High-efficiency silicon material feeding device for monocrystalline silicon growth furnace

Abstract

The invention discloses a monocrystalline silicon growth furnace silicon material efficient feeding device which comprises a charging unit and a sealing unit, and the charging unit comprises a top end circular ring part, a first circular ring part, a second circular ring part, a charging barrel, a fixing pipe, a bottom circular ring and a plurality of first connecting rods; the top end and the bottom end of the charging barrel are open; the sealing unit comprises a bottom cover, a lifting rod and a connecting part. The feeding device can be effectively used for secondary feeding of the monocrystalline silicon growth furnace, so that feeding is convenient, and the production efficiency of the monocrystalline silicon growth furnace is improved. And during secondary feeding, an additional flange part does not need to be prepared, so that the use is more convenient, and the operation is simpler. The feeding device has the material storage state and the feeding state, so that the stability is higher during material storage, and the feeding operation is more convenient during feeding.

Description

Technical Field

[0001] This invention relates to the field of monocrystalline silicon production and processing technology, and more specifically, to a high-efficiency silicon material feeding device for monocrystalline silicon growth furnaces. Background Art

[0002] The Czochralski method is a commonly used method for preparing single-crystal silicon. During crystal pulling, polycrystalline silicon raw material is placed in a quartz crucible within a single-crystal furnace. After being heated and melted, the silicon melt is gradually grown into a single-crystal silicon rod under the guidance of a seed crystal by controlling the temperature gradient and pulling speed. Because the polycrystalline silicon raw material is initially packed into the quartz crucible, occupying a large space, and its volume shrinks significantly after melting, leaving considerable space at the top of the crucible, one or more feeding operations are required to improve the production efficiency and output of the single-crystal furnace.

[0003] Existing feeding devices require an additional flange during initial feeding. During secondary feeding, this flange is placed at the top opening of the furnace body. As the feeding device descends, the protruding ring on the outside of the cylinder rests on the flange, limiting the cylinder's height. The lifting rod continues to descend, allowing the bottom cover to open and release the silicon material from the cylinder. The need for the additional flange complicates the operation and makes it less convenient. Furthermore, when silicon material is stored in the cylinder but not yet used for feeding, the bottom cover may accidentally open, causing silicon leakage and disrupting production. Summary of the Invention

[0004] The present invention aims to overcome the shortcomings of the prior art and provide a high-efficiency silicon material feeding device for a single crystal silicon growth furnace.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a silicon material feeding device, comprising a feeding unit and a sealing unit, wherein the feeding unit includes a top annular portion, a first annular portion, a second annular portion, a material cylinder, a fixed tube, a bottom annular portion, and a plurality of first connecting rods connecting the top annular portion and the first annular portion; the first annular portion is fixedly connected to the outer wall of the material cylinder, the second annular portion is fixedly connected to the outer wall of the bottom end of the material cylinder, the bottom annular portion is fixedly connected to the inner wall of the bottom end of the material cylinder, both the top and bottom ends of the material cylinder are open, the fixed tube is fixedly connected to the top annular portion through a plurality of first radial rods, and the fixed tube is fixedly connected to the bottom annular portion through a plurality of second radial rods; the sealing unit includes a bottom cover, a lifting rod fixedly connected to the bottom cover and passing through the fixed tube, and a connecting portion fixed to the top end of the lifting rod.

[0006] Thus, as the lifting rod rises and falls, the bottom cover can either close or open the bottom of the material cylinder. Furthermore, the lifting rod rises and falls within the fixed tube, preventing friction between the lifting rod and the silicon material.

[0007] Furthermore, the bottom ring has an inverted frustum-shaped surface, a circumferential surface connected to the inverted frustum-shaped surface, a frustum-shaped surface connected to the circumferential surface, and an annular surface connected to the frustum-shaped surface; the bottom cover includes a first cylindrical block connected to the lifting rod, a frustum-shaped block connected to the first cylindrical block, and a second cylindrical block connected to the frustum-shaped block.

