Deformable orbital molecular screen with increased ultrahigh vacuum space

Abstract

The invention discloses a deformable orbital molecular screen capable of increasing an ultrahigh vacuum space. The deformable orbital molecular screen comprises a circular molecular screen substrate and flaps, the multiple flaps are located on one side of the circular molecular screen substrate, one ends of the multiple flaps are clamped and fixed along the periphery of the circular molecular screen substrate, the multiple flaps are sequentially and closely spliced to form a shielding ring similar to a circular truncated cone in a surrounding mode, and the outline of each flap is not larger than that of the circular molecular screen substrate. The volume range of the ultrahigh vacuum area can be increased, machining and rocket transportation are convenient, and rapid assembly can be achieved.

Description

Technical Field

[0001] The invention relates to the technical field of space vacuum manufacturing, and in particular to a deformable orbital molecular screen for increasing ultra-high vacuum space. Background Art

[0002] like Fig.19 As shown in the figure, the orbital molecular screen is a stainless steel disk that flies at high speed in a low orbit (300km-500km). It is placed in front of the orbiter or experimental equipment in the flight direction. According to the principle of high-speed kinematics, an ultra-high vacuum zone (about 10 -13 Pa), providing an ultra-high vacuum zone for orbiters or experimental equipment. The United States launched a total of three space flight missions with an orbital molecular screen "Wake Shield Facility" between 1994 and 1996; Russia began to implement a similar orbital molecular screen space device "Screen-M" in 1996. However, the orbital molecular screen devices of both are almost the same: a stainless steel flat disk with a diameter of about 3.7 meters and a thickness of 0.3 meters. Although this structural design can achieve ultra-high vacuum in its wake area in the predetermined orbit, it is far from the theoretical calculated value (about 10 -13 Pa), only reached 10 - 9 Pa. According to the analysis results, part of the reason is that the high-speed moving hydrogen atoms entered the wake area, causing the pressure to increase, which in turn limited the volume area of ​​the ultra-high vacuum.

[0004] Due to the rapid development of space science and technology in recent years, especially the emergence of commercial aerospace companies led by Space X, the cost of round-trip transportation to space has been greatly reduced, and it is expected to continue to decrease in the future. Against this background, space experiments and space manufacturing have ushered in a booming development. The orbital molecular screen provides the necessary experimental and production environment for the experiments of molecular beam epitaxy technology in space and the large-scale production of high-performance semiconductor materials in space. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the present invention is to propose a deformable orbital molecular screen that increases the ultra-high vacuum space, increases the volume range of the ultra-high vacuum area, and is easy to process and transport by rocket, and can be quickly assembled.

[0006] The deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention comprises:

[0007] Circular molecular screen substrate;

[0008] Flaps, there are multiple flaps, and the multiple flaps are located on one side of the circular molecular screen substrate. One end of the multiple flaps is clamped and fixed along the peripheral portion of the circular molecular screen substrate, and the multiple flaps are adjacent to each other in sequence to form a truncated cone-shaped shielding ring, and the outline of each flap is not larger than the outline of the circular molecular screen substrate.

[0009] According to the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention, the circular molecular screen substrate and the flaps are manufactured separately, which is convenient for processing and does not need to be assembled on the earth. Since the outline of each flap is not larger than the outline of the circular molecular screen substrate, the flaps and the circular molecular screen substrate can be stacked and placed, which does not change the maximum vertical cross-sectional area compared to the conventional plane disk orbital molecular screen, and meets the transportation requirements of the rocket, and is convenient for transportation by the carrier rocket. When the flaps and the circular molecular screen substrate arrive in space, the flaps and the circular molecular screen substrate are quickly connected and assembled by the robotic arm to form the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention; and the epitaxial device is arranged in the shielding circle and installed on one side of the circular molecular screen substrate. Since the size of the circular molecular screen substrate is close to or consistent with that of the conventional planar disk orbital molecular screen, a truncated cone-shaped shielding ring is added to the peripheral portion of the circular molecular screen substrate. Therefore, the size of the assembled deformable orbital molecular screen for increasing ultra-high vacuum space is much larger than that of the conventional planar disk orbital molecular screen. When the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention flies on a predetermined orbit, the shielding ring can effectively prevent high-speed moving gas substances from entering the wake area of ​​the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention, thereby expanding the spatial volume range of the ultra-high vacuum area, which can meet the ultra-high vacuum environment required for space experiments or large-scale production and manufacturing of epitaxial equipment.

