A device for real-time temperature detection in a vacuum chamber

Abstract

The present invention discloses a device for real-time temperature detection in a vacuum chamber, and relates to the technical field of temperature detection of vacuum coating, and is used to overcome the problem that the temperature measurement heat conduction interferes with the closed space system, and the heat state is ambiguous, resulting in a large approximate range of temperature measurement. The present invention mainly reduces the interference of the temperature measuring device on the system in the vacuum chamber by arranging a temperature measuring sealing cylinder, a sealing chamber, a sensor positioning cylinder, and a rotating main shaft, and reduces the approximation of the target temperature detection result in the vacuum chamber. By arranging a power piston member, a second connecting rod, and a bellows, the pressure damage degree and pressure maintenance load of the closed space caused by the interactive state adjustment between the temperature measuring device and the temperature measurement target can be reduced. By arranging a heat-conducting diaphragm, a transfer channel, a first electrode, and a second electrode, the approximation of the temperature detection result obtained by heat conduction is reduced, and the accuracy of temperature detection in the closed space is improved.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating temperature detection, and in particular to a device for real-time temperature detection in a vacuum chamber. Background Art

[0002] In the arc ion plating process of vacuum coating, arc ion plating is a technology that uses gas discharge to partially ionize the gas or evaporated material, and deposits the evaporated material or its reactant on the substrate under the bombardment of gas ions or evaporated material ions. In the common vacuum coating process, the plated part usually needs to be installed on the workpiece rack for rotation and other movements to meet the needs of heating, curing and uniform coating, and the static coating is less common. In the existing vacuum coating equipment, the temperature detection of the surface layer of the plated part usually relies on a remote non-contact temperature detection method, such as laser temperature measurement, etc., and the temperature of the vacuum coating environment is measured to approximately replace the temperature of the plated part. The temperature measured by this non-contact temperature detection method is usually accompanied by attenuation and loss of the detection signal. The temperature measured is often very different from the temperature of the surface layer of the plated part, making it difficult to detect the actual molding temperature of the vacuum coated part. However, some special temperature detection equipment has a more special structure and is difficult to be used in vacuum coating equipment of other structures. Therefore, it is difficult to monitor the actual temperature of the vacuum coated part in real time. The error in temperature measurement leads to poor control effect on the finished product of vacuum coating.

[0003] In the prior art, for example, European invention patent EP4024018B1 discloses a temperature measuring device. In this invention patent, the heat in the area to be measured is conducted to the temperature sensing part in a direct contact manner through a heat conduction shell with high thermal conductivity, and the temperature of the area to be measured is measured by heat transfer generated by evaporation and condensation through the heat pipe phenomenon. In this technical solution, the temperature conduction structure is in direct contact with the position to be measured, and the temperature detection work may easily interfere with the operation of the system in the detection area. At the same time, there may be a situation where the heat conduction is slow, resulting in a high delay in temperature detection, which is not conducive to real-time monitoring of temperature.

[0004] For example, the U.S. invention patent US8814428B2 discloses a temperature sensing device of a coordinate probe. In this invention patent, the temperature sensing device is driven to contact the temperature detection area through an ordinary Cartesian coordinate mechanism, and is flexibly contacted with the temperature measurement surface through the isolation of a spring. In this technical solution, when the displacement-adjusted coordinate spindle drives the sensing device to rest against the temperature measurement surface, it may be easy to cause excessive pressure to damage the temperature detection device, and in the process of contact between the temperature sensing device and the heat conduction surface, scratches are likely to occur, which may gradually reduce the heat conduction efficiency, and may easily cause the temperature sensing system and the detection area to affect each other and reduce the service life. Summary of the invention

[0005] The purpose of the present invention is to provide a device for real-time temperature detection in a vacuum chamber, so as to overcome the shortcomings of the prior art such as the interference of temperature measurement heat conduction with the closed space system and the large approximate range of temperature measurement caused by the fuzzy heat state.

[0006] In order to solve the above technical problems, the present invention specifically provides the following technical solutions:

[0007] A device for real-time temperature detection in a vacuum chamber comprises a temperature measuring sealing cylinder, a sealing chamber is arranged in the temperature measuring sealing cylinder, the sealing chamber is communicated with the vacuum chamber to be measured, a sensing positioning cylinder is arranged in the sealing chamber, and a temperature sensor is arranged at one end of the sensing positioning cylinder facing the vacuum chamber.

