A chip appearance defect detection device

Abstract

The present invention relates to a chip appearance defect detection device, comprising an appearance defect detection device body with a 2D detection area and a 3D detection area, wherein the 2D detection area and the 3D detection area are both provided with a displacement rack capable of forward and backward displacement, wherein the displacement rack is provided with a pneumatic control component capable of lifting and lowering displacement, wherein the pneumatic control component is rotatably and sealingly connected to a rotating barrel with a hemispherical hole at the bottom, wherein a pneumatic telescopic component is provided inside the rotating barrel, wherein an inclination adjustment component located in the hemispherical hole is provided below the pneumatic telescopic component, wherein a contact ring is sealed and clamped on the lower side of the inclination adjustment component, and wherein a driving component for driving the inclination adjustment component to adjust the inclination is provided on the lower side of the rotating barrel; the present invention has the advantages that a suction nozzle is easy to adjust and the suction nozzle is easy to replace.

Description

Technical Field

[0001] The present invention belongs to the technical field of chip detection equipment, and in particular relates to a chip appearance defect detection equipment. Background Art

[0002] Chip appearance inspection is a very important step in the semiconductor manufacturing and packaging process, which aims to ensure the quality and reliability of the chip. Chip appearance inspection mainly includes detecting defects on the chip surface, such as scratches, cracks, stains, contamination, missing metal layers, etc. These inspections are usually performed using chip appearance defect inspection equipment.

[0003] When the chip appearance defect detection equipment detects the appearance of the chip, the chip appearance defect detection is usually achieved through 2D and 3D detection equipment. After the 2D and 3D detection is completed, the vacuum suction nozzle and the robot arm will place the good and bad chips on different chip placement boards according to the detection results. However, due to the differences in chip manufacturing processes and surface characteristics, when adsorbing the chip, it is necessary to adjust the angle of the suction nozzle or replace the suction nozzle of different materials so that the vacuum suction nozzle can accurately and stably pick up and place the chip. However, the suction nozzle adjustment angle in the prior art is not accurate enough and it is inconvenient to replace the suction nozzle. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a chip appearance defect detection device with a nozzle that is easy to adjust and replace.

[0005] The technical solution of the present invention is as follows:

[0006] A chip appearance defect detection device, comprising an appearance defect detection device body with a 2D detection area and a 3D detection area, wherein a displacement rack capable of forward and backward displacement is provided in each of the 2D detection area and the 3D detection area, wherein a pneumatic control component capable of lifting and lowering displacement is provided on the displacement rack, wherein the pneumatic control component is rotationally and sealingly connected to a rotating barrel with a hemispherical hole at the bottom, wherein a pneumatic telescopic component is provided inside the rotating barrel, wherein an inclination adjustment component located in the hemispherical hole is provided below the pneumatic telescopic component, wherein a contact ring is sealedly clamped on the lower side of the inclination adjustment component, and wherein a driving component for driving the inclination adjustment component to adjust the inclination is provided on the lower side of the rotating barrel;

[0007] The rotating barrel is provided with air holes respectively connected with the inclination adjustment component and the pneumatic control component. The air holes are connected with the contact ring through the inclination adjustment component. The pneumatic telescopic component can be moved downward to connect with the inclination adjustment component and drive the inclination adjustment component to move downward so that the inclination adjustment component no longer clamps the contact ring. When the pneumatic telescopic component drives the inclination adjustment component to move upward and reset, the inclination adjustment component clamps the contact ring, and the pneumatic telescopic component detaches from the inclination adjustment component and continues to move upward.

[0008] Further, the pneumatic control assembly includes a grab box capable of lifting and sliding up and down on the displacement frame, a control box sealed and fixed in the grab box, a lifting cylinder fixed on the displacement frame, and a reversing valve fixed on the displacement frame, wherein the reversing valve is connected to the control box and the grab box respectively;

[0009] The rotating barrel is rotatably connected to the grab box, and a plurality of arc holes with the axis of the rotating barrel as the center of the circle are opened on the lower side of the grab box. The upper side of the rotating barrel is sealed against the grab box, and the vent holes correspond to the upper and lower positions of the arc holes, so that the rotating barrel is connected to the vent holes. The lower end of the lifting cylinder is fixed on the grab box, and the displacement frame can drive the rotating barrel to rotate;

[0010] A circular hole is provided on the lower side of the control box, and the upper end of the rotating barrel is sealed against the control box so that the rotating barrel is connected to the control box.

[0011] Further, the pneumatic telescopic assembly includes two upper and lower orifice plates fixed to the inner wall of the rotating barrel, a lifting piston sealingly and slidably connected to the inner wall of the rotating barrel, a spring fixed at both ends to the lower side of the lifting piston and the side of the orifice plate, an on-off control assembly arranged below the lifting piston, two connecting cylinders fixedly connected to the upper and lower sides of the on-off control assembly, and a cross plug block, wherein the cross plug block can pass through the orifice plate below the displacement;

[0012] The upper and lower connecting tubes are respectively sealed and fixed to connect the lifting piston and the cross plug block;

[0013] A chamber is provided inside the cross plug block, and a circular driving chamber is provided inside the four raised parts of the cross plug block. The driving chamber is provided with an air outlet and an air inlet respectively, and the air inlet is connected to the chamber. A fan wheel which is in contact and sealed with the inner wall of the driving chamber is rotatably sealed inside the driving chamber. Threaded plug rods are threadedly connected on both sides of the four raised parts of the cross plug block, and the threaded plug rods are slidably connected to the axis of the fan wheel so that the fan wheel can drive the threaded plug rods to rotate, and the threaded plug rods can be plugged into the inclination adjustment component to drive the inclination adjustment component to move up and down;

[0014] When the threaded plug-in rod can be plugged into the inclination adjustment assembly, the on-off control assembly chamber is connected to the grab box, so that the fan wheel drives the threaded plug-in rod to be plugged into the inclination adjustment assembly, and when the inclination adjustment assembly is reset, the on-off control assembly control chamber is connected to the grab box.