[0010] In some embodiments, the joint surfaces between two adjacent flaps form bending surfaces in the thickness direction of each flap.

[0011] In some embodiments, the bending surface is a step surface.

[0012] In some embodiments, one end of the flap includes a first end surface, and the first end surface abuts against a peripheral surface of the circular molecular screen substrate.

[0013] In some embodiments, it further includes a second end surface, wherein the second end surface is connected to the first end surface, and the second end surface abuts against an edge of one side of the circular molecular screen substrate.

[0014] In some embodiments, the installation angle between each flap and the circular molecular screen substrate is the same, and the installation angle between the flap and the circular molecular screen substrate is 30 to 60 degrees.

[0015] In some embodiments, the mounting angle between the flap and the circular molecular screen substrate is 45 degrees.

[0016] In some embodiments, the plurality of flaps are identical, and the number of the flaps is not less than five.

[0017] In some embodiments, a plurality of first clamping assemblies are disposed in the periphery of the circular molecular screen substrate, a second clamping assembly is disposed at one end of each of the plurality of flaps, and the first clamping assemblies are clamped with corresponding second clamping assemblies.

[0018] In some embodiments, a first mounting hole and a second mounting hole are formed on the circumferential surface of the circular molecular screen substrate, the axis of the first mounting hole intersects with the axis of the second mounting hole, and the inner end of the first mounting hole is connected to the side of the second mounting hole; the first clamping assembly is installed in the first mounting hole, and the first clamping assembly can be elastically retractable and can extend into the second mounting hole under its own elastic action;

[0019] A third mounting hole is provided on the first end surface; the second clamping assembly is installed in the third mounting hole and extends out of the third mounting hole, and the extending portion of the second clamping assembly is used to be inserted into the second mounting hole to be clamped with the first clamping assembly.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0022] Figure 1 A three-dimensional schematic diagram of a deformable orbital molecular screen for increasing ultra-high vacuum space according to the present invention;

[0023] Figure 2 A front view of a deformable orbital molecular screen for increasing ultra-high vacuum space according to the present invention;

[0024] Figure 3 for Figure 2 Schematic diagram of the cross section at AA;

[0025] Figure 4 It is a front schematic diagram of the circular molecular screen substrate of the present invention;

[0026] Figure 5 is a side view of the circular molecular screen substrate of the present invention;

[0027] Figure 6 for Figure 4 The cross-sectional view at BB;

[0028] Figure 7 A schematic diagram of a flap of the present invention in one direction;

[0029] Figure 8 Another schematic diagram of the flap of the present invention;

[0030] Fig. 9 for Figure 8 Cross-sectional view at CC of ;

[0031] Fig.10 is a schematic diagram of a bending surface of a flap of the present invention;

[0032] Fig.11 is a three-dimensional diagram of the first clamping assembly of the present invention;

[0033] Fig.12 It is a front view of the first clamping assembly of the present invention;

[0034] Fig.13 is a three-dimensional diagram of the second clamping assembly of the present invention;

[0035] Fig.14 It is a front view of the first clamping assembly of the present invention;

[0036] Fig.15 for Figure 3 The enlarged schematic diagram at I in the middle;

[0037] Fig.16 for Figure 6 The enlarged schematic diagram at M in the middle;

[0038] Fig.17 for Fig. 9 The enlarged schematic diagram at N in the middle;

[0039] Fig.18 A schematic diagram of the deformable orbital molecular screen for increasing ultra-high vacuum space to generate an ultra-high vacuum region according to the present invention;

[0040] Fig.19 Schematic diagram of the generation of ultra-high vacuum region by a conventional planar disk-orbital molecular screen.

[0041] Reference numerals:

[0042] Circular molecular screen substrate 10; first mounting hole 101; large hole 1011; small hole 1012; second mounting hole 102; first clamping assembly 103; anti-slip plate 1031; slider stopper 1032; slider 1033; spring 1034; flap 20; bending surface 201; first end surface 202; second end surface 203; third mounting hole 204; second clamping assembly 205; mounting seat 2051; insertion rod 2052; mounting angle α; epitaxial device 30. DETAILED DESCRIPTION

[0043] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0044] Combine the following Figures 1 to 18 The deformable orbital molecular screen for increasing the ultra-high vacuum space according to an embodiment of the present invention is described.

