A MO source bottle switch structure

Abstract

The present invention provides an MO source bottle switch structure, which relates to the technical field of switch structures, and comprises a MO source bottle, wherein a control component is fixedly installed on the upper end of the MO source bottle, an air outlet pipe and an air inlet pipe are installed on the upper end of the control component, and a short tube and a long tube are installed on the lower end of the control component. When the MO source bottle is opened, the third valve group is rotated first. Since the short tube is not in contact with the liquid, even if there is a pressure inconsistency between the inside and outside of the source bottle, as long as the third valve group is rotated and delayed for a period of time, the internal pressures of the first vertical groove, the second vertical groove and the horizontal groove are consistent. At this time, the first valve group is rotated again, and the liquid in the MO source bottle cannot flow back to the upper part under pressure, thereby avoiding the backflow and backflow of the liquid when the MO source bottle is opened.

Description

Technical Field

[0001] The present invention relates to the technical field of switch structures, and more specifically, to an MO source bottle switch structure. Background Art

[0002] With the widespread application of MOCVD equipment in the semiconductor industry, the MO source bottle temperature control device, as one of the supporting facilities, is becoming more and more important. The MO source bottle is a special packaging container for MO (Metalorganic Source).

[0003] MOCVD has become the key equipment and process for producing semiconductor materials and devices. When the MO source bottle is opened, the pressure inside and outside the source bottle is different, which can easily cause the raw material liquid to flow back into the flow controller or pressure controller, which can easily damage the flow controller and pressure controller. These two instruments can only contact gas media instead of liquid media. Once they come into contact with liquid media, the flow controller and pressure controller are easily damaged.

[0004] Therefore, in view of this, the existing structure and deficiencies are studied and improved, and an MO source bottle switch structure is provided, in order to achieve the purpose of being more adaptable to actual application scenarios. Summary of the invention

[0005] In order to solve the above technical problems, the present invention provides a MO source bottle switch structure to solve the above problems.

[0006] The MO source bottle switch structure of the present invention is achieved by the following specific technical means:

[0007] An MO source bottle switch structure comprises an MO source bottle, wherein a control component is fixedly mounted on the upper end of the MO source bottle, an air outlet pipe and an air inlet pipe are mounted on the upper end of the control component, and a short pipe and a long pipe are mounted on the lower end of the control component.

[0008] The control assembly comprises a mounting shell fixedly connected to the MO source bottle, a first mounting block and a second mounting block are slidably mounted inside the mounting shell, the first mounting block is mounted to the mounting shell by bolts, a connecting gas groove group used in conjunction with the gas guide groove group is respectively provided at the upper and lower ends of the mounting shell, a rotating disk used in conjunction with the first valve group, the second valve group and the third valve group is rotatably mounted inside the mounting shell, and a knob assembly is mounted on the side wall of the rotating disk;

[0009] The sequence of opening the MO source bottle through the MO source bottle switch structure is as follows: first turn the third valve group, then turn the first valve group, and finally turn the second valve group. The sequence of closing the source bottle is as follows: first turn the second valve group, then turn the first valve group, and finally turn the third valve group. The time interval of each step is between 2 seconds and 20 seconds.

[0010] Before opening: the air guide holes in the first valve group and the third valve group are respectively arranged perpendicular to the second vertical groove and the first vertical groove, while the air guide hole in the second valve group is arranged parallel to the horizontal groove;

[0011] Open state: first rotate the third valve group. Since the short tube is not in contact with the liquid, even if there is a pressure inconsistency inside and outside the source bottle, as long as the third valve group is rotated and delayed for a period of time, the internal pressures of the first vertical groove, the second vertical groove and the horizontal groove are consistent. At this time, the first valve group is rotated again, and the liquid in the MO source bottle cannot flow back to the upper part under pressure, which avoids the backflow and backflow of the liquid when the MO source bottle is opened;

[0012] Before closing: the air guide holes in the first valve group and the third valve group are respectively arranged parallel to the second vertical groove and the first vertical groove, while the air guide hole in the second valve group is arranged perpendicular to the horizontal groove;

[0013] Closed state: first rotate the second valve group, so that the first vertical groove, the second vertical groove and the horizontal groove are connected to each other, and the internal pressures of the first vertical groove, the second vertical groove and the horizontal groove are consistent. Then rotate the first valve group first, and finally rotate the third valve group, which will also not cause liquid backflow and backflow.

