Gallium nitride growth heating furnace

Abstract

The utility model provides a gallium nitride growth heating furnace which comprises an outer furnace wall, a quartz furnace pipe is fixedly connected in the outer furnace wall, a mounting hanging groove is formed in the surface of one side of the quartz furnace pipe, a rotary sleeve handle mechanism is mounted on one side of the quartz furnace pipe, and a material box is arranged below the inner wall of the quartz furnace pipe. The surface of the mounting hanging groove is movably connected with a collecting mechanism, a sealing cover is arranged at the opening end of the quartz furnace pipe through a screw rod, and the problems that after production is completed, gallium nitride needs to be collected on the inner wall of equipment, the collecting process is tedious, gallium nitride is attached through a production rod, the attachment amount of gallium nitride is small, and the production cost is high are solved. And the yield of gallium nitride is relatively low.

Description

Technical Field

[0001] The utility model mainly relates to the field of gallium nitride production, and in particular to a gallium nitride growth heating furnace. Background Art

[0002] The third generation of semiconductor materials represented by gallium nitride can emit blue light with a wavelength shorter than infrared due to its wide bandgap. At the same time, gallium nitride also has the characteristics of high electron mobility, high breakdown voltage, stable chemical properties, high temperature resistance, corrosion resistance, etc., which is very suitable for the production of radiation-resistant, high-frequency, high-power and high-density integrated electronic devices and blue, green and ultraviolet photoelectronic devices. Therefore, gallium nitride has broad application prospects in semiconductor light-emitting diodes, laser diodes, ultraviolet detectors, and high-energy and high-frequency electronic devices.

[0003] In the invention patent application with application number CN202020361644.4, publication date 2020.11.06, and titled "A gallium nitride growth heating furnace", the gallium nitride growth heating furnace includes a furnace body and a support base, the furnace body is arranged on the support base, the innermost layer of the furnace body is a quartz furnace core, and the outer side of the quartz furnace core is a heating device and a thermal insulation layer; the support base includes a bottom plate and side plates at both ends, the bottom of the side plate is fixed to the bottom plate, the side plate is provided with a through hole, and the two ends of the quartz furnace core are respectively located The quartz furnace is fixed in the through holes of the side plates at both ends of the support seat through flanges. The two ends of the quartz furnace are respectively an air inlet end and a growth rod insertion end. The air inlet end is connected with an air inlet flange, and the growth rod insertion end is connected with a sealing flange. The middle part of the sealing flange is fixed with a growth rod and an exhaust port is opened. The device heats the quartz furnace by setting a plurality of heating resistors with different powers, so that a plurality of temperature zones are formed in the furnace of the furnace body. Different temperature zones can better meet the temperature requirements of different stages and different positions in the furnace body during the gallium nitride production process.

[0004] However, in actual use of the heating furnace, after production is completed, gallium nitride needs to be removed from the inner wall of the equipment. The removal process is relatively cumbersome, and the gallium nitride is attached through the production rod, and the amount of gallium nitride attached is small, resulting in a small output of gallium nitride. Utility Model Content

[0005] 1. Technical problems to be solved by the utility model:

[0006] The utility model provides a gallium nitride growth heating furnace to solve the problem that after production is completed, gallium nitride needs to be removed from the inner wall of the equipment, the removal process is relatively cumbersome, and the gallium nitride is attached through a production rod, the attached amount of gallium nitride is small, resulting in a small output of gallium nitride.

[0007] 2. Technical solution:

[0008] In order to achieve the above-mentioned purpose, the technical solution provided by the utility model is: a gallium nitride growth heating furnace, comprising an outer furnace wall, a quartz furnace core is fixedly connected to the inside of the outer furnace wall, a mounting hanging groove is provided on one side surface of the quartz furnace core, a rotating sleeve handle mechanism is installed on one side of the quartz furnace core, a material box is provided below the inner wall of the quartz furnace core, a collection mechanism is movably connected to the surface of the mounting hanging groove, and a sealing cover is provided at the open end of the quartz furnace core through a screw.