[0015] Further, the on-off control assembly includes an adjustment box located inside the rotating barrel, an adjustment rod rotatably connected to the adjustment box, an intermediate plate rotatably and sealingly connected inside the adjustment box, a sealing cover plate rotatably connected to the side of the intermediate plate, a connecting ball rotatably connected to the intermediate plate, a connecting rod plugged into the connecting ball, and a contact plate located inside the rotating barrel, and the adjustment box is fixedly connected to the two connecting cylinders;

[0016] The adjusting rod is connected to a connecting torsion spring connected to the adjusting box, the adjusting rod is connected to the middle plate through a cylinder, and the rotation center of the cylinder is concentric with the middle plate, the cylinder is rotationally sealed with the adjusting box, and there is an angle between the adjusting rod and the horizontal line;

[0017] The middle plate is provided with a through hole, and the sealing cover plate is fitted and sealed with the side surface of the middle plate to close the through hole;

[0018] A protrusion is provided inside the regulating box, and when the middle plate rotates counterclockwise, the connecting rod abuts against the protrusion, the connecting rod abuts against the sealing cover plate, and the connecting rod cannot be separated from the connecting ball;

[0019] The contact plates include two plates that are offset up and down. Both contact plates are provided with a plurality of vertically arranged fixing rods. The fixing rods are respectively fixed on the two orifice plates, and the lifting piston seal is plugged into the fixing rods. The adjustment box can pass through between the two contact plates, and when the adjustment rod is rotated to horizontal, it can pass through the outside of the two contact plates.

[0020] Furthermore, a rotating motor is fixed to the side of the grab box, and the outer side surface of the rotating barrel is meshed with the outer side surface of the rotating motor for transmission.

[0021] Further, the inclination adjustment assembly includes four side contact and sealed clamping blocks, four hinged seats, four elastic telescopic rods independently rotatably connected to the clamping blocks, and an intermediate block rotatably connected to the four elastic telescopic rods, the four clamping blocks form a hollow sphere with circular holes at both ends, a convex ball is arranged in the hemispherical hole, a rotating groove is spirally opened on the outer side of the hollow sphere, the convex ball is located in the rotating groove and can move along the rotating groove, the driving assembly contacts the driving hollow sphere and can drive it to rotate, so that when the hollow sphere rotates, the inclination angle is gradually adjusted along with the displacement of the convex;

[0022] The ends of the four protrusions of the cross plug block facing away from each other are circular, and an arc-shaped plate for the four protrusions of the cross plug block is arranged at the circular through hole of the hinge seat, and the arc-shaped plate is concentric with the circular ends of the protrusions, and when the protrusions are located on the arc-shaped plate, the threaded plug rod can be plugged into the circular through hole;

[0023] The contact ring is clamped in the lower circular hole of the hollow sphere, and the hollow sphere contacts and seals with the side of the semicircular hole;

[0024] The upper side of the groove surface of the rotation groove is vertical so that the convex ball can be separated from the rotation groove.

[0025] Furthermore, the air inlet and the air outlet are located below the four protrusions of the cross plug-in block.

[0026] Furthermore, the contact ring includes a clamping portion, a sealing portion arranged on the clamping portion, a guide portion arranged above the clamping portion, and a sealing portion located on the lower side of the clamping portion. The clamping portion, the sealing portion, the guide portion and the contact portion are all concentrically arranged up and down. An arc-shaped guide surface is arranged on the side of the guide portion. The side of the sealing portion contacts the side of the clamping block. The clamping block is clamped on the clamping portion and is sealed with the clamping portion.

[0027] Further, the driving assembly includes a lower ring fixed on the rotating barrel, an upper ring rotatably connected to the lower ring, and a plurality of displacement seats arranged in a circular array with the center of the lower ring as the center, the lower ring is coaxially arranged with the upper ring, a transmission plate is slidably connected inside the displacement seat, and the side surfaces of the plurality of transmission plates are in contact to form a transmission ring, and the transmission ring is in contact with the side surface of the hollow sphere;

[0028] The lower ring is provided with a guide groove for the displacement seat to slide in the radial direction, and the upper ring is provided with a plurality of clamping grooves in a circular array. The clamping grooves are arc-shaped and the displacement seat is provided with a protrusion located in the clamping groove. When the upper ring rotates, the displacement seat moves toward the axis of the lower ring;

[0029] A driving assembly for driving the upper ring and the transmission ring to rotate is fixed on the lower ring;

[0030] The lower side surface of the transmission ring is located at the lower side of the ball center of the hollow sphere.

[0031] Furthermore, the driving assembly includes a fixing plate fixed to the lower side of the lower ring and two driving motors fixed to the fixing plate, and the two driving motors are respectively driven by the upper ring and the transmission ring.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] 1. The present invention facilitates the adjustment of the adsorption angle through the driving assembly, the inclination adjustment assembly and the inclination adjustment of the contact ring, and the clamping of the contact ring is achieved through the inclination adjustment assembly, which facilitates the replacement of the contact ring;

[0034] 2. The present invention adopts a pneumatic telescopic component to realize the control of the up and down displacement of the inclination adjustment component, and when the inclination adjustment component is reset, it can be separated from the inclination adjustment component to ensure the inclination adjustment of the contact ring.

