Furnace body and reaction furnace
By using a combination of heat transfer pipes and heating parts in the furnace body and using external gas for cooling, the problem of low cooling efficiency in the prior art is solved, and more efficient temperature control and process adaptability are achieved.
Patent Information
- Application Number
- CN202411686260.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-02-14
AI Technical Summary
In the prior art, the furnace body cooling efficiency of the reactor is low and cannot quickly meet the temperature requirements of different preparation processes.
A furnace body is designed, which is connected to the cavity using a heat transfer pipe, and a heating piece is provided on the heat transfer pipe. The first end of the heat transfer pipe is connected to the outside world and the second end is connected to the air extraction device to allow the outside gas to pass through. Heat transfer pipes to cool the furnace body.
Through this design, the cooling efficiency of the heat transfer pipe and heating parts is improved, thereby improving the overall cooling efficiency of the furnace body and responding to the temperature requirements of different processes more quickly.
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Figure CN119436839A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor and photovoltaic technology, and in particular to a furnace body and a reaction furnace. Background Art
[0002] At present, in the semiconductor and photovoltaic industries, different temperature conditions are usually required for different preparation processes. At present, the industry usually sets a heating element on the furnace body of the reactor to heat the furnace body. However, since different preparation processes require different temperature conditions, it is necessary for the furnace body to be able to cool down quickly.
[0003] However, the furnace body in the related art usually adopts a natural cooling method to cool the furnace body, resulting in low cooling efficiency of the furnace body. Summary of the invention
[0004] In view of this, an embodiment of the present application provides a furnace body and a reaction furnace, which solves the problem of low cooling efficiency of the furnace body.
[0005] In the first aspect, an embodiment of the present application provides a furnace body, comprising: a cavity having a chamber; at least one heat transfer tube connected to the cavity and arranged in the chamber; at least one heating element, the heating element being arranged in the heat transfer tube, and the heating element being configured to provide heat for the cavity; wherein the first end of the heat transfer tube is connected to the outside, and the second end of the heat transfer tube can be connected to an exhaust device, so that the outside gas passes through the heat transfer tube to cool the furnace body.
[0006] In combination with the first aspect, in certain implementations of the first aspect, the cavity includes an annular side wall, which encloses the chamber; there are multiple heat transfer tubes, which extend along the extension direction of the annular side wall and are arranged in sequence along the surrounding direction of the annular side wall; there are multiple heating elements, and each of the heat transfer tubes accommodates at least one heating element.
[0007] In combination with the first aspect, in certain implementations of the first aspect, the cavity also includes a cavity end, and the cavity end is connected to one end of the annular side wall and closes one end of the annular side wall; wherein the furnace body also includes: an air collecting hood, which is sealed and fastened to the side of the cavity end away from the annular side wall to form an air collecting chamber, and the air collecting chamber is connected to the exhaust device, wherein the second end of the heat transfer tube passes through the cavity end and is connected to the air collecting chamber.
[0008] In combination with the first aspect, in certain implementations of the first aspect, the furnace body also includes: at least one auxiliary air cooling pipe, the auxiliary air cooling pipe is connected to the cavity and is arranged in the chamber, the first end of the auxiliary air cooling pipe is connected to the outside, and the second end of the auxiliary air cooling pipe passes through the end of the cavity and is connected to the wind collecting chamber.
[0009] In combination with the first aspect, in certain implementations of the first aspect, the heating element includes: a heating wire, the heating wire is wound into a spiral structure with a through hole, the through hole extends along the extension direction of the heat transfer tube, wherein external gas can flow through the through hole.
[0010] In combination with the first aspect, in certain implementations of the first aspect, the annular side wall has at least one medium channel, and both ends of the medium channel are connected to the outer surface of the annular side wall so that both ends of the medium channel can be connected to a liquid source device, and the liquid source device is configured to input cooling medium into one end of the medium channel and receive the cooling medium output from the other end of the medium channel.
