Dual-state anti-disturbance integrated clamping device for optical measurement

Abstract

The invention relates to a dual-state anti-disturbance integrated clamping device for optical measurement. The principle of the dual-state anti-disturbance integrated clamping device is that the designed clamping device enables a Fizeau interferometer and a measured mirror clamp to be rigidly connected through a connecting frame module, so that the whole interference measurement system is integrally connected; the protection curtain module and the tested mirror clamp module can protect the interference cavity, and a telescopic pipe in the protection curtain module and a window shade in a tested mirror clamp can isolate the interference cavity from the external environment to prevent stray light from disturbing the interference measurement system. Meanwhile, the designed device can realize horizontal and vertical (namely horizontal and vertical) placement of the interferometer through a base in the hydraulic driving module, and horizontal interference measurement and vertical interference measurement can be carried out through attitude conversion.

Description

Technical Field

[0001] The present invention relates to a dual-state anti-disturbance integrated clamping device for optical measurement, which can realize the movement of the measured mirror through a hydraulic drive module. The designed protective curtain module can omnidirectionally shield the interference measurement optical path, thereby effectively isolating the external stray light from the interference measurement optical path and eliminating the influence of the external stray light on the interference measurement optical path. At the same time, the present invention can be applied to both horizontal and vertical interference measurement states. Background Art

[0002] The manufacturing of high-end components has extremely stringent requirements on the surface processing accuracy of components. Therefore, after completing the manufacturing process, accurate measurement of the component surface is particularly critical. This step directly determines the accuracy of the quantitative evaluation of the component processing quality.

[0003] Phase-shift interferometry is a high-precision detection technology in optical interferometry. This non-contact detection technology can achieve nanometer-level measurement accuracy and is one of the most accurate measurement methods in the current detection field.

[0004] Interferometer is a highly precise optical instrument and a necessary device for phase-shifting interferometry. It is widely used in many fields such as scientific research and engineering technology. The essence of phase-shifting interferometry is to analyze the light intensity signal of the collected interference intensity map, and use it to accurately obtain the initial phase, thereby realizing high-precision surface reconstruction of the measured object.

[0005] The process of phase-shifting interferometry can be roughly described as follows: the measured mirror is placed in front of the reference mirror in the interferometer, so that the two will interfere with each other in the interference system; then, the image acquisition device equipped with the interferometer is used to continuously collect multiple interference intensity images. At this time, the initial phase value in the interference intensity image contains detailed morphological information of the surface of the measured component; finally, the phase demodulation technology (also known as the signal reconstruction method) is used to analyze and process the initial phase data to achieve high-precision reconstruction of the surface morphology of the measured component.

[0006] There are many types of interferometers, mainly including Fizeau interferometer, Michelson interferometer, Fabry-Perot interferometer and Mach-Zehnder interferometer. Among the above different types of interferometers, Fizeau interferometer is a common-path interferometer, which can ensure that the reference light and the measurement light propagate along the same optical path, has relatively good anti-interference performance, and the clarity of the interference fringes is also high. Therefore, Fizeau interferometer is more widely used in practical applications.

[0007] From the perspective of structural form, Fizeau interferometers are mainly divided into two types: horizontal and vertical. Among them, the horizontal Fizeau interferometer has the advantages of high stability, easy operation and maintenance, and strong adaptability, but it occupies a large space and has poor vibration resistance; the vertical Fizeau interferometer has the advantages of high space utilization, but its stability is poor due to its high center of gravity; at the same time, most of the classic interferometric measurement equipment based on the Fizeau interferometer lacks a structural design to isolate stray light, which makes the measurement process extremely susceptible to external disturbances, so it is difficult to ensure measurement accuracy in the actual workshop measurement environment.

[0008] Based on the above analysis, traditional interferometric measurement systems often have the following problems:

[0009] (1) When performing optical interferometry on the measured mirror, the horizontal and vertical structures of the Fizeau interferometer each have their own advantages and disadvantages under different measurement environments and requirements. Therefore, if different interferometer structures (states) are frequently switched, the measurement cost will be high and the measurement process will be cumbersome.

[0010] (2) Since interferometry has a high precision (can reach nanometer-level measurement), when collecting the interference intensity map, the entire interferometry system (i.e., the system consisting of the interferometer and the device under test) is very sensitive to external environmental factors such as disturbances and stray light. However, traditional interferometry systems do not have dedicated protection devices for the interferometer cavity.

[0011] (3) When performing optical interferometry measurement on the measured mirror, the measured object needs to be clamped, but the traditional fixture is separated from the interferometer, and the rigid connection between the measured object, the fixture and the interferometer cannot achieve integrated vibration. At this time, the vibration transmitted from the ground (such as the subway) has a greater impact on the measurement process, which is not conducive to the realization of high-precision measurement.