[0035] In summary, the present invention has the advantages that the suction nozzle is easy to adjust and the suction nozzle is easy to replace. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0037] Figure 2 For the present invention Figure 1 A schematic diagram of the structure of the displacement frame part;

[0038] Figure 3 For the present invention Figure 2 A schematic diagram of the enlarged structure of part B;

[0039] Figure 4 For the present invention Figure 3 A schematic diagram of the structure of the contact ring;

[0040] Figure 5 For the present invention Figure 3 A schematic diagram of the structure of the lower ring;

[0041] Figure 6 For the present invention Figure 3 A schematic diagram of the structure of the upper ring;

[0042] Figure 7 For the present invention Figure 3 A schematic diagram of a drive assembly;

[0043] Figure 8 For the present invention Figure 3 A schematic diagram of the structure of a cross plug block;

[0044] Fig. 9 For the present invention Figure 8 Schematic diagram of the main structure;

[0045] Fig.10 For the present invention Figure 2 A schematic diagram of the enlarged structure of part A;

[0046] Fig.11 For the present invention Fig.10 A schematic diagram of the regulating box portion;

[0047] Fig.12 For the present invention Fig.10 A schematic diagram of the structure of the regulating box and the regulating rod;

[0048] Fig.13 For the present invention Fig.10 Schematic diagram of the contact plate structure.

[0049] In the figure, 1, 3D detection area 1, 2, 2D detection area, 3, suction head placement tube, 410, cross plug block, 4101, drive chamber, 411, connecting tube, 412, fan wheel, 4121, threaded plug rod, 414, hinge seat, 421, upper ring, 4211, clamping groove, 422, lower ring, 4221, guide groove, 423, displacement seat, 424, elastic telescopic rod, 425, middle block, 426, damping pad, 427, transmission ring, 428, rotating groove, 429, convex ball, 420, clamping block, 43, contact ring, 431, sealing part, 432, Contact part, 433, clamping part, 434, guide part, 44, slider, 45, rotating motor, 46, vent, 47, rotating barrel, 471, orifice plate, 472, lifting piston, 473, spring, 474, connecting ball, 475, adjusting box, 476, contact plate, 4761, fixing rod, 477, adjusting rod, 478, middle plate, 479, connecting rod, 470, sealing cover plate, 48, grabbing box, 49, control box, 401, displacement frame, 402, lifting cylinder, 403, reversing valve, 404, screw seat, 5, fixing plate, 6, driving motor. DETAILED DESCRIPTION

[0050] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0051] like Figure 1-2 As shown, a chip appearance defect detection device includes an appearance defect detection device body with a 2D detection area 2 and a 3D detection area 1, wherein the 2D detection area 2 and the 3D detection area 1 are both provided with material plates, and the material plates are conveyed by conveying equipment such as conveyor belts, and the 2D detection area 2 captures the plane image of the chip through a camera, and identifies defects through image processing and analysis technology. 2D detection is used to detect defects on the chip plane, such as scratches, cracks, stains, missing or excess materials, and the 3D detection area 1 uses three-dimensional imaging technology to detect the appearance of the chip, which can not only detect planar defects, but also detect three-dimensional defects such as unevenness, depressions, and protrusions on the chip surface, as well as the height and thickness of the chip;

[0052] A good product placement plate and a bad product placement plate for placing chips are arranged inside the appearance defect detection body. The good product placement plate and the bad product placement plate can realize left and right displacement through linear modules and other equipment that can realize precise displacement along precise linear displacement. A plurality of suction head placement tubes 3 are arranged in the 2D detection area 2 and the 3D detection area 1, wherein contact rings 43 of different materials are placed in the suction head placement tubes 3, and one of the suction head placement tubes 3 does not have a contact ring 43. A lead screw is rotatably connected to each other in the 2D detection area 2 and the 3D detection area 1, and the lead screw is driven by a servo motor. A lead screw seat 404 connected to the lead screw is fixed on one side of the displacement frame 401, and a slider 44 fixed to the displacement frame 401 is arranged below the lead screw seat 404. The slider 44 is slidably connected in the 2D detection area 2 and the 3D detection area 1 to realize the front and rear displacement of the displacement frame 401.

[0053] The displacement frame 401 is provided with a pneumatic control component capable of lifting and displacing. The pneumatic control component is rotatably and sealably connected to a rotating barrel 47 with a hemispherical hole at the bottom. A pneumatic telescopic component is provided inside the rotating barrel 47. A tilt adjustment component located in the hemispherical hole is provided below the pneumatic telescopic component. A contact ring 43 is sealed and clamped on the lower side of the tilt adjustment component. A driving component for driving the tilt adjustment component to adjust the tilt angle is provided on the lower side of the rotating barrel 47.

[0054] The rotating barrel 47 is provided with vent holes 46 respectively connected with the tilt adjustment assembly and the pneumatic control assembly. The vent holes 46 are connected with the contact ring 43 through the tilt adjustment assembly. The pneumatic telescopic assembly can move downward to connect with the tilt adjustment assembly and drive the tilt adjustment assembly downward so that the tilt adjustment assembly no longer clamps the contact ring 43. When the pneumatic telescopic assembly drives the tilt adjustment assembly to move upward and reset, the tilt adjustment assembly clamps the contact ring 43, and the pneumatic telescopic assembly is separated from the tilt adjustment assembly and continues to move upward.

