Semi-finished product transfer machine for semiconductor processing

Abstract

The utility model provides a semi-finished product transfer machine for semiconductor processing. The semi-finished product transfer machine for semiconductor processing comprises a base; a mounting column and a storage box, wherein the mounting column and the storage box are fixedly mounted on the base; the steering column is rotationally installed on the installation column, a fixing frame is installed on the steering column in a sliding mode, and one side of the fixing frame is attached to the inner wall of one side of the steering column; the mounting box is installed on the fixing frame in a sliding mode, a suction pump is fixedly installed on the inner wall of the top of the mounting box, the air inlet end of the suction pump is fixedly communicated with a suction pipe, and the air inlet end of the suction pipe is fixedly communicated with a suction cup; the moving mechanism is arranged on the fixing frame and used for moving the suction cup. The semi-finished product transfer machine for semiconductor processing has the advantages of being convenient to use and capable of avoiding damage to semiconductors.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to a semi-finished product transfer machine for semiconductor processing. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. In semiconductors, electrons are not tightly arranged, so they are easily affected by external electric fields. The conductivity of semiconductors depends on factors such as temperature, light and doping.

[0003] During the semiconductor processing process, semi-finished products need to be frequently transported and stored. However, the semi-finished products of semiconductor processing are very small. If they are transported by clamping, not only may the semiconductor be damaged, but it may also fall off during transportation.

[0004] Therefore, it is necessary to provide a new semiconductor processing semi-finished product transfer machinery to solve the above-mentioned technical problems. Utility Model Content

[0005] In order to solve the technical problem that semiconductor semi-finished products are easily damaged during transportation, the utility model provides a semiconductor processing semi-finished product transfer machine.

[0006] The semiconductor processing semi-finished product transfer machine provided by the utility model comprises: a base; a mounting column and a storage box, wherein the mounting column and the storage box are fixedly mounted on the base; a steering column, wherein the steering column is rotatably mounted on the mounting column, and a fixing frame is slidably mounted on the steering column, and one side of the fixing frame is in contact with an inner wall of one side of the steering column; a mounting box, wherein the mounting box is slidably mounted on the fixing frame, and a suction pump is fixedly mounted on the inner wall of the top of the mounting box, and an air inlet end of the suction pump is fixedly connected to a suction pipe, and an air inlet end of the suction pipe is fixedly connected to a suction cup;

[0007] A moving mechanism is arranged on the fixing frame and is used for moving the suction cup.

[0008] As a further solution of the utility model, the moving mechanism includes a transverse motor, a transverse screw and a slide seat. The transverse motor is fixedly installed on one side of the fixed frame, the transverse screw is rotatably installed on the fixed frame, one end of the transverse screw is fixedly connected to the output shaft of the transverse motor, the slide seat is threadedly installed on the transverse screw, and the slide seat is in contact with the top inner wall of the fixed frame.

[0009] As a further solution of the utility model, a drive motor is fixedly installed on one side of the steering column, a gear is rotatably installed inside the steering column, the gear is fixedly connected to the output shaft of the drive motor, and a plurality of teeth are provided on one side of the fixed frame, and the plurality of teeth are all meshed with the gear.

[0010] As a further solution of the utility model, a rotating motor is fixedly installed in the mounting column, and the output shaft of the rotating motor is fixedly connected to the bottom end of the steering column.

[0011] As a further solution of the utility model, a plurality of legs are fixedly installed on the bottom of the base, a shock-absorbing cylinder is fixedly installed on the bottom of the plurality of legs, a shock-absorbing spring is sleeved outside the plurality of shock-absorbing cylinders, and a moving wheel is fixedly installed on the bottom of the plurality of shock-absorbing cylinders.

[0012] As a further solution of the utility model, a guide rod is fixedly mounted on the inner wall of the steering column, and a guide groove is provided on the fixing frame, and the guide groove is in sliding contact with the guide rod.

[0013] As a further solution of the utility model, a partition is fixedly installed in the storage box, and the partition divides the storage box into a plurality of storage chambers. A sealing cover is hingedly installed on the top of the storage box.