[0011] In combination with the first aspect, in some implementations of the first aspect, there are multiple medium channels, and the multiple medium channels are arranged in sequence along the circumferential direction of the annular side wall.
[0012] In combination with the first aspect, in certain implementations of the first aspect, the annular side wall has a plurality of air inlets, and the plurality of air inlets are sequentially arranged along a circumferential direction of the annular side wall and sequentially arranged along an extending direction of the annular side wall.
[0013] In a second aspect, an embodiment of the present application provides a reaction furnace, comprising: the furnace body described in the first aspect; an exhaust device connected to the second end of the heat transfer tube of the furnace body, and configured to extract the gas in the heat transfer tube to cool the furnace body.
[0014] In combination with the second aspect, in certain implementations of the second aspect, the reaction furnace further includes: a water cooling plate connecting the second end of the heat transfer tube and the exhaust device, and configured to cool the gas flowing out of the heat transfer tube.
[0015] The furnace body provided in the embodiment of the present application includes a cavity, a heat transfer tube and a heating element. The heat transfer tube is connected to the cavity, and the heating element is arranged on the heat transfer tube. The first end of the heat transfer tube is connected to the outside world, and the second end of the heat transfer tube can be connected to the exhaust device, so that the external gas passes through the heat transfer tube and directly contacts the heating element in the heat transfer tube, so as to take away the heat of the heat transfer tube and the heating element in time, so as to improve the cooling efficiency of the heat transfer tube and the heating element, thereby improving the cooling efficiency of the furnace body.
[0016] In addition, the furnace body provided in the embodiment of the present application utilizes the heat transfer tube as the cooling air duct, and no additional cooling air duct is required, so the structure is simple. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0018] Figure 1 Shown is a schematic diagram of the explosion structure of a furnace body provided in one embodiment of the present application.
[0019] Figure 2 Shown is a cross-sectional view of a furnace body provided in one embodiment of the present application.
[0020] Figure 3 Shown Figure 2 A partial enlarged view of the furnace body in area A is shown.
[0021] Figure 4 Shown is a schematic structural diagram of a heat transfer tube, a heating element and an exhaust device provided in one embodiment of the present application.
[0022] Figure 5 Shown is a top view of a furnace body provided in one embodiment of the present application.
[0023] Figure 6 Shown is a schematic structural diagram of a reactor provided in one embodiment of the present application.
[0024] Figure 7 Shown is a bottom view of a furnace body provided in one embodiment of the present application.
[0025] Figure 8 Shown Figure 7 A partial enlarged view of the furnace body in area B is shown.
[0026] Fig. 9 Shown is a cross-sectional view of a heat transfer tube and a heating wire provided in one embodiment of the present application.
[0027] Fig.10 Shown is a side view of a furnace body provided in one embodiment of the present application.
[0028] Fig.11 Shown is a schematic structural diagram of a flow-uniforming component and an end insulation component provided in one embodiment of the present application.
[0029] Fig.12 Shown is a cross-sectional view of a flow equalizer and an air intake pipe provided in one embodiment of the present application.
[0030] Fig.13 Shown is a bottom view of a flow uniforming assembly provided in one embodiment of the present application.
