Evaporation equipment nozzle anomaly detection method and device, electronic equipment and storage medium

Abstract

The invention discloses an evaporation equipment nozzle anomaly detection method and device, electronic equipment and a storage medium, and the method comprises the steps: receiving the vibration frequency of a quartz crystal oscillator in the evaporation operation execution process of evaporation equipment, and calculating the coating speed of coating steam ejected from a nozzle through the vibration frequency, and judging whether the coating speed is greater than a preset speed threshold, if so, determining that the nozzle is blocked abnormally, and if not, determining that the nozzle is normal. Whether the nozzle is blocked or not is determined by detecting the coating speed in real time in the evaporation process, it is not needed that the coated display panel is turned on to detect color data after being assembled into a finished product, the abnormal nozzle blockage is determined manually when the color data is abnormal, the nozzle blockage can be predicted in advance by setting a reasonable speed threshold value, and the production efficiency is improved. The nozzle can be timely dredged before the blockage of the nozzle affects the coating thickness, so that the blockage of the nozzle is avoided, the coating thickness of the display panel is ensured, the reject ratio of the display panel is reduced, and the product quality of the display panel is improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a method, device, electronic device and storage medium for detecting abnormality of a nozzle of an evaporation device. Background Art

[0002] In the display panel manufacturing process, the production of organic light-emitting diodes is mainly achieved through thermal evaporation, such as Figure 1 As shown, liquefied evaporation material 2 is injected into the chamber of the evaporation device 1. The liquefied evaporation material is vaporized and evaporated after heating, and steam is ejected from multiple nozzles 3 above the evaporation device 1. When the glass substrate 4 passes over the nozzles, the steam ejected from the nozzles adheres to the glass substrate to form a coating film.

[0003] Since the temperature near the nozzle above the chamber of the evaporation equipment is lower than that at the bottom of the chamber, the vaporized steam cools down and condenses when it approaches the nozzle, which can easily cause the nozzle to become clogged. The amount of steam sprayed from the nozzle will change, causing the coating thickness on the glass substrate to change. When the coating thickness of the glass substrate is inconsistent, there will be color difference in the display panel. In the prior art, when color abnormalities are detected after the glass substrate is packaged as a display panel, the status of each nozzle is usually manually observed visually to determine whether the nozzle is clogged, and then the nozzle is unblocked. It is impossible to predict nozzle blockage in advance and unblock the nozzle in time, resulting in a large number of display panels being coated when the problem is manually determined. Summary of the invention

[0004] The present invention provides a method, device, electronic device and storage medium for detecting abnormality of a nozzle of an evaporation device, so as to solve the problem that nozzle blockage cannot be predicted in advance.

[0005] In a first aspect, the present invention provides a method for detecting nozzle abnormality of an evaporation device, wherein the evaporation device is provided with a quartz crystal oscillator, comprising:

[0006] During the evaporation operation performed by the evaporation device, receiving the vibration frequency of the quartz crystal oscillator;

[0007] Calculating a coating speed of the coating vapor ejected from the nozzle according to the vibration frequency;

[0008] Determining whether the coating speed is greater than a preset speed threshold;

[0009] If yes, it is determined that the nozzle is abnormally clogged;

[0010] If not, it is determined that the nozzle is normal, and the process returns to the step of receiving the vibration frequency of the quartz crystal oscillator during the evaporation operation performed by the evaporation equipment.

[0011] Optionally, during the evaporation operation performed by the evaporation device, receiving the vibration frequency of a quartz crystal oscillator includes:

[0012] receiving a first vibration frequency of the quartz crystal oscillator at the beginning of a detection cycle;

[0013] A second vibration frequency of the quartz crystal oscillator is received at the end of the detection period.

[0014] Optionally, calculating the coating speed of the coating vapor ejected from the nozzle according to the vibration frequency includes:

[0015] Calculating the absolute value of the difference between the first vibration frequency and the second vibration frequency to obtain a frequency change;

[0016] The coating speed of the coating vapor ejected from the nozzle is calculated according to the frequency variation and the period length of the detection period.

[0017] Optionally, calculating the coating speed of the coating vapor ejected from the nozzle by using the frequency change and the period length of the detection period includes:

[0018] Obtaining the quartz crystal density and the quartz crystal thickness of the quartz crystal at the beginning of the detection period;

[0019] Calculating a first product of the quartz crystal density and the quartz crystal thickness, and calculating a ratio of the first product to the first vibration frequency to obtain a coefficient K of the detection period;

[0020] Calculating a ratio of the frequency change to a preset coating density, and calculating a second product of the ratio and the coefficient K, and determining the second product as the coating thickness of the quartz crystal oscillator within the detection period;

[0021] The ratio of the coating thickness to the cycle length of the detection cycle is calculated to obtain the coating speed of the coating vapor ejected from the nozzle.

