Optical waveguide microcavity coupling adjusting device

Abstract

The invention provides an optical waveguide microcavity coupling adjusting device. The optical waveguide microcavity coupling adjustment device comprises a substrate, an optical waveguide, an optical microcavity and a coupling adjustment structure. An optical waveguide is located on one side of the substrate. The optical microcavity is located on the side, provided with the optical waveguide, of the substrate, and the optical microcavity and the optical waveguide are located on the same layer. The coupling adjustment structure comprises a phase change layer located on the side, away from the substrate, of the optical waveguide and a heating layer located on the side, away from the substrate, of the phase change layer, and the heating layer is used for adjusting the temperature of the phase change layer. The orthographic projection of the phase change layer on the substrate is overlapped with the orthographic projection of the coupling area of the optical waveguide and / or the coupling area of the optical microcavity on the substrate.

Description

Technical Field

[0001] The present application relates to the field of optical technology, and in particular to an optical waveguide microcavity coupling adjustment device. Background Art

[0002] Optical microcavities are basic components in integrated optics and play an important role in optical interconnection, optical computing, optical sensing and nonlinear optics.

[0003] Existing technologies usually use dispersion structures or tunable coupling structures to adjust the coupling of optical microcavities. Among them, the dispersion structure has a complex design and high processing precision requirements, and the tunable coupling structure adjusts the coupling by changing the spatial relative position between the microcavity and other optical elements. Its structure size is large and the adjustment range is limited. Summary of the invention

[0004] The present application provides an optical waveguide microcavity coupling adjustment device, comprising: substrate; an optical waveguide located on one side of the substrate; An optical microcavity, located on a side of the substrate where the optical waveguide is provided, and located on the same layer as the optical waveguide; A coupling adjustment structure, the coupling adjustment structure comprising a phase change layer located on a side of the optical waveguide away from the substrate and a heating layer located on a side of the phase change layer away from the substrate, the heating layer being used to adjust the temperature of the phase change layer; an orthographic projection of the phase change layer on the substrate overlaps with an orthographic projection of a coupling region of the optical waveguide and / or a coupling region of the optical microcavity on the substrate.

[0005] In one embodiment, one of the optical microcavities is located on one side of one of the optical waveguides; The orthographic projection of the phase change layer on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, or the orthographic projection of the phase change layer on the substrate overlaps with the orthographic projection of the coupling region of the optical microcavity on the substrate.

[0006] In one embodiment, at least two of the optical microcavities are located on the same side of one of the optical waveguides, and areas enclosed by orthographic projections of different optical microcavities on the substrate do not overlap; There are multiple coupling adjustment structures, wherein the orthographic projection of the phase change layer of one of the coupling adjustment structures on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, and the orthographic projection of the phase change layer of each of the remaining coupling adjustment structures on the substrate overlaps with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate.

[0007] In one embodiment, at least two of the optical microcavities are located on one side of one of the optical waveguides; the diameters of the optical microcavities decrease sequentially, and the optical microcavities are nested; There are multiple coupling adjustment structures, wherein the orthographic projection of the phase change layer of one of the coupling adjustment structures on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, and the orthographic projection of the phase change layer of each of the remaining coupling adjustment structures on the substrate overlaps with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate.

[0008] In one embodiment, one of the optical microcavities is located between two of the optical waveguides; The orthographic projections of the phase change layers of the two coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling region of one optical waveguide on the substrate.

[0009] In one embodiment, at least two of the optical microcavities are located between the two optical waveguides, and the areas enclosed by the orthographic projections of different optical microcavities on the substrate do not overlap; There are multiple coupling adjustment structures, wherein the orthographic projections of the phase change layers of two of the coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling region of one of the optical waveguides on the substrate respectively; and the orthographic projections of the phase change layers of each of the remaining coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate at the same time.

[0010] In one embodiment, the minimum distance between the optical microcavity and the optical waveguide ranges from 0 μm to 5 μm.

[0011] In one embodiment, when there are multiple optical microcavities, the minimum distance between adjacent optical microcavities ranges from 0 μm to 5 μm.

[0012] In one embodiment, the coupling adjustment structure further includes a heating electrode, and the heating electrode is electrically connected to the heating layer.