[0031] Reference numerals:
[0032] 1. Reactor; 10. Furnace body; 100. Cavity; 110. Annular side wall; 1101. Medium channel; 1111. One end of the medium channel; 1121. The other end of the medium channel; 1102. Air inlet; 1103. Replacement port; 120. End of cavity; 1001. Chamber; 200. Heat transfer tube; 201. First end of heat transfer tube; 202. Second end of heat transfer tube; 300. Heating element; 310. Heating wire; 301. Through hole; 400. Wind collecting cover; 401. Wind collecting chamber; 402. Wind collecting channel; 403. Wind collecting port; 50 0. Auxiliary air-cooling pipe; 501. First end of auxiliary air-cooling pipe; 502. Second end of auxiliary air-cooling pipe; 600. Side wall insulation assembly; 610. Side wall insulation member; 700. Chamber door; 800. Fixing member; 900. Insulating member; 1000. Flow-uniform assembly; 1011. Flow-uniform member; 1021. Connecting portion; 1031. Air inlet; 1041. Gas flow channel; 1051. Air outlet; 1012. Support member; 1110. First air inlet pipe; 1120. End insulation assembly; 20. Exhaust equipment; 30. Water cooling plate; 2. Liquid source equipment. DETAILED DESCRIPTION
[0033] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0034] Figure 1 Shown is a schematic diagram of the explosion structure of a furnace body provided in one embodiment of the present application. Figure 2 Shown is a cross-sectional view of a furnace body provided in one embodiment of the present application. Figure 3 Shown Figure 2 A partial enlarged view of the furnace body in area A is shown. Figure 4 The figure shows a schematic diagram of the structure of the heat transfer tube, the heating element and the exhaust device provided in one embodiment of the present application. Figures 1 to 4 As shown, the furnace body 10 includes a cavity 100 , at least one heat transfer tube 200 and at least one heating element 300 .
[0035] The cavity 100 has a chamber 1001, and the heat transfer pipe 200 is connected to the cavity 100 and is disposed in the chamber 1001. The heating element 300 is disposed on the heat transfer pipe 200, and the heating element 300 is configured to provide heat for the cavity 100. The first end 201 of the heat transfer pipe is connected to the outside, and the second end 202 of the heat transfer pipe can be connected to the exhaust device 20, so that the outside gas passes through the heat transfer pipe 200 to cool the furnace body 10.
[0036] For example, the heat transfer tube 200 is made of metal or non-metal. The heat transfer tube 200 made of metal has a better heat transfer effect and can reduce heat loss as little as possible.
[0037] Exemplarily, the heating element 300 may be a heating tube, a heating rod, a heating wire, or the like.
[0038] Exemplarily, there may be multiple air inlets on the heat transfer tube 200, and the multiple air inlets are arranged around the heat transfer tube 200 and along the extension direction of the heat transfer tube 200, so that the outside air can enter the heat transfer tube 200 through the multiple air inlets and take away the heat around the multiple air inlets at the same time, further improving the cooling efficiency of the heat transfer tube 200.
[0039] Exemplarily, the exhaust device 20 may be a vacuum pump, an exhauster, or the like.
[0040] The furnace body 10 provided in the embodiment of the present application includes a cavity 100, a heat transfer tube 200 and a heating element 300. The heat transfer tube 200 is connected to the cavity 100, and the heating element 300 is arranged on the heat transfer tube 200. The first end 201 of the heat transfer tube is connected to the outside, and the second end 202 of the heat transfer tube can be connected to the exhaust device 20, so that the external gas passes through the heat transfer tube 200 and contacts the heating element 300 in the heat transfer tube 200, so as to take away the heat of the heat transfer tube 200 and the heating element 300 in time, so as to improve the cooling efficiency of the heat transfer tube 200 and the heating element 300, thereby improving the cooling efficiency of the furnace body 10.
[0041] In addition, the heat transfer tube 200 is used as a cooling air duct, and there is no need to add an additional air duct, so the structure is simple.
[0042] In some embodiments, Figure 1 , Figure 2 and Figure 5 As shown, the cavity 100 includes an annular side wall 110, and the annular side wall 110 encloses a chamber 1001. There are multiple heat transfer tubes 200, and the multiple heat transfer tubes 200 extend along the extension direction of the annular side wall 110 and are sequentially arranged along the circumferential direction of the annular side wall 110. There are multiple heating elements 300, and each heat transfer tube 200 accommodates at least one heating element 300.
[0043] The furnace body 10 is heated by the plurality of heating elements 300, thereby further improving the heating efficiency of the furnace body 10. In addition, the plurality of heat transfer tubes 200 serve as cooling air ducts, and external air passes through the plurality of heat transfer tubes 200 and cools the plurality of heat transfer tubes 200 and the heating elements 300 in the plurality of heat transfer tubes 200, thereby further improving the cooling efficiency of the furnace body 10.