[0045] like Figures 1 to 18 As shown, the deformable orbital molecular screen for increasing ultra-high vacuum space according to an embodiment of the present invention is improved based on a conventional planar disk orbital molecular screen, and includes a circular molecular screen substrate 10 and a flap 20 .

[0046] The size of the circular molecular screen substrate 10 is close to or consistent with that of a conventional planar disc orbital molecular screen. There are multiple flaps 20, all of which are in the shape of arc sectors. The multiple flaps 20 are located on one side of the circular molecular screen substrate 10, one end of the multiple flaps 20 is clamped and fixed along the peripheral portion of the circular molecular screen substrate 10, and the multiple flaps 20 are adjacent to each other in sequence to form a shielding ring similar to a truncated cone, and the outline of each flap 20 is not larger than the outline of the circular molecular screen substrate 10.

[0047] According to the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention, the circular molecular screen substrate 10 and the flap 20 are manufactured separately and are not assembled on the earth. Since the outline of each flap 20 is not larger than the outline of the circular molecular screen substrate 10, the flap 20 and the circular molecular screen substrate 10 can be stacked and placed. Compared with the conventional plane disk orbital molecular screen, the maximum vertical cross-sectional area is not changed, which is convenient for transportation by a carrier rocket. When the flap 20 and the circular molecular screen substrate 10 arrive in space, the flap 20 and the circular molecular screen substrate 10 are quickly connected and assembled by a robotic arm to form the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention; and the epitaxial device 30 is arranged in the shielding circle and installed on one side of the circular molecular screen substrate 10. Since the size of the circular molecular screen substrate 10 is close to or consistent with that of the conventional planar disk orbital molecular screen, a truncated cone-shaped shielding ring is added to the peripheral portion of the circular molecular screen substrate 10. Therefore, the size of the assembled deformable orbital molecular screen for increasing ultra-high vacuum space is much larger than that of the conventional planar disk orbital molecular screen. When the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention flies on a predetermined orbit, the shielding ring can effectively prevent high-speed moving gas substances from entering the wake area of ​​the deformable orbital molecular screen for increasing ultra-high vacuum space of the embodiment of the present invention, thereby expanding the spatial volume range of the ultra-high vacuum area, which can meet the ultra-high vacuum environment required for space experiments or large-scale production and manufacturing of the epitaxial equipment 30.

[0048] Reference below Fig.18 and Fig.19 This proves that the volume range of the ultra-high vacuum region of the deformable orbital molecular screen for increasing the ultra-high vacuum space in the embodiment of the present invention is greatly increased compared with the conventional planar disk orbital molecular screen.

[0049] Fig.18 The ultra-high vacuum region generated by the deformable orbital molecular screen for increasing the ultra-high vacuum space of the embodiment of the present invention is shown in FIG. 1 , wherein the diameter of the circular molecular screen substrate 10 is 3.7 m, the dimension from one end of the flap 20 to the other end is 1.85 m, and the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 45 degrees. Theoretically verified, the shadow volume of the ultra-high vacuum region is 58.66 m 3 .

[0050] Fig.19 Schematic diagram of the ultra-high vacuum region generated by a conventional plane disk orbital molecular screen. The conventional plane disk orbital molecular screen has a diameter of 3.7m. Theoretically verified that the shadow volume of the ultra-high vacuum region is 10.36m 3 .

[0051] In some embodiments, Figure 1 to Figure 2 , Figures 7 to 10As shown, the joint surfaces between the two adjacent flaps 20 form a bending surface 201 in the thickness direction of each flap. In this way, when the deformable orbital molecular screen for increasing the ultra-high vacuum space of this embodiment flies on a predetermined orbit, it can effectively block the high-speed moving gas substances from entering the wake area from the connection between the two adjacent flaps 20, which is conducive to expanding the spatial volume range of the ultra-high vacuum area and providing the required ultra-high vacuum environment for the space experiment or large-scale production of the epitaxial device 30.