[0014] Further, the air guide groove group includes a first vertical groove, a second vertical groove and a transverse groove opened on the outer wall of the first mounting block, the third valve group is installed in the middle position of the first vertical groove, the second valve group is installed in the middle position of the transverse groove, the first valve group is installed in the middle position of the second vertical groove, the air guide groove group opened on the outer wall of the second mounting block is the same as the air guide groove group on the outer wall of the outer wall of the first mounting block, and the connecting air groove group is respectively composed of a first connecting hole opened on one side of the upper end of the mounting shell and connected to the air inlet pipe and the second vertical groove, a second connecting hole opened on the other side of the upper end of the mounting shell and connected to the air outlet pipe and the first vertical groove, a third connecting hole opened on one side of the lower end of the mounting shell and connected to the long tube and the second vertical groove, and a fourth connecting hole opened on the other side of the lower end of the mounting shell and connected to the short tube and the first vertical groove;

[0015] The third valve group includes a sealing disk rotatably connected to the first mounting block and the second mounting block, a first air guide hole is opened in the middle of the sealing disk, a connecting rod is fixedly connected to the middle of one end of the sealing disk, the connecting rod passes through the second mounting block and is rotatably connected thereto, a first gear is fixedly installed at the end of the connecting rod, the first valve group and the second valve group have the same structure as the third valve group, wherein the second air guide hole in the second valve group is perpendicular to the first air guide hole in the third valve group;

[0016] In actual application, the first vertical groove, the second vertical groove and the horizontal groove that can be connected to each other are used in coordination with the first valve group, the second valve group and the third valve group to control the opening and closing of the first vertical groove, the second vertical groove and the horizontal groove, so as to avoid the imbalance of air pressure inside the first vertical groove, the second vertical groove and the horizontal groove, which causes the liquid to flow out of the long tube. Specifically, the rotation of the knob assembly drives the rotating disk to rotate, and a section of the tooth group in the rotating disk drives the first gear to rotate, and the first gear drives the sealing disk to rotate 90 degrees, so that the first air guide hole is connected to or closed with the first vertical groove. Similarly, the first valve group and the second valve group control the connection or closing of the second vertical groove and the horizontal groove, and then when opened, the pressure balance between the first vertical groove, the second vertical groove and the horizontal groove is guaranteed to avoid the liquid flowing out of the long tube and damaging the flow controller or the pressure controller.

[0017] Further, the knob assembly includes a rotating body fixedly connected to the rotating disk, the interior of the rotating body is hollow, a slider is slidably installed inside the rotating body, a return spring is provided at one end of the slider, a fixing rod is fixedly provided at one end of the slider, the fixing rod penetrates the rotating body and is slidably connected thereto, an arc groove is provided on the outer wall of the mounting shell for use with the fixing rod, and a rubber sheet is pasted inside the arc groove;

[0018] In actual application, the knob assembly is provided with a fixed rod and an arc groove used in conjunction with it. When the staff rotates the knob assembly, when the first valve group, the second valve group and the third valve group rotate, the fixed rod will enter the arc groove, and the friction between the fixed rod and the rubber sheet will increase, thereby providing a slight resistance for the staff, thereby reminding the staff to rotate at a speed of 90 degrees, avoiding rotating at a speed of 90 degrees too fast, resulting in the first vertical groove, the second vertical groove and the horizontal groove opening before the internal air pressure is balanced, thereby causing liquid to flow out of the long tube.

[0019] Furthermore, the inner wall of the rotating disk is fixedly provided with a plurality of groups of teeth groups used in conjunction with the first valve group, the second valve group and the third valve group, each group of teeth can drive the first valve group, the second valve group and the third valve group to rotate 90 degrees, and the gears in the first valve group, the second valve group and the third valve group are staggered;

[0020] In actual applications, the tooth group can be changed accordingly according to actual use. Since the gears in the first valve group, the second valve group and the third valve group are staggered, when the staff rotates the knob assembly, the knob assembly drives the rotating disk to rotate, and the different tooth groups inside the rotating disk respectively drive the corresponding first valve group, the second valve group and the third valve group to rotate 90 degrees, thereby controlling the internal connectivity of the first vertical groove, the second vertical groove and the horizontal groove, thereby effectively preventing novices from operating the machine in the wrong order of opening the knobs, causing the liquid inside the MO source bottle to enter the control assembly, the air inlet pipe and the air outlet pipe from the long tube, thereby preventing the liquid from entering the flow controller or the pressure controller, causing damage to the flow controller or the pressure controller.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. Before opening: the air guide holes in the first valve group and the third valve group are respectively arranged perpendicular to the second vertical groove and the first vertical groove, while the air guide hole in the second valve group is arranged parallel to the horizontal groove;