[0012] Among the existing technologies and devices, the new devices and innovative algorithms designed by the inventors of this patent, Chang Lin et al., in the invention patents "Method for measurement and algorithm selection of multi-surface test pieces at arbitrary measurement positions-ZL202010502586.7", "A multi-surface measurement method based on high-precision fitting of phase shift characteristic polynomials-ZL202010595133.3" and the paper "Lin Chang, Jiehua Gao, Fangxiang Zhuang, et al. Superimposed Multi-harmonic Interference Frequency and Phase Measurements based on Non-synchronous Sampling Quantization and All-phase Spectrum Correction [J]. Measurement, 2024, 115114" (SCI retrieval) have achieved the goals of efficient and accurate phase-shifting interferometry algorithm design, accurate reconstruction of measurement distance in the interference system, and accurate estimation of interference harmonic frequency, and have the characteristics of strong cavity length adaptability and high measurement accuracy. However, the innovative structures and algorithms in the above patents and papers still cannot solve the problems mentioned above. First, the traditional interference measurement system based on Fizeau interferometer cannot adaptively switch states to adapt to different measurement environments. Second, the traditional interference measurement system does not have a dedicated protection device for the interference cavity. Third, the traditional fixture of the measured object cannot make the rigid connection between the measured object, the fixture and the interferometer realize integrated vibration, which leads to the problem that the ground vibration has a greater impact on the measurement process.

[0013] Therefore, in order to solve the above problems, the present invention innovatively proposes a dual-state anti-disturbance integrated clamping device for optical measurement. Summary of the invention

[0014] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a dual-state anti-disturbance integrated clamping device for optical measurement, with the aim of solving the defects in the existing measurement methods.

[0015] The principle of the present invention is that the clamping device designed by the present invention rigidly connects the interferometer and the measured mirror fixture through the connecting frame module so that the entire interference measurement system is integrated; the protective curtain module and the measured mirror fixture module are capable of protecting the interference cavity, wherein the combination of the telescopic tube in the protective curtain module and the shading curtain in the measured mirror fixture is capable of isolating the interference cavity from the external environment, thereby preventing stray light from disturbing the interference measurement system; at the same time, the designed device can realize the horizontal and vertical (i.e., horizontal and vertical) placement and switching of the interferometer through the base in the hydraulic drive module, and horizontal interference measurement and vertical interference measurement can be performed through posture conversion.

[0016] The present invention is a dual-state anti-disturbance integrated clamping device for optical measurement, and its main modules include: a connecting frame module, a protection curtain module, a measured mirror clamp module, a telescopic line control module, and a hydraulic drive module.

[0017] Preferably, the connecting frame module specifically includes: a connecting frame body, an interferometer, an interferometer fixing hole, an interferometer limiting plate, a contraction motor fixing hole, an interferometer connecting bolt, a telescopic tube limiting groove, a measured mirror fixture guide groove, a ball, a scale, a base fixing hole, a base fixing bolt, and a placement frame fixing hole; the connection method of the various parts of the connecting frame module is: the interferometer is placed above the connecting frame body, the connecting frame body is provided with an interferometer fixing hole, the interferometer connecting bolt passes through the interferometer fixing hole on the connecting frame body to fix the interferometer on the connecting frame body, an interferometer limiting plate is provided on the side of the interferometer, and the interferometer limiting plate and the connecting frame body are processed It is an integral whole. Both sides of the interferometer are provided with retraction motor fixing holes for fixing the retraction motor in the retractable line control module. A telescopic tube limiting groove is provided in the front of the interferometer for fixing the telescopic tube in the protective curtain module. The placement frame fixing hole is provided at the top of the interferometer. A measured mirror fixture guide groove is provided above the center of the connecting frame body. A ball bearing is provided in the measured mirror fixture guide groove. The scale is provided on the side of the connecting frame body. The scale and the connecting frame body are processed as a whole. The base fixing hole is provided above the connecting frame body. The base fixing bolt passes through the base fixing hole on the connecting frame body to connect and fix the connecting frame body to the base in the hydraulic drive module.

[0018] Preferably, the protective curtain module specifically includes: a telescopic tube, an electromagnet, a primary extension rod, a secondary extension rod, an electromagnetic knob switch fixing platform, a tension motor steel wire fastening platform, a primary extension rod observation slot, an electromagnetic knob switch, and a contraction motor steel wire fastening platform; the various parts of the protective curtain module are connected in the following manner: the primary extension rod is hollowed out in the middle, one end of the primary extension rod is fixedly connected to the telescopic tube limit slot in the connecting frame module by interference fit, a primary extension rod observation slot is provided on the side of the primary extension rod, and the secondary extension rod is inserted into the primary extension rod by clearance fit, The bottom of the telescopic tube is fixed in the telescopic tube limit groove in the connecting frame module, the telescopic tube is placed on the primary extension rod as a whole, an electromagnet is embedded in the end of the telescopic tube, and contraction motor steel wire tightening platforms are arranged on both sides of the top of the telescopic tube. The stretching motor steel wire tightening platform and the telescopic tube are processed as a whole, and the stretching motor steel wire tightening platform is arranged on the top of the telescopic tube. The electromagnetic knob switch fixing platform and the telescopic tube are processed as a whole, and the electromagnetic knob switch fixing platform is arranged on the side of the top of the telescopic tube, and the electromagnetic knob switch is fixed on the electromagnetic knob switch fixing platform by welding.