[0014] Compared with the related art, the semiconductor processing semi-finished product transfer machine provided by the utility model has the following beneficial effects:

[0015] The utility model provides a semi-finished product transfer machine for semiconductor processing:

[0016] 1. The storage box can be used to place the semiconductors to be transported. For example, the semi-finished products of integrated circuits and semiconductor devices need to be packaged and protected to avoid being affected by the external environment. The suction force generated by the suction cup can suck up the semiconductor and complete the transportation without damaging the semiconductor. The position of the suction cup can be adjusted according to the position of the semiconductor by the slide seat moving on the transverse screw.

[0017] 2. Through the meshing of gears and teeth, the fixed frame can be pushed up and down on the steering column to adjust the height of the suction cup. The suction cup can be driven to turn after sucking the semiconductor by rotating the motor, and the semiconductor can be placed in the storage box. The moving wheel can move the device down to the processing area, and the shock-absorbing cylinder and shock-absorbing spring can avoid vibration during transportation, which may cause damage to the semiconductor.

[0018] 3. The guide rod can be used to limit and guide the fixed frame when it moves, so as to prevent the fixed frame from shifting and ensure that the teeth are always engaged with the gears. Multiple storage cavities can prevent semiconductors from accumulating in a box and causing them to be squeezed and damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.

[0020] Figure 1 A schematic diagram of a front cross-sectional structure of a preferred embodiment of the semiconductor processing semi-finished product transfer machine provided by the utility model;

[0021] Figure 2 A schematic diagram of the rear structure of a preferred embodiment of the semiconductor processing semi-finished product transfer machine provided by the utility model;

[0022] Figure 3 for Figure 1 A schematic diagram of the enlarged structure of part A;

[0023] Figure 4 for Figure 1 Schematic diagram of the enlarged structure of part B.

[0024] In the figure: 1. base; 2. mounting column; 3. storage box; 4. steering column; 5. fixing frame; 6. mounting box; 7. suction pump; 8. suction tube; 9. suction cup; 10. transverse motor; 11. transverse screw; 12. slide seat; 13. drive motor; 14. gear; 15. teeth; 16. rotating motor; 17. support leg; 18. shock-absorbing cylinder; 19. shock-absorbing spring; 20. moving wheel; 21. guide rod; 22. guide groove; 23. partition; 24. storage chamber. DETAILED DESCRIPTION

[0025] Please refer to Figure 1-Figure 4 ,in, Figure 1 A schematic diagram of a front cross-sectional structure of a preferred embodiment of the semiconductor processing semi-finished product transfer machine provided by the utility model; Figure 2 A schematic diagram of the rear structure of a preferred embodiment of the semiconductor processing semi-finished product transfer machine provided by the utility model; Figure 3 for Figure 1 A schematic diagram of the enlarged structure of part A; Figure 4 for Figure 1The enlarged structural diagram of part B in the figure. The semi-finished product transfer machine for semiconductor processing comprises: a base 1; a mounting column 2 and a storage box 3, both of which are fixedly mounted on the base 1; a steering column 4, which is rotatably mounted on the mounting column 2, and a fixing frame 5 is slidably mounted on the steering column 4, and one side of the fixing frame 5 is in contact with the inner wall of one side of the steering column 4; a mounting box 6, which is slidably mounted on the fixing frame 5, and a suction pump 7 is fixedly mounted on the top inner wall of the mounting box 6, and the air inlet end of the suction pump 7 is fixedly connected to a suction pipe 8, and the air inlet end of the suction pipe 8 is fixedly connected to a suction cup 9; a moving mechanism, which is arranged on the fixing frame 5 and used to move the suction cup 9, and the semiconductor to be transferred can be placed through the storage box 3. For example, for the semi-finished products of integrated circuits and semiconductor devices, they need to be packaged and protected to avoid being affected by the external environment. The suction force generated by the suction cup 9 can suck up the semiconductor to complete the transportation without damaging the semiconductor.

[0026] The moving mechanism includes a transverse motor 10, a transverse screw 11 and a slide 12. The transverse motor 10 is fixedly installed on one side of the fixed frame 5. The transverse screw 11 is rotatably installed on the fixed frame 5. One end of the transverse screw 11 is fixedly connected to the output shaft of the transverse motor 10. The slide 12 is threadedly installed on the transverse screw 11. The slide 12 is in contact with the top inner wall of the fixed frame 5. By moving the slide 12 on the transverse screw 11, the position of the suction cup 9 can be adjusted according to the position of the semiconductor.