[0023] Open state: first rotate the third valve group. Since the short tube is not in contact with the liquid, even if there is a pressure inconsistency inside and outside the source bottle, as long as the third valve group is rotated and delayed for a period of time, the internal pressures of the first vertical groove, the second vertical groove and the horizontal groove are consistent. At this time, the first valve group is rotated again, and the liquid in the MO source bottle cannot flow back to the upper part under pressure, which avoids the backflow and backflow of the liquid when the MO source bottle is opened;

[0024] Before closing: the air guide holes in the first valve group and the third valve group are respectively arranged parallel to the second vertical groove and the first vertical groove, while the air guide hole in the second valve group is arranged perpendicular to the horizontal groove;

[0025] Closed state: first rotate the second valve group, so that the first vertical groove, the second vertical groove and the horizontal groove are connected to each other, and the internal pressures of the first vertical groove, the second vertical groove and the horizontal groove are consistent. Then rotate the first valve group first, and finally rotate the third valve group, which will also not cause liquid backflow and backflow.

[0026] 2. The knob assembly is provided with a fixed rod and an arc groove used in conjunction therewith. When the staff rotates the knob assembly, when the first valve group, the second valve group and the third valve group rotate, the fixed rod will enter the arc groove, and the friction between the fixed rod and the rubber sheet will increase, thereby providing a slight resistance for the staff, thereby reminding the staff to rotate 90 degrees to avoid rotating too fast, resulting in the first vertical groove, the second vertical groove and the horizontal groove opening before the internal air pressure is balanced, thereby causing liquid to flow out of the long tube.

[0027] 3. The tooth groups can be changed accordingly according to actual use. Since the gears in the first valve group, the second valve group and the third valve group are staggered, when the staff rotates the knob assembly, the knob assembly drives the rotating disk to rotate, and the different tooth groups inside the rotating disk respectively drive the corresponding first valve group, the second valve group and the third valve group to rotate 90 degrees, thereby controlling the internal connectivity of the first vertical slot, the second vertical slot and the horizontal slot, thereby effectively preventing novices from operating the device in the wrong order of opening the knobs, causing the liquid inside the MO source bottle to enter the control assembly, the air inlet pipe and the air outlet pipe from the long tube, thereby preventing the liquid from entering the flow controller or the pressure controller, causing damage to the flow controller or the pressure controller.

[0028] Other advantages, objectives and features of the present invention will be embodied in part through the following description, and in part will be understood by those skilled in the art through study and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0030] Figure 2 It is a schematic diagram of the upper and lower structures of the control assembly of the present invention.

[0031] Figure 3 It is a schematic diagram of the first state of the control component of the present invention.

[0032] Figure 4 Schematic diagram of the second state of the control component of the present invention.

[0033] Figure 5 It is a structural schematic diagram of the third valve group of the present invention.

[0034] Figure 6 It is a distribution diagram of the first valve group, the second valve group and the third valve group of the present invention.

[0035] Figure 7 It is a structural schematic diagram of the knob assembly of the present invention.

[0036] Figure 8 Schematic diagram of the distribution of tooth groups of the present invention.

[0037] Fig. 9 It is a schematic diagram of the connection of the MO source bottle of the present invention.

[0038] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:

[0039] 1. MO source bottle; 2. control component; 201. mounting shell; 2011. second connecting hole; 2012. first connecting hole; 2013. fourth connecting hole; 2014. third connecting hole; 202. first mounting block; 2021. first vertical slot; 2022. second vertical slot; 2023. horizontal slot; 203. first valve group; 204. second valve group; 205. third valve group; 2051. sealing disk; 2052. first air guide hole; 2053. first gear; 206. knob assembly; 2061. rotating body; 2062. slider; 2064. fixing rod; 207. rotating disk; 208. second mounting block; 3. air outlet pipe; 4. air inlet pipe; 5. short pipe; 6. long pipe. DETAILED DESCRIPTION

[0040] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0041] In the description of the present invention, unless otherwise specified, "plurality" means two or more than two; the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example

[0043] As attached Figure 1 To Attachment Fig. 9 As shown:

[0044] The present invention provides an MO source bottle switch structure, comprising an MO source bottle 1, a control component 2 is fixedly installed on the upper end of the MO source bottle 1, an air outlet pipe 3 and an air inlet pipe 4 are installed on the upper end of the control component 2, and a short pipe 5 and a long pipe 6 are installed on the lower end of the control component 2.