[0009] Furthermore, a mounting screw hole is provided on one side of the quartz furnace opening, which is installed on the surface of one side of the quartz furnace through a screw on one side of a sealing cover. The surface of the sealing cover is provided with pipes for conveying high-pressure gas and discharging waste gas. The collection mechanism is movably connected to the rotating sleeve handle mechanism.

[0010] Furthermore, the rotating sleeve handle mechanism includes a transmission motor arranged on one side of the quartz furnace, the transmission motor surface is transmission-connected with a transmission gear, the transmission gear surface is meshingly connected with a rotating gear plate, one side of the rotating gear plate is provided with a sleeve handle insert tube inside the quartz furnace, a limiting slot is provided on the surface of the sleeve handle insert tube, and an alignment hole is provided inside the sleeve handle insert tube.

[0011] Furthermore, the sleeve handle tube forms a transmission structure through a rotating gear plate and a transmission motor, the limit slots are arranged on both sides of the sleeve handle tube, the collection mechanism is movably connected to the surface of the sleeve handle tube, and the rotating gear plate and the sleeve handle tube form a movable structure at the bottom of the quartz furnace.

[0012] Furthermore, the collecting mechanism includes a supporting hanging rod which is engaged with the surface of the mounting hanging groove, a bearing rotating seat is fixedly connected to the lower part of the supporting hanging rod, a rotating inner rod is movably connected to the surface of one side of the bearing rotating seat, an alignment short column is provided on the surface of the other end of the rotating inner rod, protruding cutting strips are fixedly connected to the two side surfaces of the rotating inner rod, and a rotating production plate is fixedly connected to the surface of one side of the protruding cutting strip.

[0013] Furthermore, the rotating inner rod is movably connected to the surface of the bearing rotating seat to form a rotating structure. The rotating inner rod is installed on the inner wall of the quartz furnace through a supporting hanging rod and is movably connected to the inside of the sleeve handle insert tube. The rotating inner rod is installed in the inside of the sleeve handle insert tube through the protruding insert strips on both sides of the rotating inner rod, and forms a transmission structure with the transmission motor through the sleeve handle insert tube. The alignment short column is aligned with the alignment hole and installed.

[0014] 3. Beneficial effects:

[0015] The utility model has a reasonable design. When performing gallium nitride production operations, the support hanging rod in the collection mechanism is installed on the surface of the installation hanging groove, the bearing rotating seat and the rotating inner rod are installed inside the quartz furnace, and the sealing cover is installed at the opening of the quartz furnace through a screw rod to achieve sealing of the inside of the quartz furnace. Since the rotating production plates are fixedly connected to the surfaces on both sides of the rotating inner rod, the purpose of increasing the gallium nitride adhesion and increasing the gallium nitride output is achieved.

[0016] At the same time, during this process, the transmission motor is started, and the transmission motor drives the transmission gear and the rotating gear plate to rotate on the surface of the quartz furnace, and drives the sleeve handle insert tube and the rotating inner rod and the protruding insert strip inside the sleeve handle insert tube to rotate on the surface of the bearing rotating seat, so that gallium nitride can be attached to both sides of the rotating production plate on both sides of the rotating inner rod. When collecting and taking materials, the sealing cover is removed, and the collecting mechanism is removed from the installation hanging groove and the surface of the sleeve handle insert tube to avoid inconvenience in collecting inside the quartz furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 This is a three-dimensional schematic diagram of the rotary sleeve handle mechanism of the utility model;

[0019] Figure 3 This is a side view of the rotary sleeve handle mechanism of the utility model;

[0020] Figure 4 It is a schematic diagram of the collection mechanism of the utility model.