[0008] Furthermore, it also includes a rotating unit; the first annular portion has multiple grooves, in which a first rotating block is installed, and the first rotating block is connected to a first abutting plate and a second abutting plate; the second annular portion has multiple through slots, in which a second rotating block is installed, and the second rotating block is connected to a third abutting plate and a fourth abutting plate; the first abutting plate, the second abutting plate, the third abutting plate, and the fourth abutting plate all include a flat plate and an arc-shaped plate connected to the flat plate; the first annular portion has multiple limiting grooves, one end of which is fixed with a first limiting block, and the other end of which is fixed with a second limiting block; the rotating unit includes an upper rotating portion, a lower rotating portion, and multiple components connecting the upper rotating portion and the lower rotating portion. The second connecting rod, the upper rotating part includes two first rotating rings and a first connecting post connecting the two first rotating rings, the upper first rotating ring is connected to a plurality of L-shaped plates and a plurality of limiting blocks inserted into the limiting groove, the L-shaped plate has a locking bolt that can lock the upper rotating part and the first ring part relative to each other, the end of the locking bolt can abut against the upper surface of the first ring part; the lower rotating part includes two second rotating rings and a second connecting post connecting the two second rotating rings; the second ring part is fixed with a plurality of third limiting blocks, the third limiting blocks include L-shaped blocks connected to the second ring part and sliding blocks connected to the L-shaped blocks; the sliding blocks are located between the two second rotating rings.

[0009] Furthermore, the number of the groove portion and the first rotating block is 6 each.

[0010] Furthermore, the number of the through slot and the second rotating block are both four.

[0011] Furthermore, the number of the limiting groove, the limiting insert, and the third limiting block are all four.

[0012] Furthermore, the number of L-shaped plates is two.

[0013] Furthermore, there are four of each of the first and second connecting rods.

[0014] Furthermore, the feeding device can be in a storage state and a feeding state. In the storage state, the first rotating block is accommodated in the groove, the limiting insert abuts against the first limiting block, the first connecting post abuts against the first abutting plate, one end of the second rotating block is located below the bottom cover so that the bottom cover cannot move down, and the second connecting post abuts against the third abutting plate. In the feeding state, one end of the first rotating block is located outside the groove, the first connecting post abuts against the second abutting plate, the limiting insert abuts against the second limiting block, the second rotating block is not located below the bottom cover, the bottom cover can move down, and the second connecting post abuts against the fourth abutting plate.

[0015] Furthermore, both ends of the first rotating block and the second rotating block are arc-shaped.

[0016] This reduces friction between the rotating block and other components during movement.

[0017] Furthermore, the second connecting rod includes a first straight rod connected to the upper rotating part, a first arc-shaped rod connected to the first straight rod, a second arc-shaped rod connected to the first arc-shaped rod, and a second straight rod connecting the second arc-shaped rod and the lower rotating part.

[0018] Furthermore, the outer diameter of the upper rotating part is larger than the outer diameter of the lower rotating part.

[0019] The shape of the second connecting rod allows the upper and lower rotating parts to cooperate better.

[0020] Furthermore, a limiting ring portion that can abut against the top end of the fixing tube is fixed at the lifting rod.

[0021] The limiting ring can thus limit the descent height of the lifting rod, thereby limiting the descent height of the bottom cover and preventing the bottom cover from falling excessively.

[0022] Furthermore, the connecting part includes a cylindrical connecting block connected to the lifting rod and a U-shaped plate connected to the connecting block, the U-shaped plate having two through holes.

[0023] This makes it easier to connect hoisting equipment.

[0024] Beneficial effects:

[0025] 1. The feeding device of this application can be efficiently applied to the secondary feeding of monocrystalline silicon growth furnace, thereby facilitating feeding and improving the production efficiency of monocrystalline silicon growth furnace.

[0026] 2. The feeding device of this application does not require an additional flange during secondary feeding, making it more convenient to use and simpler to operate.

[0027] 3. The feeding device of this application has a material storage state and a material feeding state, which makes the material storage state more stable and the material feeding operation more convenient. Attached Figure Description

[0028] Figure 1 A schematic diagram showing the feeding device in a material storage state;

[0029] Figure 1A This is a magnified view of region 1A;

[0030] Figure 1B This is a magnified view of region 1B;

[0031] Figure 2 This is a schematic diagram showing the feeding device in the feeding state.

[0032] Figure 2A This is a magnified view of region 2A;

[0033] Figure 2B This is a magnified view of region 2B.