[0055] When in use, the pneumatic control component is connected to an external gas source device, such as a vacuum tank, a control valve body, a gas storage tank, a vacuum pump, and an air pump, etc., and the gas can be injected and discharged through the above-mentioned gas source equipment. The 2D detection area 2 and the 3D detection area 1 detect the appearance defects of the chip. After the detection is completed, the displacement rack 401 is displaced to the top of the corresponding chip, and the pneumatic control component controls the contact ring 43 to move downward and inhales air after the contact ring 43 contacts the chip, so that the chip is adsorbed on the contact ring 43, and then drives the chip to move upward, and moves the chip to the corresponding good product placement board or bad product placement board according to the detection situation, and then controls the contact ring 43 to no longer adsorb the chip, and the chip falls on the good product placement board or the bad product placement board, and then the chips can be sorted reciprocatingly;

[0056] When the chip to be tested is replaced, the driving component drives the tilt adjustment component to work according to the different chips. After the tilt adjustment component drives the contact ring 43 to adjust the tilt angle, the pneumatic control component drives the contact ring 43 to rotate so that the tilt angle can fit the chip, thereby ensuring the adsorption of the chip.

[0057] When the contact ring 43 needs to be replaced, the contact ring 43 is moved to above the tip placement tube 3 where the contact ring 43 is not placed. Then, the pneumatic control component controls the contact ring 43 to move down a certain distance, and then stops moving down and controls the switching of the rotating barrel 47 to be connected to the air source device. At this time, the pneumatic telescopic component moves down and contacts the tilt adjustment component. At this time, the pneumatic telescopic component rotates to connect the tilt adjustment component and drives the tilt adjustment component to move down. At this time, the tilt adjustment component moves down and gradually stops clamping the contact ring 43, so that the contact ring 43 falls into the tip placement tube 3. After that, the tilt adjustment component is moved to above the contact ring 43 of the corresponding material, and then the pneumatic telescopic component drives the tilt adjustment component to move up. The tilt adjustment component moves up and clamps the contact ring 43 to move up. After that, when the tilt adjustment component is reset, the driving component contacts the tilt adjustment component and limits it to be located in the hemispherical hole. The pneumatic telescopic component detaches from the tilt adjustment component and continues to move up and reset, so that the tilt adjustment component can rotate to adjust the tilt angle.

[0058] Wherein a plurality of suction head placement tubes 3 are arranged front and back;

[0059] In order to ensure the installation of the contact ring 43, the height of the rotating barrel 47 when the contact ring 43 is removed is higher than the height of the rotating barrel 47 when the contact ring 43 is installed, so as to ensure clamping.

[0060] In this embodiment, if Figure 2 As shown, the pneumatic control assembly includes a grab box 48 that is lifted and slid inside the displacement frame 401 through a slider 44 and a slide rail, a control box 49 sealed and fixed inside the grab box 48, a lifting cylinder 402 fixed on the displacement frame 401, and a reversing valve 403 fixed on the displacement frame 401, and the reversing valve 403 is connected to the control box 49 and the grab box 48 through pipelines respectively;

[0061] The rotating barrel 47 is rotatably connected to the grab box 48. The lower side of the grab box 48 is provided with a plurality of arc holes with the axis of the rotating barrel 47 as the center. The upper side of the rotating barrel 47 is sealed against the grab box 48, and the vent hole 46 corresponds to the upper and lower positions of the arc hole, so that the rotating barrel 47 is connected to the vent hole 46. The lower end of the lifting cylinder 402 is fixed on the grab box 48, and the displacement frame 401 can drive the rotating barrel 47 to rotate.

[0062] A circular hole is provided on the lower side of the control box 49, and the upper end of the rotating barrel 47 is sealed against the control box 49, so that the rotating barrel 47 is connected to the control box 49;

[0063] When the contact ring 43 needs to be raised or lowered, the lifting cylinder 402 drives the grab box 48 to be raised or lowered, and the grab box 48 drives the contact ring 43 to be raised or lowered through the rotating barrel 47 and the inclination adjustment assembly. When the rotating barrel 47 rotates, the grab box 48 is connected to the vent hole 46 through the cooperation of the arc hole, and the rotating barrel 47 is connected to the control box 49 through the round hole.

[0064] When in use, the gas flow is controlled by the control of the reversing valve 403, and the lifting and lowering is controlled by the lifting cylinder 402;

[0065] Preferably, the side of the grab box 48 with the arc hole is also provided with an annular groove, and the annular groove is not connected to the lower side of the grab box 48. The annular groove is concentric with the arc hole and has the same width to ensure connectivity during rotation.