[0022] Optionally, after determining that the nozzle is abnormally clogged, the method further includes:

[0023] The heating device of the evaporation equipment is controlled to increase the heating power of the heating device.

[0024] Optionally, after controlling the heating device of the evaporation equipment to increase the heating power of the heating device, the method further includes:

[0025] Detecting color data of a preset number of display panels;

[0026] Determining whether the color data is abnormal;

[0027] If yes, determine that the nozzle is abnormally clogged, and count the number of times the heating power is adjusted;

[0028] If not, it is determined that the nozzle is normal.

[0029] Optionally, after counting the number of heating power adjustment times, the following is further included:

[0030] Determining whether the heating power adjustment times reaches a times threshold;

[0031] If yes, control the evaporation equipment to stop working, and generate an alarm message for manually handling the nozzle blockage abnormality;

[0032] If not, return to the step of controlling the heating device of the evaporation equipment to increase the heating power of the heating device.

[0033] In a second aspect, the present invention provides a device for detecting abnormality of a nozzle of a vapor deposition device, wherein the vapor deposition device is provided with a quartz crystal oscillator, and the device for detecting abnormality of a nozzle of the vapor deposition device comprises:

[0034] A vibration frequency receiving module, used for receiving the vibration frequency of a quartz crystal oscillator during the evaporation operation performed by the evaporation device;

[0035] A coating speed calculation module, used for calculating the coating speed of the coating vapor ejected from the nozzle according to the vibration frequency;

[0036] A coating speed determination module, used to determine whether the coating speed is greater than a preset speed threshold, if so, execute an abnormal determination module, if not, execute a first normal determination module;

[0037] An abnormality determination module, used for determining that the nozzle is blocked abnormally;

[0038] The first normal determination module is used to determine that the nozzle is normal and return the result to the vibration frequency receiving module.

[0039] In a third aspect, the present invention provides an electronic device, the electronic device comprising:

[0040] at least one processor; and

[0041] a memory communicatively connected to the at least one processor; wherein,

[0042] The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can execute the method for detecting nozzle abnormality of the evaporation equipment as described in any one of the first aspects of the present invention.

[0043] In a fourth aspect, the present invention provides a computer-readable storage medium storing computer instructions, wherein the computer instructions are used to enable a processor to implement the method for detecting nozzle abnormality of a vapor deposition device as described in any one of the first aspects of the present invention when executed.

[0044] The present invention sets a quartz crystal oscillator in the evaporation equipment. When the nozzle of the evaporation equipment sprays coating vapor, a coating is formed on the surface of the quartz crystal oscillator to change the mass of the quartz crystal oscillator, so that the vibration frequency of the quartz crystal oscillator changes. The coating speed of the coating vapor sprayed from the nozzle can be calculated according to the vibration frequency of the quartz crystal oscillator. The coating speed is compared with a speed threshold to determine whether the nozzle is blocked, so as to promptly unblock the nozzle when the nozzle is blocked. The coating speed is detected in real time during the evaporation process to determine whether the nozzle is blocked. There is no need to wait for the display panel after coating to be assembled into a finished product and then light up to detect color data abnormality to manually determine that the nozzle is blocked. By setting a reasonable speed threshold, the nozzle blockage can be predicted in advance, and the nozzle can be unblocked in time before the nozzle blockage affects the coating thickness, thereby avoiding nozzle blockage, ensuring the coating thickness of the display panel, reducing the defective rate of the display panel, and improving the product quality of the display panel.

[0045] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0047] Figure 1 It is a schematic diagram of the evaporation equipment performing evaporation deposition on the display panel;

[0048] Figure 2 This is a flow chart of a method for detecting abnormality of a nozzle of a vapor deposition device provided in Embodiment 1 of the present invention;

[0049] Figure 3 This is a flow chart of a method for detecting abnormality of a nozzle of a vapor deposition device provided in Embodiment 2 of the present invention;

[0050] Figure 4 It is a structural schematic diagram of a nozzle abnormality detection device for evaporation equipment provided by Embodiment 3 of the present invention;

[0051] Figure 5 It is a schematic diagram of the structure of an electronic device provided in Embodiment 4 of the present invention. DETAILED DESCRIPTION

