Crystal bar end face detection device and wafer taking machine

Abstract

The invention relates to a crystal bar end face detection device and a wafer taking machine, and the device comprises a supporting part which is used for placing a to-be-detected crystal bar and driving the to-be-detected crystal bar to an initial position; a first driving member; the first driving part drives the detection assembly to move between a first preset position and a second preset position; the second driving part is used for driving the to-be-detected crystal bar and / or the detection assembly to rotate by taking the axis of the to-be-detected crystal bar as the center; the detection assembly at the second preset position continuously detects the spacing distance between the detection assembly and the end face of the to-be-detected crystal bar so as to determine the lowest point of the end face of the to-be-detected crystal bar according to the spacing distance. According to the detection device, the lowest point of the to-be-detected crystal bar can be determined according to the spacing distance, so that the wafer taking machine is guided to cut and take the wafer of the to-be-detected crystal bar at the lowest point, and the waste of raw materials is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing, and in particular to a crystal rod end face detection device and a wafer removal machine. Background Art

[0002] At present, when wafers are taken out on a wafer taking machine, generally only the highest point of the end face of the crystal rod to be tested can be detected. When slicing, the crystal rod to be tested is often sliced ​​by estimating an approximate range, which ultimately leads to a lot of material waste during slicing, and even slicing accidents, increasing material and time costs.

[0003] In the related art, when slicing a wafer, the lowest point of the end face of the crystal rod to be inspected cannot be accurately located, resulting in waste. Summary of the invention

[0004] The present application is proposed to solve the above-mentioned problem. According to one aspect of the present application, a crystal rod end face detection device is provided, the device comprising: a supporting component, the supporting component is used to place the crystal rod to be detected and drive the crystal rod to be detected to an initial position; a first driving member; a detection assembly, the first driving member drives the detection assembly to move between a first preset position and a second preset position; a second driving member, the second driving member is used to drive the crystal rod to be detected and / or the detection assembly to rotate around the axis of the crystal rod to be detected; the detection assembly at the second preset position continuously detects the spacing distance between itself and the end face of the crystal rod to be detected, so as to determine the lowest point of the end face of the crystal rod to be detected according to the spacing distance.

[0005] Exemplarily, it also includes a telescopic rod, which is connected to the detection component. After the crystal rod to be detected and the detection component complete at least one relative rotation, the telescopic rod enters an extended or contracted state to change the relative position between the detection component and the crystal rod to be detected at the second preset position.

[0006] Exemplarily, the second driving member is arranged on a side of the supporting component close to the crystal rod to be detected, the second driving member contacts the crystal rod to be detected, and drives the crystal rod to be detected to rotate around the axis of the crystal rod to be detected, and the telescopic rod enters an extended or contracted state, so that the detection component obtains the spacing distance at different positions from the end face of the crystal rod to be detected.

[0007] Exemplarily, the second driving member is connected to the first driving member, and the second driving member is connected to the detection component through the telescopic rod. The second driving member drives the telescopic rod and the detection component to rotate around the axis of the crystal rod to be detected, so that the detection component obtains the spacing distance under different rotation radii.

[0008] Exemplarily, the first driving member includes a telescopic cylinder, a movable end of which is connected to the second driving member; the second driving member includes a servo motor, an output shaft of which is connected to the telescopic rod to drive the telescopic rod and the detection assembly to rotate.

[0009] Exemplarily, the device also includes a control unit, which is used to control the first driving member to drive the detection component to move, and at the same time control the second driving member to drive the crystal rod to be detected and / or the detection component to rotate. The control unit is also used to receive the spacing distance detected by the detection component, and determine the position point on the end face of the crystal rod to be detected corresponding to the maximum value of the spacing distance as the lowest point of the end face of the crystal rod to be detected.

[0010] Exemplarily, the distance between the second preset position and the initial position is 5-10 cm.

[0011] Exemplarily, the detection component includes a laser rangefinder.

[0012] According to another aspect of the present application, a wafer taking machine is provided, which includes a cutting device, a clamping device and the above-mentioned crystal rod end face detection device, the cutting device is used to slice the crystal rod to be detected, and the clamping device is used to take the wafers of the crystal rod to be detected.

[0013] Exemplarily, the film extractor further includes a structural frame and a base, wherein the structural frame is connected to the base, and the first driving member is detachably mounted on the structural frame.