[0013] In one embodiment, the material of the phase change layer is germanium telluride, germanium selenium telluride or germanium antimony selenium telluride.

[0014] The optical waveguide microcavity coupling adjustment device provided in the embodiment of the present application can adjust the coupling strength between the optical waveguide and the optical microcavity or between the optical microcavities by adjusting the temperature of the heating layer. Compared with the related art, the optical waveguide microcavity coupling adjustment device of the present application has a simple design, a compact structure, and a low requirement for processing accuracy. By adjusting the refractive index of the phase change layer to adjust the coupling strength, a wider adjustment range can be achieved. In addition, the phase change layer has the characteristic of non-volatility. When adjusted to a suitable coupling state, even if the external adjustment signal disappears, the phase change layer can still maintain its state, thereby keeping the coupling strength of the optical waveguide microcavity coupling adjustment device stable.

[0015] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0017] Figure 1 A partial cross-sectional view of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application; Figure 2 A partial cross-sectional view of an optical waveguide microcavity coupling adjustment device provided in another embodiment of the present application; Figure 3 A schematic diagram of the structure of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application; Figure 4 A schematic structural diagram of an optical waveguide microcavity coupling adjustment device provided in another embodiment of the present application; Figure 5 A schematic structural diagram of an optical waveguide microcavity coupling adjustment device provided in yet another embodiment of the present application; Figure 6 A schematic diagram of the structure of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application; Figure 7 A schematic diagram of the structure of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application; Figure 8 A schematic diagram of a mode structure of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application; Fig. 9 A schematic diagram of a mode structure of an optical waveguide microcavity coupling adjustment device provided in another embodiment of the present application; Fig.10 A schematic diagram of a mode structure of an optical waveguide microcavity coupling adjustment device provided in yet another embodiment of the present application; Fig.11A schematic diagram of the mode structure of an optical waveguide microcavity coupling adjustment device provided in one embodiment of the present application. DETAILED DESCRIPTION

[0018] Here, the technical solutions in the embodiments (or "implementation methods") of the present application will be described clearly and completely in conjunction with the accompanying drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.

[0019] If there are terms involving directional indications or positional relationships in the embodiments of the present application (such as up, down, left, right, front, back, inside, outside, top, bottom, center, vertical, horizontal, longitudinal, transverse, length, width, counterclockwise, clockwise, axial, radial, circumferential, etc.), such terms are only used to explain the relative positional relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings); if the specific posture changes, the directional indication or positional relationship will also change accordingly. In addition, the terms "first" and "second" in the embodiments of the present application are only used for the purpose of convenience of description and cannot be understood as indicating or implying relative importance.

[0020] The optical waveguide microcavity coupling adjustment device of the embodiment of the present application is described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments and implementations can complement or combine with each other.

[0021] The embodiment of the present application provides an optical waveguide microcavity coupling adjustment device, such as Figure 1 and Figure 2 As shown, the optical waveguide-microcavity coupling adjustment device includes a substrate 10 , an optical waveguide 20 , an optical microcavity 30 and a coupling adjustment structure 40 .

[0022] The optical waveguide 20 is located on one side of the substrate 10. The optical microcavity 30 is located on the side of the substrate 10 where the optical waveguide 20 is provided, and is located on the same layer as the optical waveguide 20.

[0023] The coupling adjustment structure 40 includes a phase change layer 41 located on a side of the optical waveguide 20 away from the substrate 10 and a heating layer 42 located on a side of the phase change layer 41 away from the substrate 10 . The heating layer 42 is used to adjust the temperature of the phase change layer 41 .

[0024] The orthographic projection of the phase change layer 41 on the substrate 10 overlaps with the orthographic projection of the coupling region of the optical waveguide 20 or the coupling region of the optical microcavity 30 on the substrate 10. Alternatively, the orthographic projection of the phase change layer 41 on the substrate 10 overlaps with the orthographic projection of the coupling region of the optical waveguide 20 on the substrate, and overlaps with the orthographic projection of the coupling region of the optical microcavity 30 on the substrate 10.

[0025] The phase change layer 41 of the coupling adjustment structure 40 includes a phase change material, which will undergo a phase change with temperature changes, that is, its internal crystal structure or molecular arrangement will change with temperature changes, thereby causing the physical properties of the phase change material to change, such as changing the refractive index of the phase change material.