[0052] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0053] Embodiment 1

[0054] Figure 2 This is a flow chart of a method for detecting nozzle abnormality of a vapor deposition device provided in the first embodiment of the present invention. This embodiment can be used to predict the abnormality of nozzle blockage of a vapor deposition device in advance. The method can be performed by a device for detecting nozzle abnormality of a vapor deposition device. The device for detecting nozzle abnormality of a vapor deposition device can be implemented in the form of hardware and / or software and can be configured in an electronic device. Figure 2 As shown, the method for detecting abnormality of nozzles of the evaporation equipment includes:

[0055] S201. When the evaporation equipment performs an evaporation operation, receiving the vibration frequency of the quartz crystal oscillator.

[0056] like Figure 1 The figure shows the front view and the side view of the evaporation device. The evaporation device 1 of this embodiment is injected with liquid evaporation material 2. The liquid evaporation material 2 is vaporized after being heated, and the gaseous evaporation material is sprayed out from the nozzle 3. When the glass substrate 4 moves from above the nozzle, the gaseous evaporation material encounters the glass substrate 4 with a lower temperature and condenses on the glass substrate 4 to form a coating film.

[0057] from Figure 1 It can be seen that the heating device is usually arranged at the bottom of the evaporation equipment 1, which causes the temperature above the evaporation equipment 1 near the nozzle 3 to be lower than the temperature at the bottom of the evaporation equipment 1. The gaseous evaporation material is likely to cool down and condense near the nozzle 3, and the nozzle 3 is prone to clogging. If the nozzle 3 is clogged, the pressure in the evaporation equipment 1 rises, causing the speed of the gaseous evaporation material ejected from the nozzle 3 to increase, that is, the coating speed is accelerated. If the moving speed of the glass substrate 4 remains unchanged, the coating will become thicker. After the glass substrate is packaged into a display panel that can be lit after multiple steps, color unevenness and color difference will occur.

[0058] In order to detect abnormal nozzle blockage, this embodiment adds a quartz crystal oscillator 5 to the evaporation equipment 1. The quartz crystal oscillator 5 includes a quartz crystal oscillator plate. The quartz crystal oscillator plate faces the direction of the nozzle 3 to form a coating on the surface of the quartz crystal oscillator plate when the nozzle 3 sprays gaseous evaporation material, thereby changing the mass of the quartz crystal oscillator plate and changing the vibration frequency of the quartz crystal oscillator 5.

[0059] The quartz crystal oscillator 5 can convert the vibration frequency into an electrical signal and transmit it to the controller. The controller analyzes the electrical signal to obtain the vibration frequency of the quartz crystal oscillator 5 .

[0060] S202, calculating the coating speed of the coating vapor ejected from the nozzle according to the vibration frequency.

[0061] In this embodiment, a detection cycle can be set by obtaining the frequency change of the vibration frequency of the quartz crystal oscillator, mass, density, coating thickness and other parameters at the beginning and end of the detection cycle, and configuring a conversion calculation formula between the frequency change of the quartz crystal oscillator and the coating speed. The coating speed of the coating vapor ejected from the nozzle in the current detection cycle is calculated using the above parameters of each detection cycle.

[0062] S203: Determine whether the coating speed is greater than a preset speed threshold.

[0063] In one embodiment, the speed threshold may be the minimum speed at which the nozzle sprays the evaporation material when the internal pressure of the evaporation equipment is fixed and the nozzle is clogged. The speed threshold may be used to detect nozzle clog.

[0064] In another embodiment, the speed threshold may be a preset ratio of the above minimum speed, such as 90% of the minimum speed, so that the nozzle is about to be clogged by detecting the speed threshold, that is, predicting the nozzle has a tendency to be clogged.

[0065] After setting the speed threshold, the coating speed detected in the current detection cycle can be compared with the speed threshold. If the coating speed is greater than the speed threshold, execute S204; if the coating speed is less than or equal to the speed threshold, execute S205.

[0066] S204, determining that the nozzle is abnormally clogged.

[0067] If the coating speed in one detection cycle is greater than the speed threshold, it can be determined that the nozzle is clogged or is about to be clogged. Of course, in another embodiment, it can also be determined that the nozzle is clogged or is about to be clogged when the coating speed is detected to be greater than the speed threshold in N consecutive detection cycles.

[0068] S205: Determine whether the nozzle is normal.

[0069] If the coating speed in one detection cycle is less than or equal to the speed threshold, it can be determined that the nozzle is normal. Of course, in another embodiment, the nozzle can be determined to be normal when it is detected that the coating speed is less than or equal to the speed threshold in N consecutive detection cycles.

