Chemical liquid cooling system

Abstract

The invention relates to the technical field of cooling equipment, and particularly provides a chemical liquid cooling system which is used for cooling high-temperature chemical waste liquid. The system comprises a cavity used for containing chemical liquid to be cooled, a heat exchange pipeline installed in the cavity and used for circulating cooling water so as to cool the chemical liquid, and a cooling pipeline arranged between the heat exchange pipeline and a chemical liquid inlet and used for cooling the chemical liquid. And the flow uniformizing plate is used for receiving the chemical liquid introduced from the chemical liquid inlet and uniformly dispersing the chemical liquid to the heat exchange pipeline. The uniform flow plate is additionally arranged above the heat exchange pipeline, so that liquid medicine is uniformly distributed above the heat exchange pipeline and flows down along the heat exchange pipeline after entering the cooling system, and in the process, the contact area of high-temperature chemical liquid and the heat exchange pipeline is increased, so that the cooling efficiency of the chemical liquid is improved, and the cooling time of the chemical liquid is shortened.

Description

Technical Field

[0001] The invention relates to the technical field of cooling equipment, and in particular to a chemical liquid cooling system. Background Art

[0002] The semiconductor industry requires a lot of chemical solutions, most of which are strong acids, strong bases or highly corrosive solutions. Some chemical solutions have a use temperature of 100℃-200℃. After use, the chemical solution needs to be discharged through the factory pipes. High-temperature chemical waste liquid will cause damage to the factory system. For safety and production needs, a cooling system is often used to cool the waste liquid before discharging it to the factory system. In particular, when the process unit discharges a large amount of high-temperature waste liquid, the cooling system is required to quickly cool the high-temperature waste liquid to the factory-allowed discharge temperature before discharging it to the factory system.

[0003] A chemical liquid cooling system scheme in the prior art is as follows: A chemical liquid cooling system includes a liquid medicine cavity, a heat exchange pipeline and a support frame. Among them, the top of the liquid medicine cavity is provided with a chemical liquid inlet, a cooling water inlet, a cooling water outlet, and the bottom is provided with a waste outlet connected to the liquid discharge pipeline. A coil-shaped heat exchange pipeline is provided in the liquid medicine cavity, and cooling circulating water is in the heat exchange pipeline. One end of the heat exchange pipeline is connected to the cooling water inlet, and the other end is connected to the cooling water outlet. When the cooling system is working, the chemical liquid enters the cavity through the inlet, and the cooling circulating water transfers heat with the high-temperature chemical liquid to achieve cooling. When the cooling system is in use, the high-temperature chemical liquid enters the cooling system through the inlet above the liquid cavity and reaches the bottom of the cavity. As the liquid level gradually rises, the contact area with the heat exchange pipeline of the cooling circulating water will gradually increase, which has a low effective utilization area of ​​the heat exchange pipeline, and the flow path of the high-temperature chemical liquid in the cavity is only the upper liquid inlet and the lower liquid discharge, and the flow range is small, which makes only a small part of the chemical liquid fully contact with the heat exchange pipeline, and most of the chemical liquid cannot be fully contacted with the heat exchange pipeline, and the heat exchange pipeline cannot be fully utilized, which leads to low cooling efficiency of the entire chemical liquid cooling system. Once the high-temperature liquid capacity in the cooling system reaches the system upper limit, the chemical liquid inlet of the cooling system is closed, and the process treatment unit cannot use the liquid until the cooling system is cooled down. Once the process treatment unit discharges a large amount of high-temperature liquid, exceeding the upper limit of the cooling system capacity, it is difficult for the cooling system to achieve rapid cooling of the high-temperature chemical liquid. This process will greatly restrict the process time and it is difficult to improve the equipment utilization rate. Summary of the invention

[0004] The object of the present invention is to provide a chemical liquid cooling system, which is used to solve the problem of low cooling efficiency of the cooling system in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides a chemical liquid cooling system, comprising a cavity, a heat exchange pipeline and a flow equalizer, wherein the cavity is used to accommodate the chemical liquid to be cooled; the cavity is provided with a chemical liquid inlet; the heat exchange pipeline is installed inside the cavity, and the heat exchange pipeline is used to circulate cooling water to cool the chemical liquid; the flow equalizer is arranged inside the cavity and is located between the heat exchange pipeline and the chemical liquid inlet, and is used to receive the chemical liquid introduced by the chemical liquid inlet and evenly distribute it to the heat exchange pipeline.