[0008] One end of the sensing positioning cylinder facing the vacuum chamber is fixedly connected with a positioning seat, the other end of the positioning seat is provided with a positioning groove, the positioning groove is fixedly connected with a temperature sensor, a rotating spindle is provided in the sealing chamber, an extension limit hole is provided in the rotating spindle, a sealing plug is fixedly connected to the end of the extension limit hole away from the vacuum chamber, and the other end of the extension limit hole is provided with a sensing positioning cylinder;

[0009] By arranging a temperature measuring sealing cylinder, a sealing chamber, a sensor positioning cylinder and a rotating main shaft, the interference of the temperature measuring device on the system in the vacuum chamber can be reduced, and the accuracy of the heat conduction docking and positioning of the temperature detection can be improved; the approximation of the target temperature detection results in the vacuum chamber is reduced, the timeliness and accuracy of the temperature detection in the closed space of the vacuum chamber are improved, and the accuracy of the interactive position between the operation of the system in the vacuum chamber and the temperature detection device is improved.

[0010] Preferably, one end of the extended limit hole toward the vacuum chamber is slidably connected to the sensor positioning cylinder, and one end of the sensor positioning cylinder toward the vacuum chamber is fixedly connected to a docking cover cylinder, a docking isolation chamber is provided in the docking cover cylinder, the docking isolation chamber accommodates the rotating main shaft, a docking spring is provided between the docking cover cylinder and the side wall of the sealing cover chamber, one end of the docking cover cylinder away from the vacuum chamber is fixedly connected to the docking spring, and the other end of the docking spring is fixedly connected to the rotating main shaft;

[0011] By providing a sensing positioning cylinder, a docking cover cylinder, and a docking spring, the possibility of the sealing load required to maintain the sealing of the closed space being concentrated on the sensing device is reduced, the conduction path of mutual interference between the temperature detection device and the closed system for temperature measurement is reduced, the degree of interaction between the temperature detection device and the system in the closed space is reduced, the limit of the interaction between the closed system and the temperature detection device is reduced, and the docking effect of heat conduction between the temperature measuring device and the temperature measurement target system is improved.

[0012] Preferably, an opening is provided in the side wall of the sealing chamber away from the vacuum chamber, and a mechanical seal is fixedly connected to the end face of the temperature measuring sealing cylinder away from the vacuum chamber. The mechanical seal is rotatably connected to a rotating main shaft, and a synchronous pulley is fixedly connected to the end of the rotating main shaft away from the vacuum chamber.

[0013] By setting openings, mechanical seals and synchronous pulleys, the clarity of the interaction state between the temperature measuring device and the temperature measuring target is improved, the possibility of motion interference between heat conduction of the temperature measuring device and the temperature measuring target is reduced, and the efficiency and accuracy of temperature measurement in the closed system are improved.

[0014] Preferably, a docking assembly is provided in the side wall of the closure chamber, and the docking assembly includes a docking slide seat slidably connected to the side wall of the closure chamber, a docking swing frame is hingedly connected to the docking slide seat, and the other end of the docking swing frame is hingedly connected to the docking cover cylinder, and the docking swing frame is slidably connected to the first docking pin in the axial direction, and the first docking pin is located between the docking slide seat and the docking cover cylinder, and the first docking pin is rotatably connected to the first connecting rod, and the other end of the first connecting rod is provided with a power assembly that drives the first connecting rod, and the first connecting rod drives the docking swing frame to deflect around the docking slide seat;

[0015] By providing a docking slide, a docking swing frame, a first docking pin and a first connecting rod, the control accuracy of the heat conduction docking state of the temperature measuring device is improved, and the accuracy of the interference state judgment between the temperature measuring device and the temperature measuring target system is improved.

[0016] Preferably, the power assembly includes a power piston member arranged outside the sealing chamber, a control channel is provided in the side wall of the sealing chamber, a control pin is fixedly connected in the control channel, a second connecting rod is rotatably connected to the control pin, one end of the second connecting rod located in the sealing chamber is hinged to the first connecting rod, the other end of the second connecting rod is fixedly connected to a control handle, a bellows is fixedly connected between the other end of the control handle and the temperature measuring sealing cylinder, the bellows seals the control channel, and the power piston member is dynamically connected to the control handle;

[0017] By providing a power piston, a second connecting rod and a bellows, the pressure damage degree and the pressure maintenance load of the closed space caused by the interaction state adjustment between the temperature measuring device and the temperature measuring target can be reduced.

[0018] Preferably, the end of the sensing positioning cylinder facing the vacuum chamber is fixedly connected to a docking cover cylinder, the end of the docking cover cylinder facing the vacuum chamber is fixedly connected to a positioning packaging flange, a sensing packaging cavity is provided in the positioning packaging flange, a transfer mounting cover is fixedly connected to the end face of the positioning packaging flange facing the vacuum chamber, a transfer cover is slidably connected in the transfer mounting cover, a transfer channel is provided in the transfer cover, a heat-conducting diaphragm is provided on the end face of the transfer cover facing the vacuum chamber, a temperature measuring contact block is slidably connected to the end of the temperature sensor facing the vacuum chamber, the other end of the temperature measuring contact block abuts against the heat-conducting diaphragm, and a conduction spring is fixedly connected between the transfer cover and the positioning packaging flange.