[0019] Preferably, the measured mirror fixture module specifically includes: a measured mirror fixture body, an anti-falling slider, a sliding post sliding hole, a long sliding post, a short sliding post, a sliding post fixing hole, a measured mirror fixing bracket, a rolling curtain, a rolling curtain rod, a rolling curtain rod fixing platform, a rolling curtain rod fixing platform through hole, a rolling curtain magnet, a secondary extension rod fixing groove, a measured mirror clamping head, a limiting pulley frame, a limiting pulley, a measured mirror fixture body telescopic rod fixing hole, and a measured mirror fixture body slider; the various parts of the measured mirror fixture module are connected in the following manner: the anti-falling slider and the measured mirror fixture body are processed as a whole and are arranged at the bottom of the measured mirror fixture body, the measured mirror fixture body slider is placed in the measured mirror fixture guide rail groove in the connecting frame module, the measured mirror fixing bracket is placed inside the measured mirror fixture body, the measured mirror fixing bracket is provided with a sliding post sliding hole on the side, and the sliding post fixing hole is arranged inside the measured mirror fixture body. , four measured mirror clamping heads are arranged on the measured mirror fixing bracket for fixing the measured mirror, the long sliding column and the short sliding column are fixedly connected with the sliding column fixing hole by interference fit, the long sliding column and the short sliding column pass through the sliding column sliding hole so that the measured mirror fixing bracket can move left and right on the measured mirror fixture body, the rolling curtain rod fixing platform is arranged on the measured mirror fixture body, the rolling curtain rod fixing platform and the measured mirror fixture body are processed as a whole, a rolling curtain rod fixing platform through hole is arranged inside the rolling curtain rod fixing platform, the rolling curtain rod fixing platform through hole passes through and is fixedly connected by interference fit, the rolling curtain is wound around the rolling curtain rod, a rolling curtain magnet is arranged on the top of the rolling curtain, a secondary extension rod fixing groove is arranged on the front of the measured mirror fixture body, four measured mirror fixture body telescopic rod fixing holes are arranged on the back of the measured mirror fixture body, a limit pulley frame is arranged on the top of the measured mirror fixture body, and a limit pulley is arranged on the limit pulley frame.

[0020] Preferably, the telescopic wire control module specifically includes: a contraction motor, a contraction motor winding wheel, a contraction motor fixing bolt, a stretching motor, a contraction motor steel wire, a stretching motor steel wire, a wire, a wire placement rack, a stretching motor winding wheel, and a plug; the connection method of the various parts of the telescopic wire control module is: the contraction motor fixing bolt passes through the contraction motor fixing hole in the connecting frame module so that the contraction motor is fixed to the side of the connecting frame body in the connecting frame module through a threaded connection, the contraction motor winding wheel is arranged on the contraction motor, and the contraction motor steel wire is wound on the contraction motor winding wheel, the contraction motor fixing bolt passes through the stretching motor fixing hole in the hydraulic drive module so that the stretching motor is fixed to the top of the base in the hydraulic drive module through a threaded connection, the stretching motor winding wheel is arranged on the stretching motor, and the stretching motor steel wire is wound on the stretching motor winding wheel, the wire placement rack is fixed to the top of the interferometer in the connecting frame module by welding, the wire is wound on the wire placement rack, and a plug is arranged at the end of the wire.

[0021] Preferably, the hydraulic drive module specifically includes: a hydraulic cylinder, an oil inlet of the hydraulic cylinder, an oil outlet of the hydraulic cylinder, a hydraulic cylinder telescopic rod, a hydraulic cylinder fixed base, a hydraulic cylinder fixing hole, a telescopic rod of the measured mirror fixture body, a stretching motor fixing hole, a base, and a vertical fixed block; the connection method of the various parts of the hydraulic drive module is: the hydraulic cylinder fixed base and the hydraulic cylinder are a unified whole, the hydraulic cylinder fixed base is welded to the hydraulic cylinder fixing hole on the base, the hydraulic cylinder oil inlet and the hydraulic cylinder oil outlet are both arranged on the side of the hydraulic cylinder, the hydraulic cylinder telescopic rod body is arranged inside the hydraulic cylinder, the end of the hydraulic cylinder telescopic rod is welded to the measured mirror fixture body, the bottom of the telescopic rod of the measured mirror fixture body is welded together with the base, the top of the telescopic rod of the measured mirror fixture body is fixedly connected with the telescopic rod fixing hole of the measured mirror fixture body in the measured mirror fixture module by interference fit, the top of the base is provided with a stretching motor fixing hole, and four vertical fixed blocks are arranged at the bottom of the base for support. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a schematic diagram of the assembly of the connecting frame module;