[0006] The beneficial effect of the above technical solution is that by adding the flow-uniform plate above the heat exchange pipeline, the chemical liquid is evenly distributed above the heat exchange pipeline after entering the cooling system and flows down along the heat exchange pipeline. In this process, the contact area between the high-temperature chemical liquid and the heat exchange pipeline is increased, thereby improving the cooling efficiency of the chemical liquid and shortening the cooling time of the chemical liquid.

[0007] Preferably, an annular flow channel is provided on the flow equalizing plate, and the annular flow channel is connected to the chemical liquid inlet.

[0008] The beneficial effect of the above technical solution is that an annular flow channel is opened on the flow equalizer to receive the chemical liquid introduced from the chemical liquid inlet, so as to facilitate the even distribution of the chemical liquid above the heat exchange pipeline, and prepare for the next step of evenly distributing the chemical liquid on the heat exchange pipeline.

[0009] Preferably, the annular flow channel is an annular groove, and a plurality of liquid distribution holes are evenly opened at the bottom of the annular groove corresponding to the heat exchange pipeline, and the liquid distribution holes are used to guide the chemical liquid in the annular groove to the heat exchange pipeline.

[0010] The beneficial effect of the above technical solution is that the annular flow channel is set to the structural form of the annular groove, which is conducive to directly receiving the chemical liquid introduced by the chemical liquid inlet; further, a plurality of liquid distribution holes are evenly opened at the bottom of the annular groove corresponding to the heat exchange pipeline, so that the high-temperature chemical liquid in the annular groove is dropped onto the heat exchange pipeline, and the dispersed chemical liquid directly contacts the heat exchange pipeline, which greatly increases the contact area between the chemical liquid and the heat exchange pipeline, and is conducive to improving the cooling efficiency of the chemical liquid.

[0011] Preferably, the liquid distribution hole is provided with a guide portion, and the guide portion is communicated with the liquid distribution hole; the guide portion has a cross-sectional area that gradually decreases along the extension direction of the liquid distribution hole.

[0012] The beneficial effect is that by providing the guide part, the chemical liquid in the annular groove can be effectively collected into the liquid distribution hole, the efficiency of the chemical liquid passing through the liquid distribution hole is accelerated, and the efficiency of the chemical liquid flow is improved.

[0013] Preferably, the chemical liquid cooling system also includes a spoiler, which is installed inside the cavity, and the spoiler includes a main air intake pipe and a spoiler assembly, wherein the main air intake pipe is used to connect to an external air source; the spoiler assembly is installed at the bottom of the cavity and is connected to the main air intake pipe, and the spoiler assembly is provided with a plurality of blowing holes; when gas is passed into the main air intake pipe, the gas enters the spoiler assembly from the main air intake pipe, and is then blown out from the blowing holes, thereby disturbing the chemical liquid in the cavity.

[0014] Its beneficial effect is that when the air source is introduced, the gas enters the spoiler assembly through the main air inlet pipe of the spoiler, and is then blown into the chemical liquid from the blowing hole to form bubbles. The bubbles will stir the chemical liquid in the tank body during the process of rising from the bottom of the chemical liquid, so that the chemical liquid is fully in contact with the heat exchange pipeline, effectively improving the heat exchange efficiency between the chemical liquid and the heat exchange pipeline, thereby greatly improving the cooling efficiency of the chemical liquid.