[0034] Figure 3 Another perspective view of the feeding device in the feeding state;

[0035] Figure 3A This is a magnified view of the 3A area;

[0036] Figure 3B This is a magnified view of region 3B;

[0037] Figure 4 A diagram illustrating the process of adding material when the bottom cover is opened;

[0038] Figure 4A This is a magnified view of area 4A;

[0039] Figure 5 Another perspective illustration of the bottom cover being opened for material feeding;

[0040] Figure 5A This is a magnified view of area 5A;

[0041] Figure 6 This is a schematic diagram showing the separation of the feeding device components;

[0042] Figure 6A This is a magnified view of area 6A;

[0043] Figure 6B This is a magnified view of region 6B;

[0044] Figure 6C This is a magnified view of region 6C.

[0045] Figure 6D This is a magnified view of the 6D region.

[0046] Explanation of reference numerals in the attached drawings: Top ring 1; First ring 2; Groove 2.1; Limiting groove 2.2; First limiting block 2.3; Second limiting block 2.4; Second ring 3; Through groove 3.1; Third limiting block 3.2; L-shaped block 3.2.1; Sliding insert block 3.2.2; Cylinder 4; Fixed tube 5; First radial rod 5.1; Second radial rod 5.2; Bottom ring 6; Inverted frustum-shaped surface 6.1; Circumferential surface 6.2; Frustum-shaped surface 6.3; Annular surface 6.4; First connecting rod 7; Bottom cover 8; First cylindrical block 8.1; Frustum-shaped block 8.2; Second cylindrical block 8.3; Lifting rod 9; Limiting ring 9.1; connecting part 10; connecting block 10.1; U-shaped plate 10.2; through hole 10.3; first rotating block 11; first abutting plate 11.1; second abutting plate 11.2; second rotating block 12; third abutting plate 12.1; fourth abutting plate 12.2; first rotating ring 13.1; first connecting post 13.2; L-shaped plate 13.3; locking bolt 13.4; limiting insert 13.5; second rotating ring 14.1; second connecting post 14.2; second connecting rod 15; first straight rod 15.1; first arc rod 15.2; second arc rod 15.3; second straight rod 15.4. Detailed Implementation

[0047] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0048] This invention provides a high-efficiency silicon material feeding device for a single-crystal silicon growth furnace, as shown in the figure. It includes a charging unit and a sealing unit. The charging unit comprises a top annular portion 1, a first annular portion 2, a second annular portion 3, a material cylinder 4, a fixing tube 5, a bottom annular portion 6, and multiple first connecting rods 7 connecting the top annular portion 1 and the first annular portion 2. The first annular portion 2 is fixedly connected to the outer wall of the material cylinder 4, the second annular portion 3 is fixedly connected to the outer wall of the bottom end of the material cylinder 4, and the bottom annular portion 6 is fixedly connected to the inner wall of the bottom end of the material cylinder 4. Both the top and bottom ends of the material cylinder 4 are open. The fixing tube 5 is fixedly connected to the top annular portion 1 via multiple first radial rods 5.1, and to the bottom annular portion 6 via multiple second radial rods 5.2. The sealing unit includes a bottom cover 8, a lifting rod 9 fixedly connected to the bottom cover 8 and passing through the fixing tube 5, and a connecting portion 10 fixed to the top of the lifting rod 9. The bottom ring 6 has an inverted frustum-shaped surface 6.1, a circumferential surface 6.2 connected to the inverted frustum-shaped surface, a frustum-shaped surface 6.3 connected to the circumferential surface, and an annular surface 6.4 connected to the frustum-shaped surface; the bottom cover 8 includes a first cylindrical block 8.1 connected to the lifting rod 9, a frustum-shaped block 8.2 connected to the first cylindrical block, and a second cylindrical block 8.3 connected to the frustum-shaped block.It also includes a rotating unit; the first annular portion 2 has multiple grooves 2.1, in which a first rotating block 11 is installed, and the first rotating block 11 is connected to a first abutting plate 11.1 and a second abutting plate 11.2; the second annular portion 3 has multiple through slots 3.1, in which a second rotating block 12 is installed, and the second rotating block 12 is connected to a third abutting plate 12.1 and a fourth abutting plate 12.2; the first abutting plate 11.1, the second abutting plate 11.2, the third abutting plate 12.1 and the fourth abutting plate 12.2 all include a flat plate and an arc plate connected to the flat plate; the first annular portion 2 has multiple limiting grooves 2.2, one end of which is fixed with a first limiting block 2.3 and the other end with a second limiting block 2.4; the rotating unit includes an upper rotating portion, a lower rotating portion and multiple components connecting the upper rotating portion and the lower rotating portion. The second connecting rod 15, the upper rotating part includes two first rotating rings 13.1 and a first connecting post 13.2 connecting the two first rotating rings, a plurality of L-shaped plates 13.3 and a plurality of limiting blocks 13.5 inserted into the limiting groove are connected to the upper first rotating ring, the L-shaped plate has a locking bolt 13.4 that can lock the upper rotating part and the first ring part 2 in relative position, the end of the locking bolt can abut against the upper surface of the first ring part 2; the lower rotating part includes two second rotating rings 14.1 and a second connecting post 14.2 connecting the two second rotating rings; the second ring part 3 is fixed with a plurality of third limiting blocks 3.2, the third limiting block includes an L-shaped block 3.2.1 connected to the second ring part 3 and a sliding block 3.2.2 connected to the L-shaped block; the sliding block 3.2.2 is located between the two second rotating rings 14.1.

