A measurement method, compensation method and measurement system for mounting component deviation

Abstract

The present invention discloses a measurement method, compensation method and measurement system for the deviation of a mounted component, which relates to the field of chip mounting technology, and solves the technical problem that it is difficult to measure the deviation after mounting in photoelectric characteristic measurement, defective products are easily produced, and production costs are increased. The method comprises: photographing the first component through a first component upper visual system and a first component lower visual system to obtain the relative position of the upper surface alignment feature and the lower surface alignment feature of the first component; photographing the upper surface of the second component carried by the carrier table through a second visual system to obtain the relative position of the alignment feature of the upper surface of the second component; photographing the upper surface of the first component and the upper surface of the second component in the mounted component through a third visual system to obtain the deviation information of the first component and the second component in the mounted component. The present invention photographs the first component and the second component respectively to obtain the surface alignment features, and photographs the mounted component through the third visual system to obtain the deviation information, and the operation is simple and convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of chip mounting, and in particular to a method for measuring and compensating a mounting component deviation and a measuring system. Background Art

[0002] In the high-precision face-to-face placement of optoelectronic components (i.e. the chip pattern of the upper component faces downward and is placed on the positioning features of the upper surface of the lower component), the relative position of the two components after placement is required to be high. At present, the more advanced optoelectronic component placement needs to meet a relative position deviation of ≤±0.5 microns.

[0003] Since the two components will be mounted together with the corresponding positioning features on the surface after mounting, the two components are usually opaque structures, and the positioning features are completely or mostly blocked after mounting, making it difficult to measure the relative deviation between the two components immediately after mounting. The photoelectric characteristic measurement cannot judge the subtle differences. When the error is gradually magnified to the extent that the photoelectric characteristic measurement can measure during long-term use, many defective products have already been produced.

[0004] In the process of implementing the present invention, the inventors found that there are at least the following problems in the prior art:

[0005] The existing photoelectric characteristic measurement is difficult to measure the deviation of components after mounting in time, which is prone to defective products and increases production costs. Summary of the invention

[0006] The purpose of the present invention is to provide a measurement method, compensation method and measurement system for the deviation of a mounted component, so as to solve the technical problem that it is difficult to timely measure the deviation of a photoelectric component after mounting in the prior art, which is prone to defective products and increases production costs. The preferred technical solutions among the many technical solutions provided by the present invention can produce many technical effects as described below.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] The present invention provides a method for measuring the deviation of a mounted component, comprising the following steps: S10: photographing a first component through a first component upper visual system and a first component lower visual system, obtaining the upper surface shape features and the relative position of the alignment features, and the lower surface shape features and the relative position of the alignment features of the first component; the first component upper visual system and the first component lower visual system are obtained by spectroscopy by the same visual system, and photographing the first component simultaneously or separately; the alignment features are plane or three-dimensional geometric patterns, mark points, or laser light strips on the surface; S20: the second visual system photographs the upper surface of the second component carried by the carrier S30: the support table carries the mounted component after the first component and the second component are mounted, and the third visual system photographs the upper surface of the first component and the upper surface of the second component in the mounted component at one time, and calculates the deviation information of the first component and the second component in the mounted component through the relative positions of the upper surface alignment features and the lower surface alignment features of the first component and the relative positions of the upper surface alignment features of the second component, and the deviation information is calculated through the central axis, the symmetry axis, or the position reference line of the surface pattern of the first component and the second component.

[0009] Preferably, the support platform is provided with an X-axis motion axis, a Y-axis motion axis, and a rotational motion axis in the XoY plane.

[0010] Preferably, in step S10, the first component is sucked by a suction nozzle and placed between the first component upper vision system and the first component lower vision system for photographing.

[0011] Preferably, in step S10, the first component is placed on a transparent plate, and the first component upper vision system and the first component lower vision system respectively take photos from upper and lower sides of the transparent plate.

[0012] A method for compensating for component deviation is provided, which performs pre-compensation on deviation information obtained by a component deviation measurement method described in any one of the above items to obtain a component that meets a deviation condition, and comprises the following steps: S100: obtaining multiple groups of deviation information based on measurement of multiple components; S200: decomposing the multiple groups of deviation information into deviation distances dx in the X-axis direction and deviation distances dy in the Y-axis direction; S300: averaging the deviation distances dx and dy, respectively, to obtain average values ​​of the deviation distances dx and dy; S400: pre-moving a first component or a second component in the opposite direction along the X-axis direction and the Y-axis direction based on the average values ​​of the deviation distances dx and dy, and then mounting the first component and the second component.

