method for transferring the droplet 5, in this embodiment, a plurality of microfluidic transfer substrates 100 are stacked at intervals on the same side of the driving back plate 700 and are aligned with the driving back plate 700. For example, in some embodiments, step S1B provides five microfluidic transfer substrates 100 with the same structure, and the five microfluidic transfer substrates 100 are stacked at intervals on the same side of the driving back plate 700 and are aligned with the driving back plate 700. Specifically, the plurality of through holes 21 of the five microfluidic transfer substrates 100 are aligned with the plurality of sub-pixel areas 705 of the driving back plate 700. A droplet 5 is arranged on the second microfluidic pixel 3 of each microfluidic transfer substrate 100, and the droplets 5 on the five microfluidic transfer substrates 100 contain different functional layer materials. For example, the droplets 5 on the five microfluidic transfer substrates 100 are droplets 5 containing hole injection materials, droplets 5 containing hole transport materials, droplets 5 containing organic light-emitting materials, droplets 5 containing electron transport materials, and droplets 5 containing electron injection materials. The droplets 5 containing organic light-emitting materials can be any one of droplets 5 containing organic light-emitting materials of a first color, droplets 5 containing organic light-emitting materials of a second color, and droplets 5 containing organic light-emitting materials of a third color.

[0197] In one embodiment, after step S2B, the following can be obtained: Fig.33 The structure shown.

[0198] S3B: controlling the liquid droplet 5 on the second microfluidic pixel 3 of the nearest microfluidic transfer substrate 100 to move into the through hole 21 of the first microfluidic pixel 2 , so that the liquid droplet 5 falls into the sub-pixel area 705 .

[0199] Specifically, the droplet 5 on the second microfluidic pixel 3 of the nearest microfluidic transfer substrate 100 is controlled to move into the through hole 21 of the first microfluidic pixel 2, so that the droplet 5 falls into the sub-pixel area 705. The nearest microfluidic transfer substrate 100 is the microfluidic transfer substrate 100 with the smallest distance from the driving backplane 700. In one embodiment, after step S3B, the following can be obtained: Fig.34 The structure shown.

[0200] S4B: removing the solvent of the droplet 5 and forming a functional layer in the sub-pixel region 705 .

[0201] Specifically, reference may be made to the specific manner of step S4A in the second embodiment of the method for transferring the droplet 5 , which will not be described in detail here.

[0202] In some embodiments, after step S4B, a hole injection layer 41 is formed in the sub-pixel region 705, and the following can be obtained: Fig.35 The structure shown.

[0203] S5B: In order from near to far, droplets 5 on other microfluidic transfer substrates 100 are sequentially dropped into the sub-pixel area 705 and the solvent of the droplets 5 is removed, thereby forming a plurality of stacked functional layers in the sub-pixel area 705 .

[0204] Specifically, in order from near to far, the droplets 5 on other microfluidic transfer substrates 100 are sequentially dropped into the sub-pixel area 705 and the solvent of the droplets 5 is removed, thereby forming a plurality of stacked functional layers in the sub-pixel area 705 .

[0205] In a specific embodiment, step S1B provides five microfluidic transfer substrates 100 with the same structure. The five microfluidic transfer substrates 100 are stacked at intervals on the same side of the driving backplate 700 and are aligned with the driving backplate 700. The droplets 5 on the five microfluidic transfer substrates 100 are droplets 5 containing hole injection materials, droplets 5 containing hole transport materials, droplets 5 containing organic light-emitting materials, droplets 5 containing electron transport materials, and droplets 5 containing electron injection materials. In order from near to far, droplets 5 containing hole transport materials are dropped into the sub-pixel area 705 and the solvent of droplets 5 is removed to form a hole transport layer 42 on one side of the hole injection layer 41; then, droplets 5 containing organic light-emitting materials are dropped into the sub-pixel area 705 and the solvent of droplets 5 is removed to form an organic light-emitting layer 43 on one side of the hole transport layer 42; then, droplets 5 containing electron transport materials are dropped into the sub-pixel area 705 and the solvent of droplets 5 is removed to form an electron transport layer 44 on one side of the organic light-emitting layer 43; finally, droplets 5 containing electron injection materials are dropped into the sub-pixel area 705 and the solvent of droplets 5 is removed to form an electron injection layer 45 on one side of the electron transport layer 44.

[0206] In one embodiment, after step S5B, the following can be obtained: Fig.36 The structure shown.