[0015] Preferably, the spoiler assembly comprises: a central blowing part and an outer ring blowing part, wherein the central blowing part is communicated with the main air intake pipe, and the outer ring blowing part is arranged around the central blowing part. Its beneficial effects are: the central blowing part and the peripheral blowing part of the spoiler component are used to expand the spoiler range of the spoiler component on the chemical liquid. On the one hand, more chemical liquid can be in contact with the heat exchange pipeline, thereby improving the heat exchange efficiency between the chemical liquid and the heat exchange pipeline; on the other hand, the chemical liquids at different positions and different temperatures in the cavity are evenly mixed, effectively improving the overall cooling efficiency of the chemical liquid.

[0016] Preferably, the central blowing part includes a first conducting member and a first tube body; wherein the first conducting member is connected to the main air intake pipe, and a plurality of the first tube bodies are connected to the first conducting member.

[0017] The outer ring blowing portion includes a second conductive piece and a second tube body; wherein, a plurality of the second tube bodies are arranged at equal intervals around the first conductive piece, and two adjacent second tube bodies are connected through the second conductive piece; the second conductive piece is connected to an end of the first tube body away from the first conductive piece; and a plurality of the blowing holes are opened on the first tube body and the second tube body.

[0018] The beneficial effects are as follows: the installation, replacement and maintenance of the spoiler assembly can be facilitated by combining multiple tubes; and the multiple tube combination method can facilitate the processing of parts and reduce the production cost of the spoiler assembly.

[0019] Preferably, a cooling water inlet and a cooling water outlet are provided on the cavity; the heat exchange pipeline enters the cavity from the cooling water inlet and passes through the cooling water outlet after being spirally arranged.

[0020] The beneficial effect is that the heat exchange pipeline is arranged in a spiral manner, which is conducive to increasing the contact area between the heat exchange pipeline and the chemical liquid, thereby effectively improving the cooling efficiency of the chemical liquid.

[0021] Preferably, the heat exchange pipeline includes at least one heat exchange tube, a support frame for mounting the heat exchange tube is provided in the cavity, and the heat exchange tube is connected to the support frame.

[0022] The beneficial effect is that the heat exchange pipeline can be easily installed by arranging a support frame inside the cavity.

[0023] Preferably, an introduction pipe is provided at the chemical liquid inlet, and the introduction pipe passes through the chemical liquid inlet and extends into the annular groove.

[0024] Its beneficial effect is that when the chemical liquid enters the annular groove along the introduction pipe, since the outlet of the introduction pipe is in the annular groove, the splashing liquid generated when the chemical liquid is introduced can be blocked by the inner wall of the annular groove, thereby ensuring that all chemical liquid entering the cavity can be evenly distributed by the flow plate and then drip onto the heat exchange pipeline, thereby improving the cooling efficiency of the chemical liquid.

[0025] The beneficial effects of the present invention are as follows: the chemical liquid cooling system of the present application adds a uniform flow plate in the cavity containing the chemical liquid, so that after the chemical liquid enters the cooling system, it is evenly distributed above the heat exchange pipeline and flows down along the pipeline, thereby increasing the contact area between the chemical liquid and the heat exchange pipeline, shortening the cooling time of the chemical liquid, and effectively improving the cooling efficiency of the cooling system; further, a spoiler is added to the cavity, and gas is introduced into the cavity through the spoiler to stir the chemical liquid, so that the chemical liquid is in full contact with the heat exchange pipeline, which is convenient for cooling and effectively improves the cooling efficiency of the cooling system. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the external structure of the chemical liquid cooling system of the present invention; Figure 2 A half-section diagram of the chemical liquid cooling system of the present invention; Figure 3 It is a schematic diagram of the structure of the heat exchange pipeline and the flow equalizer of the chemical liquid cooling system in the present invention; Figure 4 for Figure 3 Enlarged view of point A in the middle; Figure 5 It is a schematic diagram of the structure of the flow equalizer, the support frame and the spoiler in the present invention; Figure 6 for Figure 5 Enlarged view of point B in the middle.