[0044] For example, the cross-section of the annular sidewall 110 may be in the shape of a circular ring, a rectangular ring, a polygonal ring, or the like.
[0045] Exemplarily, the plurality of heat transfer tubes 200 are arranged at intervals along the circumferential direction of the annular side wall 110, so that the gaps can be used for heat dissipation, thereby improving the cooling efficiency of the heat transfer tubes 200. Exemplarily, the plurality of heat transfer tubes 200 are arranged without intervals along the circumferential direction of the annular side wall 110, thereby increasing the number of heat transfer tubes 200 and facilitating improving the heating efficiency and cooling efficiency of the furnace body 10. Exemplarily, the plurality of heat transfer tubes 200 are evenly arranged along the circumferential direction of the annular side wall 110, so as to improve the uniformity of heating and cooling the furnace body 10.
[0046] In some embodiments, Figure 1 , Figure 2 , Figure 3 and Figure 6 As shown, the cavity 100 further includes a cavity end 120, which is connected to one end of the annular side wall 110 and closes one end of the annular side wall 110. The furnace body 10 further includes a wind collecting cover 400, which is sealed and buckled on the side of the cavity end 120 away from the annular side wall 110 to form a wind collecting chamber 401, and the wind collecting chamber 401 is connected to the exhaust device 20. The second end 202 of the heat transfer pipe passes through the cavity end 120 and is connected to the wind collecting chamber 401.
[0047] The wind collecting hood 400 is used to connect multiple heat transfer tubes 200 and the exhaust device 20, so that the exhaust device 20 can simultaneously extract external gas passing through the multiple heat transfer tubes 200, thereby cooling the multiple heat transfer tubes 200 and the heating elements 300 in the multiple heat transfer tubes 200, further improving the cooling efficiency of the furnace body 10.
[0048] Exemplarily, the wind collecting hood 400 has a plurality of wind collecting channels 402 and a wind collecting port 403 . The wind collecting channels 402 are connected to the wind collecting chamber 401 . The wind collecting port 403 is connected to the plurality of wind collecting channels 402 and the air exhaust device 20 .
[0049] In some embodiments, Figure 2 , Figures 5 to 8As shown, the furnace body 10 further includes at least one auxiliary air cooling pipe 500, which is connected to the cavity 100 and disposed in the chamber 1001. The first end 501 of the auxiliary air cooling pipe is in communication with the outside, and the second end 502 of the auxiliary air cooling pipe passes through the cavity end 120 and is in communication with the air collecting chamber 401.
[0050] By providing the auxiliary air cooling pipe 500 , the external air extracted by the exhaust device 20 can pass through the auxiliary air cooling pipe 500 to cool the furnace body 10 efficiently, thereby further improving the cooling efficiency of the furnace body 10 .
[0051] Exemplarily, the furnace body 10 includes a plurality of auxiliary air cooling pipes 500, which extend along the extension direction of the annular side wall 110 and are sequentially arranged along the circumferential direction of the annular side wall 110. The plurality of auxiliary air cooling pipes 500 and the exhaust device 20 are connected by the air collecting hood 400, and the external air extracted by the exhaust device 20 passes through the plurality of auxiliary air cooling pipes 500 to cool the furnace body 10, thereby further improving the cooling efficiency of the furnace body 10.
[0052] Exemplarily, the cross-section of the auxiliary air cooling tube 500 may be in the shape of a circular ring, a rectangular ring, a polygonal ring, etc. Exemplarily, the auxiliary air cooling tube 500 may be detachably connected to the cavity 100 to facilitate replacement of the auxiliary air cooling tube 500 .
[0053] In some embodiments, Fig. 9 As shown, the heating element 300 includes a heating wire 310 , which is wound into a spiral structure with a through hole 301 . The through hole 301 extends along the extension direction of the heat transfer tube 200 , and external gas can flow through the through hole 301 .