[0014] The crystal rod end face detection device in the present application can drive the crystal rod to be detected by means of a supporting component, and can drive the detection component by means of a first driving component, so that the crystal rod to be detected and the detection component are respectively moved to preset positions, and the second driving component can also drive the detection component or the crystal rod to be detected to rotate. During the rotation, the detection component detects the spacing distance between the end face of the crystal rod to be detected, and the lowest point on the crystal rod to be detected can be confirmed by the size of the spacing distance, thereby guiding the wafer taking machine to cut and take the crystal rod to be detected at the lowest point, thereby reducing the waste of raw materials; and the detection device in the present application can avoid damage to accessories caused by failure to confirm the lowest point of the end face of the crystal rod to be detected during cutting, thereby improving efficiency and reducing losses. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 A schematic diagram of a crystal rod end face detection device in Embodiment 1 of the present application is shown.

[0017] Figure 2(a)-Figure 2(c) A schematic diagram showing various states of the crystal rod end face detection device in the first embodiment of the present application during operation.

[0018] Figure 3 A schematic diagram of a crystal rod end face detection device in Embodiment 2 of the present application is shown.

[0019] Figure numerals: 1. wafer picker; 11. base; 12. transverse frame; 13. longitudinal frame; 2. driving member; 21. first driving member; 22. second driving member; 23. telescopic rod; 3. detection component; 4. supporting member; 5. crystal rod to be detected. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present application more obvious, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present application described in the present application, all other embodiments obtained by those skilled in the art without creative work should fall within the scope of protection of the present application.

[0021] Embodiment 1

[0022] like Figure 1 As shown, an embodiment of the present application discloses a crystal rod end face detection device, which includes: a supporting component 4, a detection assembly 3, a first driving member 21 and a second driving member 22.

[0023] The supporting component 4 is used to place the crystal rod 5 to be detected and drive the crystal rod 5 to be detected to the initial position. The first driving member 21 drives the detection component 3 to move between the first preset position and the second preset position. The second driving member 22 drives the crystal rod 5 to be detected and / or drives the detection component 3 to rotate around the axis of the crystal rod 5 to be detected; the detection component 3 in the second preset position continuously detects the spacing distance between itself and the end face of the crystal rod 5 to be detected, so as to determine the lowest point of the end face of the crystal rod 5 to be detected according to the spacing distance.

[0024] The crystal rod end face detection device in the embodiment of the present application can drive the crystal rod to be detected through the support component 4, and can drive the detection component 3 through the first driving member 21, so that the crystal rod to be detected 5 and the detection component 3 are respectively moved to the preset positions, and the second driving member 2 can also drive the detection component 3 and / or the crystal rod to be detected 5 to rotate. During the rotation process, the detection component 3 detects the spacing distance between the end face of the crystal rod 5 to be detected, and the size of the spacing distance can be used to confirm the lowest point on the crystal rod 5 to be detected, thereby guiding the wafer taking machine to cut and take the crystal rod 5 to be detected at the lowest point, thereby reducing the waste of raw materials.

[0025] On the other hand, if cutting is performed without finding the lowest point during the slicing process, damage may be caused to devices such as the suction cup in the equipment, thereby causing losses and affecting efficiency. The detection device in the present application can avoid equipment damage caused by failure to confirm the lowest point of the end face of the crystal rod 5 to be detected during cutting, thereby improving efficiency and reducing losses.

[0026] Exemplarily, the first driving member 21 and the second driving member 22 in the embodiment of the present application are collectively referred to as the driving member 2, and the detection component 3 is driven by the driving member 2. The first preset position in the embodiment of the present application refers to the starting position of the detection component 3. After the first driving member drives the detection component 3 to move to the second preset position, the detection component 3 starts to work and detects the distance between the detection component 3 and the crystal 5 to be detected. Figure 1 The detection component 3 shown in the figure is in a second preset position, wherein the second preset position is a horizontal position relative to the crystal rod 5 to be detected, and the interval between the end face of the crystal rod 5 to be detected and detected at the second preset position is the horizontal distance between the end face of the crystal rod 5 to be detected and the detection component 3.