[0019] Preferably, a sliding groove is provided in the end surface of the transfer cover located in the vacuum chamber, and a sliding spring is fixedly connected between the transfer cover and the heat-conducting diaphragm, and the sliding spring is located in the sliding groove;

[0020] By arranging a positioning packaging flange, a sensing packaging cavity, a transfer mounting cover, a conduction spring and a sliding spring, interference caused by heat conduction of a temperature detection device is reduced, and the accuracy of heat state judgment of temperature conduction detection in a closed space is improved.

[0021] Preferably, the transfer cover is slidably connected to a heat-conducting diaphragm on the end surface located in the vacuum chamber, the heat-conducting diaphragm seals the transfer channel, the transfer cover is provided with a first electrode on the contact surface axially sliding in the transfer mounting cover, and a second electrode is provided on the mating surface of the transfer mounting cover and the transfer cover;

[0022] By providing a heat-conducting diaphragm, a transfer channel, a first electrode and a second electrode, the control accuracy of the decomposition and change of the interactive state between the temperature measuring device and the temperature measurement target system can be improved, while the approximation of the temperature detection result obtained by heat conduction is reduced, the ambiguity of the state of heat conduction in temperature detection is reduced, and the accuracy of temperature detection in a closed space is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0024] Figure 1 It is a schematic diagram of the overall structure of a device for real-time temperature detection in a vacuum chamber of the present invention;

[0025] Figure 2 yes Figure 1 The main view diagram in FIG.

[0026] Figure 3 yes Figure 2 Schematic diagram of the internal structure;

[0027] Figure 4 yes Figure 3 Schematic diagram of the assembly relationship at the middle sensor positioning cylinder;

[0028] Figure 5 It is a schematic diagram of the connection relationship between the docking swing frame and the positioning packaging flange;

[0029] Figure 6 is a schematic diagram of the connection relationship between the temperature sensor and the transfer mounting cover;

[0030] Figure 7 yes Figure 6 A local enlarged schematic diagram of point A in the middle.

[0031] Figure numbers: temperature measuring sealing cylinder 10; sealing cover cavity 11; rotating main shaft 12; extending limit hole 13; sensing positioning cylinder 14; extending connecting hole 15; positioning seat 16; temperature sensor 17; docking spring 18; docking cover cylinder 19; docking isolation cavity 20; positioning packaging flange 21; sensing packaging cavity 22; transmission mounting cover 23; heat conductive diaphragm 24; conduction spring 25; temperature measuring contact block 26; docking guide pin 29; sealing plug 30; mechanical seal 31; synchronous pulley 32; brush ring sleeve 33; encoding disk 34; transfer cover 35; transfer channel 36; sliding groove 37; sliding spring 38; first electrode 39; second electrode 40; docking slide 41; docking swing frame 42; first docking pin 43; first connecting rod 44; second connecting rod 45; control pin 46; control handle 47; bellows 48; power piston member 49. DETAILED DESCRIPTION

[0032] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, specific embodiments of the present invention are now described with reference to the accompanying drawings.

[0033] The specific embodiments of the present invention described herein are only used to explain the purpose of the present invention and cannot be understood as limiting the present invention in any way. Under the guidance of the present invention, technicians can conceive of any possible variations based on the present invention, which should be regarded as belonging to the scope of the present invention. It should be noted that when an element is referred to as "arranged on" another element, it can be directly on another element or there can also be a central element. When an element is considered to be "connected" to another element, it can be directly connected to another element or there may be a central element at the same time. The terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements, it can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation method.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0035] Embodiment 1

[0036] Refer to the attached Figure 1 To Attachment Figure 5As shown, the present invention provides a device for real-time temperature detection in a vacuum chamber, comprising a temperature measuring sealing cylinder 10, a sealing chamber 11 is arranged in the temperature measuring sealing cylinder 10, the sealing chamber 11 is communicated with the vacuum chamber to be measured, a sensing positioning cylinder 14 is arranged in the sealing chamber 11, and a temperature sensor 17 is arranged at one end of the sensing positioning cylinder 14 facing the vacuum chamber,

[0037] A positioning seat 16 is fixedly connected to one end of the sensor positioning cylinder 14 facing the vacuum chamber, and a positioning groove is provided at the other end of the positioning seat 16, in which a temperature sensor 17 is fixedly connected; a rotating main shaft 12 is provided in the sealing chamber 11, and an extension limit hole 13 is provided in the rotating main shaft 12, the rotating main shaft 12 passes through the side wall of the sealing chamber 11, and a sealing plug 30 is fixedly connected to one end of the extension limit hole 13 away from the vacuum chamber, and a sensor positioning cylinder 14 is provided at the other end of the extension limit hole 13;