[0052] In some embodiments, the bending surface 201 is a step surface. In this way, the splicing between two adjacent flaps 20 is simple, and when the deformable orbital molecular screen of the embodiment that increases the ultra-high vacuum space flies on a predetermined orbit, it can effectively block the high-speed moving gas substances from entering the wake area from the connection between two adjacent flaps 20, which is conducive to expanding the spatial volume range of the ultra-high vacuum area and providing the required ultra-high vacuum environment for the space experiment or large-scale production of the epitaxial device 30.

[0053] In some embodiments, Figure 3 , Figure 15 to Figure 16 As shown, one end of the flap 20 includes a first end surface 202, and the first end surface 202 abuts against the peripheral surface of the circular molecular screen substrate 10. Therefore, when the deformable orbital molecular screen with increased ultra-high vacuum space of this embodiment flies on a predetermined orbit, it can effectively block high-speed moving gas substances from entering the wake area from the connection between the flap 20 and the circular molecular screen substrate 10, which is conducive to expanding the spatial volume range of the ultra-high vacuum area and providing the required ultra-high vacuum environment for space experiments or large-scale production of the epitaxial device 30.

[0054] In some embodiments, Figure 3 , Figures 15 to 17 As shown, the second end face 203 is also included, and the second end face 203 is connected to the first end face 202, for example, vertically connected, and the second end face 203 abuts against the edge of one side of the circular molecular screen substrate 10. Therefore, when the deformable orbital molecular screen with increased ultra-high vacuum space in this embodiment flies on a predetermined orbit, it can further effectively block high-speed moving gas substances from entering the wake area from the connection between the flap 20 and the circular molecular screen substrate 10, which is conducive to expanding the spatial volume range of the ultra-high vacuum area, and providing the required ultra-high vacuum environment for space experiments or large-scale production of the epitaxial device 30.

[0055] In some embodiments, Figure 3 As shown, the installation angle α between each flap 20 and the circular molecular screen substrate 10 is the same, and the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 30 to 60 degrees, which can prevent gas substances from entering the epitaxial device 30 from the side, and generate a vacuum as much as possible while preventing gas from entering from the side.

[0056] In some embodiments, the installation angle α between the flap 20 and the circular molecular screen substrate 10 is 45 degrees, which can prevent gas substances from entering the epitaxial device 30 from the side, thereby maximally generating a vacuum and preventing gas from entering from the side.

[0057] In some embodiments, multiple flaps 20 are the same, so that the flaps 20 can be produced in a modular manner, and it is also convenient to assemble with the circular molecular screen substrate 10. The number of flaps 20 is not less than 5. When the flaps 20 are 1 to 4, the maximum size of a single flap 20 is larger than the size of the circular molecular screen substrate 10, which violates the principle of easy carrying in a rocket and is not convenient for a single flap 20 to be stacked on the circular molecular screen substrate 10.

[0058] In some embodiments, Figures 1 to 17 As shown, a plurality of first snap-in assemblies 103 are provided in the periphery of the circular molecular screen substrate 10, and a second snap-in assemblies 205 are provided at one end of each of the plurality of flaps 20, and the first snap-in assemblies 103 are snap-fitted with the corresponding second snap-in assemblies 205. Thus, the flaps 20 and the circular molecular screen substrate 10 are easily assembled and fixed reliably. It should be noted that the number of the second snap-in assemblies 205 at one end of each flap 20 can be reasonably determined according to actual requirements, for example, Figure 7 It is shown that the number of the second clamping components 205 on one end of a single flap 20 is two, so that the flap 20 and the circular molecular screen substrate 10 can be reliably fixed.

[0059] In some embodiments, a first mounting hole 101 and a second mounting hole 102 are opened on the circumferential surface of the circular molecular screen substrate 10, the axis of the first mounting hole 101 intersects with the axis of the second mounting hole 102, and the inner end of the first mounting hole 101 is connected to the side of the second mounting hole 102; the first snap-in component 103 is installed in the first mounting hole 101, and the first snap-in component 103 is elastically retractable and can extend into the second mounting hole 102 under its own elastic action; a third mounting hole 204 is provided on the first end surface 202; the second snap-in component 205 is installed in the third mounting hole 204 and the second snap-in component 205 extends out of the third mounting hole 204, and the protruding part of the second snap-in component 205 is used to be inserted into the second mounting hole 102 to snap-in with the first snap-in component 103. Thus, one end of the flap 20 can be in contact with the circular molecular screen substrate 10 , and the first clamping assembly 103 and the second clamping assembly 205 can be clamped with each other, so that the flap 20 and the circular molecular screen substrate 10 can be quickly clamped and fixed.