[0054] The spiral heating wire 310 with the through hole 301 facilitates the passage of external airflow, so that the airflow surrounds the heating wire 310 in all directions, further improving the cooling efficiency of the heating element 300 and thus further improving the cooling efficiency of the furnace body 10 .
[0055] Exemplarily, the heating element 300 may have a hollow structure, thereby further improving the cooling efficiency of the furnace body 10 .
[0056] In some embodiments, Fig.10 As shown, the annular side wall 110 has at least one medium channel 1101, and both ends of the medium channel 1101 are connected to the outer side surface of the annular side wall 110, so that both ends of the medium channel 1101 can be connected to the liquid source device 2, and the liquid source device 2 is configured to input cooling medium to one end 1111 of the medium channel and receive cooling medium output from the other end 1121 of the medium channel.
[0057] The heat of the annular side wall 110 is taken away by the circulating cooling medium to cool the annular side wall 110 , thereby further improving the cooling efficiency of the furnace body 10 .
[0058] Exemplarily, the cooling medium may be water, salt water, trinitrile aqueous solution or other fluid liquids having a cooling effect.
[0059] For example, Fig.10 As shown, the medium channel 1101 is located inside the annular side wall 110, and therefore, the medium channel 1101 is indicated by a dotted line.
[0060] In some embodiments, there are multiple medium channels 1101, and the multiple medium channels 1101 are arranged in sequence along the circumferential direction of the annular side wall 110, so that the medium channels 1101 fully cover the annular side wall 110, and the cooling medium can flow through the entire annular side wall 110, further improving the cooling efficiency of the furnace body 10.
[0061] In some embodiments, the annular sidewall 110 has a plurality of gas inlets 1102, which are sequentially arranged along the circumferential direction of the annular sidewall 110 and sequentially arranged along the extension direction of the annular sidewall 110. The process gas can enter the chamber 1001 through the plurality of gas inlets 1102 of the annular sidewall 110, thereby improving gas intake efficiency and gas intake uniformity.
[0062] For example, Figure 1 As shown, the chamber door 700 has a plurality of air inlets 1102, which are arranged in sequence along the extension direction of the chamber door 700. When the chamber door 700 closes the replacement port 1103, the air inlets 1102 on the annular side wall 110 are more evenly distributed to further improve the air intake uniformity.
[0063] For example, Figure 2 As shown, the furnace body 10 further includes a flow-uniform component 1000 , which is connected to the cavity 100 , disposed in the chamber 1001 , and close to the cavity end 120 .
[0064] For example, Figure 2 , Figures 11 to 13 As shown, the flow equalizer assembly 1000 includes a flow equalizer 1011 and a support member 1012. The flow equalizer 1011 is disposed in the chamber 1001 and is close to the cavity end 120. The support member 1012 is connected to the flow equalizer 1011 and is connected to the cavity 100. Exemplarily, the support member 1012 can be detachably connected to the cavity 100 to facilitate replacement of the flow equalizer 1011. Exemplarily, the number of the support members 1012 is two, and the two support members 1012 are located below the flow equalizer 1011 and are respectively connected to the two sides of the flow equalizer 1011, so that the support member 1012 can stably support the flow equalizer 1011.
[0065] Exemplarily, the bottom end of the flow equalizer 1011 has a plurality of connection parts 1021, a plurality of air inlet holes 1031, a gas flow channel 1041 and a plurality of air outlet holes 1051. Among them, the plurality of air inlet holes 1031 are respectively arranged corresponding to the plurality of connection parts 1021 and are connected to the gas flow channel 1041, and the plurality of air outlet holes 1051 respectively connect the gas flow channel 1041 with the chamber 1001. The furnace body 10 also includes a plurality of first air inlet pipes 1110, one end of each of which is respectively connected to the plurality of connection parts 1021 and is respectively connected to the corresponding air inlet holes 1031. The process gas flows into the gas flow channel 1041 from the first air inlet pipes 1110 and the air inlet holes 1031 in sequence, and flows into the chamber 1001 from the plurality of air outlet holes 1051, thereby further improving the uniformity of the process gas in the chamber 1001.