[0207] The above descriptions are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A microfluidic transfer substrate, characterized in that: include: A plurality of first pixel units; a portion of the first pixel units are used as first microfluidic pixels and the first microfluidic pixels have through holes, and another portion of the first pixel units are used as second microfluidic pixels and the second microfluidic pixels do not have through holes; Wherein, each of the first microfluidic pixels is arranged adjacent to at least one of the second microfluidic pixels.

2. The microfluidic transfer substrate according to claim 1, characterized in that: The plurality of the first pixel units are divided into a plurality of pixel groups; wherein, Each of the pixel groups consists of one of the first microfluidic pixels and one of the second microfluidic pixels; or Each of the pixel groups is composed of a plurality of the first microfluidic pixels and one of the second microfluidic pixels.

3. The microfluidic transfer substrate according to claim 1, characterized in that: The plurality of first pixel units are arranged in a two-dimensional array; wherein, The first pixel units in odd-numbered rows are all the first microfluidic pixels, and the first pixel units in even-numbered rows are all the second microfluidic pixels and serve as transport channels; or In every three adjacent rows of the first pixel units, the first pixel units in the two side rows are all the first microfluidic pixels, and the first pixel units in the middle row are all the second microfluidic pixels and serve as transport channels.

4. The microfluidic transfer substrate according to claim 1, characterized in that: A plurality of the first pixel units are arranged in a two-dimensional array; wherein, in each of three adjacent rows of the first pixel units, the first pixel units in the adjacent row are all the second microfluidic pixels and serve as transport channels, and the first pixel units in the remaining two rows include a plurality of pixel groups alternately arranged along the row direction; each of the pixel groups is composed of three of the first microfluidic pixels and one of the second microfluidic pixels, and the three first microfluidic pixels in each of the pixel groups are adjacent to one of the second microfluidic pixels.

5. The microfluidic transfer substrate according to claim 4, characterized in that: The first pixel unit is rectangular, the three first microfluidic pixels of each pixel group are adjacent to one side of one second microfluidic pixel respectively, and the graphics of two adjacent pixel groups are symmetrical in center.

6. The microfluidic transfer substrate according to claim 1, characterized in that: A plurality of the first pixel units are distributed in a hexagonal close-packed manner, and the first pixel units are circular or regular hexagonal; wherein, in each of three adjacent rows of the first pixel units, the first pixel units in an adjacent row are all the second microfluidic pixels and serve as transport channels, and the first pixel units in the remaining two rows include a plurality of pixel groups alternately arranged along the row direction; each of the pixel groups is composed of three of the first microfluidic pixels and one of the second microfluidic pixels, and the three of the first microfluidic pixels and one of the second microfluidic pixels are arranged in two rows and two columns in a staggered manner, and the three of the first microfluidic pixels in each of the pixel groups are adjacent to one of the second microfluidic pixels.

7. The microfluidic transfer substrate according to any one of claims 3 to 6, characterized in that: The microfluidic transfer substrate has a transfer area and a droplet input area located on one side of the transfer area; a plurality of first pixel units are arranged in the transfer area; the droplet input area has a plurality of second pixel units, and the second pixel units have the same structure as the second microfluidic pixels; wherein the droplet input area is connected to the transport channel for generating and transporting droplets to the transfer area.

8. The microfluidic transfer substrate according to any one of claims 1 to 6, characterized in that: The first pixel unit includes a substrate, a thin film transistor, a first insulating layer, a planar layer, a microfluidic electrode layer, a second insulating layer and a hydrophobic layer which are arranged in sequence; The through hole sequentially penetrates the substrate, the first insulating layer, the flat layer, the microfluidic electrode layer, the second insulating layer and the hydrophobic layer, and is staggered with the thin film transistor.

9. A microfluidic transfer device, characterized in that: include: The microfluidic transfer substrate according to any one of claims 1 to 8; A microfluidic control circuit, electrically connected to the microfluidic transfer substrate; The microfluidic control circuit is used to control the droplet on the second microfluidic pixel to move into the through hole of the first microfluidic pixel.

10. A microfluidic transfer device, characterized in that: include: The microfluidic transfer device according to claim 9; The microfluidic transfer device is aligned with the driving back plate when in use; A sealing component, used for sealing the space on the side of the microfluidic transfer substrate away from the driving back plate, and / or for sealing the space between the microfluidic transfer substrate and the driving back plate; The air pump is used to supply air to the space on the side of the microfluidic transfer substrate away from the driving back plate, and / or to evacuate air from the space between the microfluidic transfer substrate and the driving back plate.

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