Grinding device

Abstract

The invention belongs to the technical field of grinding equipment manufacturing, and discloses a grinding device which comprises a bracket, a retaining ring, an upper flange, an upper cover ring, a main body, a protective seat, an air bag rubber diaphragm, an edge pressing block and a positioning sealing seat, a retaining ring is arranged below the bracket; an upper cover ring is arranged above the bracket; a main body is fixedly arranged inside the upper cover ring; an upper flange is arranged above the main body; a positioning sealing seat is arranged between the bracket and the main body; a protective seat is arranged on the main body; an air bag rubber diaphragm is fixedly arranged below the protective seat; the air bag rubber diaphragm can be used for adsorbing and fixing a to-be-ground part; an edge pressing block is detachably arranged on the inner side of the air bag rubber diaphragm; the edge of the to-be-ground part is jacked and pressed through the edge pressing block; and a sealing ring seat is detachably and fixedly arranged on the protective seat. Through the combined design of the air bag rubber diaphragm, the protection base and the edge pressing block, it can be ensured that in the grinding process of the to-be-ground part, grinding pressure can be more evenly distributed on the surface of the to-be-ground part.

Description

Technical Field

[0001] The present application relates to the technical field of grinding equipment, and more specifically, to a grinding device. Background Art

[0002] In the processing of semiconductor materials, wafers, as the basic materials of commonly used semiconductor devices and integrated circuits, often need to be polished, and the quality of polishing technology will directly affect the quality of silicon wafers and the performance of semiconductor devices. The polishing device used for chemical mechanical polishing of the wafer parts to be polished generally includes a polishing platform, a polishing head and a polishing pad arranged on the polishing platform. In the manufacturing process of the parts to be polished, chemical mechanical polishing is to fix and adsorb the back of the parts to be polished by the polishing head, supply chemical polishing liquid to the polishing surface covered with the polishing pad, press the front of the parts to be polished on the polishing pad, apply pressure to the parts to be polished by the polishing head, and make the polishing platform and the polishing head move relative to each other, so as to mechanically polish the surface of the parts to be polished after chemical corrosion.

[0003] The document with the prior art publication number CN111168561B provides a grinding head for a wafer grinding device, including a first rotating shaft, a grinding disc and an adsorption-type combined pad, wherein the first rotating shaft is fixedly connected to the upper end of the grinding disc; the adsorption-type combined pad includes a back pad, a fixing ring and a buffer ring, the back pad is fixed to the lower surface of the grinding disc, the fixing ring and the buffer ring are fixed to the lower surface of the back pad, and the fixing ring is sleeved on the outside of the buffer ring, and the buffer ring and the back pad are not surrounded by the fixing ring and the lower surface of the buffer ring to form a wafer accommodating space. The grinding head of this invention sets a buffer ring between the fixing ring and the wafer to be ground, which can effectively prevent the edge stress concentration phenomenon caused by the fixing ring during the grinding process and improve the wafer grinding effect.

[0004] Although the above-mentioned prior art solutions can achieve relevant beneficial effects through the structure of the prior art, there are still the following defects: the prior art overall top pressure grinding has some problems, especially when the size of the part to be ground is large or the material properties are uneven, it may cause the surface flatness of the part to be ground after grinding to be insufficient or the thickness uniformity is poor. The prior art is not suitable for grinding parts to be ground with cut edges or notches; there is no targeted solution for the cut edge part, which leads to some adverse effects of the cut edge; when the part to be ground has a cut edge notch, and the part to be ground is subjected to overall adsorption and top pressure grinding, the following problems may occur: 1. When the pressure is insufficient: the edge cannot be sealed, the grinding liquid enters between the back of the wafer and the silicone airbag membrane, corrodes and contaminates the back of the wafer and the silicone airbag membrane; the removal rate is low and the efficiency is low; 2. When the pressure is too high: the silicone airbag membrane will be squeezed to contact the grinding pad, the silicone airbag membrane will be worn, and the loss of the silicone airbag membrane will increase; increase production costs. 3. Uneven grinding: Due to the cut edge notch of the part to be ground, the grinding head may cause uneven grinding pressure distribution due to the presence of the notch when contacting the part to be ground. This may lead to inconsistent thickness of the surface of the part to be ground after grinding, which in turn affects the flatness of the part to be ground and the quality of subsequent processes. 4. Chipping and fragmentation: The part to be ground is a brittle material. If it is subjected to uneven pressure or impact during the grinding process, especially at the notch, it is easy to chip or break. This will not only reduce the yield rate of the part to be ground, but also increase production costs.

[0005] In view of this, we propose a grinding device. Summary of the invention

[0006] 1. Technical problems to be solved The purpose of the present application is to provide a grinding device, which solves the technical problems raised in the above-mentioned background technology, and realizes that through the combined design of the protective seat and the edge pressure block, it can ensure that during the grinding process of the parts to be ground, especially for the parts to be ground with cutting edge notches, the grinding pressure can be more evenly distributed on the surface of the parts to be ground; the grinding pressure can be increased to improve the grinding removal rate, so as to improve the grinding efficiency, and at the same time it is beneficial to improve the utilization rate of related consumables and save production costs; improve the flatness of the parts to be ground and the quality of subsequent processes; can reduce the risk of chipping and fragmentation; can disperse stress concentration, reduce the risk of cracks or fractures caused by stress concentration in the subsequent processing or use of the parts to be ground, and also help to maintain the technical effect of stable electrical properties of the parts to be ground.

