Combustion type harm removal equipment

Abstract

The utility model provides a combustion type deinsectization device which comprises a gas inlet system, a gas outlet system and a gas outlet system, the gas inlet system comprises a first gas inlet pipe, a second gas inlet pipe and a connecting seat, a first through hole and a second through hole are formed in the connecting seat, the first gas inlet pipe is communicated with the first through hole, the second gas inlet pipe is communicated with the second through hole, and the diameter of the first through hole is larger than that of the second through hole; the combustion system comprises a combustion chamber, and the first through hole and the second through hole communicate with the combustion chamber; the water washing system is connected with the combustion system and used for receiving the gas generated after combustion in the combustion chamber and conducting water washing treatment; and the gas treated by the water washing system is exhausted out of the combustion type harm removal equipment through the exhaust system. According to the utility model, the stability and reliability of a waste gas treatment system can be improved, continuous waste gas treatment can be ensured, and gas can be prevented from being blocked and condensed in the first through hole or at the opening end.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a combustion type harm removal device. Background Art

[0002] Semiconductor processes are widely used in various industries. From ULSI, TFT-LCD to the current micro-electromechanical (MEMS) industry, semiconductor processes are used as the manufacturing process of products. The processes include dry etching, oxidation, ion implantation, thin film deposition, etc. The use of gases has always played an important role in semiconductor processes because gases can produce chemical reactions required to shape the electrical properties of semiconductors. In addition, in the production process of the semiconductor industry, due to the need to use a large amount of chemicals and special gases, a large amount of toxic and harmful process waste gas will continue to be generated in the production process. At the same time, only part of the gas can be used in the production process, and most of the remaining gas will be discharged as waste gas. For example, CF4 only uses about 5% of the total gas in the process, and SF6 only uses about 20% of the total gas in the process. Process waste gas needs to be collected, treated and discharged synchronously with the production process. The waste gas treatment system and equipment are an integral part of the customer's production process. Its safety and stability are directly related to the customer's capacity utilization, product yield, employee occupational health and ecological environment. Therefore, electronic waste gas treatment equipment (local scrubber) has been used in semiconductor production lines (especially 8-inch and 12-inch wafers) to treat waste gas generated by various processes in the production line. At present, the commonly used waste gas treatment methods include electrothermal decomposition, combustion, high-temperature plasma and adsorption (including thermal catalyst).

[0003] In the existing combustion-type pest control equipment, for example, when treating the waste gas of the ALD TiN deposition process, the gas must enter the combustion chamber through the airway. However, the diameter of the airway is limited, usually 16 mm. When the waste gas generated by the previous process increases and the gas flow rate increases, the gas is easily blocked and condensed in the airway or at the airway mouth, and a large amount of gas is blocked in the airway and at the entrance of the combustion chamber, causing the air pressure to increase and alarm, and it cannot smoothly enter the combustion chamber and the subsequent processes, which eventually causes the pest control equipment to shut down, and the waste gas generated by the previous process cannot be processed in time. Moreover, the gas condenses and agglomerates in the airway or at the airway mouth, causing dust accumulation, and regular cleaning and shutdown maintenance are required, which requires a lot of manpower and material resources, affecting production efficiency and production costs. If it is not cleaned for a long time, it may even cause airway blockage. Utility Model Content

[0004] The utility model aims to provide a combustion type harm removal device, which can not only improve the stability and reliability of the exhaust gas treatment system and ensure that the exhaust gas treatment can be carried out continuously, but also avoid gas blockage and condensation of gas inside or at the mouth of the first through hole.

[0005] In order to achieve the above object, the utility model provides a combustion type pest removal device, which comprises:

[0006] An air intake system, the air intake system comprising a first air intake pipe, a second air intake pipe and a connecting seat, the connecting seat being provided with a first through hole and a second through hole, the first air intake pipe being in communication with the first through hole, the second air intake pipe being in communication with the second through hole, and the diameter of the first through hole being greater than the diameter of the second through hole;

[0007] A combustion system, the combustion system comprising a combustion chamber, the first through hole and the second through hole both being in communication with the combustion chamber;

[0008] A water washing system, the water washing system is connected to the combustion system and is used to receive the gas after combustion in the combustion chamber and perform water washing treatment;

[0009] An exhaust system, through which the gas treated by the water washing system is discharged to the outside of the combustion-type harm removal equipment.

[0010] Optionally, the diameter of the first air intake pipe is the same as the diameter of the second air intake pipe.

[0011] Optionally, a diameter of the second air inlet pipe is the same as a diameter of the second through hole.