[0013] Preferably, step S300 is replaced by S300': averaging the deviation distance dx and the deviation distance dy respectively to obtain the average value of the deviation distance dx, the average value of the deviation distance dy, and the angle value of the mutual deviation between the first element and the second element.

[0014] Preferably, S400 is replaced by S400': based on the average value of the deviation distance dx, the average value of the deviation distance dy, and the angle value of the mutual deviation between the first component and the second component, the first component or the second component is pre-rotated in the opposite direction in the XoY plane, and then the first component and the second component are mounted.

[0015] A system for measuring deviations of mounted components, used for running a method for measuring deviations of mounted components as described in any one of the above, comprising a first component upper visual system, a first component lower visual system, a second visual system, and a carrying platform, wherein the first component upper visual system and the first component lower visual system are relatively arranged above and below the first component, the second visual system is located above the second component, and the carrying platform is used to carry the second component.

[0016] Implementing one of the above technical solutions of the present invention has the following advantages or beneficial effects:

[0017] In the present application, two sets of visual systems are used to photograph the first component and the second component respectively to obtain the surface features of the first component and the second component, and the third visual system is used to photograph the mounted parts of the first component and the second component, so as to compare and obtain the deviation information of the mounted parts. The operation is simple and convenient, and it is easy to obtain the deviation information of the mounted parts as soon as possible in a timely manner, so as to perform pre-compensation operations based on the deviation information, and obtain the mounted parts in which the first component and the second component have no deviation from each other, which can reduce the proportion of defective products and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. It is obvious that the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0019] Figure 1 It is a flow chart of a method for measuring a mounting component deviation according to a first embodiment of the present invention;

[0020] Figure 2 The process of a method for compensating for a mounting component deviation according to the second embodiment of the present invention is as follows Figure 1 ;

[0021] Figure 3 The process of a method for compensating for a mounting component deviation according to the second embodiment of the present invention is as follows Figure 2 ;

[0022] Figure 4 is a schematic diagram of a system for measuring a deviation of a mounted component according to a third embodiment of the present invention;

[0023] In the figure: 1. Visual system above the first component; 2. Visual system below the first component; 3. First component; 4. Second visual system; 5. Second component; 6. Carrier; 7. Mounting component; 8. Mounting head; 9. Third visual system; 10. Suction nozzle. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention clearer, the various exemplary embodiments to be described below will refer to the corresponding drawings, which constitute a part of the exemplary embodiments, wherein various exemplary embodiments that may be used to implement the present invention are described. Unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation methods described in the following exemplary embodiments do not represent all implementation methods consistent with the present disclosure. It should be understood that they are only examples of processes, methods, devices, etc. that are consistent with some aspects of the present disclosure as detailed in the attached claims, and other embodiments may also be used, or the embodiments listed herein may be modified in structure and function without departing from the scope and essence of the present invention.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", etc. indicate the orientation or positional relationship based on the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the elements referred to must have a specific orientation, be constructed and operated in a specific orientation. The terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. The term "multiple" means two or more. The terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a communication connection, a direct connection, an indirect connection through an intermediate medium, and can be the internal connection of two elements or the interaction relationship between two elements. The term "and / or" includes any and all combinations of one or more related listed items. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0026] In order to illustrate the technical solution of the present invention, a specific embodiment is used below for description, and only the parts related to the embodiment of the present invention are shown.

[0027] Embodiment 1:

[0028] like Figure 1 , Figure 4As shown, the present invention provides a method for measuring the deviation of a mounted component, comprising the following steps. S10: photographing the first component 3 by means of a first component upper visual system 1 and a first component lower visual system 2, wherein the first component upper visual system 1 and the first component lower visual system 2 are both high-resolution cameras, such as microscope cameras, and together form a set of visual systems, so that the detailed features of the first component 3 can be photographed, such as the geometric shape of the first component 3, the direction and structure of the internal electrical circuit, etc., so as to confirm the relative position of the alignment feature in the first component 3 in the entire first component as an alignment feature, and obtain the upper surface shape feature and the relative position of the alignment feature, and the lower surface shape feature and the relative position of the alignment feature (the relative position The relative position of the alignment feature relative to the shape feature, such as the relative position of the alignment feature relative to a specific edge of the first element 3), the upper surface and the lower surface of the first element 3 have a variety of plane or three-dimensional geometric patterns, and the upper surface alignment feature and the lower surface alignment feature can be confirmed by these geometric patterns. The alignment feature can also be a mark point (an alignment feature obtained by marking the first element according to the mounting requirements), a laser light bar (alignment feature identification is assisted by laser light, and the operation efficiency is higher), and other business features, and then the relative position of the alignment feature of the first element 3 in the entire first element 3 can be obtained through the alignment feature. Preferably, the upper visual system 1 of the first element and the lower visual system 2 of the first element are arranged relatively, that is, the two are on the same connecting line, such as in the vertical direction, so that the upper surface and the lower surface of the first element 3 can be photographed synchronously to improve the shooting efficiency. S20: The second visual system 4 photographs the upper surface of the second component 5 carried by the supporting platform 6. The second visual system 4 is also a high-resolution camera, forming another set of visual systems to obtain the upper surface appearance features of the second component 5 and the relative position of the alignment features. Similar to the first component 3, the alignment features can be mark points, laser light bars, and in addition, the upper surface of the second component 5 also has a number of plane or three-dimensional geometric patterns. The features of these geometric patterns can also be used as alignment features to confirm the upper surface features of the second component 5, and then obtain the relative position of the alignment features in the appearance features of the second component 5. S30: The support table 6 supports the mounted component 7 after the first component 3 and the second component 5 are mounted (the specific mounting process of the first component 3 and the second component 5 is the existing technology, and the mounting is performed by the mounting head 8), and the third visual system 9 photographs the upper surface of the first component 3 and the upper surface of the second component 5 in the mounted component 7, and obtains the deviation information of the first component 3 and the second component 5 in the mounted component 7 through the relative positions of the alignment features of the upper surface of the first component 3 and the alignment features of the lower surface, and the relative positions of the alignment features of the upper surface of the second component 5. The deviation information is obtained by comparing the relative position information of the mounted component 7 with the correct relative position information of the first component 3 and the second component 5 after mounting.Based on the respective alignment features of the first component 3 and the second component 5, the relative position information of the first component 3 and the second component 5 in space can be obtained, that is, taking the alignment feature of the first component 3 or the second component 5 as a reference, the relative angle and distance deviation between the alignment feature of the other component and the reference alignment feature is the relative position information between the first component 3 and the second component 5. In the qualified products after the first component 3 and the second component 5 are mounted, the distance information and angle information between the alignment features of the two are the correct relative position information. Furthermore, the first element 3 and the second element 5 are usually regular geometric shapes, and the deviation information of the two elements can be calculated based on the corresponding central axis, symmetry axis and other auxiliary lines of the two elements (when the first element 3 and the second element 5 are irregular geometric shapes, their respective position reference lines can also be established based on the plane or three-dimensional geometric pattern information on the surface of the first element 3 and the second element 5, so that the deviation position information and angle information between the two elements can be determined based on the deviation of the position reference lines of the two elements). This deviation information is the relative position information of the two elements. The correct relative position information is the relative position information between the first element 3 and the second element 5 when the mounting part 7 is mounted as a qualified product (it can also be calculated based on the central axis, symmetry axis and position reference line of the first element 3 and the second element 5), so as to achieve reliable electrical, signal and other connections between the first element 3 and the second element 5. In this embodiment, two sets of visual systems are used to photograph the first component 3 and the second component 5 respectively, to obtain the surface features and alignment features of the first component 3 and the second component 5, and the third visual system 9 is used to photograph the mounted component 7 of the first component 3 and the second component 5, so as to compare and obtain the deviation information of the mounted component 7. The operation is simple and convenient, and it is easy to obtain the deviation information of the mounted component 7 as soon as possible, so as to perform pre-compensation operation based on the deviation information, and obtain the mounted component 7 of the first component 3 and the second component 5 without deviation from each other, which can reduce the proportion of defective products and reduce production costs.

[0029] As an optional embodiment, the carrier 6 is provided with an X-axis motion axis, a Y-axis motion axis, and a rotation motion axis of the XoY plane. After the first component 3 and the second component 5 are mounted, there is no deviation in the height direction, so only the three degrees of freedom of the X-axis, the Y-axis, and the XoY plane need to be adjusted to eliminate the relative deviation between the first component 3 and the second component 5. The three motion axes provided on the carrier 6 facilitate the use of the deviation information of the first component 3 and the second component 5 in the mounted component 7, and expand the function of the carrier 6. By moving the first component 3 and the second component 5, or rotating the first component 3 and the second component 5, the relative deviation between the first component 3 and the second component 5 is reduced, and the production and manufacturing requirements of the mounted component 7 are better met, so that the deviation information obtained by the present invention is better applied by the carrier 6 to reduce the proportion of unqualified mounted components 7.

