Water inlet system of wet process tank

By designing the water inlet and outlet pipe system in the process tank, and using the angle and arrangement of the water outlet holes to achieve the cleaning function, the problem of low cleaning efficiency of the process tank in the prior art is solved and the production efficiency is improved.

CN222146256UActive Publication Date: 2024-12-10苏州普伊特自动化系统有限公司 +3
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Patent Information

Application Number
CN202322837771.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2023-10-23
Publication Date
2024-12-10
Estimated Expiration
2033-10-23

AI Technical Summary

Technical Problem

After the existing process tank is used for a period of time, the inner wall of the tank body will produce liquid crystallization or silicon wafer etch residue, resulting in a long-term manual cleaning and reducing production efficiency.

Method used

Design a wet process tank water inlet system, including water inlet pipe and water outlet pipe, the water outlet pipe is equipped with water outlet holes along the length of the tank body, and the water inlet and water outlet flow is controlled through a pneumatic diaphragm valve, and the angle and arrangement of the water outlet holes are used to achieve cleaning. Function, can both inlet water and clean the tank body.

Benefits of technology

The time to clean the tank body is reduced, the utilization rate of water is improved, and the production efficiency is improved.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a water inlet system of a wet process tank. A main tank body comprises a first side wall, a second side wall and a tank bottom surface, wherein the first side wall and the second side wall are opposite; two ends of the tank bottom surface are respectively connected to the first side wall and the second side wall; the groove bottom surface is an inclined surface, the high-position end of the groove bottom surface is connected with the first side wall, and the low-position end of the groove bottom surface is connected with the second side wall; the water inlet system comprises a water inlet pipe connected with an external water pipe, and a ball valve for controlling the water inlet amount is arranged on the water inlet pipe; a water outlet pipe is arranged in the main tank body and arranged in the length direction of the first side wall, a water inlet of the water outlet pipe communicates with a water outlet of the water inlet pipe, and a plurality of water outlet holes are formed in the length direction of the water outlet pipe. When water is fed through factory service, the tank body is cleaned along the tank bottom surface of the main tank body through the water outlet holes formed in the water outlet pipe in the length direction, water can be fed, the tank body can be cleaned, the tank body cleaning time can be shortened, and the water utilization rate can be increased.
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Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic silicon wafer wet process, in particular to a wet process tank water inlet system. Background Art

[0002] In the production process of solar cells, silicon wafers need to go through multiple processes such as texturing and cleaning, so multiple process tanks filled with corresponding liquids are needed.

[0003] After a period of use, the process tank will produce crystals of chemical solution or silicon wafer etching residues, turbidity on the surface of silicon wafers and other deposits on the inner wall of the tank. Therefore, the process tank needs to be cleaned regularly to ensure the process effect. The process tank of the prior art cannot be cleaned with water. The water supply only meets the water supply of the tank, so the function is single. When the tank needs to be cleaned, a water gun needs to be used to clean the tank separately, which takes a long time to clean, resulting in low overall production efficiency. Utility Model Content

[0004] Therefore, the purpose of the utility model is to provide a water inlet system for a wet process tank, wherein the process tank comprises a main tank body, the main tank body comprises a first side wall and a second side wall opposite to each other, and a tank bottom surface whose two ends are respectively connected to the first side wall and the second side wall; the tank bottom surface is an inclined surface, the high end of the tank bottom surface is connected to the first side wall, and the low end of the tank bottom surface is connected to the second side wall;

[0005] It is characterized in that the water inlet system includes a water inlet pipe connected to an external water pipe, and the water inlet pipe is provided with a ball valve for controlling the water inlet amount; a water outlet pipe is provided in the main tank body, and the water outlet pipe is arranged along the length direction of the first side wall, and the water inlet of the water outlet pipe is connected with the water outlet of the water inlet pipe, and a plurality of water outlet holes are opened along the length direction of the water outlet pipe.

[0006] Furthermore, the water inlet pipe is also provided with a pneumatic diaphragm valve for controlling water inlet, and the pneumatic diaphragm valve is located on the water inlet pipe at one end of the water inlet of the ball valve.

[0007] Wherein, the water outlet holes are arranged in an equidistant array along the length direction of the water outlet pipe.

[0008] At least two rows of water outlet holes are provided along the length direction of the water outlet pipe, and two adjacent rows of water outlet holes are staggered.

[0009] Wherein, an angle A of 20° to 45° is formed between the water outlet direction formed from the center of the water outlet hole to the axis of the water outlet pipe and the bottom surface of the main tank body.