[0007] 2. Technical solution

[0008] The technical solution of the present application provides a grinding device, including: a bracket, a retaining ring, an upper flange, an upper cover ring, a main body, a protective seat, an airbag rubber diaphragm, an edge pressure block and a positioning sealing seat; A retaining ring is detachably fixedly provided below the bracket; An upper cover ring is detachably fixedly provided above the bracket; The main body is slidably arranged inside the upper cover ring; the upper flange is detachably fixedly arranged above the main body; the upper flange is detachably fixedly connected to the drive shaft of the external device; the upper flange and the drive shaft of the external device are detachably fixedly connected through a standard interface to realize the control of rotation and gas path, ensuring the stability and reliability of power transmission.

[0009] A positioning sealing seat is provided between the bracket and the main body; A protective seat is detachably fixed on the main body; the protective seat is slidably matched with the retaining ring; The lower end of the protective seat is detachably fixed with an airbag rubber diaphragm; the airbag rubber diaphragm can adsorb and fix the part to be ground. The airbag rubber diaphragm is set between the protective seat, the retaining ring and the bracket; the protective seat is slidably set on the main body, and the protective seat cooperates with the retaining ring to ensure smooth operation during the grinding process. The airbag rubber diaphragm is made of highly elastic, wear-resistant and corrosion-resistant materials. The part to be ground is fixed by negative pressure adsorption to achieve the transfer of grinding parts between various grinding tables and between various functional workbenches. During grinding, pressure can be applied separately to ensure stability and uniformity during the grinding process. An edge pressing block is detachably fixedly arranged on the inner side of the airbag rubber diaphragm, and the edge of the part to be ground is pressed by the edge pressing block.

[0010] A sealing ring seat is detachably fixed on the protective seat. The sealing ring seat is slidably matched with the bracket; The part to be ground may be a part with a cut edge or a notch, or other parts that require special control of the edge.

[0011] Through the above technical solution, the upper flange is fixedly connected to the drive shaft of the external device; the part to be ground can be adsorbed and fixed by the airbag rubber diaphragm. The middle part of the part to be ground is pressed by the protective seat; the edge of the part to be ground is pressed by the edge pressure block. When grinding the part to be ground with cut edges, it is prevented that the airbag membrane exceeds the thickness of the wafer and contacts the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure. The upper flange and the airbag rubber diaphragm are driven to rotate by the external device, thereby driving the part to be ground to rotate for grinding.

[0012] As an optional solution of the present invention, an outer limit ring is detachably fixed on the outer side of the airbag rubber diaphragm. The outer limit ring can further limit the displacement of the part to be ground during the grinding process, ensuring that the part to be ground always remains in the correct grinding position. At the same time, the outer limit ring can also provide additional support for the airbag rubber diaphragm to prevent it from being deformed or damaged under high pressure. The outer limit ring is made of wear-resistant and corrosion-resistant materials to ensure its stability and reliability in long-term use.

[0013] As an optional solution of the present invention, a positioning seal seat is provided between the bracket and the main body, and a rolling diaphragm is provided on the outside of the positioning seal seat; the inside of the rolling diaphragm is provided between the main body and the positioning seal seat; the outside of the rolling diaphragm is provided between the upper cover ring and the bracket, which plays a good sealing role. The rolling diaphragm is made of a material with high elasticity, wear resistance and corrosion resistance to ensure its sealing and stability for long-term use.

[0014] As an optional solution of the present invention, a plurality of drainage grooves are evenly distributed on the lower end of the retaining ring; the drainage grooves are used to discharge the grinding liquid during the grinding process of the part to be ground, and are also used to observe the degree of wear of the retaining ring.

[0015] Through the above technical solution, the drain groove is used to discharge the grinding liquid during the grinding process of the part to be ground, and is also used to observe the wear degree of the retaining ring.

[0016] As an optional solution of the present invention, the airbag rubber diaphragm is provided with a side cavity and a main cavity; A positioning protrusion is fixedly arranged on the side wall of the side cavity; a groove cooperating with the positioning protrusion is arranged on the side pressure block; The side pressure block is arranged in the side cavity and is fixed in position by means of a positioning protrusion.

[0017] An outer sealing ring and an inner sealing ring are respectively fixedly arranged on the opening side of the side cavity.

[0018] The outer limiting ring is arranged on the outer side of the side cavity.

[0019] The airbag rubber diaphragm is provided with air holes.

[0020] The protective seat is clamped with the main cavity.

[0021] Through the above technical solution, the side cavity is mainly used to accommodate the side pressure block, and the positioning protrusion cooperates with the groove on the side pressure block to achieve clamping and fixing. This design ensures the stability and accuracy of the side pressure block during the grinding process. The main cavity is used to clamp with the protective seat to provide support for the middle part of the part to be ground. The outer sealing ring and the inner sealing ring can improve the air tightness. These two layers of sealing rings together improve the air tightness of the part to be ground during the grinding process, prevent the grinding liquid and other impurities from entering the side cavity from the outside, and avoid gas leakage.