[0021] Reference numerals:

[0022] 1. Outer furnace wall; 2. Quartz furnace core; 3. Installation hanging slot; 4. Rotating sleeve handle mechanism; 401. Transmission motor; 402. Transmission gear; 403. Rotating gear plate; 404. Sleeve handle insert; 405. Limiting slot; 406. Alignment hole; 5. Material box; 6. Collection mechanism; 601. Support hanging rod; 602. Bearing rotating seat; 603. Rotating inner rod; 604. Alignment short column; 605. Protruding insert; 606. Rotating production plate; 7. Sealing cover. DETAILED DESCRIPTION

[0023] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0024] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", "provided with", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example

[0027] Refer to the attached Figure 1-4 , including an outer furnace wall 1, a quartz furnace 2 is fixedly connected inside the outer furnace wall 1, a mounting hanging groove 3 is provided on one side of the quartz furnace 2, a rotating sleeve handle mechanism 4 is installed on one side of the quartz furnace 2, a material box 5 is provided below the inner wall of the quartz furnace 2, a collecting mechanism 6 is movably connected on the surface of the mounting hanging groove 3, a sealing cover 7 is provided at the open end of the quartz furnace 2 through a screw, a mounting screw hole is provided on one side of the opening of the quartz furnace 2, and the sealing cover 7 is screwed on one side of the sealing cover 7 and installed on one side of the quartz furnace 2. A pipeline for conveying high-pressure gas and discharging exhaust gas is provided on the surface of the sealing cover 7, and the collecting mechanism 6 is movably connected to the rotating sleeve handle mechanism 4. The device achieves the purpose of increasing the adhesion amount of gallium nitride and facilitating collection through the movably installed collecting mechanism 6.

[0028] The rotating sleeve handle mechanism 4 includes a transmission motor 401 arranged on one side of the quartz furnace 2, and the surface of the transmission motor 401 is transmission-connected with a transmission gear 402, and the surface of the transmission gear 402 is meshingly connected with a rotating gear plate 403, and one side of the rotating gear plate 403 is provided with a sleeve handle insert tube 404 inside the quartz furnace 2, and a limiting slot 405 is provided on the surface of the sleeve handle insert tube 404, and an alignment hole 406 is provided inside the sleeve handle insert tube 404, and the sleeve handle insert tube 404 forms a transmission structure with the transmission motor 401 through the rotating gear plate 403, and the limiting slot 405 is provided on both sides of the sleeve handle insert tube 404, and the collecting mechanism 6 is movably connected to the surface of the sleeve handle insert tube 404, and the rotating gear plate 403 and the sleeve handle insert tube 404 form a movable structure at the bottom of the quartz furnace 2.

[0029] In this embodiment, the transmission motor 401 is started, and the transmission motor 401 drives the transmission gear 402 and the rotating gear plate 403 to rotate on the surface of the quartz furnace 2, and drives the sleeve handle insert 404 and the rotating inner rod 603 and the protruding insert 605 inside the sleeve handle insert 404 to rotate on the surface of the bearing rotating seat 602, so that gallium nitride can be attached to both sides of the rotating production plate 606 on both sides of the rotating inner rod 603. When collecting and taking materials, the sealing cover 7 is removed, and the collecting mechanism 6 is taken out from the mounting hanging groove 3 and the surface of the sleeve handle insert 404, so as to avoid the inconvenience of collecting inside the quartz furnace 2.

[0030] The collecting mechanism 6 includes a supporting hanging rod 601 which is engaged with the surface of the mounting hanging groove 3, a bearing rotating seat 602 is fixedly connected below the supporting hanging rod 601, a rotating inner rod 603 is movably connected to the surface of one side of the bearing rotating seat 602, an alignment short column 604 is arranged on the surface of the other end of the rotating inner rod 603, protruding inserts 605 are fixedly connected to the surfaces of both sides of the rotating inner rod 603, a rotating production plate 606 is fixedly connected to the surface of one side of the protruding inserts 605, the rotating inner rod 603 is movably connected to the surface of the bearing rotating seat 602 and forms a rotating structure, the rotating inner rod 603 is installed on the inner wall of the quartz furnace 2 through the supporting hanging rod 601, and is movably connected to the inside of the sleeve handle insert tube 404, the rotating inner rod 603 is installed in the inside of the sleeve handle insert tube 404 through the protruding inserts 605 on both sides, and forms a transmission structure with the transmission motor 401 through the sleeve handle insert tube 404, and the alignment short column 604 is aligned with the alignment hole 406 and installed.