[0066] In this embodiment, if Figure 2 , 3 As shown in Figures 8, 9 and 10, the pneumatic telescopic assembly includes two upper and lower orifice plates 471 fixed to the inner wall of the rotating barrel 47, a lifting piston 472 sealingly and slidably connected to the inner wall of the rotating barrel 47, a spring 473 whose two ends are respectively fixed to the lower side of the lifting piston 472 and the upper side of the orifice plate 471, an on-off control assembly arranged below the lifting piston 472, two connecting cylinders 411 fixedly connected to the upper and lower sides of the on-off control assembly, and a cross plug block 410, and the cross plug block 410 can pass through the orifice plate 471 below the displacement;

[0067] The upper and lower connecting tubes 411 are respectively sealed and fixedly connected to the lifting piston 472 and the cross plug block 410;

[0068] A chamber is provided inside the cross plug block 410, and a circular driving chamber 4101 is provided inside each of the four raised parts of the cross plug block 410. The driving chamber 4101 is provided with an air outlet and an air inlet respectively, and the air inlet is connected to the chamber. A fan wheel 412 which is in contact and sealed with the inner wall of the driving chamber 4101 is rotatably sealed inside the driving chamber 4101, and a threaded plug rod 4121 is threadedly connected on both sides of the four raised parts of the cross plug block 410, and the threaded plug rod 4121 is slidably connected to the axis of the fan wheel 412, so that the fan wheel 412 can drive the threaded plug rod 4121 to rotate, and the threaded plug rod 4121 can be plugged into the inclination adjustment component to drive the inclination adjustment component to move up and down;

[0069] When the threaded plug-in rod 4121 can be plugged into the tilt adjustment assembly, the on-off control assembly chamber is connected to the grab box 48, so that the fan wheel 412 drives the threaded plug-in rod 4121 to be plugged into the tilt adjustment assembly, and when the tilt adjustment assembly is reset, the on-off control assembly control chamber is connected to the grab box 48;

[0070] When in use, gas enters the rotating barrel 47, the lifting piston 472 moves downward and drives the on-off control assembly to move downward, and when the cross plug-in block 410 moves downward to the point where the threaded plug-in rod 4121 can be plugged into the inclination adjustment assembly, the on-off control assembly controls a small amount of gas to enter the drive chamber 4101 through the connecting tube 411 and the chamber, and at this time the impeller 412 rotates and drives the threaded plug-in rod 4121 to rotate, and the threaded plug-in rod 4121 is threadedly extended and gradually plugged into the inclination adjustment assembly, and when the threaded plug-in rod 4121 is fully extended, the impeller 412 cannot rotate under the action of the thread, and at this time the drive chamber 4101 cannot discharge gas, and the lifting piston 472 continues to move downward, and drives the inclination adjustment assembly to move downward until the contact ring 43 is separated from the inclination adjustment assembly;

[0071] When resetting is required, the gas in the rotating barrel 47 is discharged, and the spring 473 drives the lifting piston 472 to reset. When the inclination adjustment assembly moves into the hemispherical hole, the on-off control assembly connects the rotating barrel 47 above the lifting piston 472. At this time, the external air source equipment draws air to make the fan wheel 412 reverse and drive the threaded plug-in rod 4121 to reset. When the threaded plug-in rod 4121 is detached from the inclination adjustment assembly, the spring 473 drives the lifting piston 472 to move up and reset, and the cross plug-in block 410 is detached from the inclination adjustment assembly. At this time, the inclination adjustment assembly can adjust the inclination normally.

[0072] In this embodiment, if Fig.10 , 11 As shown in Figures 12 and 13, the on-off control assembly includes an adjustment box 475 located inside the rotating barrel 47, an adjustment rod 477 rotatably connected to the adjustment box 475, an intermediate plate 478 rotatably and sealably connected to the inside of the adjustment box 475, a sealing cover plate 470 rotatably connected to the upper side of the intermediate plate 478, a connecting ball 474 rotatably connected to the intermediate plate 478, a connecting rod 479 plugged into the connecting ball 474, and a contact plate 476 located inside the rotating barrel 47. The adjustment box 475 is fixedly connected to the two connecting cylinders 411, and both ends of the sealing cover plate 470 are connected to reset torsion springs fixed to the intermediate plate 478. The reset torsion spring is used to drive the sealing cover plate 470 to rotate so that the side of the sealing cover plate 470 fits with the side of the intermediate plate 478. The upper end of the connecting rod 479 is larger than the hole of the connecting ball 474 for the connecting rod 479 to be plugged in, so that the connecting rod 479 cannot be separated from the connecting ball 474.

[0073] The adjusting rod 477 is connected to a connecting torsion spring connected to the adjusting box 475. The adjusting rod 477 is connected to the middle plate 478 through a cylinder, and the rotation center of the cylinder and the middle plate 478 are concentric. The cylinder and the adjusting box 475 are rotationally sealed. There is an angle between the adjusting rod 477 and the horizontal line. The angle is as follows: Fig.11 As shown;

[0074] The middle plate 478 is provided with a through hole, and the sealing cover plate 470 is sealed against the side of the middle plate 478 to close the through hole;

[0075] A protrusion is integrally formed inside the regulating box 475, and when the middle plate 478 rotates counterclockwise, the connecting rod 479 abuts against the protrusion, and the connecting rod 479 abuts against the sealing cover plate 470;

[0076] The contact plates 476 include two, and the two contact plates 476 are each provided with a plurality of vertically arranged fixing rods 4761, the fixing rods 4761 are respectively fixed on the two orifice plates 471, and the lifting piston 472 is sealed and plugged on the fixing rods 4761, the adjustment box 475 can pass through between the two contact plates 476, and when the adjustment rod 477 is rotated to a horizontal position, it can pass through the outside of the two contact plates 476;

[0077] The two contact plates 476 are staggered up and down so that when the tilt adjustment assembly is reset, the threaded plug-in rod 4121 can be plugged into the tilt adjustment assembly and the adjustment rod 477 will not be separated from the contact plate 476;

[0078] When the rotating barrel 47 enters the gas, the lifting piston 472 quickly moves down to the position where the threaded plug-in rod 4121 can be inserted into the inclination adjustment assembly. At this time, the adjustment rod 477 contacts the contact plate 476 and slides along the contact plate 476. The adjustment rod 477 slides and rotates. The adjustment rod 477 rotates and drives the middle plate 478 to rotate. The middle plate 478 rotates counterclockwise so that the connecting rod 479 contacts the protrusion. The connecting rod 479 pushes the sealing cover plate 470 to rotate and does not fit the middle plate 478. The air flows into the chamber from the through hole. At this time, the impeller 412 rotates. When the impeller 412 cannot rotate, the air no longer circulates. At this time, the adjustment box 475 moves down, and the adjustment rod 477 continues to slide along the contact plate 476. When the adjustment rod 477 is horizontal, the adjustment rod 477 passes through the contact plate 476. At this time, the adjustment box 475 continues to move down.