[0038] The positioning groove provided at the upper end of the positioning seat 16 can position the temperature sensor 17, so that the temperature sensor 17 and the positioning packaging flange 21 are kept aligned, and the temperature measuring sealing cylinder 10 is sealed with the opening provided on the side wall of the vacuum chamber to be temperature-detected through the upper end opening of the sealing cover cavity 11, so that the temperature sensor 17 is encapsulated in the connecting space of the vacuum chamber, and the temperature detection of the temperature detection target in the vacuum chamber is performed. At the same time, by arranging the sealing plug 30 in the extended limiting hole 13, the pressure in the vacuum chamber can be kept constant and sealed, which is convenient for providing the temperature detection electrical connection layout through the extended limiting hole 13, and can also provide a wiring channel in the vacuum chamber;

[0039] By arranging the temperature measuring sealing cylinder 10, the sealing chamber 11, the sensing positioning cylinder 14 and the rotating main shaft 12, the temperature of the target to be measured can be detected in the vacuum chamber of the temperature detection. The axial relative position between the sensing positioning cylinder 14 and the rotating main shaft 12 is adjustable, which is convenient for expanding the layout of the temperature sensing device, and can reduce the interference of the temperature measuring device on the system in the vacuum chamber, while maintaining accurate temperature detection positioning, improving the stability of the temperature detection space positioning, and improving the accuracy of the temperature detection heat conduction docking positioning;

[0040] The degree of approximation of the target temperature detection results in the vacuum chamber is reduced, the timeliness and accuracy of temperature detection in the closed space of the vacuum chamber are improved, the accuracy of the interactive position between the operation of the system in the vacuum chamber and the temperature detection device is improved, and the positioning accuracy of the interference state judgment benchmark between the temperature measuring device and the temperature measuring target system is improved.

[0041] See attached Figure 3 To Attachment Figure 5As shown, one end of the extended limiting hole 13 facing the vacuum chamber is slidably connected to the sensor positioning cylinder 14, and one end of the sensor positioning cylinder 14 facing the vacuum chamber is fixedly connected to a docking cover cylinder 19, and a docking isolation chamber 20 is provided in the docking cover cylinder 19, and the docking isolation chamber 20 accommodates the rotating main shaft 12. A docking spring 18 is provided between the docking cover cylinder 19 and the side wall of the sealing cover chamber 11, and one end of the docking cover cylinder 19 away from the vacuum chamber is fixedly connected to the docking spring 18, and the other end of the docking spring 18 is fixedly connected to the rotating main shaft 12;

[0042] The docking spring 18 connects the sensor positioning cylinder 14 and the rotating main shaft 12 through the docking isolation chamber 20, which can buffer the impact of the movement of the temperature measurement target system in the vacuum chamber transmitted to the temperature sensor 17 of the temperature detection device. The docking spring 18 pushes the temperature sensor 17 to flexibly connect the temperature measurement target in the vacuum chamber. The docking cover cylinder 19 can improve the sliding guide effect of the sensor positioning cylinder 14 in the extension limit hole 13. At the same time, the docking isolation chamber 20 can also protect the sensor positioning cylinder 14 and the end of the rotating main shaft 12, reducing the possibility of the system material in the vacuum chamber entering the extension limit hole 13; a docking guide pin 29 can also be arranged between the structure of the temperature measurement target in the vacuum chamber and the temperature measurement device to provide pre-guiding for the heat conduction docking, which can improve the docking stability of the temperature measurement heat conduction;

[0043] The possibility of the sealing load required to maintain the sealing of the closed space being concentrated on the sensing device is reduced, the safety and stability of the temperature measuring mechanism are improved, the conduction path of mutual interference between the temperature detection device and the closed system for temperature measurement is reduced, the degree of interaction between the temperature detection device and the system in the closed space is reduced, the limit of the interaction between the closed system and the temperature detection device is narrowed, and the docking effect of heat conduction between the temperature measuring device and the temperature measurement target system is improved.

[0044] See attached Figure 1 To Attachment Figure 3 As shown, the rotating main shaft 12 drives the rotating main shaft 12 to rotate synchronously in the circumferential direction of the axis of the extended limiting hole 13, and an opening is provided in the side wall of the sealing chamber 11 away from the vacuum chamber, and the opening accommodates the rotation of the rotating main shaft 12. The end surface of the temperature measuring sealing cylinder 10 away from the vacuum chamber is fixedly connected with a mechanical seal 31, and the mechanical seal 31 is a standard part. The rotating main shaft 12 is rotatably connected inside the mechanical seal 31, and the mechanical seal 31 seals the opening in the side wall of the sealing chamber 11. The mechanical seal 31 maintains the sealing of the side wall of the sealing chamber 11 where the mechanical seal 31 is installed, and the end of the rotating main shaft 12 away from the vacuum chamber is fixedly connected with a synchronous pulley 32, a brush ring sleeve 33 and an encoding disk 34;