[0049] The number of groove portions 2.1 and the number of first rotating blocks 11 are both 6; the number of through slot portions 3.1 and the number of second rotating blocks 12 are both 4; the number of limiting grooves 2.2, limiting inserts 13.5 and third limiting blocks 3.2 are all 4; the number of L-shaped plates 13.3 is 2; the number of first connecting rods 7 and second connecting rods 15 are both 4. The feeding device can be in a storage state and a feeding state. In the storage state, the first rotating block 11 is accommodated in the groove 2.1, the limiting block 13.5 abuts against the first limiting block 2.3, the first connecting post 13.2 abuts against the first abutting plate 11.1, one end of the second rotating block 12 is located below the bottom cover 8 so that the bottom cover 8 cannot move down, and the second connecting post 14.2 abuts against the third abutting plate 12.1. In the feeding state, one end of the first rotating block 11 is located outside the groove 2.1, the first connecting post 13.2 abuts against the second abutting plate 11.2, the limiting block 13.5 abuts against the second limiting block 2.4, the second rotating block 12 is not located below the bottom cover 8, the bottom cover 8 can move down, and the second connecting post 14.2 abuts against the fourth abutting plate 12.2. Both ends of the first rotating block 11 and the second rotating block 12 are arc-shaped. The second connecting rod 15 includes a first straight rod 15.1 connected to the upper rotating part, a first arc-shaped rod 15.2 connected to the first straight rod, a second arc-shaped rod 15.3 connected to the first arc-shaped rod, and a second straight rod 15.4 connecting the second arc-shaped rod and the lower rotating part. A limiting ring 9.1 that can abut against the top of the fixed tube 5 is fixed at the lifting rod 9. The connecting part 10 includes a cylindrical connecting block 10.1 connected to the lifting rod 9 and a U-shaped plate 10.2 connected to the connecting block. The U-shaped plate has two through holes 10.3.

[0050] Working principle: As shown in the figure, the feeding device of this application can be lifted into the auxiliary chamber of the monocrystalline silicon growth furnace via the hoisting connection. Then, the feeding device is lowered. In the feeding state, due to the outward extension of multiple first rotating blocks, the ends of the first rotating blocks can rest at the opening of the furnace top, thus preventing the second annular section from descending further (i.e., the material cylinder cannot descend further). However, the lifting rod can continue to descend, thus... Figure 3 As shown, the bottom cover can be lowered to open the bottom of the barrel, allowing the silicon material to be discharged. The limiting ring restricts the lowering height of the bottom cover, preventing excessive descent. The shape of the bottom cover and the shape of the bottom ring inside the barrel can be better matched, resulting in a better seal of the bottom of the barrel during material storage, and as... Figure 1As shown, in the material storage state, one end of the second rotating block is located below the bottom cover and can abut against the lower surface of the bottom cover, thus preventing the bottom cover from moving down and avoiding accidental opening and material leakage. The sliding block, limiting block, limiting groove, first limiting block, and second limiting block can realize the installation and limiting of the rotating unit, and the rotation range of the rotating unit is limited by the first limiting block and the second limiting block. The rotating unit can be rotated by rotating the L-shaped plate, and the relative position of the rotating unit and the first ring can be locked by the locking bolt, so that the feeding device can easily switch between the material storage state and the feeding state.

[0051] Although the present invention has been illustrated and described with reference to preferred embodiments, those skilled in the art should understand that various changes and modifications can be made to the present invention without departing from the scope defined by the claims.