[0027] like Figure 1As shown, illustratively, an embodiment of the present application also provides a wafer taking machine, and the wafer taking machine 1 in the embodiment of the present application includes a structural frame and a base 11, and the first driving member 21 is detachably mounted on the structural frame. Exemplarily, the structural frame includes a transverse frame 12 and a longitudinal frame 13, the bottom of the longitudinal frame 13 is connected to the base 11, and the top of the longitudinal frame 13 is connected through the transverse frame 12, and the first driving member 21 is detachably mounted on the structural frame. Exemplarily, after completing the detection of the end face of the crystal rod 5 to be detected, the crystal rod 5 to be detected can be cut by the wafer taking machine 1, thereby removing a small amount of waste at the end of the crystal rod 5 to be detected, and cutting the remaining part to obtain a sheet-shaped wafer. Through the above-mentioned detection process, the lowest point of the end face can be found on the end face of the crystal rod to be detected, and when cutting is performed later, the cutting can be performed based on the lowest point, thereby ensuring that the cutting surface is a complete plane, and the waste removed by cutting can be as small as possible, so as to achieve the effect of reducing material waste. Exemplarily, the wafer taking machine 1 further includes a cutting device and a clamping device (not shown in the figure), wherein the cutting device is used for slicing the crystal rod 5 to be detected, and the clamping device is used for taking wafers from the crystal rod 5 to be detected.

[0028] Exemplarily, the support component 4 includes a horizontal support block, wherein the horizontal support block is arranged on the wafer picker 1, and at least two horizontal support blocks are arranged, and the crystal rod 5 to be detected can be placed on the horizontal support block. The horizontal support block can move horizontally, thereby driving the crystal rod 5 to be detected to move horizontally, wherein the horizontal support block moves in the direction close to and away from the detection component 3 when moving. When the driver 2 drives the detection component 3 to move to the second preset position, and the horizontal support block drives the crystal rod 5 to be detected to move to the initial position, the distance between the end face of the crystal rod 5 to be detected and the detection component 3 is 5-10cm. It should be noted that the initial position and the second preset position in the embodiment of the present application refer to the position in the horizontal direction. After the detection component 3 moves to the second preset position, it is also necessary to rotate under the drive of the driver 2. During the rotation process, the second preset position of the detection component 3 in the horizontal direction does not change. The distance between the end face of the crystal rod 5 to be detected and the detection component 3 refers to the horizontal distance along the axial direction of the crystal rod 5 to be detected. A preset interval is set between the crystal rod 5 to be detected and the detection component 3, which can provide a gap for the detection component 3 to rotate.

[0029] The driving member 2 includes a first driving member 21 and a second driving member 22 arranged on the first driving member 21, the detection assembly 3 is connected to the second driving member 22, the first driving member 21 drives the second driving member 22 so that the center of the second driving member 22 coincides with the axis of the crystal rod 5 to be detected, and the second driving member 22 is used to drive the detection assembly 3 to rotate around the axis of the crystal rod 5 to be detected. The driving member 2 drives the first driving member 21 and the second driving member 22 respectively, the detection assembly 3 and the second driving member 22 are connected, the first driving member 21 drives the second driving member 22 and the detection assembly 3 to move to the second preset position (horizontal position), and then the second driving member 22 drives the detection assembly 3 to rotate so as to detect the end face of the crystal rod 5 to be detected. Among them, the second driving member 22 is connected to the detection assembly 3 through a telescopic rod 23. After the second driving member 22 drives the detection assembly 3 to perform a complete rotation, the telescopic rod 23 can change the distance between the detection assembly 3 and the second driving member 22, thereby changing the rotation radius of the detection assembly 3, so as to detect the interval between the detection assembly 3 and different positions on the end face of the crystal rod 5 to be detected. For example, when the detection device in the embodiment of the present application is detecting, the telescopic rod 23 is first in an extended state. After the detection component 3 completes one rotation, the telescopic rod 23 gradually contracts to change the rotation radius of the detection component 3, and then starts to rotate and detect. After repeated multiple times, the detection data (interval distance) of concentric circles of different radii can be obtained. In some embodiments, the telescopic rod 23 can also be gradually extended from a contracted state to change the rotation radius of the detection component 3.

[0030] Exemplarily, the detection component 3 in the embodiment of the present application includes a laser rangefinder, through which the horizontal distance between the end face and the detection component 3 can be detected more accurately and quickly, thereby achieving the effect of detecting the lowest point. In some embodiments, the detection component 3 can also be other detection instruments for detecting distance. Among them, the lowest point on the end face of the crystal rod 5 to be detected refers to the point on the end face detected by the detection component 3 corresponding to the maximum distance between the detection component 3 and the detection component 3.