[0079] When the incline adjustment assembly needs to be reset, the lifting piston 472 moves upward under the action of the spring 473, and after the incline adjustment assembly is reset, the adjustment rod 477 contacts and rotates with the contact plate 476. When the threaded plug-in rod 4121 is detached from the incline adjustment assembly, the lifting piston 472 continues to move upward, and after the adjustment rod 477 passes through the contact plate 476, the adjustment box 475 is reset.

[0080] In this embodiment, if Figure 2 As shown, a rotating motor 45 is fixed to the side of the grab box 48, and the outer side of the rotating barrel 47 is meshed with the outer side of the rotating motor 45 through a gear ring and a gear for transmission;

[0081] When rotation is required, the rotating barrel 47 is driven by the rotating motor 45 to ensure rotation.

[0082] In this embodiment, if Figure 2 , 3 As shown in Figures 5, 6 and 7, the inclination adjustment component includes a clamping block 420 with four sides sealed by sealing rings or sealing gaskets, four hinged seats 414, four elastic telescopic rods 424 independently rotatably connected to the clamping block 420, and an intermediate block 425 rotatably connected to the four elastic telescopic rods 424. The four clamping blocks 420 form a hollow sphere with round holes at both ends, a convex ball 429 is arranged in the hemispherical hole, a rotating groove 428 is spirally opened on the outer side of the hollow sphere, the convex ball 429 is located in the rotating groove 428 and can move along the rotating groove 428, the driving component contacts with the driving hollow sphere and can drive it to rotate, so that when the hollow sphere rotates, the inclination angle is gradually adjusted along with the displacement of the convexity;

[0083] The four protrusions of the cross plug block 410 have a circular end opposite to each other. The circular through hole of the hinge seat 414 is provided with an arc plate for the four protrusions of the cross plug block 410 to be placed. The arc plate is concentric with the circular end of the protrusion. When the protrusion is located on the arc plate, the threaded plug rod 4121 can be plugged into the circular through hole.

[0084] The contact ring 43 is clamped in the lower circular hole of the hollow sphere, and the hollow sphere contacts and seals with the side of the semicircular hole;

[0085] The upper side of the groove surface of the rotating groove 428 is vertical, so that the convex ball 429 can be separated from the rotating groove 428;

[0086] When in use, the gas enters the vent hole 46 through the contact ring 43 and the hollow sphere to ensure the adsorption of the chip. When the contact ring 43 needs to be replaced, the raised portion of the cross plug-in block 410 moves down and contacts the arc plate. At this time, the adjusting rod 477 and the contact plate 476 move along the contact plate 476, and the sealing cover plate 470 rotates to open. Then the threaded plug-in rod 4121 is plugged into the hinge seat 414. Then the drive assembly works and no longer clamps the four clamping blocks 420. At this time, the hinge seat 414 drives the four The clamping block 420 moves downward, and the elastic telescopic rod 424 pushes the clamping block 420 to rotate around the threaded plug-in rod 4121, so that the contact ring 43 is separated from the clamping block 420. Then, when the contact ring 43 needs to be clamped, the cross plug-in block 410 drives the clamping block 420 to move upward. Under the action of the hemispherical hole, the cross plug-in block 410 gradually contacts and forms a hollow sphere. At this time, the clamping block 420 clamps the contact ring 43, and then the driving assembly contacts the hollow sphere, and the threaded plug-in rod 4121 separates from the hinge seat 414 and moves upward.

[0087] In this embodiment, if Figure 8 As shown, the air inlet and the air outlet are located below the four protrusions of the cross plug block 410;

[0088] When in use, the air inlet and outlet holes are opened below the four protrusions of the cross plug block 410 so that the fan wheel 412 can be driven to rotate forward and reverse when the gas enters and exits.

[0089] In this embodiment, if Figure 3 and 4 As shown, the contact ring 43 includes a clamping portion 433, a sealing portion 431 disposed on the clamping portion 433, a guide portion 434 disposed above the clamping portion 433, and a sealing portion 431 located on the lower side of the clamping portion 433. The clamping portion 433, the sealing portion 431, the guide portion 434 and the contact portion 432 are all concentrically disposed up and down, and an arc-shaped guiding surface is disposed on the side of the guide portion 434. The side of the sealing portion 431 contacts the side of the clamping block 420, and the clamping block 420 is clamped on the clamping portion 433 and fits and seals with the clamping portion 433.

[0090] When in use, the sealing part 431 ensures the fit with the clamping block 420, the clamping part 433 realizes clamping, sealing and fixing, the guiding part 434 realizes the guidance of the clamping block 420 when moving downward to ensure clamping, and the contact part 432 realizes contact with the chip to ensure adsorption.