[0010] Wherein, the angle A between the central axis of the water outlet and the bottom surface of the main tank body is 30° to 40°.

[0011] Wherein, the water outlet hole is a circular hole structure or a flat strip hole structure.

[0012] Wherein, the water outlet pipe is composed of a three-way connection part and two pipe parts, the water inlet of the three-way connection part is connected with the water inlet pipe, and the two pipe parts are respectively connected with the water outlet of the three-way connection part.

[0013] Based on the above technical scheme, the utility model has the following beneficial effects: when the structure takes in water, it can also become a cleaning mode through a plurality of water outlet holes opened on the outlet pipe along the length direction. That is, when water is taken in through factory services, the water inlet is controlled by a pneumatic diaphragm valve and the flow rate of the water inlet is controlled by a manual ball valve, so that the tank body is cleaned along the bottom surface of the main tank body through a plurality of water outlet holes opened on the outlet pipe along the length direction. It can both take in water and clean the tank body, which can reduce the time for cleaning the tank body and improve the utilization rate of water. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The exemplary embodiments of the present invention are explained in more detail below with reference to the accompanying drawings. In the drawings:

[0015] Figure 1 A front view of a process tank according to Embodiment 1 of the present application is shown;

[0016] Figure 2 A side view of a process tank according to the first embodiment of the present application is shown;

[0017] Figure 3 A cross-sectional view of a water outlet pipe according to Embodiment 1 of the present application is shown;

[0018] Figure 4 A schematic diagram showing a water outlet pipe according to the first embodiment of the present application;

[0019] Figure 5 A schematic diagram of a water outlet pipe according to the second embodiment of the present application is shown. DETAILED DESCRIPTION

[0020] The following is a description of exemplary embodiments of the present application in conjunction with the accompanying drawings, including various details of the embodiments of the present application to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present application. Similarly, for the sake of clarity and conciseness, the description of well-known functions and structures is omitted in the following description.

[0021] Embodiment 1:

[0022] Figure 1 and Figure 2The wet process tank and water inlet system shown in the figure, the process tank includes a main tank body 100 and a waste collecting tank body 200; the main tank body 100 includes a first side wall 110 and a second side wall 120 opposite to each other, and a tank bottom surface 130 whose two ends are respectively connected to the first side wall 110 and the second side wall 120; the tank bottom surface 130 is an inclined surface to achieve rapid liquid drainage, the high end of the tank bottom surface 130 is connected to the first side wall 110, and the low end of the tank bottom surface 130 is connected to the second side wall 120; the waste collecting tank body 200 is located outside the main tank body 100 and connected to the second side wall 120, and the second side wall 120 is provided with a drain port connecting the main tank body 100 and the waste collecting tank body 200 near the tank bottom surface 130;

[0023] Among them, the water inlet system includes a water inlet pipe 400 connected to an external water pipe, and the water inlet pipe 400 is provided with a pneumatic diaphragm valve 500 for controlling the water inlet and a ball valve 600 for controlling the water inlet amount, and the pneumatic diaphragm valve 500 is located on the water inlet pipe 400 at one end of the water inlet of the ball valve 600; a water outlet pipe 700 is provided in the main tank body 100, and the water outlet pipe 700 is arranged along the length direction BB of the first side wall 110, and the water inlet of the water outlet pipe 700 is connected with the water outlet of the water inlet pipe 400, and a plurality of water outlet holes 740 are opened along the length direction of the water outlet pipe 700.

[0024] When the main tank body 100 needs to be cleaned, the pneumatic diaphragm valve 500 is opened, and the ball valve 600 channel is opened as completely as possible, increasing the water inflow per unit time of the outlet pipe 700, thereby increasing the water outlet pressure of the outlet hole 740, and achieving the purpose of washing the dirt on the bottom surface 130 of the tank. After cleaning, the ball valve 600 channel is adjusted to be smaller, reducing the water inflow per unit time of the outlet pipe 700, thereby reducing the water outlet pressure of the outlet hole 740, so that stable water inflow can be achieved. The ball valve 600 can be controlled electrically or manually, and a manual ball valve is used in this embodiment.

[0025] See also Figure 4 The water outlet pipe 700 is composed of a three-way connection part 710 and two pipe parts 720. The water inlet of the three-way connection part 710 is connected to the water inlet pipe 400, and one end of the two pipe parts 720 is respectively connected to the water outlet of the three-way connection part 710. The other end of the pipe part 720 is provided with a plug 730 or an integral seal, and each pipe part 720 is provided with a water outlet hole 740.