[0031] Exemplarily, the first driving member 21 in the above-mentioned driving member 2 includes a telescopic cylinder, and the fixed end of the telescopic cylinder is detachably mounted on the structural frame, specifically mounted on the transverse frame 12. The movable end of the telescopic cylinder is connected to the second driving member 22. Exemplarily, the second driving member 22 includes a servo motor. The servo motor is connected to the detection component 3 through a telescopic rod 23, and the telescopic rod 23 is connected to the output shaft of the servo motor. When the first driving member 21 enters the extended state, the second driving member 22 and the detection component 3 can be driven to move downward. When the first driving member 21 enters the contracted state, the second driving member 22 and the detection component 3 can be driven to move upward. The center of the driving shaft on the second driving member 22 coincides with the axis of the crystal rod 5 to be detected. When the second driving member 22 is working, the telescopic rod 23 and the detection component 3 can be driven to rotate. When the telescopic rod 23 is extended or contracted, the rotation radius of the detection component 3 can be changed. When the detection component 3 rotates at different radii, the distance between the end face of the crystal rod 5 to be detected and the detection component 3 can be more comprehensively obtained, thereby facilitating the confirmation of the lowest point on the end face of the crystal rod 5 to be detected, so as to facilitate the slicing of the crystal rod 5 to be detected.

[0032] Exemplarily, when the first driving member 21 drives the second driving member 22 and the detection component 3 to move downward, the telescopic rod 23 is in a retracted state. When the second driving member 22 drives the detection component 3 to rotate for the first time, the rotation radius of the detection component 3 is the largest. After completing one detection, the telescopic rod 23 contracts and reduces the rotation radius of the detection component 3. After completing another detection, the telescopic rod 23 reduces the rotation radius of the detection component 3 again. That is to say, as the detection process proceeds, the rotation radius of the detection component 3 gradually decreases. In some embodiments, the rotation radius of the detection component 3 gradually increases as the detection process proceeds, and can be selectively set according to actual conditions.

[0033] The crystal rod end face detection device in the embodiment of the present application also includes a control unit. For example, the control unit includes a PLC module. The detection component 3 is connected to the PLC module through a high-flexible cable. When the detection component 3 detects the distance between the end face of the crystal rod 5 to be detected and the detection component 3 during rotation, the spacing distance is sent to the control unit as detection data. The control unit will record the spacing distance detected by the detection component 3 and the point on the end face of the crystal rod 5 to be detected corresponding to the spacing distance. The control unit can confirm the maximum value of the spacing distance by comparison, and at the same time, the point corresponding to the maximum spacing distance is used as the lowest point on the end face of the crystal rod 5 to be detected. For example. The measurement value obtained by the control unit will be stored through built-in storage or external storage, such as a hard disk or an external U disk. In some embodiments, the control unit can also be an industrial computer. For example, the control unit and the MES (manufacturing execution system) network are connected to facilitate data backup, organization and tracing, etc. For example, the control unit is also used to connect a display, and the data detected by the detection component 3 in real time can be displayed through the display. The control unit is also connected to the first driving member 21 and the second driving member 22, so as to control the process of the first driving member 21 driving the second driving member 22 and the detection component 3 to move, the process of the second driving member 22 driving the detection component 3 to rotate, and the process of the telescopic rod 23 to extend and retract.

[0034] Exemplarily, the detection component 3 and the driving component 2 are connected via a high-flexible cable and a control unit, thereby achieving the transmission of control signals and detection data.

[0035] Figure 2(a)-Figure 2(c) The schematic diagram of each state of the crystal rod end face detection device in the working process in the embodiment of the present application is shown. The working process of the detection device in the present application is introduced in conjunction with FIG. 2 below:

[0036] First, as shown in FIG2(a), before the feeding of the crystal rod to be tested is completed, the detection device enters the initial state, the driving member 2 and the detection assembly 3 are both in the initial state, and the detection assembly 3 is at the first preset position. Then, as shown in FIG2(b), the first driving member 21 drives the second driving member 22 to move downward, and at the same time drives the telescopic rod 23 and the detection assembly 3 to move downward to the second preset position, thereby realizing the lowering of the position of the detection assembly 3.