[0027] A drive motor 13 is fixedly installed on one side of the steering column 4, and a gear 14 is rotatably installed inside the steering column 4. The gear 14 is fixedly connected to the output shaft of the drive motor 13. A plurality of teeth 15 are provided on one side of the fixing frame 5, and the plurality of teeth 15 are all meshed with the gear 14. Through the meshing of the gear 14 and the teeth 15, the fixing frame 5 can be pushed to rise and fall on the steering column 4 to adjust the height of the suction cup 9.

[0028] A rotating motor 16 is fixedly installed in the mounting column 2 , and the output shaft of the rotating motor 16 is fixedly connected to the bottom end of the steering column 4 . The rotating motor 16 can drive the suction cup 9 to turn after sucking the semiconductor, so that the semiconductor can be placed in the storage box 3 .

[0029] A plurality of legs 17 are fixedly mounted on the bottom of the base 1, and a shock-absorbing cylinder 18 is fixedly mounted on the bottom of each of the legs 17. Shock-absorbing springs 19 are sleeved outside each of the shock-absorbing cylinders 18, and moving wheels 20 are fixedly mounted on the bottom of each of the shock-absorbing cylinders 18. The moving wheels 20 can be used to move the device downward to the processing area, and the shock-absorbing cylinders 18 and shock-absorbing springs 19 can prevent vibration during transportation, which may cause damage to the semiconductor.

[0030] A guide rod 21 is fixedly mounted on the inner wall of the steering column 4, and a guide groove 22 is provided on the fixing frame 5. The guide groove 22 is in sliding contact with the guide rod 21. The guide rod 21 can limit and guide the fixing frame 5 when the fixing frame 5 moves, thereby preventing the fixing frame 5 from deflecting and ensuring that the teeth 15 are always meshed with the gear 14.

[0031] A partition 23 is fixedly installed in the storage box 3, and the partition 23 divides the storage box 3 into a plurality of storage chambers 24. A sealing cover is hingedly installed on the top of the storage box 3. The plurality of storage chambers 24 can prevent semiconductors from piling up in one box and causing them to be squeezed and damaged.

[0032] It is worth noting that the circuits, electronic components and modules involved in the present utility model are all prior art and can be fully implemented by those skilled in the art. Needless to say, the content protected by the present utility model does not involve improvements to software and methods.

[0033] The working principle of the semiconductor processing semi-finished product transfer machine provided by the utility model is as follows:

[0034] This solution also has an electric control cabinet, which is installed on the equipment. When in use, each electrical device can be started and operated through the electric control cabinet. The power connection method of each electrical device is an existing mature technology, which is a well-known technology for people in this field and will not be described in detail here.

[0035] When in use, the device is pushed to the side of the semi-finished semiconductor product that needs to be transported, the position of the suction cup 9 is adjusted according to the height of the table on which the semi-finished product is placed, and the driving motor 13 is started. The driving motor 13 drives the gear 14 to rotate. When the gear 14 rotates, it will continuously push the teeth 15 meshing therewith. According to the different rotation directions of the gear 14, the fixing frame 5 can be pushed up or down. When the suction cup 9 contacts the semiconductor, the suction pump 7 is started. The suction pump 7 generates suction force to extract the air in the suction cup 9, so that the suction cup 9 generates adsorption force to firmly adsorb the semiconductor. According to the different positions of the semiconductor, the transverse motor 10 can be started. The transverse motor 10 drives the transverse screw 11 to rotate. When the transverse screw 11 rotates, the slide 12 drives the suction cup 9 to move on the transverse screw 11.

[0036] Start the rotating motor 16, and the rotating motor 16 drives the steering column 4 to rotate, so that the suction cup 9 turns to the storage box 3 and is located directly above the storage box 3. The suction pump 7 supplies air in the reverse direction, so that the suction cup 9 no longer has an adsorption effect, and the semiconductor is placed in the storage cavity 24 in the storage box 3. After the semiconductor is loaded in the storage cavity 24, the device is pushed to the next working area, and then the semiconductor is sucked out to complete the transfer. The sucking-out steps are the same as above and will not be repeated here.