[0031] In this embodiment, when performing gallium nitride production operations, the support hanging rod 601 in the collection mechanism 6 is installed on the surface of the installation hanging groove 3, the bearing rotating seat 602 and the rotating inner rod 603 are installed inside the quartz furnace 2, and the sealing cover 7 is installed at the opening of the quartz furnace 2 through a screw to achieve sealing of the inside of the quartz furnace 2. Since the rotating production plates 606 are fixedly connected to the surfaces of both sides of the rotating inner rod 603, the purpose of increasing the gallium nitride adhesion and increasing the gallium nitride output is achieved.

[0032] The above-described embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the patent of the utility model shall be based on the attached claims.

Claims

1. A gallium nitride growth heating furnace, characterized in that : comprising an outer furnace wall (1), a quartz furnace (2) being fixedly connected to the interior of the outer furnace wall (1), a mounting groove (3) being provided on one side of the surface of the quartz furnace (2), a rotating sleeve handle mechanism (4) being installed on one side of the quartz furnace (2), a material box (5) being provided below the inner wall of the quartz furnace (2), a collecting mechanism (6) being movably connected to the surface of the mounting groove (3), and a sealing cover (7) being provided at the open end of the quartz furnace (2) via a screw.

2. The gallium nitride growth heating furnace according to claim 1, characterized in that: A mounting screw hole is provided on one side of the opening of the quartz furnace (2), and is mounted on a surface of one side of the quartz furnace (2) via a screw on one side of a sealing cover (7). A pipeline for conveying high-pressure gas and discharging waste gas is provided on the surface of the sealing cover (7). The collection mechanism (6) is movably connected to the rotating sleeve handle mechanism (4).

3. The gallium nitride growth heating furnace according to claim 1, characterized in that: The rotating sleeve handle mechanism (4) comprises a transmission motor (401) arranged on one side of the quartz furnace (2); a transmission gear (402) is transmission-connected to the surface of the transmission motor (401); a rotating gear plate (403) is meshingly connected to the surface of the transmission gear (402); a sleeve handle insert tube (404) is arranged inside the quartz furnace (2) on one side of the rotating gear plate (403); a limiting slot (405) is arranged on the surface of the sleeve handle insert tube (404); and an alignment hole (406) is arranged inside the sleeve handle insert tube (404).

4. The gallium nitride growth heating furnace according to claim 3, characterized in that: The sleeve handle insert tube (404) forms a transmission structure through a rotating gear plate (403) and a transmission motor (401); the limiting slots (405) are provided on both sides of the sleeve handle insert tube (404); the collecting mechanism (6) is movably connected to the surface of the sleeve handle insert tube (404); and the rotating gear plate (403) and the sleeve handle insert tube (404) form a movable structure at the bottom of the quartz furnace (2).

5. The gallium nitride growth heating furnace according to claim 1, characterized in that: The collecting mechanism (6) comprises a supporting hanging rod (601) which is engaged with the surface of the mounting hanging groove (3); a bearing rotating seat (602) is fixedly connected below the supporting hanging rod (601); a rotating inner rod (603) is movably connected to the surface of one side of the bearing rotating seat (602); an alignment short column (604) is arranged on the surface of the other end of the rotating inner rod (603); protruding cutting strips (605) are fixedly connected to the surfaces of both sides of the rotating inner rod (603); and a rotating production plate (606) is fixedly connected to the surface of one side of the protruding cutting strip (605).

6. The gallium nitride growth heating furnace according to claim 5, characterized in that: The rotating inner rod (603) is movably connected to the surface of the bearing rotating seat (602) to form a rotating structure. The rotating inner rod (603) is installed on the inner wall of the quartz furnace (2) through the supporting hanging rod (601) and is movably connected to the inside of the sleeve handle insert tube (404). The rotating inner rod (603) is installed in the inside of the sleeve handle insert tube (404) through the protruding insert strips (605) on both sides of the rotating inner rod (603), and forms a transmission structure with the transmission motor (401) through the sleeve handle insert tube (404). The alignment short column (604) is aligned with the alignment hole (406) and installed.

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