[0037] As shown in FIG2(c), after the movement of the detection component 3 is completed, the crystal rod 5 to be detected is loaded. The crystal rod 5 to be detected is placed on the support component 4, that is, placed on two horizontal support blocks. The horizontal support blocks can drive the crystal rod 5 to be detected to move horizontally, so that the crystal rod 5 to be detected gradually approaches the detection component 3 from a distance, and finally the crystal rod 5 to be detected reaches the initial position. At this time, the interval between the end face of the crystal rod 5 to be detected and the detection component 3 is 5-10cm. The second driving member 22 will drive the detection component 3 to rotate around the axis of the crystal rod 5 to be detected. During the rotation, the detection component 3 will continuously detect the interval distance between the end face of the crystal rod 5 to be detected and the detection component 3. The interval distance will be transmitted to the control unit as detection data and recorded by the control unit.

[0038] Continuing to refer to Figure 2(c), after the detection component 3 rotates one circle, its movement trajectory can be regarded as a circle. The telescopic rod 23 will contract (in some embodiments, it will extend) to change the rotation radius of the detection component 3, and the second driving member 22 will continue to drive the detection component 3 to rotate so that its rotation trajectory and the previous trajectory form concentric circles. During the rotation process, the detection component 3 will still detect the spacing distance between itself and the end face of the crystal rod 5 to be detected until it completes another rotation process. The number of rotations of the detection component 3 is pre-set, and its number of rotations is the same as the number of adjustments of the telescopic rod 23. The telescopic rod 23 is adjusted to enable the detection component 3 to complete a preset number of rotations and detections, and the final detection data will be recorded by the control unit.

[0039] The control unit compares all received spacing distances to confirm the point on the end face of the crystal rod 5 to be detected corresponding to the maximum spacing distance as the lowest point to complete the detection process. The end face of the crystal rod 5 to be detected is cut according to the position of the lowest point to obtain a flat cutting surface and minimize the waste of material at the end of the crystal rod 5 to be detected.

[0040] The crystal rod end face detection device in the embodiment of the present application can drive the crystal rod 5 to be detected through the support component 4, and can drive the detection component 3 through the first driving member 21, so that the crystal rod 5 to be detected and the detection component 3 are moved to a preset position. The second driving member 22 can also drive the detection component 3 to rotate. During the rotation, the detection component 3 detects the spacing distance between itself and the end face of the crystal rod 5 to be detected. The lowest point on the crystal rod 5 to be detected can be confirmed by the size of the spacing distance, thereby guiding the wafer taking machine to cut and take the crystal rod 5 to be detected at the lowest point, thereby reducing the waste of raw materials.

[0041] Embodiment 2

[0042] like Figure 3As shown, an embodiment of the present application provides a device for detecting the end face of a crystal rod, and the device includes: a supporting component 4, a detection assembly 3, a first driving member 21 and a second driving member 22.

[0043] The difference from the above-mentioned embodiment 1 is that the second driving member 22 in the embodiment of the present application is not connected to the first driving member 21, but is arranged on the supporting component 4, wherein the supporting component 4 includes a horizontal support block arranged on the wafer picker 1, and the second driving member 22 is arranged on the side of the supporting component 4 close to the crystal rod 5 to be detected. The second driving member 22 contacts the crystal rod 5 to be detected and drives the crystal rod 5 to be detected to rotate around the axis of the crystal rod 5 to be detected.

[0044] Exemplarily, the second driving member 22 may be a transmission roller disposed on the supporting member 4, the transmission roller contacts the crystal rod 5 to be detected and drives the crystal rod 5 to be detected to rotate. In the embodiment of the present application, the first driving member 21 may be directly connected to the telescopic rod 23, the detection assembly 3 does not rotate, and the telescopic rod 23 is connected to the detection assembly 3, so that the detection position of the detection assembly 3 can be changed when the telescopic rod 23 is extended or retracted, so as to detect different positions on the end surface of the crystal rod 5 to be detected.

[0045] The crystal rod end face detection device in the embodiment of the present application can drive the crystal rod 5 to be detected through the support component 4, and can drive the detection component 3 through the first driving member 21, so that the crystal rod 5 to be detected and the detection component 3 are respectively moved to the preset positions, and the second driving member 22 can also drive the crystal rod 5 to be detected to rotate. During the rotation, the detection component 3 detects the spacing distance between itself and the end face of the crystal rod 5 to be detected. The lowest point on the crystal rod 5 to be detected can be confirmed by the size of the spacing distance, thereby guiding the wafer taking machine to cut and take the crystal rod 5 to be detected at the lowest point, thereby reducing the waste of raw materials.