[0022] As an optional solution of the present invention, the protective seat includes a shaft rod, a round table and a pressure plate; A round table is coaxially fixedly arranged at one end of the shaft rod; a pressure plate is fixedly arranged on the round table; The shaft is provided with two sealing ring grooves for placing sealing rings. The pressure plate is provided with air grooves A, B and C from outside to inside.

[0023] An air channel is provided on the shaft rod, which is connected to the air groove A, the air groove B and the air groove C. The air channel can be connected to an external air source through a joint.

[0024] A connecting groove is provided on the pressure plate, and the connecting groove connects the air groove A, the air groove B and the air groove C; and an axis air channel is provided on the shaft rod.

[0025] Through the above technical solution, the air grooves A and C are used to adsorb and fix the parts to be ground through negative pressure; the air grooves A and C realize a function similar to a suction cup to adsorb and fix the parts to be ground; the design of multiple air grooves can make the air pressure more uniform when it is transferred to the parts to be ground. Due to the large number of air grooves, the air pressure can be distributed over a wider area, thereby avoiding the situation where the parts to be ground are subjected to excessive local force. Uniform air pressure transmission helps to ensure the stability and accuracy of the parts to be ground during the grinding process and improve the grinding quality. Multiple air grooves can form more air pressure support points, which work together to fix the parts to be ground more firmly on the pressure plate.

[0026] As an optional solution of the present invention, a pressure ring is detachably fixedly provided on the edge pressure block; the edge pressure block and the pressure ring are fixedly connected by a plurality of bolts. Both the pressure ring and the edge pressure block are annular structures.

[0027] Through the above technical solution, the edge pressure block and the airbag rubber diaphragm are fixed by the pressure ring.

[0028] As an optional solution of the present invention, the upper flange is provided with gas path A, gas path B and gas path C; Air path A is connected with the shaft airway, air groove A and air groove C; Through the cooperation of the rolling diaphragm and the sealing ring C, an air pressure chamber A is formed between the main body, the upper cover ring, the protective seat and the bracket; The side cavity of the airbag rubber diaphragm, the bracket, the protective seat and the sealing ring seat form an air pressure cavity B; The air path B is connected to the air pressure chamber A. Through the cooperation of the air pressure path and the air pressure chamber A, the upper cover ring, the protective seat and the bracket can be moved downward under the action of air squeezing.

[0029] The air path C is connected with the air pressure chamber B. The air pressure chamber B and the air pressure path cooperate to enable the edge pressure block and the air bag rubber diaphragm to press the edge of the part to be ground.

[0030] The shaft air channel, air groove A, air groove C and the main cavity form a vacuum adsorption cavity; the parts to be ground are adsorbed and fixed through the vacuum adsorption cavity and the airbag rubber diaphragm.

[0031] As an optional solution of the present invention, a sealing ring A is provided between the upper flange and the main body; A sealing ring B is arranged between the shaft and the main body of the protective seat; the sealing ring B is arranged in the sealing ring groove; An annular groove A is provided on the upper end of the truncated table of the protective seat, and a sealing ring C is arranged in the annular groove A; when the truncated table contacts the bracket, the sealing ring C can play a sealing role.

[0032] A ring groove B is provided on the sealing ring seat, and a sealing ring D is provided in the ring groove B. When the sealing ring seat contacts the bracket, the sealing ring D can play a sealing role.

[0033] A sealing ring E is arranged between the inner sealing ring and the bracket.

[0034] As an optional solution of the present invention, a wafer adsorption in place detection mechanism is detachably fixedly provided on the protective seat; the lower end of the wafer adsorption in place detection mechanism is connected to the air groove B.

[0035] The wafer adsorption detection mechanism includes a fixing plate, an overflow nozzle and a positioning bolt; The fixing plate is detachably fixed on the protection seat by means of positioning bolts; An overflow nozzle is slidably provided on the fixed plate; A spring is arranged on the overflow nozzle; a rubber ring is arranged below the spring on the overflow nozzle.

[0036] The bracket is provided with a gas path D and a gas path E; the gas path D and the gas path E are connected; One end of the gas path D corresponds to the overflow nozzle; the lower end of the gas path E is connected to the side cavity; and the upper end of the gas path E is detachably fixed with a sealing plug.

[0037] 3. Beneficial effects

[0038] One or more technical solutions provided in the technical solution of this application have at least the following technical effects or advantages: 1. The present invention presses the middle part of the part to be ground through the protective seat; and presses the edge of the part to be ground through the edge pressing block. This prevents the airbag film from exceeding the thickness of the wafer and contacting the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure when grinding the part to be ground with a cut edge. A larger pressure can be applied without causing the airbag film to exceed the thickness of the wafer and contact the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure. This can improve the removal rate and production efficiency.

[0039] 2. The edge of the part to be ground is pressed by the edge pressing block, which avoids the problem of insufficient grinding of the edge of the part to be ground when grinding the part with cut edges, thereby improving the grinding quality and yield rate.

[0040] 3. It has strong adaptability and can grind parts with cut edges. The device can adsorb, fix and grind parts with cut edges, which expands its scope of application and flexibility.