[0045] The control assembly 2 includes a mounting shell 201 fixedly connected to the MO source bottle 1, a first mounting block 202 and a second mounting block 208 are slidably mounted inside the mounting shell 201, the first mounting block 202 and the mounting shell 201 are mounted by bolts, a connecting gas groove group used in conjunction with the gas guide groove group is respectively provided at the upper and lower ends of the mounting shell 201, a rotating disk 207 used in conjunction with the first valve group 203, the second valve group 204 and the third valve group 205 is rotatably mounted inside the mounting shell 201, and a knob assembly 206 is mounted on the side wall of the rotating disk 207;

[0046] The sequence of opening the MO source bottle 1 through the MO source bottle 1 switch structure is as follows: first turn the third valve group 205, then turn the first valve group 203, and finally turn the second valve group 204. The sequence of closing the source bottle is as follows: first turn the second valve group 204, then turn the first valve group 203, and finally turn the third valve group 205. The time interval of each step is between 2 seconds and 20 seconds.

[0047] Before opening: the air guide holes in the first valve group 203 and the third valve group 205 are respectively arranged perpendicular to the second vertical groove 2022 and the first vertical groove 2021, while the air guide hole in the second valve group 204 is arranged parallel to the horizontal groove 2023;

[0048] Opening state: first rotate the third valve group 205. Since the short tube 5 is not in contact with the liquid, even if there is a pressure difference inside and outside the source bottle, as long as the third valve group 205 is rotated and delayed for a period of time, the internal pressures of the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are consistent. At this time, the first valve group 203 is rotated again, and the liquid in the MO source bottle cannot flow back to the upper part under pressure, thus avoiding the backflow and backflow of the liquid when the MO source bottle is opened;

[0049] Before closing: the air guide holes in the first valve group 203 and the third valve group 205 are respectively arranged parallel to the second vertical groove 2022 and the first vertical groove 2021, while the air guide hole in the second valve group 204 is arranged perpendicular to the horizontal groove 2023;

[0050] Closed state: first rotate the second valve group 204, so that the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are interconnected, and the internal pressures of the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are consistent, then rotate the first valve group 203 first, and finally rotate the third valve group 205, which will also not cause liquid backflow and backflow.

[0051] The air guide groove group includes a first vertical groove 2021, a second vertical groove 2022 and a horizontal groove 2023 opened on the outer wall of the first mounting block 202, the third valve group 205 is installed in the middle position of the first vertical groove 2021, the second valve group 204 is installed in the middle position of the horizontal groove 2023, the first valve group 203 is installed in the middle position of the second vertical groove 2022, the air guide groove group opened on the outer wall of the second mounting block 208 is the same as the air guide groove group on the outer wall of the outer wall of the first mounting block 202, and the air guide groove group is connected to the outer wall of the second mounting block 208. The mounting shell 201 is provided with a first connection hole 2012 connected to the air inlet pipe 4 and the second vertical groove 2022 at one side of the upper end of the mounting shell 201, a second connection hole 2011 connected to the air outlet pipe 3 and the first vertical groove 2021 at the other side of the upper end of the mounting shell 201, a third connection hole 2014 connected to the long tube 6 and the second vertical groove 2022 at one side of the lower end of the mounting shell 201, and a fourth connection hole 2013 connected to the short tube 5 and the first vertical groove 2021 at the other side of the lower end of the mounting shell 201;

[0052] The third valve group 205 includes a sealing disk 2051 rotatably connected to the first mounting block 202 and the second mounting block 208, a first air guide hole 2052 is opened in the middle of the sealing disk 2051, a connecting rod is fixedly connected to the middle of one end of the sealing disk 2051, the connecting rod passes through the second mounting block 208 and is rotatably connected thereto, a first gear 2053 is fixedly installed at the end of the connecting rod, the first valve group 203 and the second valve group 204 have the same structure as the third valve group 205, wherein the second air guide hole in the second valve group 204 is perpendicular to the first air guide hole 2052 in the third valve group 205;