[0091] In this embodiment, if Figure 3 , 5 As shown in FIGS. 6 and 7 , the driving assembly includes a lower ring 422 fixed on a rotating barrel 47, an upper ring 421 rotatably connected to the lower ring 422, and a plurality of displacement seats 423 arranged in a circular array with the center of the lower ring 422 as the center. The lower ring 422 is coaxially arranged with the upper ring 421, and a transmission plate is slidably connected inside the displacement seat 423. The side surfaces of the plurality of transmission plates are in contact to form a transmission ring 427, and the transmission ring 427 is in contact with the side surface of the hollow sphere through a damping pad 426.

[0092] The lower ring 422 is provided with a guide groove 4221 along the radial direction for the displacement seat 423 to slide, and the upper ring 421 is provided with a plurality of clamping grooves 4211 in a circular array. The clamping grooves 4211 are arc-shaped and the displacement seat 423 is provided with a protrusion located in the clamping groove 4211. When the upper ring 421 rotates, the displacement seat 423 moves toward the axis of the lower ring 422.

[0093] A driving assembly for driving the upper ring 421 and the transmission ring 427 to rotate is fixed on the lower ring 422;

[0094] The lower side of the transmission ring 427 is located below the center of the hollow sphere;

[0095] When the hollow sphere needs to be rotated, the driving assembly drives the hollow sphere to rotate through the transmission ring 427. When the hollow sphere rotates hollow, the inclination angle of the hollow sphere is adjusted under the action of the rotating groove 428 and the convex ball 429, thereby ensuring the adjustment. When the contact ring 43 needs to be replaced, the driving assembly drives the upper ring 421 to rotate, and the protrusion moves radially along the lower ring 422 under the action of the clamping groove 4211 and the guide groove 4221, so that the transmission ring 427 no longer clamps the hollow sphere, so that the hollow sphere can move downward, and when it needs to be clamped again, the driving assembly drives the upper ring 421 to rotate in the opposite direction, so that the transmission ring 427 clamps the hollow sphere.

[0096] In this embodiment, the driving assembly includes a fixing plate 5 fixed to the lower side of the lower ring 422 and two driving motors 6 fixed to the fixing plate 5. The outer circumferential sides of the upper ring 421 and the transmission ring 427 are both provided with teeth. The two driving motors 6 are respectively connected to the upper ring 421 and the transmission ring 427 through teeth and gear sets.

[0097] When in use, the upper ring 421 and the transmission ring 427 are driven by two motors, thereby ensuring the driving.

[0098] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip appearance defect detection device, comprising an appearance defect detection device body with a 2D detection area and a 3D detection area, characterized in that: The 2D detection area and the 3D detection area are both provided with a displacement rack capable of forward and backward displacement, the displacement rack is provided with a pneumatic control component capable of lifting and lowering displacement, the pneumatic control component is rotationally sealed and connected to a rotating barrel with a hemispherical hole at the bottom, a pneumatic telescopic component is provided inside the rotating barrel, a tilt adjustment component located in the hemispherical hole is provided below the pneumatic telescopic component, a contact ring is sealed and clamped on the lower side of the tilt adjustment component, and a driving component for driving the tilt adjustment component to adjust the tilt angle is provided on the lower side of the rotating barrel; The rotating barrel is provided with vent holes respectively connected with the tilt adjustment assembly and the pneumatic control assembly, the vent holes are connected with the contact ring through the tilt adjustment assembly, the pneumatic telescopic assembly can be moved downward to connect with the tilt adjustment assembly and drive the tilt adjustment assembly to move downward, so that the tilt adjustment assembly no longer clamps the contact ring, and when the pneumatic telescopic assembly drives the tilt adjustment assembly to move upward and reset, the tilt adjustment assembly clamps the contact ring, and the pneumatic telescopic assembly is separated from the tilt adjustment assembly and continues to move upward; The pneumatic telescopic assembly includes two upper and lower orifice plates fixed to the inner wall of the rotating barrel, a lifting piston sealed and slidably connected to the inner wall of the rotating barrel, a spring fixed at both ends to the lower side of the lifting piston and the side of the orifice plate, an on-off control assembly arranged below the lifting piston, two connecting cylinders fixedly connected to the upper and lower sides of the on-off control assembly, and a cross plug block, wherein the cross plug block can pass through the orifice plate below the displacement; The upper and lower connecting tubes are respectively sealed and fixed to connect the lifting piston and the cross plug block; A chamber is provided inside the cross plug block, and a circular driving chamber is provided inside the four raised parts of the cross plug block. The driving chamber is provided with an air outlet and an air inlet respectively, and the air inlet is connected to the chamber. A fan wheel which is in contact and sealed with the inner wall of the driving chamber is rotatably sealed inside the driving chamber. Threaded plug rods are threadedly connected on both sides of the four raised parts of the cross plug block, and the threaded plug rods are slidably connected to the axis of the fan wheel so that the fan wheel can drive the threaded plug rods to rotate, and the threaded plug rods can be plugged into the inclination adjustment component to drive the inclination adjustment component to move up and down; When the threaded plug-in rod can be plugged into the inclination adjustment assembly, the on-off control assembly chamber is connected to the grab box, so that the fan wheel drives the threaded plug-in rod to be plugged into the inclination adjustment assembly, and when the inclination adjustment assembly is reset, the on-off control assembly control chamber is connected to the grab box.