[0027] Component number: Cavity 1, tank 11, top plate 12, chemical liquid inlet 13, introduction pipe 14, chemical liquid outlet 15, cooling water inlet 16, cooling water outlet 17, inspection hole 18, cover plate 19, air outlet 20, Heat exchange pipeline 2, heat exchange tube 21, flow plate 3, annular groove 31, liquid distribution hole 32, flow guide part 321, spoiler 4, main air intake pipe 41, spoiler assembly 42, branch pipe 43, blowing hole 44, first conducting member 45, first tube body 46, second conducting member 47, second tube body 48, Support frame 5 , first clamping member 51 , second clamping member 52 , and clamping slot 53 . DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the present invention clearer, the technical scheme in the embodiment of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the usual meanings understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Unless otherwise specified, the "connection" described in this article can be a direct connection or an indirect connection, that is, connected through an intermediate.

[0029] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0030] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0031] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In view of the problems existing in the prior art, an embodiment of the present invention provides a chemical liquid cooling system, comprising: a cavity 1, a heat exchange pipeline 2 and a flow equalizer 3, wherein the cavity 1 is used to contain the chemical liquid to be cooled; the cavity 1 is provided with a chemical liquid inlet 13; the heat exchange pipeline 2 is installed inside the cavity 1, and the heat exchange pipeline 2 is used to circulate cooling water to cool the chemical liquid; the flow equalizer 3 is arranged inside the cavity 1 and located between the heat exchange pipeline 2 and the chemical liquid inlet 13, and is used to receive the chemical liquid introduced by the chemical liquid inlet 13 and evenly distribute it on the heat exchange pipeline 2. In this technical solution, by adding the flow equalizer 3 above the heat exchange pipeline 2, the chemical liquid is evenly distributed above the heat exchange pipeline 2 and flows down along the heat exchange pipeline 2 after entering the cooling system. In this process, the contact area between the high-temperature chemical liquid and the heat exchange pipeline 2 is increased, thereby improving the cooling efficiency of the chemical liquid and shortening the cooling time of the chemical liquid.

[0034] Furthermore, a chemical liquid outlet 15 is provided at the bottom of the cavity 1, and a temperature control valve (not shown in the drawings) is provided at the chemical liquid outlet 15. The temperature control valve is a prior art and will not be described in detail here. After the chemical liquid to be cooled enters the cavity 1, it exchanges heat with the heat exchange pipeline 2. When the temperature of the chemical liquid does not drop to the set temperature of the temperature control valve, the temperature control valve remains closed. When the temperature of the chemical liquid drops below the set temperature of the temperature control valve, the temperature control valve opens to release the chemical liquid.

[0035] In one embodiment of the present application, the flow plate 3 is an annular plate and has an octagonal structure, and its two opposite sides are parallel to each other. An annular flow channel is provided on the flow plate 3, and the annular flow channel is connected to the chemical liquid inlet 13. In this technical solution, an annular flow channel is provided on the flow plate 3 to receive the chemical liquid introduced from the chemical liquid inlet 13, so as to facilitate the chemical liquid to be evenly distributed above the heat exchange pipeline 2, and prepare for the next step of evenly distributing the chemical liquid on the heat exchange pipeline 2.

[0036] In one embodiment of the present application, the annular flow channel is an annular groove 31, and a plurality of liquid distribution holes 32 are evenly opened at the bottom of the annular groove 31 corresponding to the heat exchange pipeline 2, and the liquid distribution holes 32 are used to guide the chemical liquid in the annular groove 31 to the heat exchange pipeline 2. In this technical solution, the annular flow channel is set in the structural form of the annular groove 31, which is conducive to directly receiving the chemical liquid introduced by the chemical liquid inlet 13; further, a plurality of liquid distribution holes 32 are evenly opened at the bottom of the annular groove 31 corresponding to the heat exchange pipeline 2, which is convenient for dropping the high-temperature chemical liquid in the annular groove 31 on the heat exchange pipeline 2, and the dispersed chemical liquid directly contacts the heat exchange pipeline 2, which greatly increases the contact area between the chemical liquid and the heat exchange pipeline 2, and is conducive to improving the cooling efficiency of the chemical liquid.

