Upper polishing head transmission pressurizing structure of polishing machine equipment

Abstract

The upper polishing head transmission pressurizing structure of the polishing machine equipment comprises a lifting mechanism, an upper support is connected to the lifting mechanism in a liftable mode, an upper disc shaft assembly is arranged on the upper support in a sliding mode, the lower end of the upper disc shaft assembly is connected with an upper disc assembly, the upper end of the upper disc shaft assembly is connected with a cylinder rod end of an air cylinder, and the upper disc shaft assembly is used for driving the upper disc assembly to pressurize. According to the structure, the upper polishing head lifting and pressurizing structure can be separated, the pressurizing stability is improved, the equipment machining precision is guaranteed, and the equipment operation working space is increased.

Description

Technical Field

[0001] The invention relates to the field of polishing equipment, in particular to an upper polishing head transmission pressurizing structure of a polishing machine equipment. Background Art

[0002] Single-side polishing machines are currently the main equipment for processing hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, electronic-grade silicon, and sapphire. As the size of workpieces becomes larger and larger, the size of workpiece carriers also becomes larger and larger, and the processing accuracy becomes higher and higher, which requires the stability of the pressurization pressure during the processing. The existing polishing equipment realizes the pressurization and lifting functions of the upper polishing head, which all rely on the same cylinder, making the pressurization pressure unstable. Summary of the invention

[0003] The purpose of the present invention is to overcome the problems existing in the prior art and provide an upper polishing head transmission pressurizing structure for a polishing machine equipment, which is used to separate the pressurizing and lifting functions of the upper polishing head, improve the stability of the pressurizing pressure, ensure the processing accuracy of the equipment, and at the same time increase the space size of the equipment processing area.

[0004] In order to achieve the above technical objectives and the above technical effects, the present invention is implemented through the following technical solutions: A transmission and pressurizing structure for an upper polishing head of a polishing machine device comprises a lifting mechanism, to which an upper bracket is liftably connected, an upper disc shaft assembly is slidably provided on the upper bracket, the lower end of the upper disc shaft assembly is connected to an upper disc assembly, and the upper end is connected to a cylinder rod end of a cylinder for driving the upper disc assembly for pressurization.

[0005] Furthermore, the lifting mechanism includes an upper platform, on which a motor screw assembly and a linear slide rail are vertically arranged, and the motor screw assembly drives the upper bracket to vertically lift and lower along the linear slide rail.

[0006] Furthermore, the motor screw assembly is connected to and drives a slider portion on the linear slide rail, and the slider portion on the linear slide rail is fixedly connected to the upper bracket and slides along the linear slide rail together.

[0007] Furthermore, the motor screw assembly and the linear slide rail are vertically arranged on the side of the upper platform.

[0008] Furthermore, the cylinder body end of the cylinder is fixedly connected to the upper bracket.

[0009] The beneficial effects of the present invention are: The structure of the present invention can realize the separation of the upper blasting head lifting and the pressurizing structure, improve the pressurizing stability, ensure the processing accuracy of the equipment, and increase the equipment operation work space. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a structural schematic diagram of the present invention.

[0011] Explanation of the numbers in the figure: 1. Upper platform; 2. Motor screw assembly; 3. Linear guide rail; 4. Cylinder; 5. Upper bracket; 6. Upper plate assembly; 7. Upper plate shaft assembly. DETAILED DESCRIPTION

[0012] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0013] like Figure 1 As shown, an upper polishing head transmission pressurizing structure of a polishing machine equipment includes a lifting mechanism, on which an upper bracket 5 is liftably connected, and an upper disk shaft assembly 7 is slidably provided on the upper bracket 5. The lower end of the upper disk shaft assembly 7 is connected to an upper disk assembly 6, and the upper end is connected to the cylinder rod end of a cylinder 4 for driving the upper disk assembly 6 for pressurization.

[0014] The lifting mechanism includes an upper platform 1, which can be fixed to a corresponding frame. A motor screw assembly 2 and a linear slide rail 3 are vertically arranged on the upper platform 1. The motor screw assembly 2 drives the upper bracket 5 to vertically lift and lower along the linear slide rail 3.

[0015] The motor screw assembly 2 is connected to and drives the slider portion on the linear slide rail 3 . The slider portion on the linear slide rail 3 is fixedly connected to the upper bracket 5 and slides along the linear slide rail 3 together.

[0016] The motor screw assembly 2 and the linear guide rail 3 are vertically arranged on the side of the upper platform 1 .

[0017] The cylinder body end of the cylinder 4 is fixedly connected to the upper bracket 5 .

[0018] Working process and principle of the present invention In the present invention, the up and down lifting of the entire upper polishing head is achieved by the motor screw assembly 2 driving the upper bracket 5. When the upper disk assembly 6 falls on the polishing workpiece, the cylinder rod end of the cylinder 4 moves, and the upper disk assembly 6 is driven by the upper disk shaft assembly 7 to realize the pressurization function.

[0019] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A transmission and pressurizing structure for an upper polishing head of a polishing machine, characterized in that: The invention comprises a lifting mechanism, wherein an upper bracket (5) is connected to the lifting mechanism in a liftable manner, an upper plate shaft assembly (7) is slidably provided on the upper bracket (5), the lower end of the upper plate shaft assembly (7) is connected to the upper plate assembly (6), and the upper end is connected to the cylinder rod end of the cylinder (4), which is used to drive the upper plate assembly (6) to apply pressure.

2. The upper polishing head transmission pressure structure of the polishing machine equipment according to claim 1 is characterized in that: The lifting mechanism comprises an upper platform (1), on which a motor screw assembly (2) and a linear slide rail (3) are vertically arranged, and the motor screw assembly (2) drives an upper bracket (5) to vertically lift and lower along the linear slide rail (3).

3. The upper polishing head transmission pressure structure of the polishing machine equipment according to claim 2 is characterized in that: The motor screw assembly (2) is connected to and drives a slider portion on the linear slide rail (3); the slider portion on the linear slide rail (3) is fixedly connected to an upper bracket (5) and slides along the linear slide rail (3) together.

4. The upper polishing head transmission pressure structure of the polishing machine equipment according to claim 3 is characterized in that: The motor screw assembly (2) and the linear slide rail (3) are vertically arranged on the side of the upper platform (1).

5. The upper polishing head transmission pressurizing structure of the polishing machine equipment according to claim 1 is characterized in that: The cylinder body end of the cylinder (4) is fixedly connected to the upper bracket (5).

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