[0023] Figure 2 It is a schematic diagram of the parts of the connecting frame module;

[0024] Figure 3 It is a schematic diagram of the assembly of the protection curtain module;

[0025] Figure 4 It is a schematic diagram of the parts of the protection curtain module;

[0026] Figure 5 It is a schematic diagram of the assembly of the fixture module of the measured mirror;

[0027] Figure 6 It is a schematic diagram of the parts of the fixture module of the mirror under test;

[0028] Figure 7 It is a schematic diagram of the assembly of the telescopic line control module;

[0029] Figure 8 It is a schematic diagram of the parts of the telescopic wire control module;

[0030] Fig. 9 It is a schematic diagram of the assembly of the hydraulic drive module;

[0031] Fig.10 It is a schematic diagram of the parts of the hydraulic drive module;

[0032] Fig.11 It is a schematic diagram of the horizontal assembly implementation of the present invention;

[0033] Fig.12 It is a schematic diagram of the vertical assembly implementation of the present invention;

[0034] Fig.13 It is a schematic diagram of the distribution of modules and parts of the present invention.

[0035] The meanings of the graphic codes are as follows:

[0036] 1. Connecting frame module; 2. Protective curtain module; 3. Mirror fixture module; 4. Telescopic line control module; 5. Hydraulic drive module; 101. Connecting frame body; 102. Interferometer; 103. Interferometer fixing hole; 104. Interferometer limit plate; 105. Retraction motor fixing hole; 106. Interferometer connecting bolt; 107. Telescopic tube limit groove; 108. Mirror fixture guide groove; 109. Ball bearing; 110. Scale; 111. Base fixing hole; 112. Base fixing bolt; 11 3. Fixing hole of the placement rack; 201. Telescopic tube; 202. Electromagnet; 203. Primary extension rod; 204. Secondary extension rod; 205. Fixing platform of electromagnetic knob switch; 206. Fastening platform of steel wire of stretching motor; 207. Observation slot of primary extension rod; 208. Electromagnetic knob switch; 209. Fastening platform of steel wire of contraction motor; 301. Main body of the clamp of the measured mirror; 302. Anti-falling slider; 303. Sliding hole of sliding column; 304. Long sliding column; 305. Short sliding column; 306. Fixing hole of sliding column; 307 .Fix bracket for the measured mirror; 308. Rolling curtain; 309. Rolling curtain rod; 310. Rolling curtain rod fixing platform; 311. Rolling curtain rod fixing platform through hole; 312. Rolling curtain magnet; 313. Secondary extension rod fixing groove; 314. Clamping head of the measured mirror; 315. Limiting pulley frame; 316. Limiting pulley; 317. Fixing hole of telescopic rod of the measured mirror fixture body; 318. Sliding block of the measured mirror fixture body; 401. Retraction motor; 402. Retraction motor winding wheel; 403. Retraction motor fixing bolt; 404. Pull Extension motor; 405. Contraction motor steel wire; 406. Extension motor steel wire; 407. Conductor; 408. Conductor placement rack; 409. Extension motor winding wheel; 410. Plug; 501. Hydraulic cylinder; 502. Hydraulic cylinder oil inlet; 503. Hydraulic cylinder oil outlet; 504. Hydraulic cylinder telescopic rod; 505. Hydraulic cylinder fixed base; 506. Hydraulic cylinder fixing hole; 507. Telescopic rod of the main body of the measured mirror fixture; 508. Extension motor fixing hole; 509. Base; 510. Vertical fixing block. DETAILED DESCRIPTION

[0037] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention, and cannot be used to limit the scope of protection of the present invention. This section will further illustrate the technical solutions in the above invention content in conjunction with specific embodiments. The preferred embodiments of the present invention are described in detail as follows:

[0038] Embodiment 1

[0039] In this embodiment, see Figures 1 to 13, a dual-state anti-disturbance integrated clamping device for optical measurement, embodiment 1 can realize the horizontal anti-disturbance interference measurement mode of the present invention, and its main modules include: a connecting frame module 1, a protective curtain module 2, a measured mirror clamp module 3, a telescopic line control module 4, and a hydraulic drive module 5;