[0026] like Figure 3As shown, in the first embodiment, the water outlet hole 740 is a circular hole structure, and the water outlet direction formed by the center of the water outlet hole 740 to the axis of the water outlet pipe 700 forms an angle A of 20° to 45° with the bottom surface of the main tank body 100, and the angle A is preferably 30° to 40°. By setting the water outlet angle of the water outlet hole 740 within this angle range, it can not only ensure that the water flow can flush away the dirt, but also make the contact point between the water flow and the bottom surface 130 of the tank as close to the first side wall 110 as possible.

[0027] like Figure 4 As shown, two rows of water outlet holes 740 may be arranged on the water outlet pipe 700 in an equidistant array along the length direction of the water outlet pipe 700 , and the two rows of water outlet holes 740 are staggered.

[0028] Embodiment 2:

[0029] This embodiment is different from the first embodiment in that Figure 5 It can be seen that the water outlet hole 740 is a flat strip-shaped hole structure, so that by extending the length of the water outlet hole 740 and reducing the width of the water outlet hole 740, the high-speed sprayed water flow can form a structure similar to a water knife, which can better flush out the deposited dirt.

[0030] Since the width of the water outlet holes 740 is relatively small, more than two rows of water outlet holes 740 may be designed along the circumference of the water outlet pipe 700 , and adjacent rows of water outlet holes 740 may also be arranged in a staggered manner.

[0031] The technical solution of the present application is explained above with exemplary preferred implementation modes. It should be noted that the above implementation modes are only used to illustrate the technical solution of the present application, rather than to limit it; although the present application is described in detail with reference to the aforementioned implementation modes, a person of ordinary skill in the art should understand that: it is still possible to modify the technical solutions described in the aforementioned implementation modes, or to replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the various implementation modes of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in each implementation mode can be combined in any way. The present application is not limited to the specific implementation modes disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A wet process tank water inlet system, the process tank comprising a main tank body (100), the main tank body (100) comprising a first side wall (110) and a second side wall (120) opposite to each other, and a tank bottom surface (130) with two ends respectively connected to the first side wall (110) and the second side wall (120); the tank bottom surface (130) is an inclined surface, the upper end of the tank bottom surface (130) is connected to the first side wall (110), and the lower end of the tank bottom surface (130) is connected to the second side wall (120); It is characterized in that The water inlet system comprises a water inlet pipe (400) connected to an external water pipe, and a ball valve (600) for controlling the water inlet amount is provided on the water inlet pipe (400); a water outlet pipe (700) is provided in the main tank body (100), and the water outlet pipe (700) is arranged along the length direction of the first side wall (110), and the water inlet of the water outlet pipe (700) is connected to the water outlet of the water inlet pipe (400), and a plurality of water outlet holes (740) are opened along the length direction of the water outlet pipe (700).

2. The wet process tank water inlet system according to claim 1, characterized in that: The water inlet pipe (400) is also provided with a pneumatic diaphragm valve (500) for controlling water inlet, and the pneumatic diaphragm valve (500) is located on the water inlet pipe (400) at one end of the water inlet of the ball valve (600).

3. The wet process tank water inlet system according to claim 1, characterized in that: The water outlet holes (740) are arranged in an equidistant array along the length direction of the water outlet pipe (700).

4. The wet process tank water inlet system according to claim 3, characterized in that: At least two rows of water outlet holes (740) are provided along the length direction of the water outlet pipe (700), and two adjacent rows of water outlet holes (740) are staggered.

5. The wet process tank water inlet system according to claim 1, characterized in that: An angle A of 20° to 45° is formed between the water outlet direction formed from the center of the water outlet hole (740) to the axis of the water outlet pipe (700) and the bottom surface of the main tank body (100).

6. The wet process tank water inlet system according to claim 5, characterized in that: An angle A between the central axis of the water outlet hole (740) and the bottom surface of the main tank body (100) is 30° to 40°.

7. The wet process tank water inlet system according to claim 1, characterized in that: The water outlet hole (740) is a circular hole structure or a flat strip hole structure.

8. The wet process tank water inlet system according to claim 1, characterized in that: The water outlet pipe (700) is composed of a three-way connection part (710) and two pipe parts (720), the water inlet of the three-way connection part (710) is connected to the water inlet pipe (400), and the two pipe parts (720) are respectively connected to the water outlets of the three-way connection part (710).