[0060] Specifically, the first mounting hole 101 includes a large hole 1011 and a small hole 1012 which are axially connected. The large hole 1011 is located at the outer end of the small hole 1012 , and the inner end of the small hole 1012 is connected to the side of the second mounting hole 102 .

[0061] The first clamping assembly 103 includes an anti-slip plate 1031, a slider stopper 1032, a slider 1033 and a spring 1034. The anti-slip plate 1031 is fixed on the inner end wall of the large hole 1011. The slider stopper 1032 can slide through the anti-slip plate 1031 and the small hole 1012. One end of the slider stopper 1032 has a blocking portion, which is used to abut against the outer side surface of the anti-slip plate 1031 and is fixed to the slider 1033. The other end of the slider stopper 1032 is fixed to one end of the slider 1033. The spring 1034 is sleeved on the slider 1033, and both ends of the spring 1034 abut between the anti-slip plate 1031 and the slider 1033.

[0062] The second clamping assembly 205 includes a mounting seat 2051 and an insertion rod 2052, one end of the insertion rod 2052 is fixed in the third mounting hole through the mounting seat 2051, and the other end of the insertion rod 2052 is provided with a clamping head. When the other end of the insertion rod 2052 is inserted into the second mounting hole 102, the clamping head squeezes the slider 1033 when passing the other end of the slider 1033 until the clamping head completely passes over the other end of the slider 1033. Driven by the spring 1034, the slider 1033 moves the slider stopper 1032 and the slider 1033 toward the insertion rod 2052 together, so that the other end of the slider 1033 is clamped with the clamping head. At this time, the limiting part abuts against the outer surface of the anti-slip plate 1031.

[0063] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A deformable orbital molecular screen for increasing ultra-high vacuum space, characterized in that: include: Circular molecular screen substrate; Flaps, there are multiple flaps, and the multiple flaps are located on one side of the circular molecular screen substrate. One end of the multiple flaps is clamped and fixed along the peripheral portion of the circular molecular screen substrate, and the multiple flaps are adjacent to each other in sequence to form a truncated cone-shaped shielding ring, and the outline of each flap is not larger than the outline of the circular molecular screen substrate.

2. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 1, characterized in that: The joint surfaces between the two adjacent flaps form bending surfaces in the thickness direction of each flap.

3. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 2, characterized in that: The bending surface is a step surface.

4. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 1, characterized in that: One end of the flap includes a first end surface, and the first end surface abuts against the peripheral surface of the circular molecular screen substrate.

5. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 4, characterized in that: It also includes a second end face, the second end face is connected to the first end face, and the second end face abuts against an edge of one side of the circular molecular screen substrate.

6. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 1, characterized in that: The installation angle between each flap and the circular molecular screen substrate is the same, and the installation angle between the flap and the circular molecular screen substrate is 30 to 60 degrees.

7. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 6, characterized in that: The installation angle between the flap and the circular molecular screen substrate is 45 degrees.

8. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 1, characterized in that: The plurality of flaps are identical, and the number of the flaps is not less than 5.

9. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 4, characterized in that: A plurality of first clamping assemblies are arranged in the peripheral part of the circular molecular screen substrate, and a second clamping assembly is arranged at one end of each of the plurality of flaps, and the first clamping assembly is clamped with the corresponding second clamping assembly.

10. The deformable orbital molecular screen for increasing ultra-high vacuum space according to claim 9, characterized in that: A first mounting hole and a second mounting hole are formed on the circumferential surface of the circular molecular screen substrate, the axis of the first mounting hole intersects with the axis of the second mounting hole, and the inner end of the first mounting hole is connected to the side of the second mounting hole; the first clamping assembly is installed in the first mounting hole, and the first clamping assembly can be elastically retractable and can extend into the second mounting hole under its own elastic action; A third mounting hole is provided on the first end surface; the second clamping assembly is installed in the third mounting hole and extends out of the third mounting hole, and the extending portion of the second clamping assembly is used to be inserted into the second mounting hole to be clamped with the first clamping assembly.

Images