[0066] For example, the heat transfer tube 200 is detachably connected to the cavity end 120. For example, Figure 2 and Figure 3 As shown, the furnace body 10 further includes a fixing member 800, which abuts against both ends of the heat transfer tube 200 and is detachably connected to the cavity end 120, so as to realize the detachable connection between the heat transfer tube 200 and the cavity end 120. For example, the end of the heat transfer tube 200 has a third screw connection portion, and the cavity end 120 has a fourth screw connection portion corresponding to the third screw connection portion. The furnace body 10 further includes a second locking screw, which is screwed to the third screw connection portion and the fourth screw connection portion, respectively, so as to realize the detachable connection between the heat transfer tube 200 and the cavity end 120. When the heat transfer tube 200 is detachably connected to the cavity end 120, when the heat transfer tube 200 or the heating element 300 needs to be replaced, the heat transfer tube 200 is disassembled and taken out from the chamber 1001 for replacement, thereby improving the convenience of replacing the heat transfer tube 200 and the heating element 300.
[0067] For example, Figure 2 and Figure 3 As shown, the furnace body 10 further includes an insulating member 900, which is disposed on the heat transfer tube 200, and the insulating member 900 abuts against the heating member 300, and the fixing member 800 abuts against the insulating member 900, so that the heating member 300 is installed on the heat transfer tube 200. When the heating member 300 needs to be replaced, the fixing member 800 is disassembled, and the insulating member 900 is taken out from the heat transfer tube 200, and the heating member 300 can be taken and placed on the heat transfer tube 200, thereby further improving the convenience of replacing the heating member 300. In addition, the insulating member 900 can separate the heat transfer tube 200 from the fixing member 800, so as to achieve insulation between the fixing member 800 and the heating member 300. Exemplarily, the material of the fixing member 800 can be a metal material or a non-metal material. Exemplarily, the material of the insulating member 900 can be ceramic, plastic, etc.
[0068] For example, Figure 2 and Figure 4 As shown, one heat transfer tube 200 accommodates two heating elements 300, and the two heating elements 300 can enter and exit the heat transfer tube 200 through the first end 201 and the second end 202 of the heat transfer tube, respectively, further improving the convenience of replacing the heating elements 300. In addition, an insulating element 900 is also provided between the two heating elements 300, and the insulating element 900 separates the two heating elements 300, thereby achieving insulation between the two heating elements 300, so as to facilitate the separate control of the two heating elements 300.
[0069] Exemplarily, the furnace body 10 further includes a side wall insulation assembly 600 and at least one chamber door 700, the annular side wall 110 has at least one replacement port 1103 communicating with the chamber 1001, the side wall insulation assembly 600 is disposed between the annular side wall 110 and the heat transfer tube 200, and the side wall insulation assembly 600 can enter and exit the chamber 1001 through the replacement port 1103. The chamber door 700 is connected to the chamber body 100 and is configured to open or close the replacement port 1103.
[0070] Exemplarily, the shape of the replacement port 1103 can be circular, rectangular, polygonal, etc., and the shape of the chamber door 700 can be circular, rectangular, polygonal, etc. Exemplarily, the shape of the replacement port 1103 can be the same as or different from the shape of the chamber door 700, as long as the chamber door 700 can completely close the replacement port 1103.
[0071] Exemplarily, there are multiple replacement ports 1103, and the multiple replacement ports 1103 are arranged at intervals along the circumferential direction of the annular side wall 110. There are multiple chamber doors 700, and the multiple chamber doors 200 are respectively configured to open or close the multiple replacement ports 1103. By reasonably setting multiple replacement ports 1103, the convenience of replacing the side wall insulation assembly 600 is further improved. In addition, by setting a reasonable number of replacement ports 1103, it is also possible to avoid the mechanical strength of the annular side wall 110 being too low. Exemplarily, the number of replacement ports 1103 can be two, three, four or more. Figure 1 There are four replacement ports 1103 shown, which are spaced apart along the circumferential direction of the annular side wall 110 . There are four chamber doors 700 , which are respectively configured to open or close the four replacement ports 1103 .