[0045] A power synchronous belt driven by a servo motor is fixedly connected to the synchronous pulley 32. The brush ring sleeve 33 at the lower end of the rotating spindle 12 can be wired in the extended limit hole 13. The brush ring sleeve 33 is connected to the temperature sensor 17 through the wiring circuit. At the same time, the brush ring sleeve 33 can also be wired through the extended connecting hole 15 and the positioning seat 16 to provide a connection line for the coating electrode for the coating workpiece rack in the vacuum chamber at the upper end of the positioning seat 16. The encoder disk 34 fixedly connected to the lower end of the rotating spindle 12 transmits feedback on the rotation of the rotating spindle 12. When the synchronous pulley 32 drives the rotating spindle 12 to rotate, it drives The sensing positioning cylinder 14 that rotates synchronously with the rotating main shaft 12 in the circumferential direction of the extended limiting hole 13 rotates, thereby driving the docking cover cylinder 19, the positioning seat 16 and the temperature sensor 17 to rotate synchronously. The encoding disk 34 detects the rotation speed at the temperature sensor 17. After comparing the relative rotation angular velocity of the detection object in the vacuum chamber, the control signal sent by the encoding disk 34 immediately drives the rotating main shaft 12 to adjust the rotation speed, thereby controlling the angular velocity of the temperature sensor 17 rotating around the axis of the rotating main shaft 12 to keep the same angular velocity as the detection object in the vacuum chamber, thereby forming a speed control closed loop;

[0046] By setting a synchronous pulley 32 to drive the rotating main shaft 12 and the temperature sensor 17 to keep the same angular velocity with the temperature detection target in the vacuum chamber, the elastic thrust of the docking spring 18 can keep the docking cover tube 19, the positioning seat 16 and the temperature sensor 17 against the surface of the temperature detection target in the vacuum chamber, and the rotating main shaft 12 drives the sensing positioning tube 14 to rotate around the axis of the extended connecting hole 15 and keep it relatively still with the workpiece frame for temperature detection in the vacuum chamber in the circumferential direction of the axis of the temperature measuring sealing tube 10, thereby reducing the possibility of local sliding of the heat conduction part of the temperature sensor 17 during the temperature detection process, and cooperating with the heat conduction docking holding effect of the docking spring 18 to drive the temperature sensor 17 to abut against the temperature detection target position, decomposing the interactive state of the transfer movement between the temperature detection heat conduction action and the system to be measured in the closed space, and the temperature sensor 17 flexibly abuts against the temperature measurement target for heat conduction, while synchronously rotating with the temperature measurement target at the heat conduction position;

[0047] The clarity of the interaction state between the temperature measuring device and the temperature measuring target is improved, the accuracy and stability of the control of the heat conduction docking state of the temperature measuring device are improved, the possibility of motion interference between the heat conduction of the temperature measuring device and the temperature measuring target is reduced, the immediacy and thermal conductivity of the heat conduction of the temperature measuring device are improved, and the efficiency and accuracy of temperature measurement in the closed system are improved.

[0048] See attached Figure 3 To Attachment Figure 5As shown, a docking assembly is provided in the side wall of the sealing chamber 11, and the docking assembly includes a docking slide 41 slidably connected in the side wall of the sealing chamber 11, and the docking slide 41 slides in the side wall of the sealing chamber 11 to change the distance between the docking slide 41 and the temperature sensor 17, and a docking swing frame 42 is hinged on the docking slide 41, and the other end of the docking swing frame 42 is hinged to the docking cover cylinder 19, and the docking swing frame 42 is slidably connected to the first docking pin 43 in the axial direction, and the first docking pin 43 is located between the docking slide 41 and the docking cover cylinder 19, and the first docking pin 43 is rotatably connected to the first connecting rod 44, and the first connecting rod 44 is located in the sealing chamber 11, and the other end of the first connecting rod 44 is provided with a power assembly for driving the first connecting rod 44, and the first connecting rod 44 drives the docking swing frame 42 to deflect around the docking slide 41;

[0049] A docking slide 41 is arranged in the side wall in the circumferential direction of the sealing chamber 11. The docking slide 41 can slide in the radial direction of the sealing chamber 11 to adjust the distance between the docking slide 41 and the temperature sensor 17. The docking slide 41 is hinged to the docking cover tube 19 through the docking swing frame 42. When the power component drives the first connecting rod 44 to push the docking swing frame 42 to relatively deflect around the hinge center of the docking swing frame 42 and the docking cover tube 19 through the first docking pin 43, the docking slide 41 slides in the side wall of the sealing chamber 11 to adjust the distance between it and the temperature sensor 17. The docking swing frame 42 and the docking cover tube 19 are connected to the sealing chamber 11. The hinged position between the connecting cover tube 19 is driven by the relative deflection of the docking swing frame 42, so that the docking cover tube 19 and the temperature sensor 17 move in the axial direction of the sensor positioning tube 14 and drive the docking spring 18 to elastically expand and contract. At the same time, the first docking pin 43 slides in the axial direction of the docking swing frame 42, and the posture of the first connecting rod 44 adapts to the change, so that the temperature sensor 17 is driven by the first connecting rod 44 to move in the direction of the decomposition of the interactive state between the temperature measuring device and the temperature measuring target. The first connecting rod 44 can drive the temperature sensor 17 to move and adjust the heat conduction position of the temperature measuring device;