[0070] The embodiment of the present invention sets a quartz crystal oscillator in the evaporation equipment. When the nozzle of the evaporation equipment sprays coating vapor, a coating is formed on the surface of the quartz crystal oscillator to change the mass of the quartz crystal oscillator, so that the vibration frequency of the quartz crystal oscillator changes. The coating speed of the coating vapor sprayed from the nozzle can be calculated according to the vibration frequency of the quartz crystal oscillator. The coating speed is compared with the speed threshold to determine whether the nozzle is abnormally blocked, so as to promptly unblock the nozzle when the nozzle is abnormally blocked. The coating speed is detected in real time during the evaporation process to determine whether the nozzle is blocked. There is no need to light up and detect color data after the display panel after coating is assembled into a finished product, and to manually determine the nozzle blockage abnormality when the color data is abnormal. By setting a reasonable speed threshold, the nozzle blockage can be predicted in advance, and the nozzle can be unblocked in time before the nozzle blockage affects the coating thickness, thereby avoiding nozzle blockage, ensuring the uniformity of the coating thickness of the display panel, reducing the defective rate of color difference of the display panel, and improving the product quality of the display panel.

[0071] Embodiment 2

[0072] Figure 3 This is a flow chart of a method for detecting abnormalities in a nozzle of a vapor deposition device provided in the second embodiment of the present invention. The embodiment of the present invention is optimized on the basis of the above-mentioned first embodiment. Figure 3 As shown, the method for detecting abnormality of nozzles of the evaporation equipment includes:

[0073] S301, receiving a first vibration frequency of a quartz crystal oscillator at the beginning of a detection cycle, and receiving a second vibration frequency of the quartz crystal oscillator at the end of the detection cycle.

[0074] This embodiment can receive the vibration frequency of the quartz crystal oscillator according to a preset period. The detection period can be determined according to the coating efficiency of the display panel. For example, assuming that the coating of a display panel is completed in 50 seconds, the vibration frequency can be received at intervals of 100 seconds, 150 seconds, etc.

[0075] During the evaporation process of the evaporation device, after the nozzle starts to spray the evaporation material, the first vibration frequency of the quartz crystal oscillator is received at the beginning of a detection cycle, and the second vibration frequency of the quartz crystal oscillator is received at the end of the detection cycle.

[0076] S302: Calculate the absolute value of the difference between the first vibration frequency and the second vibration frequency to obtain a frequency variation.

[0077] Since the quartz crystal oscillator on the quartz crystal oscillator faces the nozzle during a detection cycle, as the nozzle sprays the evaporation material, a coating is formed on the quartz crystal oscillator, the mass of the quartz crystal oscillator changes, and the vibration frequency also changes accordingly. The first vibration frequency F at the beginning of a detection cycle can be calculated. q The second vibration frequency F at the end of the detection period f and take the absolute value as the frequency change △F.

[0078] S303, calculating the coating speed of the coating vapor ejected from the nozzle according to the frequency change and the period length of the detection period.

[0079] In an optional embodiment, the quartz crystal density ρ of the quartz crystal at the beginning of the detection period can be obtained. q and the thickness of the quartz crystal D q , calculate the quartz crystal density ρ q and the thickness of the quartz crystal D q The product of the first vibration frequency F q The ratio of the detection period coefficient K is obtained, and the frequency change △F and the preset coating density ρ are calculated. f The ratio of the ratio and the product of the ratio and the coefficient K are calculated as the coating thickness D of the quartz crystal during the detection period. f , calculate the coating thickness D f The ratio of the period length T of the detection period is used to obtain the coating speed V of the coating vapor ejected from the nozzle. The specific calculation formula is as follows:

[0080]

[0081] In the above formula, the coating density ρ f It is a fixed value, which is only related to the characteristics of the coating material. The coefficient K of each detection cycle is different, that is, The quartz crystal density ρ can be obtained at the beginning of each detection cycle q and the thickness of the quartz crystal D q , where the thickness of the coating on the quartz crystal can be measured at the beginning of each detection cycle, the coating mass can be calculated by the coating thickness, coating density and coating area of ​​the quartz crystal, the total mass of the quartz crystal is obtained by calculating the sum of the coating mass and the mass of the quartz crystal before coating, and the total volume is calculated by the coating thickness on the quartz crystal and the thickness of the quartz crystal itself. The ratio of the total mass to the total volume can be calculated to obtain the quartz crystal density ρ q ,pass That is, the coefficient K of a detection cycle can be calculated. After the frequency change △F is calculated at the end of the detection cycle, the frequency change △F, coefficient K and coating density ρ f Substitute the coating thickness D of the test cyclef The coating thickness D within a test cycle is obtained by calculating the formula f , coating thickness D f The ratio of the coating speed to the cycle time T is the coating speed V.