[0040] Through the attached figure Figure 1 , Figure 2 It can be seen that the connection method of the various parts of the connecting frame module 1 is as follows: the interferometer 102 is placed above the connecting frame body 101, the connecting frame body 101 is provided with an interferometer fixing hole 103, the interferometer connecting bolt 106 passes through the interferometer fixing hole 103 on the connecting frame body 101 to fix the interferometer 102 on the connecting frame body 101, an interferometer limiting plate 104 is provided on the side of the interferometer 102, the interferometer limiting plate 104 and the connecting frame body 101 are processed as a whole, both sides of the interferometer 102 are provided with a contraction motor fixing hole 105 for fixing the contraction motor 401 in the telescopic line control module 4, and a telescopic The tube limiting groove 107 is used to fix the telescopic tube 201 in the protective curtain module 2, the placement frame fixing hole 113 is set at the top of the interferometer 102, and a measured mirror fixture guide groove 108 is set above the center of the connecting frame body 101. A ball 109 is set in the measured mirror fixture guide groove 108, and a scale 110 is set on the side of the connecting frame body 101. The scale 110 and the connecting frame body 101 are processed as a whole, and the base fixing hole 111 is set above the connecting frame body 101. The base fixing bolt 112 passes through the base fixing hole 111 on the connecting frame body 101 to connect and fix the connecting frame body 101 to the base 509 in the hydraulic drive module 5.

[0041] Through the attached figure Figure 3 , Figure 4It can be seen that the connection method of the various parts of the protection curtain module 2 is as follows: the middle of the primary extension rod 203 is hollowed out, one end of the primary extension rod 203 is fixed in the telescopic tube limiting groove 107 in the connecting frame module 1 by interference fit, a primary extension rod observation groove 207 is arranged on the side of the primary extension rod 203, the secondary extension rod 204 is inserted into the primary extension rod 203 by clearance fit, the bottom of the telescopic tube 201 is fixedly connected to the telescopic tube limiting groove 107 in the connecting frame module 1, the telescopic tube 201 is placed on the primary extension rod 203 as a whole, and the telescopic tube 204 is inserted into the primary extension rod 203 by clearance fit. The electromagnet 202 is embedded in the end, the contraction motor steel wire fastening platform 209 is arranged on both sides of the top of the telescopic tube 201, the stretching motor steel wire fastening platform 206 and the telescopic tube 201 are processed as a whole, and the stretching motor steel wire fastening platform 206 is arranged on the top of the telescopic tube 201, the electromagnetic knob switch fixing platform 205 and the telescopic tube 201 are processed as a whole, and the electromagnetic knob switch fixing platform 205 is arranged on the side of the top of the telescopic tube 201, and the electromagnetic knob switch 208 is fixed to the electromagnetic knob switch fixing platform 205 by welding.

[0042] Through the attached figure Figure 5 , Figure 6 It can be seen that the connection method of the various parts of the measured mirror fixture module 3 is as follows: the anti-falling slider 302 and the measured mirror fixture body 301 are processed as a whole and are arranged at the bottom of the measured mirror fixture body 301. The measured mirror fixture body slider 318 is placed in the measured mirror fixture guide groove 108 in the connecting frame module 1. The measured mirror fixing bracket 307 is placed inside the measured mirror fixture body 301. The measured mirror fixing bracket 307 is provided with a slide column sliding hole 303 on the side of the measured mirror fixing bracket 307. The slide column fixing hole 306 is arranged inside the measured mirror fixture body 301. Four measured mirror clamping heads 314 are arranged on the measured mirror fixing bracket 307 for fixing the measured mirror. The long slide column 304 and the short slide column 305 are fixedly connected with the slide column fixing hole 306 by interference fit. The long slide column 304 and the short slide column 305 pass through the slide column sliding hole 303 to fix the measured mirror. The fixed bracket 307 can move left and right on the measured mirror fixture body 301, the curtain rod fixing platform 310 is arranged on the measured mirror fixture body 301, the curtain rod fixing platform 310 and the measured mirror fixture body 301 are processed as a whole, a curtain rod fixing platform through hole 311 is arranged inside the curtain rod fixing platform 310, and the curtain rod fixing platform through hole 311 is fixedly connected by interference fit, the curtain 308 is wound around the curtain rod 309, and a curtain magnet 312 is arranged on the top of the curtain 308, a secondary extension rod fixing groove 313 is arranged on the front side of the measured mirror fixture body 301, and four measured mirror fixture body telescopic rod 507 fixing holes 317 are arranged on the back side of the measured mirror fixture body 301, a limiting pulley frame 315 is arranged on the top of the measured mirror fixture body 301, and a limiting pulley 316 is arranged on the limiting pulley frame 315.

[0043] Through the attached figure Figure 7 , Figure 8It can be seen that the connection method of the various parts of the telescopic line control module 4 is as follows: the retraction motor fixing bolt 403 passes through the retraction motor fixing hole 105 in the connecting frame module 1, so that the retraction motor 401 is fixed to the side of the connecting frame body 101 in the connecting frame module 1 through a threaded connection, the retraction motor winding wheel 402 is arranged on the retraction motor 401, and the retraction motor steel wire 405 is wound on the retraction motor winding wheel 402, the retraction motor fixing bolt 403 passes through the stretching motor fixing hole 508 in the hydraulic drive module 5, so that the stretching motor 404 is fixed to the top of the base 509 in the hydraulic drive module 5 through a threaded connection, the stretching motor winding wheel 409 is arranged on the stretching motor 404, and the stretching motor steel wire 406 is wound on the stretching motor winding wheel 409, the wire placement frame 408 is fixed to the top of the interferometer 102 in the connecting frame module 1 by welding, the wire 407 is wound on the wire placement frame 408, and a plug 410 is arranged at the end of the wire 407.

