Single crystal furnace vacuum pipeline inner wall cleaning device and use method

Abstract

The invention belongs to the technical field of monocrystalline silicon production and manufacturing, and relates to a single crystal furnace vacuum pipeline inner wall cleaning device which comprises an adjusting rod and a plurality of cleaning assemblies connected with the adjusting rod, the peripheries of the cleaning assemblies make contact with the inner wall of a vacuum pipeline, and the cleaning assemblies can be driven to rotate by driving the adjusting rod. And the inner wall of the vacuum pipeline is cleaned. The vacuum pipeline cleaning device has the beneficial effects that the cleaning brush making contact with the inner wall of the vacuum pipeline is arranged, and cleaning is rapidly conducted through rotation of the cleaning brush; the flow guide plate and the cleaning brush are sequentially arranged in the airflow direction, so that airflow cannot directly act on the cleaning brush when the cleaning brush cleans attachments, the flow speed of the airflow cannot be affected, the opening degree of a throttling valve in the single crystal growth process cannot be affected, and then the problem that crystallization and quality are affected is solved.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal silicon production and manufacturing, and relates to a single crystal furnace vacuum pipeline inner wall cleaning device and a use method. Background Art

[0002] A single crystal furnace is a device that uses a heater and multiple thermal field components in an inert gas environment to melt silicon materials into a high-temperature liquid state, and grows single crystals without dislocations by using the Czochralski method. The existing single crystal furnace structure includes a main furnace chamber, a sub-chamber, a lifting mechanism, a vacuum pump, a gas pipeline device, etc. The vacuum pump mainly includes a vacuum pipe and a vacuum pump, and the vacuum pipe connects the vacuum pump and the single crystal furnace. During the single crystal growth process, the generated gas will be adsorbed on the inner wall of the vacuum pipe, especially the corners of the vacuum pipe are more prone to accumulation of attachments. If it is not cleaned in time, the vacuum pipe will be blocked, affecting the growth of the single crystal. Therefore, a single crystal furnace vacuum pipe inner wall cleaning device and a method of use are needed to solve the above technical problems. Summary of the invention

[0003] In order to solve the above-mentioned technical problems, the present invention provides a single crystal furnace vacuum pipe inner wall cleaning device and use method, which can quickly clean the attachments on the inner wall of the vacuum pipe and reduce the abnormal single crystal growth caused by the blockage and obstruction of the vacuum pipe.

[0004] The technical solution adopted by the present invention is: a single crystal furnace vacuum pipe inner wall cleaning device and a method of use, characterized in that: it includes an adjusting rod and multiple groups of cleaning components connected to the adjusting rod, and the periphery of the cleaning component is in contact with the inner wall of the vacuum pipe, and driving the adjusting rod can drive the cleaning component to rotate to clean the inner wall of the vacuum pipe.

[0005] Furthermore, the cleaning assembly includes a connecting rod, a cleaning brush, a guide plate and a fixed plate, the two ends of the connecting rod are respectively connected to the adjusting rod and the fixed plate, the cleaning brush is in contact with the inner wall of the vacuum pipe, and the guide plate and the cleaning brush are arranged on the same side of the fixed plate along the airflow direction so that the airflow passes through the guide plate without directly acting on the cleaning brush.

[0006] Furthermore, the guide plate is an arc-shaped plate, which forms a certain angle with the cleaning brush, and the length of the connecting rod is adjustable so that the distance between the cleaning brush and the adjusting rod can be adjusted.

[0007] Furthermore, a guide piece is wrapped around the outer side of the adjusting rod, which is connected to the connecting rod through the guide piece. Driving the guide piece can drive the cleaning assembly to move along the length direction of the adjusting rod.

[0008] Furthermore, the adjusting rod is provided with an inwardly recessed slide groove, and the inner side of the guide member is provided with a protrusion matching the slide groove, and the protrusion can be displaced along the slide groove, thereby driving the cleaning component to move.

[0009] Furthermore, a limiting member is provided between the guide member and the adjusting rod to limit the relative displacement between the two.

[0010] Furthermore, the guide member is rotatably connected to the connecting rod.

[0011] Furthermore, a supporting portion is provided at the end of the connecting rod away from the fixing plate, and the supporting portion is supported against the outer wall of the adjusting rod.

[0012] Furthermore, the end of the adjusting rod away from the guide member is connected to the output end of the motor.

[0013] The method for using the above-mentioned single crystal furnace vacuum pipeline inner wall cleaning device is characterized by comprising the following steps:

[0014] Adjusting the relative position between the adjusting rod and the guide member, and the length of the connecting rod, so that the cleaning brush contacts the inner wall of the vacuum pipe;

[0015] According to the opening of the furnace throttle valve, the matching rotation speed of the regulating rod is selected to drive the cleaning brush to clean the inner wall of the vacuum pipe, and the information is fed back to the furnace in time.