[0082] S304: Determine whether the coating speed is greater than a preset speed threshold.

[0083] In this embodiment, the speed threshold is equal to the product of the minimum speed of the vapor deposition material sprayed when the nozzle is clogged and a preset ratio. For example, assuming that the minimum speed when the nozzle is clogged is 10m / s, the speed threshold can be set to 8m / s to determine whether the coating speed of the current detection cycle is greater than the speed threshold. If so, it is determined that the nozzle is about to be clogged and S306 can be executed. If not, it is determined that the nozzle is normal and will not be clogged, and S305 can be executed.

[0084] It should be noted that the embodiment of the present invention compares the calculated coating speed with the speed threshold when the calculated coating speed is greater than 0, that is, before the nozzle is completely blocked and no coating steam is ejected, resulting in the coating speed being 0, the calculated coating speed is compared with the speed threshold. If the coating speed is 0, it means that the nozzle is completely blocked and no coating steam is ejected from the nozzle. There is no need to compare with the speed threshold, and it can be directly determined that the nozzle is completely blocked.

[0085] S305: Determine whether the nozzle is normal.

[0086] If the calculated coating speed at the end of the detection cycle is less than or equal to the speed threshold, or the coating speed for N consecutive detection cycles is less than or equal to the speed threshold, it is determined that the nozzle is not blocked.

[0087] S306, controlling the heating device of the evaporation equipment to increase the heating power of the heating device.

[0088] If the coating speed is greater than the speed threshold, or the coating speed is greater than the speed threshold for N consecutive detection cycles, it is determined that the nozzle has a tendency to be clogged. The heating device can be controlled to increase the power to increase the temperature of the evaporation equipment near the nozzle, and the evaporation material that is clogged at the nozzle can be dissolved by high temperature to achieve the purpose of unclogging the clogged nozzle.

[0089] S307 , detecting color data of a preset number of display panels.

[0090] After increasing the heating power of the heating device so that the temperature of the evaporation equipment is increased, a preset number of display panels are evaporated to form a coating film, and then the preset number of display panels can be manufactured into finished products and lit up to perform color detection to obtain color data. For example, a preset number of display panels are preferentially packaged after completing subsequent processes to form display panels that can be lit up, and the color data of multiple areas are detected after the display panels are lit up.

[0091] S308: Determine whether the color data is abnormal.

[0092] Specifically, the color data of multiple areas can be compared with the standard value. If the color data of the area greater than the preset ratio among the color data of multiple areas is abnormal, execute S310; if the color data of the area less than or equal to the preset ratio is normal, execute S309.

[0093] Exemplarily, the color data of three points are detected. If the color data of two of the points are outside the marked range, it is determined that the color data is abnormal, and it is possible that the nozzle is still clogged.

[0094] S309: Determine whether the nozzle is normal.

[0095] When the color data is normal, it is determined that the nozzle that is blocked or about to be blocked has been unblocked, and the coating can be produced normally, and S301 is returned to continue to receive the vibration frequency of the quartz crystal oscillator.

[0096] S310, determining that the nozzle is blocked abnormally, and counting the number of times the heating power is adjusted.

[0097] When the color data is abnormal, it is determined that the blocked or about-to-be-blocked nozzle has not been unblocked and still needs to increase the temperature to continue unblocking, that is, return to S306 and count the number of heating power adjustment times.

[0098] S311, determine whether the number of heating power adjustment times reaches the number threshold.

[0099] Specifically, the number threshold can be set to two times, three times, etc. If the number threshold is reached, it is determined that the heating power is increased too many times, and S312 can be executed. If not, return to S306.

[0100] S312, control the evaporation equipment to stop working, and generate an alarm message for manually handling the abnormal nozzle blockage. When the number of heating power adjustments reaches the threshold number, it means that the blocked or about-to-be-blocked nozzle has not been unblocked after increasing the temperature for multiple times, and the method of unblocking the nozzle by increasing the temperature has failed to work, and the evaporation equipment can be controlled to shut down. After the evaporation equipment is shut down, an alarm message can be generated to prompt the maintenance personnel to manually unblock the blocked nozzle or replace the nozzle.