[0046] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely exemplary and are not intended to limit the scope of the present application to this. Those of ordinary skill in the art may make various changes and modifications therein without departing from the scope and spirit of the present application. All these changes and modifications are intended to be included within the scope of the present application as required by the appended claims.

[0047] In the description provided herein, a large number of specific details are described. However, it is understood that the embodiments of the present application can be practiced without these specific details. In some instances, well-known methods, structures and techniques are not shown in detail so as not to obscure the understanding of this description.

[0048] Similarly, it should be understood that in order to streamline the present application and help understand one or more of the various inventive aspects, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, the method of the present application should not be interpreted as reflecting the following intention: the claimed application requires more features than the features clearly stated in each claim. More specifically, as reflected in the corresponding claims, the inventive point is that the corresponding technical problem can be solved with features less than all the features of a single disclosed embodiment. Therefore, the claims following the specific embodiment are hereby explicitly incorporated into the specific embodiment, wherein each claim itself serves as a separate embodiment of the present application.

[0049] It will be understood by those skilled in the art that, except for mutually exclusive features, all features disclosed in this specification (including the accompanying claims, abstracts and drawings) and all processes or units of any method or device disclosed in this specification may be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstracts and drawings) may be replaced by an alternative feature that provides the same, equivalent or similar purpose.

[0050] In addition, those skilled in the art will appreciate that, although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments is meant to be within the scope of the present application and form different embodiments. For example, in the claims, any one of the claimed embodiments may be used in any combination.

[0051] The above is only a specific implementation or description of a specific implementation of the present application, and the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. The protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A crystal rod end face detection device, characterized in that: The device comprises: A supporting component, the supporting component is used to place the crystal rod to be detected and drive the crystal rod to be detected to an initial position; a first driving member; A detection component, wherein the first driving member drives the detection component to move between a first preset position and a second preset position; A second driving member, the second driving member is used to drive the crystal rod to be detected and / or the detection component to rotate around the axis of the crystal rod to be detected; the detection component at the second preset position continuously detects the spacing distance between itself and the end face of the crystal rod to be detected, so as to determine the lowest point of the end face of the crystal rod to be detected based on the spacing distance.

2. The device according to claim 1, characterized in that It also includes a telescopic rod, which is connected to the detection component. After the crystal rod to be detected and the detection component complete at least one relative rotation, the telescopic rod enters an extended or contracted state to change the relative position between the detection component and the crystal rod to be detected at the second preset position.

3. The device according to claim 2, characterized in that The second driving member is arranged on a side of the supporting component close to the crystal rod to be detected, the second driving member contacts the crystal rod to be detected, and drives the crystal rod to be detected to rotate around the axis of the crystal rod to be detected, and the telescopic rod enters an extended or contracted state, so that the detection component obtains the spacing distance at different positions from the end face of the crystal rod to be detected.

4. The device according to claim 2, characterized in that The second driving member is connected to the first driving member, and the second driving member is connected to the detection component through the telescopic rod. The second driving member drives the telescopic rod and the detection component to rotate around the axis of the crystal rod to be detected, so that the detection component obtains the spacing distance under different rotation radii.

5. The device according to claim 4, characterized in that The first driving member includes a telescopic cylinder, the movable end of which is connected to the second driving member; the second driving member includes a servo motor, the output shaft of which is connected to the telescopic rod to drive the telescopic rod and the detection component to rotate.

6. The device according to claim 1, characterized in that The device also includes a control unit, which is used to control the first driving member to drive the detection component to move, and at the same time control the second driving member to drive the crystal rod to be detected and / or the detection component to rotate. The control unit is also used to receive the spacing distance detected by the detection component, and determine the position point on the end face of the crystal rod to be detected corresponding to the maximum value of the spacing distance as the lowest point of the end face of the crystal rod to be detected.

7. The device according to any one of claims 1 to 6, characterized in that The distance between the second preset position and the initial position is 5-10 cm.

8. The device according to any one of claims 1 to 6, characterized in that The detection component includes a laser rangefinder.

9. A film taking machine, characterized in that: The slicing machine comprises a cutting device, a clamping device and a crystal rod end face detection device according to any one of claims 1 to 8, wherein the cutting device is used for slicing the crystal rod to be detected, and the clamping device is used for slicing the crystal rod to be detected.

10. The device according to claim 9, characterized in that The film extractor further comprises a structural frame and a base, wherein the structural frame is connected to the base, and the first driving member is detachably mounted on the structural frame.

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