[0016] The present invention designs a single crystal furnace vacuum pipe inner wall cleaning device and a use method, wherein a cleaning brush in contact with the inner wall of the vacuum pipe is provided, and cleaning is performed quickly by rotating the cleaning brush; a guide plate and a cleaning brush are sequentially arranged along the airflow direction, so that when the cleaning brush cleans attachments, the airflow will not directly act on the cleaning brush, and will not affect the flow rate of the airflow, nor the opening of the throttle valve during the single crystal growth process, thereby improving the problems affecting crystallization and quality; a guide member and an adjustable connecting rod are provided, and the two cooperate with each other, so that the contact force and contact position of the cleaning brush with the inner wall can be flexibly adjusted, and the applicability is stronger; the fixed plate is rotatably connected to the connecting rod, and can be adjusted according to the type and size of the pipe, so that the cleaning brush is always in contact with the inner wall of the pipe, and a variety of pipe structures can be cleaned; the connecting rod abuts against the outer wall of the adjusting rod through the supporting portion, so that the connection between the cleaning component and the adjusting rod is more stable and firm, thereby increasing the stability and safety during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of an embodiment provided by the present invention;

[0018] Figure 2 is a schematic diagram of the connection between the guide plate and the fixing plate of an embodiment provided by the present invention;

[0019] Figure 3 It is a schematic diagram of the structure of the embodiment provided by the present invention when in use.

[0020] In the figure:

[0021] 1. Adjusting rod; 11. Slide; 2. Cleaning assembly; 21. Connecting rod; 22. Cleaning brush; 23. Guide plate; 24. Fixing plate; 25. Adjusting assembly; 251. First screw; 252. Sleeve; 253. Second screw; 3. Vacuum pipe; 4. Guide. DETAILED DESCRIPTION

[0022] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0023] Reference Figure 1 As shown, a single crystal furnace vacuum pipeline inner wall cleaning device is characterized in that it includes an adjusting rod 1 and a plurality of cleaning components 2 connected to the adjusting rod 1, and the periphery of the cleaning components 2 is in contact with the inner wall of the vacuum pipeline 3, and the adjusting rod 1 is driven to drive the cleaning components 2 to rotate to clean the inner wall of the vacuum pipeline 3. In this embodiment, Figure 3 As shown, the cleaning component 2 is placed at the corner of the vacuum pipe. The cleaning component 2 is connected to the vacuum pipe through the adjusting rod 1. The adjusting rod 1 can be driven to drive the cleaning component 2 to rotate to clean the inner wall. The attachments on the inner wall of the vacuum pipe 3 can be quickly cleaned, and the abnormal single crystal growth caused by the blockage and obstruction of the vacuum pipe can be reduced.

[0024] Preferably, the cleaning assembly 2 includes a connecting rod 21, a cleaning brush 22, a guide plate 23 and a fixed plate 24, the two ends of the connecting rod 21 are respectively connected to the adjusting rod 1 and the fixed plate 24, the cleaning brush 22 is in contact with the inner wall 3 of the vacuum pipe, and the guide plate 23 and the cleaning brush 22 are arranged on the same side of the fixed plate 24 along the airflow direction, so that the airflow passes through the guide plate 23 without directly acting on the cleaning brush 22. In this embodiment, as Figure 2 As shown, the guide plate 23 and the cleaning brush 22 are arranged along the direction of the airflow. When the airflow passes through the corner of the vacuum pipe 3, it acts on the guide plate 23 instead of directly acting on the cleaning brush 22, so that the cleaning brush 22 will not affect the flow rate of the airflow while cleaning the attachments on the inner wall, nor will it affect the opening of the throttle valve during the single crystal growth process, thereby improving the problems affecting crystal formation and quality.

[0025] When it is necessary to clean a straight pipe section, the fixing plate 24 and the connecting rod 21 are arranged vertically, and the central axis of the adjusting rod 1 coincides with the central axis of the pipe.

[0026] When in use, by adjusting the position of the guide member 4 on the adjusting rod 1 and the length of the connecting rod 21, the rotation speed of the adjusting rod 1 can be matched with the opening of the throttle valve, so that the cleaning brush 22 can clean the inner wall at a suitable rotation speed and force, thereby reducing the abnormal single crystal growth caused by the blockage and obstruction of the vacuum pipeline.

[0027] Preferably, the cleaning components 2 are evenly distributed along the circumference of the adjusting rod 1 .