[0101] This embodiment receives a first vibration frequency of a quartz crystal oscillator at the beginning of a detection cycle and a second vibration frequency at the end of the detection cycle to calculate a frequency change of the quartz crystal oscillator in a detection cycle, and calculates a coating speed of the coating vapor ejected from the nozzle by the frequency change and the cycle duration of the detection cycle, and determines that the nozzle is clogged when the coating speed is greater than a speed threshold, thereby realizing real-time detection of the coating speed during the evaporation process to determine whether the nozzle is clogged. There is no need to light up and detect color data after the display panel after coating is assembled into a finished product, and manually determine that the nozzle is clogged when the color data is abnormal. By setting a reasonable speed threshold, nozzle clogs can be predicted in advance, and the nozzle can be unblocked in time before the nozzle clogs and affects the coating thickness, thereby avoiding nozzle clogs, ensuring the coating thickness of the display panel, reducing the defective rate of the display panel, and improving the product quality of the display panel.

[0102] Furthermore, after determining that the nozzle is abnormally clogged, the heating device of the evaporation equipment can be controlled to increase the heating power of the heating device, so as to increase the evaporation temperature to unclog the clogged nozzle, and detect the color data of a preset number of display panels to determine whether the nozzle has been unblocked, thereby realizing automatic unblocking of the nozzle. When the nozzle is still clogged after increasing the temperature for multiple times, the evaporation equipment is controlled to stop working to prompt the maintenance personnel to manually handle the nozzle blockage, thereby avoiding the situation where the clogged nozzle cannot be unblocked after increasing the temperature for multiple times, resulting in excessive temperature and pressure and causing safety hazards.

[0103] Embodiment 3

[0104] Figure 4 A schematic diagram of a nozzle abnormality detection device for a vapor deposition device provided in Embodiment 3 of the present invention. The vapor deposition device of this embodiment is provided with a quartz crystal oscillator. The nozzle abnormality detection device for the vapor deposition device includes:

[0105] A vibration frequency receiving module 401 is used to receive the vibration frequency of a quartz crystal oscillator during the evaporation operation performed by the evaporation device;

[0106] A coating speed calculation module 402, used to calculate the coating speed of the coating vapor ejected from the nozzle according to the vibration frequency;

[0107] A coating speed determination module 403 is used to determine whether the coating speed is greater than a preset speed threshold, if so, execute an abnormal determination module 404, if not, execute a first normal determination module 405;

[0108] An abnormality determination module 404, used to determine the nozzle blockage abnormality;

[0109] The first normal determination module 405 is used to determine that the nozzle is normal and return the result to the vibration frequency receiving module 401 .

[0110] Optionally, the vibration frequency receiving module 401 includes:

[0111] A first vibration frequency receiving unit, used for receiving a first vibration frequency of the quartz crystal oscillator at the beginning of a detection cycle;

[0112] The second vibration frequency receiving unit is used to receive the second vibration frequency of the quartz crystal oscillator at the end of the detection period.

[0113] Optionally, the coating speed calculation module 402 includes:

[0114] a frequency variation calculation unit, configured to calculate an absolute value of a difference between the first vibration frequency and the second vibration frequency to obtain a frequency variation;

[0115] The coating speed calculation unit is used to calculate the coating speed of the coating vapor ejected from the nozzle according to the frequency change and the period length of the detection period.

[0116] Optionally, the coating speed calculation unit includes:

[0117] A crystal density and thickness calculation subunit, used to obtain the quartz crystal density and quartz crystal thickness of the quartz crystal at the beginning of the detection period;

[0118] A coefficient calculation subunit, used for calculating a first product of the quartz crystal density and the quartz crystal thickness, and calculating a ratio of the first product to the first vibration frequency to obtain a coefficient K of the detection period;

[0119] A coating thickness calculation subunit, used for calculating the ratio of the frequency change to a preset coating density, and calculating a second product of the ratio and the coefficient K, and determining the second product as the coating thickness of the quartz crystal oscillator within the detection period;

[0120] The coating speed calculation subunit is used to calculate the ratio of the coating thickness to the cycle length of the detection cycle to obtain the coating speed of the coating vapor ejected by the nozzle.

[0121] Optionally, also include:

[0122] The heating power increasing module is used to control the heating device of the evaporation equipment to increase the heating power of the heating device.