[0026] A phase change layer 41 is disposed near the coupling region of the optical waveguide 20. When the phase change layer 41 undergoes a phase change, its refractive index changes. Since the phase change layer 41 is located around the optical waveguide, it is equivalent to affecting the refractive index of the material around the optical waveguide, resulting in a change in the effective refractive index of the optical waveguide 20. By adjusting the effective refractive index of the optical waveguide 20, the coupling strength between the optical waveguide 20 and the optical microcavity 30 can be adjusted.

[0027] A phase change layer 41 is disposed near the coupling region of the optical microcavity 30. When the phase change layer 41 undergoes a phase change, its refractive index changes. Since the phase change layer 41 is located around the optical waveguide, it is equivalent to affecting the refractive index of the material around the optical waveguide. This causes the coupling strength between the waveguide and the microcavity 30 to change, thereby causing the mode structure of the optical microcavity 30 to change. The coupling structure of the optical microcavity 30 can be adjusted by the coupling strength between the optical waveguide 20 and the optical microcavity 30.

[0028] It should be noted that the coupling region between the optical waveguide 20 and the optical microcavity 30 refers to a region where the optical fields of the two can effectively interact with each other.

[0029] The heating layer 42 of the coupling adjustment structure 40 can generate heat. After the heat is transferred to the phase change layer 41, the phase change layer 41 can undergo a phase change, resulting in a change in the refractive index of the phase change layer 41. Therefore, the optical waveguide microcavity coupling adjustment device of the present application can adjust the coupling strength between the optical waveguide 20 and the optical microcavity 30 or between the optical microcavity 30 and the optical microcavity 30 by adjusting the temperature of the heating layer 42. Compared with the related art, the optical waveguide microcavity coupling adjustment device of the present application has a simple design, a compact structure, and a low requirement for processing accuracy. By adjusting the refractive index of the phase change layer to adjust the coupling strength, a wider adjustment range can be achieved. In addition, the phase change layer 41 has the characteristic of non-volatility. When adjusted to a suitable coupling state, even if the external adjustment signal (such as voltage) disappears, the phase change layer 41 can still maintain its state, thereby keeping the coupling strength of the optical waveguide microcavity coupling adjustment device stable.

[0030] by represents the power in the optical waveguide before coupling, represents the power at the output of the optical waveguide, Represents the power entering the optical microcavity. The coupling coefficient expression between the optical waveguide and the optical microcavity is:

[0031] in, , , is the propagation constant when two adjacent waveguides exist independently. Depends on the effective refractive index and wavelength of light ,Right now , . Difference It can reflect the difference in propagation properties between two optical waveguides. , , To simultaneously calculate the supermode propagation parameters when two waveguides are coupled. is the coupling length.

[0032] From the above expression, it can be seen that changing the effective refractive index of any optical waveguide in the coupled waveguide will affect the propagation constant , which will affect and The value of , which ultimately affects the coupling coefficient When the coupling coefficient When the refractive index of the optical waveguide changes, the coupling strength will also change accordingly. Therefore, the coupling strength can be adjusted by adjusting the refractive index of the optical waveguide.

[0033] exist Figure 1 In the illustrated embodiment, the orthographic projection of the phase change layer 41 on the substrate 10 only overlaps with the orthographic projection of the optical waveguide 20 on the substrate 10. Figure 2 In the illustrated embodiment, the orthographic projection of the phase change layer 41 on the substrate 10 overlaps with the orthographic projections of two adjacent optical microcavities 30 on the substrate.

[0034] In one embodiment, Figure 1 and Figure 2 As shown, the optical waveguide-microcavity coupling adjustment device further includes a buried layer 11 located between the substrate 10 and the optical waveguide 20 and the optical microcavity 30. The buried layer 11 can play a role of physical support and refractive index matching, which is beneficial for maintaining the structural stability of the optical waveguide 20 and the optical microcavity 30 above the substrate 10, and is convenient for forming a compact and low-loss optical waveguide.