[0041] 4. The combination of the protective seat and the edge pressure block can ensure that the grinding pressure can be more evenly distributed on the surface of the part to be ground during the grinding process, especially for the part to be ground with a cutting edge notch. The edge pressure block's top pressure on the edge of the part to be ground can compensate for the uneven grinding pressure caused by the notch, reduce the inconsistency of the thickness of the surface of the part to be ground after grinding, and thus improve the flatness of the part to be ground and the quality of subsequent processes.

[0042] 5. Reduce the risk of chipping and breaking: The additional pressure on the edge of the part to be ground by the edge pressure block can effectively reduce the risk of chipping or breaking caused by uneven pressure or impact during the grinding process. This design is especially suitable for parts to be ground with cutting edges, which can significantly improve the yield of the parts to be ground and reduce production costs.

[0043] 6. Stress concentration can be dispersed: The pressure of the edge pressure block on the edge of the part to be ground not only helps to evenly distribute the grinding pressure, but also disperses the stress concentration at the notch to a certain extent. This can reduce the risk of cracks or fractures caused by stress concentration in the subsequent processing or use of the part to be ground, and also help to maintain the electrical properties of the part to be ground stable and improve the performance and reliability of the chip.

[0044] 7. The present invention uses a highly elastic, wear-resistant and corrosion-resistant material to fix the part to be ground by using the airbag rubber diaphragm, which ensures stability and uniformity during the grinding process. The softness of the airbag rubber diaphragm helps to reduce stress concentration and damage during the grinding process, and protects the integrity and performance of the part to be ground. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 It is an overall schematic diagram of a grinding device disclosed in a preferred embodiment of the present application; Figure 2 A schematic diagram of the external structure of a grinding device disclosed in a preferred embodiment of the present application; Figure 3 A schematic diagram of a retaining ring of a grinding device disclosed in a preferred embodiment of the present application; Figure 4A schematic diagram of the cooperation between the retaining ring and the airbag rubber diaphragm of the grinding device disclosed in a preferred embodiment of the present application; Figure 5 A schematic diagram of the structure of an airbag rubber diaphragm of a grinding device disclosed in a preferred embodiment of the present application; Figure 6 for Figure 5 Middle AA section view; Figure 7 A schematic diagram of a protective seat of a grinding device disclosed in a preferred embodiment of the present application; Figure 8 A schematic diagram of a wafer adsorption detection mechanism of a grinding device disclosed in a preferred embodiment of the present application being installed on a protective seat; Fig. 9 This is a schematic diagram of the structure of a wafer adsorption detection mechanism for a grinding device disclosed in a preferred embodiment of the present application.

[0046] Fig.10 A schematic diagram of a bracket of a grinding device disclosed in a preferred embodiment of the present application.

[0047] Fig.11 for Fig.10 Middle BB section view.

[0048] Reference numerals:

[0049] 1. Bracket; 2. Retaining ring; 3. Upper flange; 4. Parts to be ground; 5. Upper cover ring; 6. Main body; 7. Protective seat; 8. Airbag rubber diaphragm; 9. Side pressure block; 10. External limit ring; 11. Rolling diaphragm; 12. Positioning seal seat; 13. Pressing ring; 14. Sealing ring seat; 15. Sealing ring A; 16. Sealing ring B; 17. Sealing ring C; 18. Sealing ring D; 19. Sealing ring E; 21. Drain trough; 31. Gas path A; 32. Gas path B; 33. Gas path C; 71 , shaft; 72, round table; 73, pressure plate; 74, air groove A; 75, air groove B; 751, connecting groove; 76, air groove C; 77, sealing ring slot; 78, wafer adsorption detection mechanism; 781, fixing plate; 782, overflow nozzle; 783, spring; 784, rubber ring; 785, positioning bolt; 79, shaft airway; 81, side cavity; 82, main cavity; 83, positioning protrusion; 84, outer sealing ring; 85, inner sealing ring; 101, air path D; 102, air path E. DETAILED DESCRIPTION

[0050] The present application is further described in detail below in conjunction with the accompanying drawings.

[0051] Reference Figure 1, the embodiment of the present application provides a grinding device, including: a bracket 1, a retaining ring 2, an upper flange 3, an upper cover ring 5, a main body 6, a protective seat 7, an airbag rubber diaphragm 8, an edge pressure block 9 and a positioning sealing seat 12; A retaining ring 2 is detachably fixedly provided below the bracket 1; An upper cover ring 5 is detachably fixedly provided on the upper side of the bracket 1; The main body 6 is slidably arranged inside the upper cover ring 5; the upper flange 3 is detachably fixedly arranged above the main body 6; the upper flange 3 is detachably fixedly connected to the drive shaft of the external device; the upper flange 3 and the drive shaft of the external device are detachably fixedly connected through a standard interface (such as a flange, a chuck, etc.) to achieve power transmission, thereby ensuring the stability and reliability of power transmission.