Claims

1. A high-efficiency silicon material feeding device for a single crystal silicon growth furnace, characterized in that: It includes a loading unit and a closing unit, wherein the loading unit includes a top annular portion, a first annular portion, a second annular portion, a barrel, a fixed tube, a bottom annular portion, and a plurality of first connecting rods connecting the top annular portion and the first annular portion; the first annular portion is fixedly connected to the outer wall of the barrel, the second annular portion is fixedly connected to the outer wall of the bottom end of the barrel, the bottom annular portion is fixedly connected to the inner wall of the bottom end of the barrel, the top and bottom ends of the barrel are both open, the fixed tube is fixedly connected to the top annular portion by a plurality of first radial rods, and the fixed tube is fixedly connected to the bottom annular portion by a plurality of second radial rods; the closing unit includes a bottom cover, a lifting rod fixedly connected to the bottom cover and passing through the fixed tube, and a connecting portion fixed to the top end of the lifting rod.

2. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 1, characterized in that: The bottom circular ring has an inverted frustum-shaped surface, a circumferential surface connected to the inverted frustum-shaped surface, a frustum-shaped surface connected to the circumferential surface, and an annular surface connected to the frustum-shaped surface; the bottom cover includes a first cylindrical block connected to the lifting rod, a frustum-shaped block connected to the first cylindrical block, and a second cylindrical block connected to the frustum-shaped block.

3. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 2, characterized in that: The cam is a vertical cam which is provided with a plurality of grooves, in which a first rotating block is installed, and the first rotating block is connected to a first abutment plate and a second abutment plate; the second circular ring portion has a plurality of through-grooves, in which a second rotating block is installed, and the second rotating block is connected to a third abutment plate and a fourth abutment plate; the first abutment plate, the second abutment plate, the third abutment plate and the fourth abutment plate all include a plane plate and an arc plate connected to the plane plate; the first circular ring portion has a plurality of limiting grooves, one end of the limiting groove is fixed with a first limiting block, and the other end of the limiting groove is fixed with a second limiting block; the rotating unit includes an upper rotating portion, a lower rotating portion and a plurality of first rotating portions connecting the upper rotating portion and the lower rotating portion. Two connecting rods, the upper rotating part includes two first rotating rings and a first connecting column connecting the two first rotating rings, the first rotating ring located at the top is connected with multiple L-shaped plates and multiple limiting blocks inserted into the limiting groove, the L-shaped plate has a locking bolt that can lock the relative position of the upper rotating part and the first circular ring part, and the end of the locking bolt can abut the upper surface of the first circular ring part; the lower rotating part includes two second rotating rings and a second connecting column connecting the two second rotating rings; the second circular ring part is fixed with multiple third limiting blocks, the third limiting block includes an L-shaped block connected to the second circular ring part and a sliding block connected to the L-shaped block; the sliding block is located between the two second rotating rings.

4. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 3, characterized in that: The number of the groove parts and the first rotating block is 6; the number of the through groove parts and the second rotating block is 4; the number of the limiting grooves, limiting plug blocks and the third limiting blocks is 4; the number of the L-shaped plates is 2; the number of the first connecting rods and the second connecting rods is 4.

5. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 3, characterized in that: The feeding device can be in a storing state and a feeding state. In the storing state, the first rotating block is accommodated in the groove portion, the limiting plug abuts the first limiting block, the first connecting column abuts the first abutment plate, one end of the second rotating block is located below the bottom cover so that the bottom cover cannot move downward, and the second connecting column abuts the third abutment plate; in the feeding state, one end of the first rotating block is located outside the groove portion, the first connecting column abuts the second abutment plate, the limiting plug abuts the second limiting block, the second rotating block is not located below the bottom cover, the bottom cover can move downward, and the second connecting column abuts the fourth abutment plate.

6. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 3, characterized in that: Both ends of the first rotating block and the second rotating block are arc-shaped; the second connecting rod includes a first straight rod connected to the upper rotating part, a first curved rod connected to the first straight rod, a second curved rod connected to the first curved rod, and a second straight rod connecting the second curved rod and the lower rotating part.

7. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 3, characterized in that: A limiting circular ring portion capable of abutting against the top end of the fixed pipe is fixed at the lifting rod.

8. The silicon material efficient feeding device for a single crystal silicon growth furnace according to claim 3, characterized in that: The connecting part comprises a cylindrical connecting block connected to the lifting rod and a U-shaped plate connected to the connecting block, wherein the U-shaped plate has two through holes.

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