[0053] In practical applications, the first vertical slot 2021, the second vertical slot 2022 and the horizontal slot 2023, which can be connected to each other, are used in coordination with the first valve group 203, the second valve group 204 and the third valve group 205 to control the opening and closing of the first vertical slot 2021, the second vertical slot 2022 and the horizontal slot 2023, so as to avoid the imbalance of air pressure inside the first vertical slot 2021, the second vertical slot 2022 and the horizontal slot 2023, which causes the liquid to flow out of the long tube 6. Specifically, the knob assembly 206 rotates to drive the rotating disk 207 to rotate, and the rotating disk 207 is A tooth group drives the first gear 2053 to rotate, and the first gear 2053 drives the sealing plate 2051 to rotate 90 degrees, so that the first air guide hole 2052 is connected to or closed with the first vertical groove 2021. Similarly, the first valve group 203 and the second valve group 204 control the connection or closing of the second vertical groove 2022 and the horizontal groove 2023, and then when opened, the pressure balance between the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 is guaranteed to prevent liquid from flowing out of the long tube 6 and damaging the flow controller or the pressure controller.

[0054] The knob assembly 206 includes a rotating body 2061 fixedly connected to the rotating disk 207. The interior of the rotating body 2061 is hollow. A slider 2062 is slidably installed inside the rotating body 2061. A return spring is provided at one end of the slider 2062. A fixing rod 2064 is fixedly provided at one end of the slider 2062. The fixing rod 2064 penetrates the rotating body 2061 and is slidably connected thereto. An arc groove used to cooperate with the fixing rod 2064 is provided on the outer wall of the mounting shell 201. A rubber sheet is pasted inside the arc groove.

[0055] In actual application, the knob assembly 206 is provided with a fixed rod 2064 and an arc groove used in conjunction therewith. When the staff rotates the knob assembly 206, when the first valve group 203, the second valve group 204 and the third valve group 205 rotate, the fixed rod 2064 will enter the arc groove, and the friction between the fixed rod 2064 and the rubber sheet will increase, thereby providing a slight resistance for the staff, thereby reminding the staff to rotate 90 degrees to avoid rotating 90 degrees too fast, resulting in the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 opening before the internal air pressure is balanced, thereby causing liquid to flow out of the long tube 6.

[0056] The inner wall of the rotating disk 207 is fixedly provided with a plurality of gear groups used in conjunction with the first valve group 203, the second valve group 204 and the third valve group 205. Each gear group can drive the first valve group 203, the second valve group 204 and the third valve group 205 to rotate 90 degrees. The gears in the first valve group 203, the second valve group 204 and the third valve group 205 are staggered.

[0057] In actual application, the tooth group can be changed accordingly according to actual use. Since the gears in the first valve group 203, the second valve group 204 and the third valve group 205 are staggered, when the staff rotates the knob assembly 206, the knob assembly 206 drives the rotating disk 207 to rotate, and the different tooth groups inside the rotating disk 207 respectively drive the corresponding first valve group 203, the second valve group 204 and the third valve group 205 to rotate 90 degrees, thereby controlling the internal connection of the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023, thereby effectively preventing novices from operating the machine in the wrong order of opening the knobs, causing the liquid inside the MO source bottle 1 to enter the control assembly 2, the air inlet pipe 4 and the air outlet pipe 3 from the inside of the long tube 6, thereby preventing the liquid from entering the flow controller or the pressure controller, causing damage to the flow controller or the pressure controller.

[0058] The specific usage and function of this embodiment are as follows:

[0059] Before opening: the air guide holes in the first valve group 203 and the third valve group 205 are respectively arranged perpendicular to the second vertical groove 2022 and the first vertical groove 2021, while the air guide hole in the second valve group 204 is arranged parallel to the horizontal groove 2023;

[0060] Opening state: first rotate the third valve group 205. Since the short tube 5 is not in contact with the liquid, even if there is a pressure difference inside and outside the source bottle, as long as the third valve group 205 is rotated and delayed for a period of time, the internal pressures of the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are consistent. At this time, the first valve group 203 is rotated again, and the liquid in the MO source bottle cannot flow back to the upper part under pressure, thus avoiding the backflow and backflow of the liquid when the MO source bottle is opened;

[0061] Before closing: the air guide holes in the first valve group 203 and the third valve group 205 are respectively arranged parallel to the second vertical groove 2022 and the first vertical groove 2021, while the air guide hole in the second valve group 204 is arranged perpendicular to the horizontal groove 2023;

[0062] Closed state: first rotate the second valve group 204, so that the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are interconnected, and the internal pressures of the first vertical groove 2021, the second vertical groove 2022 and the horizontal groove 2023 are consistent, then rotate the first valve group 203 first, and finally rotate the third valve group 205, which will also not cause liquid backflow and backflow.