[0037] In another embodiment of the present application, the annular flow channel can also be a closed flow channel (not shown in the drawings), which is connected to the chemical liquid inlet 13. A plurality of small holes for introducing the chemical liquid into the top of the heat exchange pipeline 2 are provided on the bottom wall of the closed flow channel. The function of the small holes is the same as that of the liquid distribution holes 32 in the previous embodiment.

[0038] Specifically, an introduction pipe 14 is provided at the chemical liquid inlet 13, and the introduction pipe 14 penetrates the chemical liquid inlet 13 and extends into the annular groove 31. In this embodiment, the introduction pipe 14 is vertically arranged. In this technical solution, the purpose of extending the introduction pipe 14 into the annular groove 31 is that when the chemical liquid enters the annular groove 31 along the introduction pipe 14, since the outlet of the introduction pipe 14 is in the annular groove 31, the splashing liquid generated when the chemical liquid is introduced can be blocked by the inner wall of the annular groove 31, thereby ensuring that all chemical liquids entering the cavity 1 can be evenly distributed by the flow plate 3 and then drip onto the heat exchange pipeline 2, thereby improving the cooling efficiency of the chemical liquid.

[0039] In one embodiment of the present application, the liquid distribution hole 32 is provided with a guide portion 321, and the guide portion 321 is connected to the liquid distribution hole 32; the guide portion 321 is arranged with a gradually decreasing cross-sectional area along the extension direction of the liquid distribution hole 32. In this technical solution, by providing the guide portion 321, the chemical liquid in the annular groove 31 can be effectively collected into the liquid distribution hole 32, the efficiency of the chemical liquid passing through the liquid distribution hole 32 is accelerated, and the efficiency of the chemical liquid flow is improved.

[0040] In one embodiment of the present application, the chemical liquid cooling system further includes a spoiler 4, which is installed inside the cavity 1. The spoiler 4 includes a main air inlet pipe 41 and a spoiler assembly 42, wherein the main air inlet pipe 41 is used to connect to an external air source; the spoiler assembly 42 is installed at the bottom of the cavity 1 and communicates with the main air inlet pipe 41, and a plurality of blowing holes 44 are provided on the spoiler assembly 42; when the main air inlet pipe 41 is passed with gas, the gas enters the spoiler assembly 42 from the main air inlet pipe 41, and then blows out from the blowing holes 44, thereby disturbing the chemical liquid in the cavity 1. In this technical solution, when the air source is passed, the gas enters the spoiler assembly 42 through the main air inlet pipe 41 of the spoiler 4, and then blows into the chemical liquid from the blowing holes 44 to form bubbles, and the bubbles will stir the chemical liquid in the tank 11 in the process of rising from the bottom of the chemical liquid, so that the chemical liquid is fully in contact with the heat exchange pipeline 2, effectively improving the heat exchange efficiency between the chemical liquid and the heat exchange pipeline 2, thereby greatly improving the cooling efficiency of the chemical liquid.

[0041] In one embodiment of the present application, a branch pipe 43 is further provided on the main air intake pipe 41; the branch pipe 43 is located above the spoiler assembly 42 and is connected to the main air intake pipe 41. The branch pipe 43 opens downward and forms an angle with the main air intake pipe 41. In this solution, the branch pipe 43 can blow air downward, and the chemical liquid is disturbed by blowing air downward, so that the chemical liquid is fully in contact with the heat exchange pipeline 2, thereby improving the cooling efficiency of the heat exchange pipeline 2 on the chemical liquid.

[0042] In one embodiment of the present application, the spoiler assembly 42 includes a central blowing portion and an outer ring blowing portion. The central blowing portion is connected to the main air intake pipe 41, and the outer ring blowing portion is arranged around the central blowing portion. In this technical scheme, the central blowing portion and the outer blowing portion of the spoiler assembly 42 are used to expand the spoiler range of the spoiler assembly 42 on the chemical liquid. On the one hand, more chemical liquid can be in contact with the heat exchange pipeline 2, thereby improving the heat exchange efficiency between the chemical liquid and the heat exchange pipeline 2; on the other hand, the chemical liquids at different positions and different temperatures in the cavity 1 are evenly mixed, thereby effectively improving the overall cooling efficiency of the chemical liquid.