2. The chip appearance defect detection device according to claim 1, characterized in that: The pneumatic control assembly includes a grab box that can be lifted and slid up and down on the displacement frame, a control box sealed and fixed in the grab box, a lifting cylinder fixed on the displacement frame, and a reversing valve fixed on the displacement frame, wherein the reversing valve is connected to the control box and the grab box respectively; The rotating barrel is rotatably connected to the grab box, and a plurality of arc holes with the axis of the rotating barrel as the center of the circle are opened on the lower side of the grab box. The upper side of the rotating barrel is sealed against the grab box, and the vent holes correspond to the upper and lower positions of the arc holes, so that the rotating barrel is connected to the vent holes. The lower end of the lifting cylinder is fixed on the grab box, and the displacement frame can drive the rotating barrel to rotate; A circular hole is provided on the lower side of the control box, and the upper end of the rotating barrel is sealed against the control box so that the rotating barrel is connected to the control box.

3. The chip appearance defect detection device according to claim 2, characterized in that: The on-off control assembly includes an adjustment box located inside the rotating barrel, an adjustment rod rotatably connected to the adjustment box, an intermediate plate rotatably and sealingly connected inside the adjustment box, a sealing cover plate rotatably connected to the side of the intermediate plate, a connecting ball rotatably connected to the intermediate plate, a connecting rod plugged into the connecting ball, and a contact plate located inside the rotating barrel, wherein the adjustment box is fixedly connected to the two connecting cylinders; The adjusting rod is connected to a torsion spring connected to the adjusting box, the adjusting rod is connected to the sealing cover plate through a cylinder, and the rotation center of the cylinder and the sealing cover plate are concentric, the cylinder and the adjusting box are rotationally sealed, and there is an angle between the adjusting rod and the horizontal line; The middle plate is provided with a through hole, and the sealing cover plate is fitted and sealed with the side surface of the middle plate to close the through hole; A protrusion is provided inside the regulating box, and when the middle plate rotates counterclockwise, the connecting rod abuts against the protrusion, and the connecting rod is rotatably connected to the sealing cover plate; The contact plates include two plates that are offset up and down. Both contact plates are provided with a plurality of vertically arranged fixing rods. The fixing rods are respectively fixed on the two orifice plates, and the lifting piston seal is plugged into the fixing rods. The adjustment box can pass through between the two contact plates, and when the adjustment rod is rotated to horizontal, it can pass through the outside of the two contact plates.

4. The chip appearance defect detection device according to claim 3, characterized in that: A rotating motor is fixed on the side of the grab box, and the outer side of the rotating barrel is meshed and driven with the outer side of the rotating motor.

5. The chip appearance defect detection device according to claim 4, characterized in that: The inclination adjustment assembly includes four side contact and sealed clamping blocks, four hinged seats, four elastic telescopic rods independently rotatably connected to the clamping blocks, and an intermediate block rotatably connected to the four elastic telescopic rods, the four clamping blocks form a hollow sphere with round holes at both ends, a convex ball is arranged in the hemispherical hole, a rotating groove is spirally opened on the outer side of the hollow sphere, the convex ball is located in the rotating groove and can move along the rotating groove, the driving assembly contacts the driving hollow sphere and can drive it to rotate, so that when the hollow sphere rotates, the inclination angle is gradually adjusted along with the displacement of the convex; The ends of the four protrusions of the cross plug block facing away from each other are circular, and an arc-shaped plate for the four protrusions of the cross plug block is arranged at the circular through hole of the hinge seat, and the arc-shaped plate is concentric with the circular ends of the protrusions, and when the protrusions are located on the arc-shaped plate, the threaded plug rod can be plugged into the circular through hole; The contact ring is clamped in the lower circular hole of the hollow sphere, and the hollow sphere contacts and seals with the side of the semicircular hole; The upper side of the groove surface of the rotation groove is vertical so that the convex ball can be separated from the rotation groove.

6. The chip appearance defect detection device according to claim 5, characterized in that: The air inlet and the air outlet are located below the four raised portions of the cross plug-in block.

7. The chip appearance defect detection device according to claim 6, characterized in that: The contact ring includes a clamping portion, a sealing portion arranged on the clamping portion, a guide portion arranged above the clamping portion, and a sealing portion located on the lower side of the clamping portion. The clamping portion, the sealing portion, the guide portion and the contact portion are all concentrically arranged up and down. An arc-shaped guide surface is arranged on the side of the guide portion. The side of the sealing portion contacts the side of the clamping block. The clamping block is clamped on the clamping portion and is sealed with the clamping portion.

8. The chip appearance defect detection device according to claim 7, characterized in that: The driving assembly comprises a lower ring fixed on the rotating barrel, an upper ring rotatably connected to the lower ring, and a plurality of displacement seats arranged in a circular array with the center of the lower ring as the center, the lower ring is coaxially arranged with the upper ring, a transmission plate is slidably connected inside the displacement seat, and the side surfaces of the plurality of transmission plates are in contact to form a transmission ring, and the transmission ring is in contact with the side surface of the hollow sphere; The lower ring is provided with a guide groove for the displacement seat to slide in the radial direction, and the upper ring is provided with a plurality of clamping grooves in a circular array. The clamping grooves are arc-shaped and the displacement seat is provided with a protrusion located in the clamping groove. When the upper ring rotates, the displacement seat moves toward the axis of the lower ring; A driving assembly for driving the upper ring and the transmission ring to rotate is fixed on the lower ring; The lower side surface of the transmission ring is located at the lower side of the ball center of the hollow sphere.

9. The chip appearance defect detection device according to claim 8, characterized in that: The driving assembly comprises a fixing plate fixed on the lower side of the lower ring and two driving motors fixed on the fixing plate, and the two driving motors are respectively driven by the upper ring and the transmission ring.

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