[0035] In one embodiment, Figure 1 and Figure 2As shown, the optical waveguide microcavity coupling adjustment device further includes a buried layer 12, which is located on the side of the buried layer 11 away from the substrate 10 and can cover the optical waveguide 20, the optical microcavity 30 and the coupling adjustment structure 40. The buried layer 12 can provide mechanical protection for other film layers. When the optical waveguide microcavity coupling adjustment device is squeezed or vibrated, the buried layer 12 can absorb part of the external force to reduce the risk of damage to the internal optical components. In one embodiment, the material of the optical waveguide 20 or the optical microcavity 30 is silicon, silicon nitride, chalcogenide material, etc.

[0036] In one embodiment, the material of the phase change layer 41 is an optical phase change material such as germanium telluride, germanium selenide telluride or germanium antimony selenide telluride. With this configuration, the light absorption coefficient of the phase change layer 41 is low, which can reduce the loss of optical signals during transmission. When the phase change layer 41 is made of the above materials, the refractive index of the phase change layer 41 has a large range of variation and has non-volatile characteristics, and can remain relatively stable after the phase change, thereby ensuring the stable operation of the optical waveguide microcavity coupling adjustment device.

[0037] In one embodiment, the material of the heating layer 42 is titanium nitride, aluminum, or the like, so that the heating layer 42 has good thermal conductivity.

[0038] In one embodiment, the coupling adjustment structure 40 further includes a heating electrode 43, which is located on a side of the heating layer 42 away from the substrate 10 and is electrically connected to the heating layer 42 through a through hole penetrating the embedding layer 12. By adjusting electrical parameters such as the voltage applied to the heating electrode 43, the heat generated by the heating layer 42 can be precisely controlled, thereby precisely regulating the refractive index of the phase change layer 41. By precisely adjusting the refractive index of the phase change layer 41, it is possible to precisely adjust the coupling strength between the optical waveguide 20 and the optical microcavity 30 or between the optical microcavities 30. In some embodiments, the material of the heating electrode 43 can be a metal material such as aluminum or gold.

[0039] In one embodiment, Figure 3As shown, the optical waveguide-microcavity coupling adjustment device includes an optical waveguide 20 and an optical microcavity 30 located on one side of the optical waveguide 20, and the orthographic projection of the phase change layer 41 on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide 20 on the substrate. The heating layer 42 is heated by the heating electrode 43, so that the phase change layer 41 undergoes a phase change, and the refractive index of the phase change layer 41 changes, so that the coupling strength between the optical waveguide 20 and the optical microcavity 30 can be adjusted. In this embodiment, the phase change layer 41 only changes the effective refractive index of the optical waveguide 20, and has almost no effect on the refractive index of the optical microcavity 30, so the light field distribution in the optical microcavity 30 is also relatively stable. Therefore, while achieving the adjustment of the coupling strength, the resonant mode position of the optical microcavity 30 can be kept unchanged, which is beneficial to the stability of signal transmission and convenient for signal modulation.

[0040] In another embodiment, the orthographic projection of the phase change layer on the substrate overlaps with the orthographic projection of the coupling region of the optical microcavity on the substrate. In this embodiment, the change in the refractive index of the phase change layer will cause the equivalent refractive index of the optical microcavity to change, resulting in a change in the light field distribution mode inside the optical microcavity, and then the resonant mode position moves. Such a setting can enable the optical waveguide microcavity coupling adjustment device to achieve functions such as selective filtering of optical signals of different frequencies and frequency conversion of light.

[0041] In one embodiment, Figure 4 As shown, the optical waveguide-microcavity coupling adjustment device includes an optical waveguide 20, at least two optical microcavities 30 are located on the same side of the optical waveguide 20, and the areas enclosed by the orthographic projections of different optical microcavities 30 on the substrate 10 do not overlap. There are multiple coupling adjustment structures 40, wherein the orthographic projection of the phase change layer 41 of one of the coupling adjustment structures 40 on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide 20 on the substrate, and the orthographic projection of the phase change layer 41 of each of the remaining coupling adjustment structures 40 on the substrate overlaps with the orthographic projections of the coupling regions of two adjacent optical microcavities 30 on the substrate at the same time. The phase change layer 41 overlapping with the coupling region of the optical waveguide can adjust the coupling strength between the optical waveguide 20 and the adjacent optical microcavity 30, and the remaining phase change layers 41 overlapping with the coupling regions of the adjacent optical microcavities 30 can adjust the coupling strength between the optical microcavities.