[0043] Specifically, the central blowing part includes a first conducting member 45 and a first tube body 46 ; wherein the first conducting member 45 is in communication with the main air intake pipe 41 , and the plurality of first tube bodies 46 are in communication with the first conducting member 45 .

[0044] The outer ring air blowing part includes a second conducting member 47 and a second pipe body 48; wherein, a plurality of second pipe bodies 48 are circumferentially and equidistantly arranged around the first conducting member 45, and adjacent two second pipe bodies 48 are communicated through the second conducting member 47; the second conducting member 47 is communicated with one end of the first pipe body 46 far away from the first conducting member 45; a plurality of air blowing holes 44 are formed on the first pipe body 46 and the second pipe body 48. In this technical solution, through the combination of multiple pipe bodies, the installation, replacement and maintenance of the flow disturbing component 42 can be facilitated; and the combination of multiple pipe bodies can facilitate the processing of parts and reduce the production cost of the flow disturbing component 42. When gas is introduced, the gas enters the first pipe body 46 and the second pipe body 48 through the main air inlet pipe 41, forms bubbles through the air blowing holes 44 into the chemical liquid, stirs the chemical liquid in the tank body 11, and enables the chemical liquid to fully contact with the heat exchange pipeline 2.

[0045] Further, in this embodiment, the central air blowing part includes a first conducting member 45 and four first pipe bodies 46, the outer ring air blowing part includes four second conducting members 47 and four second pipe bodies 48, the second pipe body 48 is of an arc-shaped structure, and the central air blowing part and the outer ring air blowing part together form a "field" - shaped structure.

[0046] Further, in this embodiment, the first conducting member 45 is a central five - way welding block, the second conducting member 47 is a three - way welding block, and the central five - way welding block and the three - way welding block are welded and fixed at the bottom of the cavity 1 to fix the entire flow disturbing component 42.

[0047] In an embodiment of the present application, a cooling water inlet 16 and a cooling water outlet 17 are provided on the cavity 1; the heat exchange pipeline 2 enters the inside of the cavity 1 from the cooling water inlet 16 and passes out from the cooling water outlet 17 after being spirally arranged. In this technical solution, the heat exchange pipeline 2 is arranged in a spiral manner, which is beneficial to increasing its contact area with the chemical liquid, and thus effectively improving the cooling efficiency of the chemical liquid.

[0048] Specifically, the cavity 1 includes a tank body 11 and a top plate 12, the top plate 12 is fixedly welded to the top plate 12 of the tank body 11, and the cooling water inlet 16 and the cooling water outlet 17 are arranged on the top plate 12.

[0049] In addition, an air outlet hole 20 is also formed on the top plate 12 for balancing the air pressure inside and outside the cavity 1.

[0050] An inspection hole 18 is formed in the middle of the top plate 12, and a cover plate 19 is detachably installed on the inspection hole 18. In this embodiment, the cover plate 19 and the inspection hole 18 are connected by bolts.

[0051] In one embodiment of the present application, the heat exchange pipeline 2 includes a heat exchange tube 21, and four support frames 5 for installing the heat exchange tube are provided in the cavity 1. The support frame 5 is vertically arranged, and four support rods are arranged at equal intervals in the circumferential direction. The top of the support rod is connected to the flow plate 3, and the heat exchange tube 21 is connected to the support frame 5. In this technical solution, by arranging the support frame 5 inside the cavity 1, the heat exchange pipeline 2 can be conveniently fixed and installed.

[0052] Furthermore, in this embodiment, the support frame 5 includes a first clamping member 51 and a second clamping member 52, and the first clamping member 51 is detachably connected to the second clamping member 52. The second clamping member 52 is provided with a plurality of slots 53, and the spirally arranged heat exchange tubes 21 are correspondingly clamped in the slots 53. Specifically, the slots 53 are U-shaped slots 53, and the number of the slots 53 is equal to the number of spiral turns of the heat exchange tube. The first clamping member 51 cooperates with the second clamping member 52 to prevent the heat exchange tube 21 from falling out of the slots 53.