[0063] The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and changes are obvious to those skilled in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention and to enable those skilled in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

Claims

1. A MO source bottle switch structure, characterized in that: It comprises an MO source bottle (1), a control component (2) is fixedly mounted on the upper end of the MO source bottle (1), an air outlet pipe (3) and an air inlet pipe (4) are mounted on the upper end of the control component (2), and a short pipe (5) and a long pipe (6) are mounted on the lower end of the control component (2); The control assembly (2) comprises a mounting shell (201) fixedly connected to the MO source bottle (1); a first mounting block (202) and a second mounting block (208) are slidably mounted inside the mounting shell (201); the first mounting block (202) and the mounting shell (201) are mounted via bolts; a connecting gas groove group used in conjunction with a gas guide groove group is respectively provided at the upper end and the lower end of the mounting shell (201); a rotating disk (207) used in conjunction with a first valve group (203), a second valve group (204) and a third valve group (205) is rotatably mounted inside the mounting shell (201); a knob assembly (206) is mounted on a side wall of the rotating disk (207); The air guide groove group comprises a first vertical groove (2021), a second vertical groove (2022) and a horizontal groove (2023) which are opened on the outer wall of the first mounting block (202); the third valve group (205) is installed at the middle position of the first vertical groove (2021); the second valve group (204) is installed at the middle position of the horizontal groove (2023); the first valve group (203) is installed at the middle position of the second vertical groove (2022); and the air guide groove group opened on the outer wall of the second mounting block (208) is the same as the air guide groove group on the outer wall of the outer wall of the first mounting block (202); The third valve group (205) comprises a sealing disk (2051) rotatably connected to the first mounting block (202) and the second mounting block (208); a first air guide hole (2052) is provided in the middle of the sealing disk (2051); a connecting rod is fixedly connected to the middle of one end of the sealing disk (2051); the connecting rod passes through the second mounting block (208) and is rotatably connected thereto; a first gear (2053) is fixedly mounted on the end of the connecting rod; The connecting air groove group is respectively composed of a first connecting hole (2012) opened on one side of the upper end of the mounting shell (201) and connected to the air inlet pipe (4) and the second vertical groove (2022), a second connecting hole (2011) opened on the other side of the upper end of the mounting shell (201) and connected to the air outlet pipe (3) and the first vertical groove (2021), a third connecting hole (2014) opened on one side of the lower end of the mounting shell (201) and connected to the long tube (6) and the second vertical groove (2022), and a fourth connecting hole (2013) opened on the other side of the lower end of the mounting shell (201) and connected to the short tube (5) and the first vertical groove (2021); The knob assembly (206) comprises a rotating body (2061) fixedly connected to a rotating disk (207); the interior of the rotating body (2061) is hollow; a slider (2062) is slidably mounted inside the rotating body (2061); a return spring is disposed at one end of the slider (2062); a fixing rod (2064) is fixedly disposed at one end of the slider (2062); the fixing rod (2064) penetrates the rotating body (2061) and is slidably connected thereto; an arc groove for cooperating with the fixing rod (2064) is formed on the outer wall of the mounting shell (201); a rubber sheet is adhered to the interior of the arc groove; The inner wall of the rotating disk (207) is fixedly provided with a plurality of groups of teeth for use with the first valve group (203), the second valve group (204) and the third valve group (205), each group of teeth being capable of driving the first valve group (203), the second valve group (204) and the third valve group (205) to rotate 90 degrees, and the gears in the first valve group (203), the second valve group (204) and the third valve group (205) are staggered; The first valve group (203) and the second valve group (204) have the same structure as a third valve group (205), wherein the second air guide hole in the second valve group (204) is perpendicular to the first air guide hole (2052) in the third valve group (205); The sequence of opening the MO source bottle (1) by the MO source bottle (1) switch structure is as follows: first turn the third valve group (205), then turn the first valve group (203), and finally turn the second valve group (204). The sequence of closing the source bottle is as follows: first turn the second valve group (204), then turn the first valve group (203), and finally turn the third valve group (205). The time interval between each step is between 2 seconds and 20 seconds.

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