[0028] Preferably, the fixing plate 24 is rotatably connected to the connecting rod 21. Figure 3 As shown, the fixing plate 24 is rotated so that the cleaning brush 22 can contact different inner walls of the pipes, which can be straight pipes or corners of the pipes, and can be cleaned. It should be noted that the rotation connection between the fixing plate 24 and the connecting rod 21 is common knowledge in the art and a common structure in the prior art, and will not be elaborated in detail here.

[0029] Preferably, the guide plate 23 is an arc-shaped plate, which forms a certain angle with the cleaning brush 23. Figure 2 As shown, the inner arc surface of the guide plate 23 faces the direction of the airflow, and the guide plate 23 is connected to the fixed plate 24 through a plurality of adjustment components 25. The adjustment component 25 includes a first screw 251, a sleeve 252, and a second screw 253. The left side of the first screw 251 is connected to the guide plate 23, and the right side is connected to the second screw 253 through the sleeve 252. The end of the second screw 253 away from the sleeve 252 is connected to the fixed plate 24. The first screw 251 and the second screw 253 are both rotatably connected to the sleeve 252. Adjusting the length of the first screw 251 or the second screw 253 inserted into the sleeve 252 can change the angle between the guide plate 23 and the fixed plate 24, and then change the angle between the guide plate 23 and the cleaning brush 23, so that the angle of the guide plate 23 can be adjusted. The user can adjust it according to the actual direction of the airflow, which is more flexible. It should be noted that the guide plate 23 and the fixed plate 24 can also be connected by a bidirectional screw, which is not specifically limited here, as long as the same function can be achieved.

[0030] Preferably, the length of the connecting rod 21 is adjustable so that the distance between the cleaning brush 22 and the adjusting rod 1 is adjustable. In this embodiment, the adjusting rod 1 is provided with four cleaning assemblies 2 in the circumference, and the cleaning brush 21 is connected to the adjusting rod 1 through the connecting rod 21. The length of each connecting rod 21 is adjustable, so that the distance between the cleaning brush 22 and the adjusting rod 1 is adjustable. The user can adjust it according to the actual application, which can be applied to multiple scenes. It should be noted that the adjusting rod 1 and the connecting rod 21 are telescopic rods, and their lengths can be changed. This is common knowledge in the art and a common structure in the prior art, which will not be elaborated in depth here.

[0031] Preferably, the outer side of the adjusting rod 1 is wrapped with a guide member 4, which is connected to the connecting rod 21 through the guide member 4. Driving the guide member 4 can drive the cleaning assembly 2 to move along the length direction of the adjusting rod 1. The movement of the guide member 4 drives the cleaning assembly 2 to move, so that the position of the cleaning assembly 2 on the adjusting rod 1 can be adjusted. The guide member 4 cooperates with the connecting rod 21, so that the positioning of the cleaning assembly 2 is more extensive, and it can be applied to the cleaning of the inner wall of pipes of various calibers.

[0032] Preferably, an inwardly recessed slide groove 11 is provided on the adjusting rod 1, and a protrusion matching the slide groove 11 is provided on the inner side of the guide member 4. The protrusion can be displaced along the slide groove 11, thereby driving the cleaning assembly 2 to displace.

[0033] Preferably, a limiter 5 is provided between the guide member 4 and the adjusting rod 1 to limit the relative displacement of the two. In this embodiment, the limiter 5 is a positioning pin. When in use, the positioning pin is inserted into the through holes on the guide member 4 and the adjusting rod 1 at the same time to fix the two to each other. When the relative position between the two needs to be adjusted, the positioning pin can be taken out. The technical solution of this application does not specifically limit the number, position and size of the through holes, and the number, size and position of the positioning pins, as long as the same function can be achieved.

[0034] Preferably, the guide member 4 is rotatably connected to the connecting rod 21 .

[0035] Preferably, the guide member 4 is provided with a plurality of threaded holes in the circumferential direction, and the number of the threaded holes is the same as the number of the connecting rods 21 .

[0036] Preferably, a support portion is provided at the end of the connecting rod 21 away from the fixing plate 24, and the end away from the connecting rod 21 is pressed against the outer wall of the adjusting rod 1. In this embodiment, the connecting rod 21 is threadedly connected to the guide member 4, and the guide member 4 is provided with four built-in threaded holes. The support portion passes through the threaded holes and presses against the outer wall of the adjusting rod 1, which also makes the connection between the cleaning assembly 2 and the adjusting rod 1 more stable and firm, and increases the stability and safety during use.

[0037] Preferably, the end of the adjusting rod 1 away from the guide member 4 is connected to the output end of the motor.