[0053] In one embodiment of the present application, the cavity 1, the flow plate 3 and the support frame 5 are all made of polytetrafluoroethylene material, and the heat exchange tube, the first tube body 46 and the second tube body 48 are all made of fluororesin material. By adopting the above-mentioned corrosion-resistant materials, the chemical liquid cooling system of this embodiment has excellent corrosion resistance, which greatly extends the service life of the cooling system.

[0054] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto, and any changes or replacements within the technical scope disclosed in the embodiment of the present application should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application should be based on the protection scope of the claims.

Claims

1. A chemical liquid cooling system, characterized in that: include: The cavity is used to contain the chemical liquid to be cooled; the cavity is provided with a chemical liquid inlet; A heat exchange pipeline is installed inside the cavity, and the heat exchange pipeline is used to circulate cooling water to cool the chemical liquid; A flow-uniform plate is arranged inside the cavity and between the heat exchange pipeline and the chemical liquid inlet, and is used to receive the chemical liquid introduced by the chemical liquid inlet and evenly distribute it to the heat exchange pipeline.

2. The chemical liquid cooling system according to claim 1, characterized in that: An annular flow channel is provided on the flow equalizing plate, and the annular flow channel is communicated with the chemical liquid inlet.

3. The chemical liquid cooling system according to claim 2, characterized in that: The annular flow channel is an annular groove, and a plurality of liquid distribution holes are evenly opened at the bottom of the annular groove corresponding to the heat exchange pipeline. The liquid distribution holes are used to guide the chemical liquid in the annular groove to the heat exchange pipeline.

4. The chemical liquid cooling system according to claim 3, characterized in that: The liquid distribution hole is provided with a guide portion, and the guide portion is communicated with the liquid distribution hole; the guide portion is arranged along the extension direction of the liquid distribution hole, and the cross-sectional area of ​​the guide portion is gradually reduced.

5. The chemical liquid cooling system according to claim 1, characterized in that: The device also includes a spoiler, which is installed inside the cavity and includes: Main air inlet pipe, used to connect to external air source; A spoiler assembly is installed at the bottom of the cavity and is connected to the main air intake pipe. The spoiler assembly is provided with a plurality of blowing holes. When gas is introduced into the main air intake pipe, the gas enters the spoiler assembly from the main air intake pipe and is blown out from the blowing holes, thereby disturbing the chemical liquid in the cavity.

6. The chemical liquid cooling system according to claim 5, characterized in that: The spoiler assembly comprises: A central air blowing portion, connected to the main air inlet pipe; The outer ring air blowing portion is arranged around the central air blowing portion.

7. The chemical liquid cooling system according to claim 6, characterized in that: The central blowing part includes a first conducting member and a first tube body; wherein the first conducting member is connected to the main air intake pipe, and a plurality of the first tube bodies are connected to the first conducting member; The outer ring blowing portion includes a second conductive piece and a second tube body; wherein, a plurality of the second tube bodies are arranged at equal intervals around the first conductive piece, and two adjacent second tube bodies are connected through the second conductive piece; the second conductive piece is connected to an end of the first tube body away from the first conductive piece; and a plurality of the blowing holes are opened on the first tube body and the second tube body.

8. The chemical liquid cooling system according to claim 1, characterized in that: The cavity is provided with a cooling water inlet and a cooling water outlet; the heat exchange pipeline enters the cavity from the cooling water inlet and passes through the cooling water outlet after being spirally arranged.

9. The chemical liquid cooling system according to claim 1, characterized in that: The heat exchange pipeline includes at least one heat exchange tube. A support frame for installing the heat exchange tube is provided in the cavity, and the heat exchange tube is connected to the support frame.

10. The chemical liquid cooling system according to claim 3, characterized in that: An introduction pipe is provided at the chemical liquid inlet, and the introduction pipe penetrates the chemical liquid inlet and extends into the annular groove.

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