[0052] A positioning sealing seat 12 is detachably fixedly provided on the main body 6; A protective seat 7 is slidably provided on the main body 6; the protective seat 7 is slidably matched with the retaining ring 2; The lower end of the protective seat 7 is detachably fixed with an airbag rubber diaphragm 8; the airbag rubber diaphragm 8 can adsorb and fix the part to be ground 4. The airbag rubber diaphragm 8 is arranged between the protective seat 7, the retaining ring 2 and the bracket 1; the protective seat 7 is slidably arranged on the main body 6, and the protective seat 7 cooperates with the retaining ring 2 to ensure smooth operation during the grinding process. The airbag rubber diaphragm 8 is made of highly elastic, wear-resistant and corrosion-resistant materials, and fixes the part to be ground 4 through negative pressure adsorption to ensure stability and uniformity during the grinding process. At the same time, the softness of the airbag rubber diaphragm 8 helps to reduce stress concentration and damage during the grinding process. The airbag rubber diaphragm 8 adsorbs and fixes the part to be ground 4, and achieves stable adsorption through negative pressure to ensure grinding uniformity.

[0053] The upper cover ring 5 protects the internal components, and the upper cover ring 5, the retaining ring 2, the main body 6, the protective seat 7 and the bracket 1 together form a closed space.

[0054] The inner side of the airbag rubber diaphragm 8 is detachably fixed with an edge pressing block 9. The edge of the grinding component 4 is pressed by the edge pressing block 9.

[0055] A sealing ring seat 14 is detachably fixed on the protection seat 7. The sealing ring seat 14 is slidably matched with the bracket 1; The part to be ground 4 can be a circular part to be ground with cut edges or notches.

[0056] In this technical solution, the upper flange 3 is fixedly connected to the drive shaft of the external device; the part to be ground 4 can be adsorbed and fixed by the airbag rubber diaphragm 8. The middle part of the part to be ground 4 is pressed by the protective seat 7; the edge of the part to be ground 4 is pressed by the edge pressure block 9. The upper flange 3 and the airbag rubber diaphragm 8 are driven to rotate by the external device, thereby driving the part to be ground 4 to rotate for grinding. When grinding the part to be ground with cut edges, it is avoided that the airbag membrane exceeds the thickness of the wafer and contacts the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure. A larger pressure can be applied, and there will be no problem of the airbag membrane exceeding the thickness of the wafer and contacting the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure, which can improve the removal rate and production efficiency.

[0057] Furthermore, an outer stop ring 10 is detachably fixedly provided on the outer side of the airbag rubber diaphragm 8. The outer stop ring 10 can limit the displacement of the airbag rubber diaphragm 8 during the grinding process, ensuring that the part to be ground 4 always remains in the correct grinding position. At the same time, the outer stop ring 10 can also provide additional support for the airbag rubber diaphragm 8 to prevent it from being deformed or damaged under high pressure. The outer stop ring 10 should be made of wear-resistant and corrosion-resistant materials to ensure its stability and reliability in long-term use.

[0058] Furthermore, a positioning sealing seat 12 is arranged between the bracket 1 and the main body 6, and a rolling diaphragm 11 is arranged on the outer side of the positioning sealing seat 12; the inner side of the rolling diaphragm 11 is arranged between the main body 6 and the positioning sealing seat 12; the outer side of the rolling diaphragm 11 is arranged between the upper cover ring 5 and the bracket 1, and the rolling diaphragm 11 plays a good sealing role.

[0059] The rolling diaphragm 11 is made of a material with high elasticity, wear resistance and corrosion resistance to ensure its sealing and stability for long-term use.

[0060] Reference Figure 3 and Figure 4 The lower end of the retaining ring 2 is evenly provided with a plurality of drainage grooves 21; the drainage grooves 21 are used to discharge the grinding liquid during the grinding process of the part to be ground, and are also used to observe the wear degree of the retaining ring 2. The design of the drainage grooves 21 allows the grinding liquid to be smoothly discharged from the bottom of the retaining ring 2, avoiding the degradation of the grinding effect or equipment failure caused by the accumulation of grinding liquid.

[0061] In this technical solution, the drain groove 21 is used to drain the grinding liquid during the grinding process of the part to be ground, and is also used to observe the wear degree of the retaining ring 2. When the depth of the drain groove 21 is worn to the set minimum value, it means that the retaining ring 2 has been excessively worn and needs to be replaced with a new retaining ring 2.

[0062] Reference Figure 5 and Figure 6, the airbag rubber diaphragm 8 is provided with a side cavity 81 and a main cavity 82; A positioning protrusion 83 is fixedly provided on the side wall of the side cavity 81; a groove cooperating with the positioning protrusion 83 is provided on the side pressure block 9; The side pressure block 9 is disposed in the side cavity 81 and is fixed in place by means of the positioning protrusion 83 .

[0063] An outer sealing ring 84 and an inner sealing ring 85 are fixedly disposed on the opening side of the side cavity 81 .

[0064] The outer limiting ring 10 is arranged on the outer side of the side cavity 81 .

[0065] The airbag rubber diaphragm 8 is provided with air holes 86 .

[0066] The protective seat 7 is snap-fitted to the main cavity 82 .