[0072] Exemplarily, the side wall insulation assembly 600 is arranged along the circumferential direction of the annular side wall 110 and extends along the extension direction of the annular side wall 110. Exemplarily, the side wall insulation assembly 600 includes a plurality of side wall insulation parts 610, and the plurality of side wall insulation parts 610 are arranged in sequence along the circumferential direction of the annular side wall 110, or the plurality of side wall insulation parts 610 are arranged in sequence along the circumferential direction and the extension direction of the annular side wall 110, respectively. Exemplarily, two adjacent side wall insulation parts 610 are arranged with or without spacing. In the case where two adjacent side wall insulation parts 610 are arranged without spacing, the plurality of side wall insulation parts 610 can completely cover the annular side wall 110 to further improve the insulation effect of the side wall insulation assembly 600. Exemplarily, the shape of the side wall insulation part 610 can be rectangular, circular, polygonal, etc.
[0073] When there are multiple replacement ports 1103 and the side wall insulation assembly 600 includes multiple side wall insulation parts 610, the multiple side wall insulation parts 610 around each replacement port 1103 can enter and exit the chamber 1001 through the replacement port 1103, further improving the convenience of replacing the side wall insulation assembly 600.
[0074] Exemplarily, the chamber door 700 can be detachably connected to the chamber body 100. Exemplarily, the chamber door 700 has a plurality of first screw-connecting parts, the chamber body 100 has a plurality of second screw-connecting parts arranged one by one corresponding to the plurality of first screw-connecting parts, and the furnace door 10 further comprises a first locking screw, which is screwed to the first screw-connecting part and the second screw-connecting part respectively, so as to realize the detachable connection between the chamber door 700 and the chamber body 100. Exemplarily, one side of the chamber door 700 is hinged to the chamber body 100, and the other side of the chamber door 700 is snap-connected to the chamber body 100. The detachable connection between the chamber door 700 and the chamber body 100 facilitates the chamber door 700 to open or close the replacement port 1103.
[0075] Exemplarily, the furnace body 10 further includes an end insulation component 1120, which is disposed between the cavity end 120 and the flow equalizer 1011 to further improve the heat preservation of the furnace body 10. When the support member 1012 is detachably connected to the cavity 100, when it is necessary to replace the end insulation component 1120, the support member 1012 is disassembled, and the support member 1012 and the flow equalizer 1011 are taken out of the chamber 1001, and the end insulation component 1120 can be replaced, thereby improving the convenience of replacing the end insulation component 1120.
[0076] For example, Fig.11As shown, the flow equalizer 1011 has an insulation component receiving groove 1061 opening upward, and the end insulation component 1120 is arranged in the insulation component receiving groove 1061. The insulation component receiving groove 1061 can limit and block the end insulation component 1120 to prevent the placement position of the end insulation component 1120 from being offset or falling out.
[0077] Exemplarily, the furnace body 10 also includes a gland and a second air inlet pipe, the gland is located on the outside of the annular side wall 110 and is connected to the annular side wall 110, the gland is connected to one end of the second air inlet pipe, and the other end of the second air inlet pipe extends into the chamber 1001 from the air inlet 1102 and is close to the product in the chamber 1001 to ensure that the process gas can directly contact the product as much as possible.
[0078] An embodiment of the present application also provides a reaction furnace. Figures 1 to 4 and Figure 6 As shown, the reaction furnace 1 includes the furnace body 10 and the exhaust device 20 mentioned in the above embodiment. The exhaust device 20 is connected to the second end 202 of the heat transfer tube of the furnace body 10 and is configured to extract gas in the heat transfer tube 200 to cool the furnace body 10.