[0123] Optionally, also include:

[0124] A color data detection module, used for detecting color data of a preset number of display panels after increasing the heating power of the heating device;

[0125] A color data determination module, used to determine whether the color data is abnormal, if so, execute the adjustment times counting module, if not, execute the second normal determination module;

[0126] An adjustment times statistics module is used to determine the nozzle blockage abnormality and count the heating power adjustment times;

[0127] The second normal determination module is used to determine that the nozzle is normal.

[0128] Optionally, also include:

[0129] The adjustment times judgment module is used to judge whether the heating power adjustment times reaches the times threshold, if so, execute the work stop control module, if not, execute the heating power increase module.

[0130] The stop working control module is used to control the evaporation equipment to stop working and generate alarm information for manually processing the nozzle blockage abnormality.

[0131] The device for detecting abnormality of a nozzle of a vapor deposition device provided in an embodiment of the present invention can execute the method for detecting abnormality of a nozzle of a vapor deposition device provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0132] Embodiment 4

[0133] Figure 5 A schematic diagram of the structure of an electronic device 40 that can be used to implement an embodiment of the present invention is shown. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or required herein.

[0134] like Figure 5As shown, the electronic device 40 includes at least one processor 41, and a memory connected to the at least one processor 41, such as a read-only memory (ROM) 42, a random access memory (RAM) 43, etc., wherein the memory stores a computer program that can be executed by at least one processor, and the processor 41 can perform various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 42 or the computer program loaded from the storage unit 48 to the random access memory (RAM) 43. In the RAM 43, various programs and data required for the operation of the electronic device 40 can also be stored. The processor 41, the ROM 42, and the RAM 43 are connected to each other through a bus 44. An input / output (I / O) interface 45 is also connected to the bus 44.

[0135] A number of components in the electronic device 40 are connected to the I / O interface 45, including: an input unit 46, such as a keyboard, a mouse, etc.; an output unit 47, such as various types of displays, speakers, etc.; a storage unit 48, such as a disk, an optical disk, etc.; and a communication unit 49, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 49 allows the electronic device 40 to exchange information / data with other devices through a computer network such as the Internet and / or various telecommunication networks.

[0136] The processor 41 may be a variety of general and / or special processing components with processing and computing capabilities. Some examples of the processor 41 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any appropriate processor, controller, microcontroller, etc. The processor 41 executes the various methods and processes described above, such as a method for detecting abnormalities in a nozzle of a vapor deposition device.

[0137] In some embodiments, the evaporation device nozzle abnormality detection method may be implemented as a computer program, which is tangibly contained in a computer-readable storage medium, such as a storage unit 48. In some embodiments, part or all of the computer program may be loaded and / or installed on the electronic device 40 via the ROM 42 and / or the communication unit 49. When the computer program is loaded into the RAM 43 and executed by the processor 41, one or more steps of the evaporation device nozzle abnormality detection method described above may be performed. Alternatively, in other embodiments, the processor 41 may be configured to execute the evaporation device nozzle abnormality detection method in any other appropriate manner (e.g., by means of firmware).

[0138] Various implementations of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), application specific standard products (ASSPs), systems on chips (SOCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various implementations can include: being implemented in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which can be a special purpose or general purpose programmable processor that can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit data and instructions to the storage system, the at least one input device, and the at least one output device.

[0139] Computer programs for implementing the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, so that when the computer program is executed by the processor, the functions / operations specified in the flow chart and / or block diagram are implemented. The computer program may be executed entirely on the machine, partially on the machine, partially on the machine and partially on a remote machine as a stand-alone software package, or entirely on a remote machine or server.

[0140] In the context of the present invention, a computer-readable storage medium may be a tangible medium that may contain or store a computer program for use by or in combination with an instruction execution system, device or equipment. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices or equipment, or any suitable combination of the foregoing. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. A more specific example of a machine-readable storage medium may include an electrical connection based on one or more lines, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.

[0141] To provide interaction with a user, the systems and techniques described herein may be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or trackball) through which the user can provide input to the electronic device. Other types of devices may also be used to provide interaction with the user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0142] The systems and techniques described herein may be implemented in a computing system that includes backend components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes frontend components (e.g., a user computer with a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such backend components, middleware components, or frontend components. The components of the system may be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), a blockchain network, and the Internet.

[0143] A computing system may include a client and a server. The client and the server are generally remote from each other and usually interact through a communication network. The client and server relationship is generated by computer programs running on the corresponding computers and having a client-server relationship with each other. The server may be a cloud server, also known as a cloud computing server or cloud host, which is a host product in the cloud computing service system to solve the defects of difficult management and weak business scalability in traditional physical hosts and VPS services.