[0067] In this technical solution, the side cavity 81 is mainly used to accommodate the side pressure block 9, and the positioning protrusion 83 cooperates with the groove on the side pressure block 9 to achieve snap-fit ​​fixation. This design ensures the stability and accuracy of the side pressure block 9 during the grinding process. The main cavity 82 is used to snap-fit ​​with the protective seat 7 to provide support for the middle part of the part to be ground 4. The outer sealing ring 84 and the inner sealing ring 85 can improve the air tightness. These two layers of sealing rings together improve the air tightness of the part to be ground during the grinding process, prevent the grinding liquid and other impurities from entering the side cavity 81 from the outside, and avoid gas leakage.

[0068] Furthermore, the inner wall of the side cavity 81 is provided with a plurality of steps which gradually progress inward. The design purpose of these steps is to clamp the protective seat 7 to ensure its stability and position accuracy during the grinding process. Through the progressive design of multiple steps, a more stable clamping effect can be achieved to prevent the protective seat 7 from moving or falling off during the grinding process.

[0069] The upper end of the outer wall of the side cavity 81 is inclined outward: The upper end of the outer wall of the side cavity 81 is designed to be inclined outward. This design facilitates the buckling of the outer sealing ring 84 between the retaining ring 2 and the bracket 1. The inclined outer wall can provide a guide surface, making it easier for the outer sealing ring 84 to be installed in the correct position, and can better cooperate with the retaining ring 2 and the bracket 1 to achieve a good sealing effect.

[0070] Reference Figure 7 , the protection seat 7 includes a shaft 71, a round table 72 and a pressure plate 73; A truncated platform 72 is coaxially fixedly disposed on one end of the shaft 71; a pressure plate 73 is fixedly disposed on the truncated platform 72; The shaft 71 is provided with two sealing ring grooves 77 for placing sealing rings. The pressure plate 73 is provided with an air groove A 74 , an air groove B 75 and an air groove C 76 in sequence from the outside to the inside.

[0071] An air passage 78 is provided on the shaft 71. The air passage 78 is connected to the air groove A74, the air groove B75 and the air groove C76. The air passage 78 can be connected to an external air source through a joint.

[0072] The pressure plate 73 is provided with a connecting groove 751, which connects the air groove A74, the air groove B75 and the air groove C76; The shaft 71 is provided with a shaft air passage 79; In this technical solution, the air grooves A74 and C76 are used to adsorb and fix the part to be ground 4 through negative pressure; the air grooves A74 and C76 realize a function similar to a suction cup to adsorb and fix the part to be ground 4; the design of multiple air grooves can make the air pressure more uniform when it is transferred to the part to be ground. Due to the large number of air grooves, the air pressure can be distributed over a wider area, thereby avoiding the situation where the part to be ground is subjected to excessive local force. Uniform air pressure transmission helps to ensure the stability and accuracy of the part to be ground during the grinding process and improve the grinding quality. Multiple air grooves can form more air pressure support points, which work together to fix the part to be ground more firmly on the pressure plate 73. Stable fixation helps prevent the part to be ground from shifting or deforming during the grinding process, thereby ensuring the accuracy and consistency of the grinding.

[0073] Furthermore, a pressure ring 13 is detachably fixedly provided on the edge pressure block 9; preferably, the edge pressure block 9 and the pressure ring 13 are fixedly connected by a plurality of bolts. The pressure ring 13 and the edge pressure block 9 are both annular structures.

[0074] The airbag rubber diaphragm 8 can be supported and fixed by the edge pressing block 9 and the pressure ring 13, so that the part to be ground can be evenly stressed. When grinding parts with cut edges or notches, the airbag rubber diaphragm 8 can be supported and fixed by the edge pressing block 9 and the pressure ring 13, so that the airbag rubber diaphragm 8 above the cut edge or notch can remain in a horizontal state, avoiding the grinding liquid from entering between the airbag rubber diaphragm 8 and the part to be ground, and ensuring a good grinding effect. If there is no edge pressing block 9 and the pressure ring 13 to support the airbag rubber diaphragm 8, when grinding parts with cut edges or notches, the airbag rubber diaphragm 8 above the cut edge or notch will sag under the action of gravity, and the airbag rubber diaphragm 8 will be worn and damaged by the grinding head, reducing the service life.

[0075] In this technical solution, the edge pressure block 9 and the airbag rubber diaphragm 8 are fixed by a pressure ring 13 .

[0076] Furthermore, a gas path A31, a gas path B32 and a gas path C33 are provided on the upper flange 3; The air path A31 is in communication with the shaft air channel 79, the air groove A74 and the air groove C76; Through the cooperation of the rolling diaphragm 11 and the sealing ring C17, an air pressure chamber A is formed between the main body 6, the upper cover ring 5, the protective seat 7 and the bracket 1; The side cavity 81 of the airbag rubber diaphragm 8, the bracket 1, the protection seat 7 and the sealing ring seat 14 form an air pressure cavity B; The air path B32 is connected to the air pressure chamber A. The cooperation between the air pressure path 32 and the air pressure chamber A can make the upper cover ring 5, the protection seat 7 and the bracket 1 move downward under the action of air squeezing.

[0077] The air path C33 is connected to the air pressure chamber B. The air pressure chamber B and the air pressure path 32 cooperate to enable the edge pressure block 9 and the airbag rubber diaphragm 8 to press the edge of the part to be ground 4 .