[0042] exist Figure 4 In the illustrated embodiment, the optical waveguide-microcavity coupling adjustment device includes an optical waveguide 20 and two optical microcavities 30, and the two optical microcavities 30 are spaced apart in a direction perpendicular to the extension direction of the optical waveguide 20. In other embodiments, the optical microcavities 30 may also be arranged in other directions as long as the coupling regions of each optical microcavity and other optical microcavities or optical waveguides do not overlap.

[0043] In another embodiment, if Figure 5 As shown, at least two optical microcavities 30 are located on one side of an optical waveguide 20, the diameters of the optical microcavities 30 decrease successively, and the optical microcavities 30 are nested. There are multiple coupling adjustment structures 40, wherein the orthographic projection of the phase change layer 41 of one coupling adjustment structure 40 overlaps with the orthographic projection of the coupling region of the optical waveguide 20 on the substrate, and the orthographic projection of the phase change layer 41 of each of the remaining coupling adjustment structures 40 overlaps with the orthographic projection of the coupling region of two adjacent optical microcavities 30 on the substrate at the same time. The phase change layer 41 overlapping with the coupling region of the optical waveguide can adjust the coupling strength between the optical waveguide 20 and the adjacent optical microcavity 30, and the remaining phase change layers 41 overlapping with the coupling region of the adjacent optical microcavity 30 can adjust the coupling strength between the optical microcavities.

[0044] In one embodiment, Figure 6 As shown, the optical waveguide microcavity coupling adjustment device includes two optical waveguides 20 and an optical microcavity 30 located between the two optical waveguides 20. The orthographic projections of the phase change layers 41 of the two coupling adjustment structures 40 on the substrate overlap with the orthographic projections of the coupling region of one optical waveguide 20 on the substrate. The structure of two optical waveguides and an optical microcavity located between them provides the possibility of bidirectional optical signal transmission. The two coupling adjustment structures 40 overlap with the coupling regions of the two optical waveguides 20, respectively, so that the coupling strength between the two optical waveguides 20 and the optical microcavity 30 can be independently controlled. In addition, the optical signal can be coupled from one of the optical waveguides 20 into the optical microcavity 30, and then coupled to the other optical waveguide 20. The bidirectional signal path increases the flexibility and functionality of the optical system.

[0045] In one embodiment, Figure 7 As shown, the optical waveguide-microcavity coupling adjustment device includes two optical waveguides 20 and at least two optical microcavities 30 located between the two optical waveguides 20, and the areas enclosed by the orthographic projections of different optical microcavities 30 on the substrate 10 do not overlap. There are multiple coupling adjustment structures 40, wherein the orthographic projections of the phase change layers 41 of the two coupling adjustment structures 40 on the substrate overlap with the orthographic projections of the coupling area of ​​one optical waveguide 20 on the substrate respectively, and the orthographic projections of the phase change layers 41 of each of the remaining coupling adjustment structures 40 on the substrate overlap with the orthographic projections of the coupling areas of two adjacent optical microcavities 30 on the substrate at the same time. The two optical waveguides 20 and the multiple optical microcavities 30 arranged at intervals are integrated together to provide a rich optical signal transmission path and processing unit. The two optical waveguides 20 increase the input and output channels of the optical signal, and the multiple optical microcavities 30 can be used as independent optical resonators to realize a variety of optical functions, such as filtering, modulation and optical signal storage.

[0046] In one embodiment, the minimum distance between the optical microcavity 30 and the optical waveguide 20 ranges from 0 μm to 5 μm. Within this distance range, it is beneficial for light to be efficiently coupled from the optical waveguide into the optical microcavity, or coupled from the optical microcavity back to the optical waveguide, thereby achieving a higher coupling efficiency, and avoiding excessive coupling due to a small distance or insufficient coupling due to a large distance. In some embodiments, the minimum distance between the optical microcavity 30 and the optical waveguide 20 can be 0.1 μm, 1.5 μm, 3.0 μm, 5 μm, etc.