[0050] By setting a power component to push the first connecting rod 44 and the docking swing frame 42 to drive the adjustment of the heat conduction position on the temperature sensor 17, the accuracy and convenience of adjusting the heat conduction position between the temperature measuring device and the temperature measuring target can be improved, and the control accuracy of the heat conduction docking state of the temperature measuring device can be further improved. The coordination effect between the temperature measurement heat conduction and the operation of the closed system is improved, and the degree of interaction between the temperature detection device and the system in the closed space is further reduced, and the accuracy of the interference state judgment between the temperature measuring device and the temperature measurement target system is improved.

[0051] See attached Figure 3 To Attachment Figure 5As shown, the power assembly includes a power piston member 49 arranged on the outside of the sealing chamber 11, the relative position between the power piston member 49 and the temperature measuring sealing tube 10 remains unchanged, a control channel is provided in the side wall of the sealing chamber 11, a control pin 46 is fixedly connected in the control channel, a second connecting rod 45 is rotatably connected to the control pin 46, one end of the second connecting rod 45 located in the sealing chamber 11 is hinged to the first connecting rod 44, the other end of the second connecting rod 45 near the power piston member 49 in the control channel is fixedly connected to a control handle 47, a bellows 48 is fixedly connected between the other end of the control handle 47 and the temperature measuring sealing tube 10, the bellows 48 seals the control channel, and the power piston member 49 is dynamically connected to the control handle 47;

[0052] The driving power of the docking rocking frame 42 can be arranged outside the sealing chamber 11 and the control channel, thereby reducing the space occupancy rate of the docking rocking frame 42 pushing the docking cover tube 19 to move axially to adjust the docking position of the temperature sensor 17, and can reduce the pressure destruction degree and pressure maintenance load of the vacuum coating closed space caused by the interaction state adjustment between the temperature measuring device and the temperature measuring target, thereby further reducing the interaction degree between the temperature measuring device and the temperature measuring target system.

[0053] Refer to the attached Figure 2 , Attachment Figure 5 And attached Figure 7 As shown, a positioning packaging flange 21 is fixedly connected to one end of the docking cover tube 19 facing the vacuum chamber, a sensing packaging cavity 22 is arranged in the positioning packaging flange 21, a positioning seat 16 and a temperature sensor 17 are located in the sensing packaging cavity 22, a transfer mounting cover 23 is fixedly connected to the end face of the positioning packaging flange 21 facing the vacuum chamber, a transfer cover 35 is slidably connected to the end of the transfer mounting cover 23 facing the vacuum chamber, a transfer channel 36 is arranged in the transfer cover 35, a heat-conducting diaphragm 24 is arranged on the end face facing the vacuum chamber, a temperature measuring contact block 26 is slidably connected to the end of the temperature sensor 17 facing the vacuum chamber, the other end of the temperature measuring contact block 26 abuts against the heat-conducting diaphragm 24, the temperature measuring contact block 26 is located in the transfer cover 35, a conduction spring 25 is fixedly connected between the transfer cover 35 and the positioning packaging flange 21, the temperature measuring contact block 26 detects the temperature on the heat-conducting diaphragm 24, and the heat-conducting diaphragm 24 contacts the temperature detection position on the workpiece rack of the temperature-measured space;

[0054] By setting the positioning packaging flange 21, the transfer mounting cover 23, the transfer cover 35 and the heat-conducting diaphragm 24, the temperature sensor 17 can be packaged at the end of the positioning packaging flange 21, and the heat-conducting diaphragm 24 contacts the temperature measurement target for heat conduction. The temperature sensor 17 contacts and detects the heat conducted by the heat-conducting diaphragm 24 through the temperature measurement contact block 26, thereby completing the temperature detection work of the temperature measurement target system in the closed space;

[0055] The thermally conductive diaphragm 24, the transfer cover 35 and the transfer mounting cover 23 isolate the temperature sensing and temperature measurement target systems in the enclosed space, reducing the possibility of exposure and mutual damage to the temperature detection device, and improving the safety and stability of the temperature sensing device. At the same time, by providing a conduction spring 25 to buffer the motion transfer of heat conduction docking, the heat conduction is made more stable, the contact reliability of the heat conduction is ensured, the instantaneous temperature measurement of the target system in the enclosed space is further improved, and the approximate value range of the temperature measurement results in the enclosed space is reduced.