[0038] The method for using the above-mentioned single crystal furnace vacuum pipeline inner wall cleaning device is characterized by comprising the following steps:

[0039] Adjust the relative position between the adjusting rod 1 and the guide member 4, and the length of the connecting rod 21, so that the cleaning brush 22 contacts the inner wall of the vacuum pipe 3;

[0040] According to the opening of the furnace throttle valve, a matching rotation speed of the regulating rod 1 is selected to drive the cleaning brush 22 to clean the inner wall of the vacuum pipe 3, and the information is fed back to the furnace in a timely manner.

[0041] When in use, adjust the relative position between the adjusting rod 1 and the guide member 4, the angle between the fixing plate 24 and the connecting rod 21, and the length of the connecting rod 21 so that the cleaning brush 22 contacts the inner wall of the vacuum pipe 3. Then, turn on the motor according to the opening of the throttle valve of the furnace table, select the matching speed of the adjusting rod 1, so as to drive the cleaning brush 22 to clean the inner wall of the vacuum pipe 3, and feed back the information to the furnace table in time.

[0042] The present invention designs a single crystal furnace vacuum pipe inner wall cleaning device and a use method, wherein a cleaning brush in contact with the inner wall of the vacuum pipe is provided, and cleaning is performed quickly by rotating the cleaning brush; a guide plate and a cleaning brush are sequentially arranged along the airflow direction, so that when the cleaning brush cleans attachments, the airflow will not directly act on the cleaning brush, and will not affect the flow rate of the airflow, nor the opening of the throttle valve during the single crystal growth process, thereby improving the problems affecting crystallization and quality; a guide member and an adjustable connecting rod are provided, and the two cooperate with each other, so that the contact force and contact position of the cleaning brush with the inner wall can be flexibly adjusted, and the applicability is stronger; the fixed plate is rotatably connected to the connecting rod, and can be adjusted according to the type and size of the pipe, so that the cleaning brush is always in contact with the inner wall of the pipe, and a variety of pipe structures can be cleaned; the connecting rod abuts against the outer wall of the adjusting rod through the supporting portion, so that the connection between the cleaning component and the adjusting rod is more stable and firm, thereby increasing the stability and safety during use.

[0043] The embodiments of the present invention are described in detail above, but the contents described are only preferred embodiments of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A single crystal furnace vacuum pipeline inner wall cleaning device, characterized in that: It comprises an adjusting rod and a plurality of cleaning components connected to the adjusting rod, wherein the periphery of the cleaning components contacts the inner wall of the vacuum pipe, and the adjusting rod can be driven to drive the cleaning components to rotate so as to clean the inner wall of the vacuum pipe.

2. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 1 is characterized in that: The cleaning assembly includes a connecting rod, a cleaning brush, a guide plate and a fixed plate, the two ends of the connecting rod are respectively connected to the adjusting rod and the fixed plate, the cleaning brush is in contact with the inner wall of the vacuum pipe, and the guide plate and the cleaning brush are arranged on the same side of the fixed plate along the airflow direction so that the airflow passes through the guide plate without directly acting on the cleaning brush.

3. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 2 is characterized in that: The guide plate is an arc-shaped plate, which forms a certain angle with the cleaning brush. The length of the connecting rod is adjustable so that the distance between the cleaning brush and the adjusting rod can be adjusted.

4. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 2 or 3, characterized in that: The outer side of the adjusting rod is wrapped with a guide piece, which is connected to the connecting rod through the guide piece. Driving the guide piece can drive the cleaning assembly to move along the length direction of the adjusting rod.

5. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 4 is characterized in that: The adjusting rod is provided with an inwardly recessed sliding groove, and the inner side of the guide member is provided with a protrusion matching the sliding groove. The protrusion can be displaced along the sliding groove, thereby driving the cleaning component to move.

6. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 5, characterized in that: A limiting member is provided between the guide member and the adjusting rod to limit the relative displacement between the two.

7. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 5, characterized in that: The guide member is rotatably connected to the connecting rod.

8. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 7, characterized in that: The end of the connecting rod away from the fixing plate is provided with a supporting portion which abuts against the outer wall of the adjusting rod.

9. The single crystal furnace vacuum pipeline inner wall cleaning device according to claim 8, characterized in that: The end of the adjusting rod away from the guide member is connected to the output end of the motor.

10. A method for using the single crystal furnace vacuum pipeline inner wall cleaning device according to any one of claims 5 to 9, characterized in that: The following steps are included: Adjusting the relative position between the adjusting rod and the guide member, and the length of the connecting rod, so that the cleaning brush contacts the inner wall of the vacuum pipe; According to the opening of the furnace throttle valve, the matching speed of the regulating rod is selected to drive the cleaning brush to clean the inner wall of the vacuum pipe, and the information is fed back to the furnace in time.

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