[0078] The shaft air channel 79, the air groove A74, the air groove C76 and the main cavity 82 form a vacuum adsorption cavity; the part to be ground 4 is adsorbed and fixed through the vacuum adsorption cavity and the airbag rubber diaphragm 8.

[0079] Furthermore, a sealing ring A15 is provided between the upper flange 3 and the main body 6; A sealing ring B16 is provided between the shaft 71 of the protection seat 7 and the main body 6; the sealing ring B16 is provided in the sealing ring groove 77; An annular groove A is formed at the upper end of the truncated cone 72 of the protective seat 7, and a sealing ring C17 is arranged in the annular groove A; when the truncated cone 72 contacts the bracket 1, the sealing ring C17 can play a sealing role.

[0080] The sealing ring seat 14 is provided with a ring groove B, and the ring groove B is provided with a sealing ring D18. When the sealing ring seat 14 contacts the bracket 1, the sealing ring D18 can play a sealing role.

[0081] A sealing ring E19 is provided between the inner sealing ring 85 and the bracket 1 .

[0082] Reference Figure 8 , Fig. 9 , Fig.10 and Fig.11 A wafer adsorption in place detection mechanism 78 is detachably fixed on the protection seat 7; the lower end of the wafer adsorption in place detection mechanism 78 is connected to the air groove B75.

[0083] The wafer adsorption detection mechanism 78 includes a fixing plate 781, an overflow nozzle 782 and a positioning bolt 785; The fixing plate 781 is detachably fixed on the protection seat 7 by means of positioning bolts 785; An overflow nozzle 782 is slidably provided on the fixed plate 781; A spring 783 is provided on the overflow nozzle 782 ; a rubber ring 784 is provided below the spring 783 on the overflow nozzle 782 .

[0084] The bracket 1 is provided with an air path D101 and an air path E102; the air path D101 and the air path E102 are connected; one end of the air path D101 corresponds to the overflow nozzle 782; the lower end of the air path E102 is connected to the side cavity 81; the upper end of the air path E102 is detachably fixed with a sealing plug.

[0085] In this technical solution, when the airbag rubber diaphragm 8 fixes the part to be ground 4 by negative pressure adsorption, the airbag rubber diaphragm 8 contacts the lower end of the overflow nozzle 782 and gradually pushes the overflow nozzle 782 upward, so that the side cavity 81 is connected with the air groove A74, the air groove C76 and the main cavity 82, and the air pressure is uniform; the airbag rubber diaphragm 8 evenly presses various parts of the part to be ground 4 to improve the grinding effect. Maintain the gas pressure inside the device within an appropriate range. During the grinding process, the airbag rubber diaphragm 8 fixes the part to be ground 4 by negative pressure adsorption. The rubber ring 784 is used to enhance the sealing effect and prevent gas leakage, thereby improving the working efficiency and performance of the air valve 78.

[0086] The working principle of a grinding device of the present invention is as follows: first, the part to be ground 4 is placed under the airbag rubber diaphragm 8, and the protective seat 7 is moved downward by the air pressure of the external device, so that the airbag rubber diaphragm 8 contacts the part to be ground 4, and then the airbag rubber diaphragm 8 is adsorbed and fixed by the external device and the vacuum air path 31 (the pressure plate 73 presses the middle part of the part to be ground 4, and the edge part of the part to be ground 4 is pressed by the side pressure block 9); the pressure in the side cavity 81 and the main cavity 82 is different; when the airbag rubber diaphragm 8 fixes the part to be ground 4 by negative pressure adsorption, the airbag rubber diaphragm 8 contacts the lower end of the overflow nozzle 782, and gradually pushes the overflow nozzle 782 upward, and the overflow nozzle 782 is pushed upward, so that the side cavity 81 is connected with the air groove A74, the air groove C76 and the main cavity 82, and the air pressure is uniform; the airbag rubber diaphragm 8 is uniformly pressed on various parts of the part to be ground 4, so as to improve the grinding effect. The entire device and the part to be ground 4 are driven by the external device to rotate for grinding. After grinding, the part to be ground 4 is separated from the airbag rubber diaphragm 8 through the compressed air circuit 32. Since the connecting groove 751 connects the air groove A74, the air groove B75 and the air groove C76, the part to be ground 4 can be separated from the airbag rubber diaphragm 8 quickly and evenly to avoid damage to the part to be ground 4 due to uneven force during separation. It is convenient to remove the part to be ground 4 and then replace it with a new part to be ground for grinding. The combined design of the protective seat 7 and the edge pressure block 9 can ensure that during the grinding process of the part to be ground, especially for the part to be ground with a trimming notch, the grinding pressure can be more evenly distributed on the surface of the part to be ground. The top pressure of the edge pressure block 9 on the edge of the part to be ground can compensate for the uneven grinding pressure caused by the notch, reduce the inconsistent thickness of the surface of the part to be ground after grinding, and thus improve the flatness of the part to be ground and the quality of subsequent processes.