[0056] Refer to the attached Figure 6 and attached Figure 7 As shown, a sliding groove 37 is provided in the end surface of the transfer cover 35 located in the vacuum chamber, and a sliding spring 38 is fixedly connected between the transfer cover 35 and the heat-conducting diaphragm 24, and the sliding spring 38 is located in the sliding groove 37; the transfer cover 35 is slidably connected to the heat-conducting diaphragm 24 in the upper end surface facing the vacuum chamber, and the heat-conducting diaphragm 24 seals the connecting space and the transfer channel 36 between the transfer mounting cover 23 and the positioning packaging flange 21. By setting the sliding spring 38, the interaction force generated by the friction in the contact surface of the heat-conducting diaphragm 24 contacting the temperature measurement target for heat conduction can be buffered, and at the same time, an eccentric stroke of frictional sliding of heat contact conduction is provided, which further reduces the interference caused by heat conduction of the temperature detection device, and further reduces the degree of interaction between the temperature detection device and the temperature measurement target system;

[0057] At the same time, the relative eccentric sliding between the heat-conducting diaphragm 24 and the transfer cover 35 can provide a sliding stroke for the heat conduction contact position to deviate from the rotation center of the temperature measuring sealing cylinder 10 and the temperature sensor 17 when the temperature measuring sealing cylinder 10 drives the sensing positioning cylinder 14 and the temperature sensor 17 to follow the rotation of the vacuum coating workpiece rack of the temperature detection target in the vacuum chamber, thereby reducing the rigid connection impact of the heat conduction docking, blocking the possibility of temperature detection mutual interference due to the inertial transfer of the temperature conduction connection, improving the accuracy of the decomposition of the interactive state between the temperature detection device and the temperature measurement target system, and improving the accuracy of the heat state judgment of the closed space temperature conduction detection;

[0058] At the same time, the heat loss of the temperature sensing part during the conduction process is reduced, the approximation of the temperature measured in the closed space is further reduced, and the accuracy of the heat benchmark for temperature detection conduction in the closed space is improved.

[0059] Refer to the attached Figure 6 and attached Figure 7 As shown, the transfer cover 35 is slidably connected to the heat-conducting diaphragm 24 on the end surface located in the vacuum chamber, and the heat-conducting diaphragm 24 seals the transfer channel 36. The transfer cover 35 is provided with a first electrode 39 on the contact surface that slides axially in the transfer mounting cover 23. The mating surfaces of the transfer mounting cover 23 and the transfer cover 35 are provided with a second electrode 40, and the second electrode 40 and the first electrode 39 cooperate with each other.

[0060] A first electrode 39, a second electrode 40 and a conductive spring 25 are arranged on the relative sliding stroke of the transfer mounting cover 23 and the transfer cover 35. Before the heat conduction contact of the temperature detection, the conductive spring 25 and the thermal conductive film 24 are subjected to the air pressure of the temperature detection space according to the sealed state of the stroke between the thermal conductive film 24, the transfer cover 35 and the positioning packaging flange 21. The air pressure strength of the space to be temperature detected can be detected according to the circuit path characteristics between the second electrode 40 and the first electrode 39, or a pressure sensor is arranged in the sealed environment between the transfer cover 35 and the positioning packaging flange 21 to detect the air pressure of the temperature detection space. The temperature of the space is affected by multiple parameters such as environmental humidity and pressure.

[0061] At the same time, during the heat conduction docking process of temperature detection, the contact pressure of heat conduction between the thermal conductive diaphragm 24 and the temperature detection area can be assisted in judging according to the pressure changes detected by the second electrode 40 and the first electrode 39, which can improve the control accuracy of the decomposition and change of the interactive state between the temperature measuring device and the temperature measurement target system, and at the same time reduce the approximation of the temperature detection result obtained by heat conduction, reduce the ambiguity of the state of heat conduction in temperature detection, and analyze the information of the state of the influence of air pressure on temperature, so as to correct the approximate range of temperature detection and verify the state of heat conduction in temperature detection, thereby improving the accuracy of temperature detection in closed spaces.

[0062] The above description is only an illustrative embodiment of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes made by a person skilled in the art without departing from the concept and principle of the present invention shall fall within the scope of protection of the present invention.