[0079] In some embodiments, Figure 4 and 6 As shown, the reaction furnace 1 further includes a water cooling plate 30 , which is connected to the second end 202 of the heat transfer tube and the exhaust device 20 , and is configured to cool down the gas flowing out of the heat transfer tube 200 .
[0080] The use of the water cooling plate 30 improves the cooling efficiency of the reactor 1. At the same time, the water cooling plate 30 is used to cool the gas flowing out of the heat transfer tube 200. The cooled gas flows out from the exhaust device 20, thereby reducing the temperature of the gas flowing out of the exhaust device 20 and preventing the gas temperature from being too high and scalding the staff.
[0081] In the embodiments of the present application, if not clearly defined, the connection form may be a detachable connection by means of bolts and nuts, screws, buckles, magnetic attraction, etc. In some connections, if the form of detachable matching is not clearly defined, a non-detachable connection may be made by means of welding, bonding, etc.
[0082] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.
[0083] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.
[0084] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.
[0085] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.
[0086] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. A furnace body, characterized in that: include: a cavity, having a chamber; at least one heat transfer tube connected to the cavity and disposed in the chamber; at least one heating element, the heating element being disposed on the heat transfer tube and configured to provide heat to the cavity; Wherein, the first end of the heat transfer tube is connected to the outside, and the second end of the heat transfer tube can be connected to the exhaust device, so that the external gas passes through the heat transfer tube to cool the furnace body.
2. The furnace body according to claim 1, characterized in that: The cavity comprises an annular side wall, and the annular side wall encloses the chamber; The number of the heat transfer tubes is multiple, and the multiple heat transfer tubes extend along the extension direction of the annular side wall and are arranged in sequence along the surrounding direction of the annular side wall; There are multiple heating elements, and each heat transfer tube accommodates at least one heating element.
3. The furnace body according to claim 2, characterized in that: The cavity further comprises a cavity end portion, wherein the cavity end portion is connected to one end of the annular side wall and closes one end of the annular side wall; Wherein, the furnace body further comprises: The wind collecting hood is sealed and fastened to the side of the cavity end away from the annular side wall to form a wind collecting chamber, and the wind collecting chamber is connected to the exhaust device, wherein the second end of the heat transfer tube passes through the cavity end and is connected to the wind collecting chamber.
4. The furnace body according to claim 3, characterized in that: Also includes: At least one auxiliary air cooling pipe is connected to the cavity and is arranged in the chamber. The first end of the auxiliary air cooling pipe is connected to the outside, and the second end of the auxiliary air cooling pipe passes through the end of the cavity and is connected to the wind collecting chamber.
5. The furnace body according to any one of claims 1 to 4, characterized in that: The heating element comprises: The heating wire is wound into a spiral structure with a through hole, and the through hole extends along the extension direction of the heat transfer tube, wherein external gas can flow through the through hole.
6. The furnace body according to any one of claims 2 to 4, characterized in that: The annular side wall has at least one medium channel, and both ends of the medium channel are connected to the outer side surface of the annular side wall, so that the two ends of the medium channel can be connected to a liquid source device, and the liquid source device is configured to input cooling medium into one end of the medium channel and receive the cooling medium output from the other end of the medium channel.
7. The furnace body according to claim 6, characterized in that: There are multiple medium channels, and the multiple medium channels are arranged in sequence along the circumferential direction of the annular side wall.
8. The furnace body according to any one of claims 2 to 4, characterized in that: The annular side wall has a plurality of air inlets, which are sequentially arranged along the circumferential direction of the annular side wall and sequentially arranged along the extending direction of the annular side wall.
9. A reactor, characterized in that: include: The furnace body according to any one of claims 1 to 8; The exhaust device is connected to the second end of the heat transfer tube of the furnace body and is configured to extract the gas in the heat transfer tube to cool the furnace body.
10. The reaction furnace according to claim 9, characterized in that: Also includes: The water cooling plate is connected to the second end of the heat transfer tube and the air extraction device, and is configured to cool the gas flowing out of the heat transfer tube.