[0047] In one embodiment, when there are multiple optical microcavities 30, the minimum distance between adjacent optical microcavities 30 ranges from 0 μm to 5 μm. The light fields of adjacent optical microcavities 30 can influence each other within this distance range, so that light can be coupled and energy exchanged between adjacent optical microcavities, which can avoid excessive coupling due to a small distance or insufficient coupling due to a large distance. In some embodiments, the minimum distance between adjacent optical microcavities 30 can be 0.1 μm, 1.5 μm, 3.0 μm, 5 μm, etc.

[0048] According to actual needs, the minimum distance between the optical microcavity 30 and the optical waveguide 20 or between the optical microcavity 30 and the optical microcavity 30 can be adjusted in advance to make them in different states such as weak coupling and strong coupling. It should be noted that the above minimum distance refers to the length of the shortest line segment connecting a point on the optical microcavity 30 and the optical waveguide 20 or a point on the optical microcavity 30.

[0049] In one embodiment, the optical microcavity 30 may be a planar microcavity with various irregular shapes but a closed structure. For example, the optical microcavity 30 may be a circular microring cavity, a rectangular microring cavity, etc.

[0050] Below Figure 4 and Figure 5 The application of the optical waveguide microcavity coupling adjustment device is introduced by taking the optical waveguide microcavity coupling adjustment device as an example and combining the mode structure diagram of the optical microcavity. The dotted line in the mode structure diagram of the optical microcavity represents the mode structure of the optical microcavity before adjustment by the optical waveguide microcavity coupling adjustment device, and the solid line and the shaded area represent the mode structure after adjustment by the optical waveguide microcavity coupling adjustment device.

[0051] exist Figure 8 In the embodiment shown, before the coupling strength of the optical waveguide microcavity coupling adjustment device is adjusted by using the coupling adjustment structure 40, each optical microcavity 30 is There is a resonance mode at the position, and there is almost no coupling between the two optical microcavities 30. From the output end of the optical waveguide 20, its transmission spectrum presents a single Lorentz line shape within a free spectrum range, that is, after the optical signal passes through the optical waveguide microcavity coupling adjustment device, its frequency distribution characteristics conform to the Lorentz line shape. The optical signal reaches its peak.

[0052] After the coupling strength of the optical waveguide microcavity coupling adjustment device is adjusted by the coupling adjustment structure 40, the coupling strength between the optical microcavities 30 increases, so that the light fields of the two optical microcavities 30 interact with each other, thereby generating mode splitting. Accordingly, the transmission spectrum at the output end of the optical waveguide 20 has two Lorentz line shapes within a free spectrum range, that is, after the optical signal is adjusted, the resonant frequency is respectively and By properly adjusting the coupling adjustment structure 40, the frequency difference between the two Lorentz line shapes can be (in is the Brillouin frequency shift, As the relevant parameter), the conditions of stimulated Brillouin scattering are achieved. When the frequency is When the energy of the optical signal reaches a certain threshold, Brillouin laser output can be generated.

[0053] exist Fig. 9 In the embodiment shown, before the coupling strength of the optical waveguide microcavity coupling adjustment device is adjusted by the coupling adjustment structure 40, coupling already exists between the optical microcavities 30 and two splitting modes are generated, and the transmission spectrum at the output end of the optical waveguide 20 has a central frequency of within a free spectrum range. and the center frequency is The two Lorentz line shapes of , so the condition of stimulated Brillouin scattering is not satisfied. After adjusting the coupling strength of the optical waveguide microcavity coupling adjustment device through the coupling adjustment structure 40, the frequencies of the two splitting modes can be adjusted to and ,make , thereby satisfying the conditions of stimulated Brillouin scattering and realizing the generation of Brillouin laser.

[0054] exist Fig.10 In the embodiment shown, before the coupling strength of the optical waveguide microcavity coupling adjustment device is adjusted by using the coupling adjustment structure 40, the mode structure of the optical microcavity 30 includes a frequency of The mode structure and frequency are The mode structure of the two optical microcavities is After adjusting the coupling strength of the optical waveguide microcavity coupling adjustment device by the coupling adjustment structure 40, the frequency can be The mode structure is split into frequencies and The two splitting modes make or , thus satisfying the frequency difference condition required to generate Brillouin laser.