Claims

1. A device for real-time temperature detection in a vacuum chamber, comprising a temperature measuring sealing cylinder (10), a sealing chamber (11) being provided in the temperature measuring sealing cylinder (10), the sealing chamber (11) being communicated with a vacuum chamber to be measured, a sensing positioning cylinder (14) being provided in the sealing chamber (11), a temperature sensor (17) being provided at one end of the sensing positioning cylinder (14) facing the vacuum chamber, characterized in that: The sensing positioning tube (14) is fixedly connected to a positioning seat (16) at one end facing the vacuum chamber, and a positioning groove is provided at the other end of the positioning seat (16), and the temperature sensor (17) is fixedly connected in the positioning groove; a rotating main shaft (12) is provided in the sealing chamber (11), and an extension limit hole (13) is provided in the rotating main shaft (12); a sealing plug (30) is fixedly connected to the end of the extension limit hole (13) away from the vacuum chamber, and the sensing positioning tube (14) is provided at the other end of the extension limit hole (13); The sensing positioning tube (14) is fixedly connected to a docking cover tube (19) at one end facing the vacuum chamber, and the docking cover tube (19) is fixedly connected to a positioning packaging flange (21) at one end facing the vacuum chamber. A sensing packaging cavity (22) is provided in the positioning packaging flange (21). A transfer mounting cover (23) is fixedly connected to the end surface of the positioning packaging flange (21) facing the vacuum chamber. A transfer cover (35) is slidably connected to the transfer mounting cover (23). A transfer channel (36) is provided in the transfer cover (35). A heat-conducting film (24) is provided on the end surface of the transfer cover (35) facing the vacuum chamber. A temperature measuring contact block (26) is slidably connected to the end of the temperature sensor (17) facing the vacuum chamber. The other end of the temperature measuring contact block (26) abuts against the heat-conducting film (24). A conduction spring (25) is fixedly connected between the transfer cover (35) and the positioning packaging flange (21). A sliding groove (37) is provided in the end surface of the transfer cover (35) located in the vacuum chamber, a sliding spring (38) is fixedly connected between the transfer cover (35) and the heat-conducting diaphragm (24), and the sliding spring (38) is located in the sliding groove (37); The transfer cover (35) is located on an end surface in the vacuum chamber and is slidably connected to the heat-conducting diaphragm (24). The heat-conducting diaphragm (24) seals the transfer channel (36). The transfer cover (35) is provided with a first electrode (39) on an axially sliding contact surface in the transfer mounting cover (23). A second electrode (40) is provided on a mating surface between the transfer mounting cover (23) and the transfer cover (35).

2. A device for real-time temperature detection in a vacuum chamber as claimed in claim 1, characterized in that: The end of the extended limiting hole (13) facing the vacuum chamber is slidably connected to the sensing positioning tube (14), and the end of the sensing positioning tube (14) facing the vacuum chamber is fixedly connected to a docking cover tube (19), a docking isolation chamber (20) is provided in the docking cover tube (19), and the docking isolation chamber (20) accommodates the rotating main shaft (12), a docking spring (18) is provided between the docking cover tube (19) and the side wall of the sealing chamber (11), and the end of the docking cover tube (19) away from the vacuum chamber is fixedly connected to the docking spring (18), and the other end of the docking spring (18) is fixedly connected to the rotating main shaft (12).

3. A device for real-time temperature detection in a vacuum chamber as claimed in claim 2, characterized in that: An opening is provided in the side wall of the sealing cavity (11) away from the vacuum chamber, and a mechanical seal (31) is fixedly connected to the end face of the temperature measuring sealing cylinder (10) away from the vacuum chamber. The mechanical seal (31) is rotatably connected to the rotating main shaft (12), and a synchronous pulley (32) is fixedly connected to one end of the rotating main shaft (12) away from the vacuum chamber.

4. A device for real-time temperature detection in a vacuum chamber as claimed in claim 3, characterized in that: A docking assembly is provided in the side wall of the enclosure cavity (11), and the docking assembly includes a docking slide (41) slidably connected to the side wall of the enclosure cavity (11); a docking swing frame (42) is hingedly connected to the docking slide (41); the other end of the docking swing frame (42) is hingedly connected to the docking cover cylinder (19); the docking swing frame (42) is slidably connected to a first docking pin (43) in the axial direction; the first docking pin (43) is located between the docking slide (41) and the docking cover cylinder (19); a first connecting rod (44) is rotatably connected to the first docking pin (43); a power assembly for driving the first connecting rod (44) is provided at the other end of the first connecting rod (44); the first connecting rod (44) drives the docking swing frame (42) to deflect around the docking slide (41).

5. A device for real-time temperature detection in a vacuum chamber as claimed in claim 4, characterized in that: The power assembly comprises a power piston member (49) arranged on the outside of the sealing chamber (11), a control channel is provided in the side wall of the sealing chamber (11), a control pin (46) is fixedly connected in the control channel, a second connecting rod (45) is rotatably connected to the control pin (46), one end of the second connecting rod (45) located in the sealing chamber (11) is hinged to the first connecting rod (44), the other end of the second connecting rod (45) is fixedly connected to a control handle (47), a bellows (48) is fixedly connected between the other end of the control handle (47) and the temperature measuring sealing tube (10), the bellows (48) seals the control channel, and the power piston member (49) is dynamically connected to the control handle (47).

Images