[0044] Through the attached figure Fig. 9 , Fig.10 It can be seen that the connection method of the various parts of the hydraulic drive module 5 is as follows: the hydraulic cylinder fixed base 505 and the hydraulic cylinder 501 are a unified whole, the hydraulic cylinder fixed base 505 is welded to the hydraulic cylinder fixing hole 506 on the base 509, the hydraulic cylinder oil inlet 502 and the hydraulic cylinder oil outlet 503 are both arranged on the side of the hydraulic cylinder 501, the hydraulic cylinder telescopic rod 504 body is arranged inside the hydraulic cylinder 501, the end of the hydraulic cylinder telescopic rod 504 is welded to the main body of the mirror fixture to be tested, the bottom of the telescopic rod 507 of the main body of the mirror fixture to be tested is welded together with the base 509, the top of the telescopic rod 507 of the main body of the mirror fixture to be tested is fixedly connected with the telescopic rod fixing hole 317 of the main body of the mirror fixture to be tested in the mirror fixture module to be tested by interference fit, the top of the base 509 is provided with a stretching motor fixing hole 508, and four vertical fixing blocks 510 are arranged at the bottom of the base 509 to play a supporting role.

[0045] Through the attached figure Figures 1 to 13 It can be seen that the present invention can realize horizontal anti-disturbance interferometry. When the present invention is used for horizontal interferometry, the present invention is placed horizontally as a whole. The telescopic tube 201 in the protective curtain module 2 is converted from a non-shielded interference cavity state to a shielded interference cavity state through the stretching motor 404 in the telescopic line module. The electromagnet 202 built into the telescopic tube 201 is energized, and the electromagnet 202 tightly adsorbs the telescopic tube 201 in the secondary extension rod fixing groove 313 in the measured mirror module. This embodiment can realize the horizontal anti-disturbance interferometry measurement mode of the present invention.

[0046] Embodiment 2

[0047] Through the attached figure Figures 1 to 13It can be seen that embodiment 1 can realize the horizontal anti-disturbance interference measurement mode of the present invention, and this embodiment can realize the vertical anti-disturbance interference measurement mode of the present invention. In this embodiment, the present invention performs vertical interference measurement, and the present invention is placed vertically as a whole (that is, the line connecting the interferometer 102 and the base 509 is perpendicular to the horizontal plane at this time), and the four vertical fixed blocks 510 on the base 509 in the hydraulic drive module 5 are placed on the anti-vibration platform to ensure the overall stability of the vertical state of the present invention, thereby realizing the vertical anti-disturbance interference measurement mode of the present invention.

[0048] At the same time, the device can also adjust the interference cavity length. In the interference measurement process, the setting of the interference cavity length (that is, the distance from the measured object to the reference mirror in the interferometer) is very important for the interference measurement process, and can directly affect the signal frequency of the interference signal. Therefore, adjusting and measuring the interference cavity length is one of the important steps in the interference measurement. The specific steps are as follows: when the telescopic tube 201 is retracted, it is in a non-shielded state. When the telescopic tube 201 is not blocked, the measured mirror can be replaced. When adjusting the interference cavity length, the hydraulic cylinder oil inlet 502 in the hydraulic drive module 5 supplies oil, and the hydraulic cylinder telescopic rod 504 pushes the measured mirror fixture body 301 to change the distance between the measured mirror and the reference mirror, thereby adjusting the interference cavity length; the scale 110 is set on the connecting frame body 101 for real-time monitoring of the position of the measured mirror fixture body 301. At this time, the scale 110 can be used to accurately obtain the interference cavity length, and the retraction motor 401 in the telescopic line control module 4 is energized to make the telescopic tube 201 suspended and form a non-shielded interference cavity state; this embodiment In the embodiment, the telescopic tube 201 is in a shielding state when it is opened, and the shielding state of the telescopic tube 201 can protect the interference cavity. When the vertical interference measurement is performed in this embodiment, the retraction motor 401 is powered off, and the telescopic tube 201 is lowered to the secondary extension rod fixing groove 313 in the mirror module to be measured. At this time, the present embodiment is converted into a shielding interference cavity state, and the electromagnet 202 built into the telescopic tube 201 is energized. The electromagnet 202 tightly adsorbs the telescopic tube 201 in the secondary extension rod fixing groove 313 in the mirror fixture module 3 to be measured. At this time, the telescopic tube 201 can isolate the interference cavity from the external environment, thereby preventing external stray light from affecting the measurement environment. At this time, the vertical anti-disturbance interference measurement mode of the present invention can be realized.