[0030] As an optional implementation, in step S10, the first component 3 is sucked by a suction nozzle and placed between the upper visual system 1 of the first component and the lower visual system 2 of the first component for shooting. The suction nozzle facilitates the free adjustment of the spatial position of the first component 3, so that it is more convenient for the upper visual system 1 of the first component and the lower visual system 2 of the first component to accurately shoot. In step S10, the first component 3 is placed on a transparent plate, and after the transparent plate is placed horizontally, the upper surface and the lower surface of the first component 3 can be shot. It is particularly suitable for the first component 3 to be a sheet or plate structure. The upper visual system 1 of the first component and the lower visual system 2 of the first component shoot from the upper and lower sides of the transparent plate respectively, so that the upper surface features and the lower surface features of the first component 3 can be quickly obtained, and the operation is also relatively convenient.

[0031] As an optional implementation, in step S10, the first element upper visual system 1 and the first element lower visual system 2 are obtained by spectral splitting by the same visual system, and the first element 3 is photographed simultaneously or separately. Photographing by spectral splitting can save a set of cameras and reduce costs. At the same time, the same visual system is also convenient for operation and control, and the photographing operation of the first element 3 is also simpler.

[0032] As an optional implementation, in step S30, the third visual system 9 photographs the upper surface of the first component 3 and the upper surface of the second component 5 in the mounting component 7 at one time. Since the first component 3 and the second component 5 are both opaque components, the relative position between the first component 3 and the second component 5 in the mounting component 7 can be calculated by photographing once, thereby obtaining deviation information, reducing the number of photographing times, and making the measurement efficiency of this embodiment higher.

[0033] The embodiment is only a specific example and does not represent only one implementation mode of the present invention.

[0034] Embodiment 2:

[0035] A method for compensating for a deviation of a mounting component is provided, wherein the deviation information obtained by the method for measuring the deviation of a mounting component in the first embodiment is pre-compensated to obtain a mounting component 7 that meets the deviation condition, such as Figure 2As shown, the following steps are included: S100: Based on the measurement of multiple mounted parts 7, the specific number can be set as needed. The larger the sample size, the more statistically significant the obtained deviation information is, and multiple groups of deviation information are obtained. S200: The deviation information is mainly the deviation distance between the first component 3 and the second component 5. The multiple groups of deviation information are decomposed into the deviation distance dx in the X-axis direction and the deviation distance dy in the Y-axis direction. The X-axis direction and the Y-axis direction can be specifically defined according to the characteristics of the first component 3 and the second component 5 and the use requirements. The deviation distance dx and the deviation distance dy can be combined to obtain any distance in any direction. S300: The deviation distance dx and the deviation distance dy are averaged respectively to obtain the average value of the deviation distance dx and the average value of the deviation distance dy, so that the general deviation situation in the mounting operation can be obtained, which is convenient for compensation operation. S400: Pre-move the first component 3 or the second component 5 in the opposite direction along the X-axis direction and the Y-axis direction based on the average value of the deviation distance dx and the average value of the deviation distance dy, the average value of the deviation distance dx and the average value of the deviation distance dy are 3 units and 5 units respectively, and pre-move the first component 3 by -3 units along the X-axis direction and -5 units along the Y-axis direction. If the first component 3 and the second component 5 are mounted again, the mounted parts 7 of the first component 3 and the second component 5 without deviation can be obtained. Through the compensation operation, the qualified rate of the finished mounted parts 7 is improved and the production cost is reduced.

[0036] As an optional implementation, Figure 3 As shown, step S300 is replaced by S300': averaging dx and dy respectively to obtain the average value of the deviation distance dx, the average value of the deviation distance dy, and the angle value of the mutual deviation between the first component 3 and the second component 5. At this time, the first component 3 and the second component 5 produce an angle deviation during mounting, and need to be replenished by rotation. S400 is replaced by S400': based on the average value of the deviation distance dx, the average value of the deviation distance dy, and the angle value of the mutual deviation between the first component 3 and the second component 5, the first component 3 or the second component 5 is pre-rotated in the opposite direction in the XoY plane. For example, if the first component 3 and the second component 5 deviate from each other by 5 degrees, the first component 3 or the second component 5 is pre-rotated by -5 degrees, and then the first component 3 and the second component 5 are mounted, and the mounted component 7 of the first component 3 and the second component 5 without angle deviation can be obtained.