[0087] The present invention uses the airbag rubber diaphragm 8 made of highly elastic, wear-resistant and corrosion-resistant materials, and fixes the part to be ground 4 by negative pressure adsorption, thereby ensuring stability and uniformity during the grinding process. The softness of the airbag rubber diaphragm 8 helps to reduce stress concentration and damage during the grinding process, and protects the integrity and performance of the part to be ground. The edge of the part to be ground 4 is pressed by the edge pressure block 9, thereby avoiding the problem that when grinding the part to be ground with a cut edge, the airbag membrane exceeds the thickness of the wafer and contacts the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure; the grinding quality and yield rate are improved. The device has strong adaptability and can grind the part to be ground with a cut edge. The device can adsorb, fix and grind the part to be ground with a cut edge, can apply greater pressure, and will not cause the airbag membrane to exceed the thickness of the wafer or contact the grinding liquid and the grinding platform due to the failure to seal the edge or excessive pressure. The removal rate can be improved and the production efficiency can be improved. Its scope of application and flexibility are expanded.

[0088] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features thereof may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A grinding device, comprising: Bracket, retaining ring, upper flange, upper cover ring, main body, protective seat, airbag rubber diaphragm, side pressure block and positioning sealing seat; the upper flange is detachably fixedly arranged on the upper part of the main body; the characteristics are: A retaining ring is detachably fixedly provided below the bracket; an upper cover ring is detachably fixedly provided above the bracket; a main body is slidably provided inside the upper cover ring; a positioning sealing seat is provided between the bracket and the main body; A protective seat is detachably fixed on the main body; the protective seat is slidably matched with the retaining ring; An airbag rubber diaphragm is detachably fixedly arranged below the protection seat; an edge pressure block is detachably fixedly arranged inside the airbag rubber diaphragm; a sealing ring seat is detachably fixedly arranged on the protection seat; and the sealing ring seat is slidably matched with the bracket.

2. The grinding device according to claim 1, characterized in that: A positioning seal seat is detachably fixedly arranged below the main body, and a rolling diaphragm is arranged on the outer side of the positioning seal seat; the inner side of the rolling diaphragm is arranged between the main body and the positioning seal seat; the outer side of the rolling diaphragm is arranged between the upper cover ring and the bracket to play a sealing role.

3. The grinding device according to claim 1, characterized in that: The airbag rubber diaphragm is provided with a side cavity and a main cavity; A positioning protrusion is fixedly arranged on the side wall of the side cavity; a groove cooperating with the positioning protrusion is arranged on the side pressure block; the side pressure block is arranged in the side cavity and is fixedly positioned by the positioning protrusion; An outer sealing ring and an inner sealing ring are respectively fixedly arranged on the opening side of the side cavity; an outer limiting ring is arranged on the outer side of the side cavity; and a protective seat is clamped with the main cavity.

4. The grinding device according to claim 1, characterized in that: The protective seat comprises a shaft rod, a round table and a pressure plate; A round table is coaxially fixedly arranged at one end of the shaft rod; a pressure plate is fixedly arranged on the round table; The shaft is provided with a sealing ring groove; the pressure plate is provided with air grooves A, B and C from the outside to the inside in sequence; An air channel is provided on the shaft; the air channel is connected with the air groove A, the air groove B and the air groove C; A connecting groove is provided on the pressure plate, and the connecting groove connects the air groove A, the air groove B and the air groove C; and an axis air channel is provided on the shaft rod.

5. The grinding device according to claim 1, characterized in that: A pressure ring is detachably fixedly arranged on the edge pressure block.

6. The grinding device according to claim 5, characterized in that: The pressure ring and the edge pressure block are both annular structures.

7. The grinding device according to claim 4, characterized in that: Gas path A, gas path B and gas path C are arranged on the upper flange; gas path A is connected with the shaft gas channel, gas groove A and gas groove C; Through the cooperation of the rolling diaphragm and the sealing ring C, the main body, the upper cover ring, the protective seat and the bracket form an air pressure chamber A; the side cavity of the airbag rubber diaphragm and the bracket, the protective seat and the sealing ring seat form an air pressure chamber B; Gas path B is connected to air pressure chamber A; gas path C is connected to air pressure chamber B; The axial air channel, air groove A, air groove C and the main cavity constitute a vacuum adsorption cavity.

8. The grinding device according to claim 1, characterized in that: The protective seat is detachably fixed with a wafer adsorption in place detection mechanism; The wafer adsorption detection mechanism comprises a fixing plate, an overflow nozzle and a positioning bolt; the fixing plate is detachably fixed on the protective seat by the positioning bolt; the overflow nozzle is slidably arranged on the fixing plate; A spring is arranged on the overflow nozzle; a rubber ring is arranged below the spring on the overflow nozzle.

9. The grinding device according to claim 3, characterized in that: The airbag rubber diaphragm is made of a highly elastic, wear-resistant and corrosion-resistant material; the inner wall of the side cavity is provided with a plurality of steps which gradually progress inward; and the upper end of the outer wall of the side cavity is inclined outward.

10. The grinding device according to claim 8, characterized in that: The lower end of the retaining ring is evenly provided with a plurality of drainage grooves; the bracket is provided with a gas path D and a gas path E; the gas path D and the gas path E are connected; One end of the gas path D corresponds to the overflow nozzle; the lower end of the gas path E is connected to the side cavity; and the upper end of the gas path E is detachably fixed with a sealing plug.

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