[0049] The above describes the embodiments of the present invention in conjunction with the accompanying drawings, but the present invention is not limited to the above examples. Various changes can be made according to the purpose of the invention. Any changes, modifications, substitutions, combinations or simplifications made according to the spirit and principle of the technical solution of the present invention should be equivalent replacement methods. As long as they meet the purpose of the invention and do not deviate from the technical principles and inventive concepts of the present invention, they belong to the protection scope of the present invention.

Claims

1. The main modules of the dual-state anti-disturbance integrated clamping device for optical measurement designed by the present invention include: A connecting frame module (1), a protective curtain module (2), a measured mirror fixture module (3), a telescopic line control module (4), and a hydraulic drive module (5); The connecting frame module (1) comprises: a connecting frame body (101), an interferometer (102), an interferometer fixing hole (103), an interferometer limiting plate (104), a contraction motor fixing hole (105), an interferometer connecting bolt (106), a telescopic tube limiting groove (107), a measured mirror fixture guide groove (108), a ball bearing (109), a scale (110), a base fixing hole (111), a base fixing bolt (112), and a placement frame fixing hole (113); The protective curtain module (2) comprises: a telescopic tube (201), an electromagnet (202), a primary extension rod (203), a secondary extension rod (204), an electromagnetic knob switch fixing platform (205), a stretching motor steel wire fastening platform (206), a primary extension rod observation slot (207), an electromagnetic knob switch (208), and a retracting motor steel wire fastening platform (209); The measured mirror fixture module (3) comprises: a measured mirror fixture body (301), an anti-falling slider (302), a slide post sliding hole (303), a long slide post (304), a short slide post (305), a slide post fixing hole (306), a measured mirror fixing bracket (307), a rolling curtain (308), a rolling curtain rod (309), a rolling curtain rod fixing platform (310), a rolling curtain rod fixing platform through hole (311), a rolling curtain magnet (312), a secondary extension rod fixing groove (313), a measured mirror clamping head (314), a limiting pulley frame (315), a limiting pulley (316), a measured mirror fixture body telescopic rod fixing hole (317), and a measured mirror fixture body slider (318); The telescopic wire control module (4) comprises: a retracting motor (401), a retracting motor winding wheel (402), a retracting motor fixing bolt (403), a stretching motor (404), a retracting motor steel wire (405), a stretching motor steel wire (406), a wire (407), a wire placement rack (408), a stretching motor winding wheel (409), and a plug (410); The hydraulic drive module (5) comprises: a hydraulic cylinder (501), a hydraulic cylinder oil inlet (502), a hydraulic cylinder oil outlet (503), a hydraulic cylinder telescopic rod (504), a hydraulic cylinder fixed base (505), a hydraulic cylinder fixing hole (506), a measured mirror fixture main body telescopic rod (507), a stretching motor fixing hole (508), a base (509), and a vertical fixing block (510); The connecting frame module (1) is characterized in that: the interferometer (102) is placed above the connecting frame body (101); the connecting frame body (101) is provided with an interferometer fixing hole (103); the interferometer connecting bolt (106) passes through the interferometer fixing hole (103) on the connecting frame body (101) to fix the interferometer (102) on the connecting frame body (101); an interferometer limiting plate (104) is provided on the side of the interferometer (102); the interferometer limiting plate (104) and the connecting frame body (101) are processed as a whole; both sides of the interferometer (102) are provided with contraction motor fixing holes (105) for fixing the contraction motor (401) in the telescopic line control module (4); and a telescopic tube limiting groove (106) is provided in front of the interferometer (102). 107) is used to fix the telescopic tube (201) in the protection curtain module (2), the placement frame fixing hole (113) is arranged on the top of the interferometer (102), a measured mirror fixture guide groove (108) is arranged above the center of the connection frame body (101), a ball (109) is arranged in the measured mirror fixture guide groove (108), a scale (110) is arranged on the side of the connection frame body (101), the scale (110) and the connection frame body (101) are processed as a whole, a base fixing hole (111) is arranged above the connection frame body (101), and the base fixing bolt (112) passes through the base fixing hole (111) on the connection frame body (101) to connect and fix the connection frame body (101) to the base (509) in the hydraulic drive module (5).