[0144] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0145] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for detecting abnormality of a nozzle of a vapor deposition device, characterized in that: The evaporation equipment is provided with a quartz crystal oscillator, including: During the evaporation operation performed by the evaporation device, receiving the vibration frequency of the quartz crystal oscillator; Calculating a coating speed of the coating vapor ejected from the nozzle according to the vibration frequency; Determining whether the coating speed is greater than a preset speed threshold; If yes, it is determined that the nozzle is abnormally clogged; If not, it is determined that the nozzle is normal, and the process returns to the step of receiving the vibration frequency of the quartz crystal oscillator during the evaporation operation performed by the evaporation equipment.

2. The method for detecting abnormality of a nozzle of a vapor deposition device according to claim 1, characterized in that: During the evaporation operation performed by the evaporation device, receiving the vibration frequency of the quartz crystal oscillator includes: receiving a first vibration frequency of the quartz crystal oscillator at the beginning of a detection cycle; A second vibration frequency of the quartz crystal oscillator is received at the end of the detection period.

3. The method for detecting abnormality of a nozzle of a vapor deposition device according to claim 2, characterized in that: Calculating the coating speed of the coating vapor ejected from the nozzle by the vibration frequency includes: Calculating the absolute value of the difference between the first vibration frequency and the second vibration frequency to obtain a frequency change; The coating speed of the coating vapor ejected from the nozzle is calculated according to the frequency variation and the period length of the detection period.

4. The method for detecting abnormality of a nozzle of a vapor deposition device according to claim 3, characterized in that: Calculating the coating speed of the coating vapor ejected from the nozzle by the frequency variation and the period length of the detection period includes: Obtaining the quartz crystal density and the quartz crystal thickness of the quartz crystal at the beginning of the detection period; Calculating a first product of the quartz crystal density and the quartz crystal thickness, and calculating a ratio of the first product to the first vibration frequency to obtain a coefficient K of the detection period; Calculating a ratio of the frequency change to a preset coating density, and calculating a second product of the ratio and the coefficient K, and determining the second product as the coating thickness of the quartz crystal oscillator within the detection period; The ratio of the coating thickness to the cycle length of the detection cycle is calculated to obtain the coating speed of the coating vapor ejected from the nozzle.

5. The method for detecting abnormality of a nozzle of a vapor deposition device according to any one of claims 1 to 4, characterized in that: After determining that the nozzle is blocked abnormally, the method further includes: The heating device of the evaporation equipment is controlled to increase the heating power of the heating device.

6. The method for detecting abnormality of a nozzle of a vapor deposition device according to claim 5, characterized in that: After controlling the heating device of the evaporation equipment to increase the heating power of the heating device, the method further includes: Detecting color data of a preset number of display panels; Determining whether the color data is abnormal; If yes, determine that the nozzle is abnormally clogged, and count the number of times the heating power is adjusted; If not, it is determined that the nozzle is normal.

7. The method for detecting abnormality of a nozzle of a vapor deposition device according to claim 6, characterized in that: After counting the number of heating power adjustments, it also includes: Determining whether the heating power adjustment times reaches a times threshold; If yes, control the evaporation equipment to stop working, and generate an alarm message for manually handling the nozzle blockage abnormality; If not, return to the step of controlling the heating device of the evaporation equipment to increase the heating power of the heating device.

8. A device for detecting abnormality of a nozzle of a vapor deposition device, characterized in that: The evaporation equipment is provided with a quartz crystal oscillator, and the evaporation equipment nozzle abnormality detection device comprises: A vibration frequency receiving module, used for receiving the vibration frequency of a quartz crystal oscillator during the evaporation operation performed by the evaporation device; A coating speed calculation module, used for calculating the coating speed of the coating vapor ejected from the nozzle according to the vibration frequency; A coating speed determination module, used to determine whether the coating speed is greater than a preset speed threshold, if so, execute an abnormal determination module, if not, execute a first normal determination module; An abnormality determination module, used for determining that the nozzle is blocked abnormally; The first normal determination module is used to determine that the nozzle is normal and return the result to the vibration frequency receiving module.

9. An electronic device, characterized in that: The electronic device comprises: at least one processor; and a memory communicatively connected to the at least one processor; wherein, The memory stores a computer program executable by the at least one processor, and the computer program is executed by the at least one processor so that the at least one processor can execute the method for detecting nozzle abnormality of a vapor deposition device according to any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the method for detecting abnormalities in a nozzle of a vapor deposition device according to any one of claims 1 to 7 when the instructions are executed.

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