[0037] Compared with the related art, the semiconductor processing semi-finished product transfer machine provided by the utility model has the following beneficial effects:

[0038] The utility model provides a semiconductor processing semi-finished product transfer machine, through which the transfer semiconductor can be placed in a storage box 3. For example, for the semi-finished products of integrated circuits and semiconductor devices, it is necessary to package and protect them to avoid being affected by the external environment. The suction force generated by the suction cup 9 can suck up the semiconductor to complete the transfer without damaging the semiconductor. The position of the suction cup 9 can be adjusted according to the position of the semiconductor by a slide seat 12 moving on a transverse screw rod 11. The fixing frame 5 can be pushed up and down on the steering column 4 through the meshing of the gear 14 and the teeth 15, so as to adjust the height of the suction cup 9. The degree can be adjusted, and the suction cup 9 can be driven to turn after sucking the semiconductor by rotating the motor 16, and the semiconductor can be placed in the storage box 3. The moving wheel 20 can move the device down to the processing area, and the shock-absorbing cylinder 18 and the shock-absorbing spring 19 can avoid vibration during transportation, which may cause damage to the semiconductor. The guide rod 21 can limit and guide the fixing frame 5 when it moves to avoid the fixing frame 5 from shifting, ensuring that the teeth 15 are always engaged with the gear 14. The multiple storage cavities 24 can prevent semiconductors from piling up in a box and causing them to be squeezed and damaged.

[0039] It should be noted that the equipment structure and drawings of the utility model mainly describe the principle of the utility model. In terms of the technology of the design principle, the settings of the power mechanism, power supply system and control system of the device are not fully described. On the premise that the technical personnel in this field understand the principle of the above utility model, the details of the power mechanism, power supply system and control system can be clearly known. The control method of the application document is automatic control through a controller, and the control circuit of the controller can be realized by simple programming by the technical personnel in this field;

[0040] The standard parts used therein can all be purchased from the market and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art, and the structures and principles of the components known to technical personnel in this field can be known by these technical personnel through technical manuals or through conventional experimental methods.

[0041] Although the embodiments of the present invention have been shown and described, it is understandable to those skilled in the art that various changes, modifications, substitutions and variations or direct or indirect applications may be made to these embodiments without departing from the principles and spirit of the present invention. In other related technical fields, the scope of the present invention is defined by the attached claims and their equivalents, which are equally included in the scope of patent protection of the present invention.

Claims

1. A semi-finished product transfer machine for semiconductor processing, characterized in that: include: Base; A mounting column and a storage box, wherein the mounting column and the storage box are both fixedly mounted on the base; A steering column, the steering column is rotatably mounted on the mounting column, a fixing frame is slidably mounted on the steering column, and one side of the fixing frame is in contact with an inner wall of one side of the steering column; An installation box, wherein the installation box is slidably mounted on the fixing frame, a suction pump is fixedly mounted on the top inner wall of the installation box, an air inlet end of the suction pump is fixedly connected to a suction pipe, and an air inlet end of the suction pipe is fixedly connected to a suction cup; A moving mechanism is arranged on the fixing frame and is used for moving the suction cup.

2. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: The moving mechanism includes a transverse motor, a transverse screw and a slide seat. The transverse motor is fixedly installed on one side of the fixed frame, the transverse screw is rotatably installed on the fixed frame, one end of the transverse screw is fixedly connected to the output shaft of the transverse motor, the slide seat is threadedly installed on the transverse screw, and the slide seat is in contact with the top inner wall of the fixed frame.

3. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: A drive motor is fixedly installed on one side of the steering column, a gear is rotatably installed in the steering column, the gear is fixedly connected to the output shaft of the drive motor, and a plurality of teeth are provided on one side of the fixing frame, and the plurality of teeth are all meshed with the gear.

4. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: A rotating motor is fixedly installed in the mounting column, and an output shaft of the rotating motor is fixedly connected to the bottom end of the steering column.

5. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: A plurality of legs are fixedly mounted on the bottom of the base, a shock absorbing cylinder is fixedly mounted on the bottom of the plurality of legs, a shock absorbing spring is sleeved outside the plurality of shock absorbing cylinders, and a moving wheel is fixedly mounted on the bottom of the plurality of shock absorbing cylinders.

6. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: A guide rod is fixedly mounted on the inner wall of the steering column, and a guide groove is provided on the fixing frame. The guide groove is in sliding contact with the guide rod.

7. The semiconductor processing semi-finished product transfer machine according to claim 1, characterized in that: A partition is fixedly installed in the storage box, and the partition divides the storage box into a plurality of storage chambers. A sealing cover is hingedly installed on the top of the storage box.

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