[0037] Embodiment three:

[0038] A system for measuring the deviation of a mounting component, used to run a method for measuring the deviation of a mounting component in the first embodiment, such as Figure 4As shown, it includes a visual system 1 on the first component, a visual system 2 under the first component, a second visual system 4, and a carrying platform 6. The visual system 1 on the first component and the visual system 2 under the first component are arranged relatively above and below the first component 3, and the second visual system 4 is located above the second component 5. The carrying platform 6 is used to carry the second component 5. The measuring system also includes a suction nozzle for adsorbing the first component 3, and a mounting head 8 for mounting the first component 3 and the second component 5. In this embodiment, two groups of visual systems are used to photograph the first component 3 and the second component 5 respectively to obtain the surface features of the first component 3 and the second component 5, and the third visual system 9 is used to photograph the mounted component 7 of the first component 3 and the second component 5, so as to compare and obtain the deviation information of the mounted component 7. The operation is simple and convenient, and it is convenient to obtain the deviation information of the mounted component 7 in a timely and early manner, so as to perform a pre-compensation operation based on the deviation information, and obtain the mounted component 7 of the first component 3 and the second component 5 without deviation from each other, which can reduce the proportion of defective products and reduce production costs.

[0039] The above description is only the preferred embodiment of the present invention. It is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application belong to the protection scope of the present invention.

Claims

1. A method for measuring the deviation of a mounted component, characterized in that: The following steps are involved: S10: photographing the first component through the first component upper visual system and the first component lower visual system to obtain the upper surface shape features and the relative positions of the alignment features, and the lower surface shape features and the relative positions of the alignment features of the first component; the first component upper visual system and the first component lower visual system are obtained by spectroscopy by the same visual system, and photographing the first component simultaneously or separately; the alignment features are plane or three-dimensional geometric patterns, mark points, or laser light strips on the surface; S20: the second vision system photographs the upper surface of the second component carried by the carrying platform to obtain the upper surface appearance features and the relative positions of the alignment features of the second component; S30: The support table supports the mounted component after the first component and the second component are mounted, and the third vision system photographs the upper surface of the first component and the upper surface of the second component in one go, and calculates the deviation information of the first component and the second component in the mounted component through the relative positions of the alignment features on the upper surface of the first component and the alignment features on the lower surface, and the relative positions of the alignment features on the upper surface of the second component. The deviation information is calculated through the central axis, the axis of symmetry, or the position reference line of the surface pattern of the first component and the second component.

2. A method for measuring the deviation of a mounting component according to claim 1, characterized in that: The carrier platform is provided with an X-axis motion axis, a Y-axis motion axis, and a rotation motion axis in the XoY plane.

3. A method for measuring the deviation of a mounting component according to claim 1, characterized in that: In step S10, the first component is sucked by a suction nozzle and placed between the first component upper vision system and the first component lower vision system for photographing.

4. A method for measuring the deviation of a mounting component according to claim 1, characterized in that: In step S10, the first component is placed on a transparent plate, and the first component upper vision system and the first component lower vision system respectively take photos from the upper and lower sides of the transparent plate.

5. A method for compensating for a mounting component deviation, characterized in that: Pre-compensation is performed based on the deviation information obtained by the method for measuring the deviation of a mounting component according to any one of claims 1 to 4 to obtain a mounting component that meets the deviation condition, comprising the following steps: S100: Based on the measurement of multiple mounted parts, multiple groups of deviation information are obtained; S200: Decomposing the multiple sets of deviation information into deviation distances dx in the X-axis direction and deviation distances dy in the Y-axis direction respectively; S300: averaging the deviation distance dx and the deviation distance dy respectively to obtain an average value of the deviation distance dx and an average value of the deviation distance dy; S400: Pre-move the first component or the second component in the opposite direction along the X-axis direction and the Y-axis direction based on the average value of the deviation distance dx and the average value of the deviation distance dy, and then mount the first component and the second component.

6. A method for compensating for a mounting component deviation according to claim 5, characterized in that: S300 step is replaced by: S300 ′: averaging the deviation distance dx and the deviation distance dy respectively to obtain an average value of the deviation distance dx, an average value of the deviation distance dy, and an angle value of the mutual deviation between the first element and the second element.

7. A method for compensating for a mounting component deviation according to claim 6, characterized in that: S400 is replaced by: S400': based on the average value of the deviation distance dx, the average value of the deviation distance dy, and the angle value of the mutual deviation between the first component and the second component, pre-rotate the first component or the second component in the opposite direction in the XoY plane, and then mount the first component and the second component.

8. A system for measuring the deviation of a mounted component, characterized in that: A method for measuring the deviation of a mounted component used to run any one of claims 1-4, comprising a first component upper visual system, a first component lower visual system, a second visual system, and a carrying table, wherein the first component upper visual system and the first component lower visual system are relatively arranged above and below the first component, the second visual system is located above the second component, and the carrying table is used to carry the second component.

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