[0055] exist Fig.11 In the embodiment shown, before the coupling strength of the optical waveguide microcavity coupling adjustment device is adjusted by using the coupling adjustment structure 40, the mode structure of the optical microcavity 30 includes a frequency of The mode structure and frequency are The mode structure of the two optical microcavities is After adjusting the coupling strength of the optical waveguide microcavity coupling adjustment device by the coupling adjustment structure 40, the frequency can be The mode structure is split into frequencies and The adjusted mode structure consists of two splitting modes with a frequency of , and By further adjusting the coupling strength, , thereby satisfying the energy conservation condition of optical parametric oscillation and further controlling the occurrence of optical parametric oscillation.

[0056] Figures 8 to 11 Only some application scenarios of the optical waveguide microcavity coupling adjustment device are illustrated, and the present application does not specifically limit other application scenarios of the optical waveguide microcavity coupling adjustment device.

[0057] It should be noted that the technical solutions or technical features described in the above embodiments can be combined or supplemented with each other without causing conflicts. The scope of protection of this application is not limited to the precise structures described in the above embodiments and shown in the drawings; all modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of this application should be included in the scope of protection of this application.

Claims

1. An optical waveguide microcavity coupling adjustment device, characterized in that: include: substrate; an optical waveguide located on one side of the substrate; An optical microcavity, located on a side of the substrate where the optical waveguide is provided, and located on the same layer as the optical waveguide; A coupling adjustment structure, the coupling adjustment structure comprising a phase change layer located on a side of the optical waveguide away from the substrate and a heating layer located on a side of the phase change layer away from the substrate, the heating layer being used to adjust the temperature of the phase change layer; an orthographic projection of the phase change layer on the substrate overlaps with an orthographic projection of a coupling region of the optical waveguide and / or a coupling region of the optical microcavity on the substrate.

2. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: One of the optical microcavities is located on one side of one of the optical waveguides; The orthographic projection of the phase change layer on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, or the orthographic projection of the phase change layer on the substrate overlaps with the orthographic projection of the coupling region of the optical microcavity on the substrate.

3. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: At least two of the optical microcavities are located on the same side of one of the optical waveguides, and areas enclosed by orthographic projections of different optical microcavities on the substrate do not overlap; There are multiple coupling adjustment structures, wherein the orthographic projection of the phase change layer of one of the coupling adjustment structures on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, and the orthographic projection of the phase change layer of each of the remaining coupling adjustment structures on the substrate overlaps with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate.

4. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: At least two of the optical microcavities are located on one side of one of the optical waveguides; the diameters of the optical microcavities decrease sequentially, and the optical microcavities are nested; There are multiple coupling adjustment structures, wherein the orthographic projection of the phase change layer of one of the coupling adjustment structures on the substrate overlaps with the orthographic projection of the coupling region of the optical waveguide on the substrate, and the orthographic projection of the phase change layer of each of the remaining coupling adjustment structures on the substrate overlaps with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate.

5. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: One of the optical microcavities is located between the two optical waveguides; The orthographic projections of the phase change layers of the two coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling region of one of the optical waveguides on the substrate.

6. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: At least two of the optical microcavities are located between the two optical waveguides, and areas enclosed by orthographic projections of different optical microcavities on the substrate do not overlap; There are multiple coupling adjustment structures, wherein the orthographic projections of the phase change layers of two of the coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling region of one of the optical waveguides on the substrate respectively; and the orthographic projections of the phase change layers of each of the remaining coupling adjustment structures on the substrate overlap with the orthographic projections of the coupling regions of two adjacent optical microcavities on the substrate at the same time.

7. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: The minimum distance between the optical microcavity and the optical waveguide ranges from 0 μm to 5 μm.

8. The optical waveguide microcavity coupling adjustment device according to claim 7, characterized in that: When there are multiple optical microcavities, the minimum distance between adjacent optical microcavities ranges from 0 μm to 5 μm.

9. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: The coupling adjustment structure further includes a heating electrode, and the heating electrode is electrically connected to the heating layer.

10. The optical waveguide microcavity coupling adjustment device according to claim 1, characterized in that: The material of the phase change layer is germanium telluride, germanium selenium telluride or germanium antimony selenium telluride.

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