2. The protective curtain module (2) in the device for automatic adsorption and movement of an optical lens according to claim 1 is characterized in that: the middle of the primary extension rod (203) is hollowed out, one end of the primary extension rod (203) is fixedly connected to the telescopic tube limiting groove (107) in the connecting frame module (1) by interference fit, a primary extension rod observation groove (207) is arranged on the side of the primary extension rod (203), the secondary extension rod (204) is inserted into the primary extension rod (203) by clearance fit, the bottom of the telescopic tube (201) is fixed in the telescopic tube limiting groove (107) in the connecting frame module (1), and the telescopic tube (201) is placed as a whole on the primary extension rod ( 203), an electromagnet (202) is embedded in the end of the telescopic tube (201), both sides of the top of the telescopic tube (201) are provided with a contraction motor steel wire fastening platform (209), the stretching motor steel wire fastening platform (206) and the telescopic tube (201) are processed as a whole, the stretching motor steel wire fastening platform (206) is arranged on the top of the telescopic tube (201), the electromagnetic knob switch fixing platform (205) and the telescopic tube (201) are processed as a whole, the electromagnetic knob switch fixing platform (205) is arranged on the side of the top of the telescopic tube (201), and the electromagnetic knob switch (208) is fixed on the electromagnetic knob switch fixing platform (205) by welding.

3. The measured mirror fixture module (3) in the device for automatic adsorption and movement of an optical lens according to claim 1 is characterized in that: the anti-falling slider (302) and the measured mirror fixture body (301) are processed as a whole and arranged at the bottom of the measured mirror fixture body (301); the measured mirror fixture body slider (318) is placed in the measured mirror fixture guide groove (108) in the connecting frame module (1); the measured mirror fixing bracket (307) is placed on the measured mirror fixture body (3 01), a slide post sliding hole (303) is arranged on the side of the measured mirror fixing bracket (307), a slide post fixing hole (306) is arranged inside the measured mirror fixture body (301), four measured mirror clamping heads (314) are arranged on the measured mirror fixing bracket (307) for fixing the measured mirror, the long slide post (304) and the short slide post (305) are both fixedly connected to the slide post fixing hole (306) by interference fit, and the long slide post (304) and the short slide post (305) pass through the slide post sliding hole ( The mirror fixing bracket (307) can be moved left and right on the mirror fixture body (301) to be tested. The curtain rod fixing platform (310) is arranged on the mirror fixture body (301) to be tested. The curtain rod fixing platform (310) and the mirror fixture body (301) to be tested are processed as a whole. The curtain rod fixing platform through hole (311) is arranged inside the curtain rod fixing platform (310). The curtain rod fixing platform through hole (311) is fixedly connected by interference fit. The curtain (308) is wound around the curtain rod fixing platform. A rolling curtain magnet (312) is arranged on the top of the rolling curtain (308) on the rolling curtain rod (309), a secondary extension rod fixing groove (313) is arranged on the front of the measured mirror clamp body (301), four measured mirror clamp body telescopic rod (507) fixing holes (317) are arranged on the back of the measured mirror clamp body (301), a limiting pulley frame (315) is arranged on the top of the measured mirror clamp body (301), and a limiting pulley (316) is arranged inside the limiting pulley frame (315).

4. The telescopic wire control module (4) in the device for automatic adsorption and movement of an optical lens according to claim 1 is characterized in that: a retracting motor fixing bolt (403) passes through a retracting motor fixing hole (105) in the connecting frame module (1) so that the retracting motor (401) is fixed to the side of the connecting frame body (101) in the connecting frame module (1) through a threaded connection; a retracting motor winding wheel (402) is arranged on the retracting motor (401), a retracting motor steel wire (405) is wound on the retracting motor winding wheel (402), and the retracting motor fixing bolt (403) passes through the retracting motor fixing hole (105) in the connecting frame module (1). The stretching motor fixing hole (508) in the hydraulic drive module (5) allows the stretching motor (404) to be fixed to the top of the base (509) in the hydraulic drive module (5) through a threaded connection, the stretching motor winding wheel (409) is set on the stretching motor (404), the stretching motor steel wire (406) is wound on the stretching motor winding wheel (409), the wire placement frame (408) is fixed to the top of the interferometer (102) in the connecting frame module (1) by welding, the wire (407) is wound on the wire placement frame (408), and a plug (410) is set at the end of the wire (407).

5. The hydraulic drive module (5) in the device for automatic adsorption and movement of an optical lens according to claim 1 is characterized in that: the hydraulic cylinder fixing base (505) and the hydraulic cylinder (501) are a unified whole, the hydraulic cylinder fixing base (505) is welded to the hydraulic cylinder fixing hole (506) on the base (509), the hydraulic cylinder oil inlet (502) and the hydraulic cylinder oil outlet (503) are both arranged on the side of the hydraulic cylinder (501), and the main body of the hydraulic cylinder telescopic rod (504) is arranged on the hydraulic cylinder (501). ), the end of the hydraulic cylinder telescopic rod (504) is welded to the main body of the mirror fixture to be tested, the bottom of the telescopic rod (507) of the main body of the mirror fixture to be tested is welded to the base (509), the top of the telescopic rod (507) of the main body of the mirror fixture to be tested is fixedly connected to the telescopic rod fixing hole (317) of the main body of the mirror fixture to be tested in the mirror fixture module to be tested by interference fit, the top of the base (509) is provided with a tension motor fixing hole (508), and four vertical fixing blocks (510) are provided at the bottom of the base (509) to play a supporting role.

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