[0012] Optionally, the combustion system further comprises a pressure detector, wherein the pressure detector is located in the combustion chamber.

[0013] Optionally, a diameter of the first through hole is one to two times a diameter of the second through hole.

[0014] Optionally, the water washing system includes a primary water washing component, a secondary water washing component and a tertiary water washing component connected in sequence, and the primary water washing component, the secondary water washing component and the tertiary water washing component are located between the combustion system and the exhaust system.

[0015] Optionally, the tertiary water washing component includes a filtering device.

[0016] Optionally, the number of the first air inlet pipes and the number of the second air inlet pipes are both at least two, the first air inlet pipes correspond to the first through holes in a one-to-one manner, and the second air inlet pipes correspond to the second through holes in a one-to-one manner.

[0017] Optionally, all of the first through holes and the second through holes are evenly distributed in a ring shape on the connecting seat.

[0018] Optionally, the first air intake pipe is connected to the first through hole via a first pipe connector, and the second air intake pipe is connected to the second through hole via a second pipe connector.

[0019] As configured above, the utility model provides a first through hole and a second through hole as airways for gas to enter the combustion chamber. In order to improve the stability and reliability of the exhaust gas treatment system and ensure that the exhaust gas treatment can be carried out continuously, each device of the previous process is connected to two combustion-type pest removal devices, so that when one of the pest removal devices is down, the exhaust gas can enter the other pest removal device for continued treatment, and the second through hole is used to receive the exhaust gas that cannot be treated when other pest removal devices are down. Therefore, the second through hole does not have exhaust gas continuously entering, and gas will only enter when other pest removal devices are down. The gas flow rate is small, and it is not easy to cause gas blockage, condensation and agglomeration. The first through hole has exhaust gas continuously entering, and the gas flow rate is large. Therefore, the diameter of the first through hole is designed to be larger than the diameter of the second through hole to withstand a larger flow of gas, avoid gas blockage, condensation and agglomeration inside or at the mouth of the first through hole, and prevent the air pressure from the first through hole to the combustion chamber from being too high, so that the gas can continuously and smoothly enter the combustion chamber and subsequent treatment processes to maintain the combustion efficiency of the combustion chamber. The utility model improves the stability and reliability of the waste gas treatment system by using the second through hole to receive the waste gas that cannot be treated when other harm removal equipment is out of service, thereby ensuring that the waste gas treatment can be carried out continuously, and by increasing the diameter of the first through hole, gas blockage and condensation agglomeration inside or at the mouth of the first through hole is avoided, thereby greatly reducing the frequency and workload of shutting down equipment for maintenance, ensuring production efficiency, and reducing failure rate and production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Those skilled in the art should understand that the drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0021] Figure 1 A schematic diagram of a combustion-type pest removal device according to an embodiment of the utility model;

[0022] Figure 2 It is a schematic diagram of a connecting base of a combustion-type harm removal device according to an embodiment of the utility model.

[0023] The reference numerals are as follows:

[0024] 11-first air intake pipe; 12-second air intake pipe; 2-connecting seat; 21-first through hole; 22-second through hole; 3-combustion chamber; 31-first pipe connecting piece; 32-second pipe connecting piece. DETAILED DESCRIPTION

[0025] In this document, unless otherwise specified, the terms "upper", "lower", "left", "right", "inside", "outside", "front", "back", "top", "bottom", etc. are used to indicate directions or positional relationships based on the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction and operation. Therefore, they cannot be understood as limiting the present invention.

[0026] The following will describe the specific implementation of the utility model in more detail with reference to the schematic diagram. The advantages and features of the utility model will become clearer according to the following description. It should be noted that the drawings are all in a very simplified form and are not in exact proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0027] The preferred embodiments of the present utility model are given below in conjunction with the accompanying drawings and described in detail.

[0028] Figure 1 This is a schematic diagram of a combustion-type pest control device according to an embodiment of the present invention. Figure 1 The embodiment of the utility model provides a combustion-type harm removal device, including an air intake system, a combustion system, a water washing system and an exhaust system. The combustion system includes a combustion chamber 3 for burning exhaust gas. The air intake system includes a first air intake pipe 11, a second air intake pipe 12 and a connecting seat 2, and a first through hole 21 and a second through hole 22 are provided in the connecting seat 2, and the first through hole 21 and the second through hole 22 are both connected to the combustion chamber 3; the first air intake pipe 11 is connected to the first through hole 21, and the second air intake pipe 12 is connected to the second through hole 22. Further, the number of the first air intake pipe 11 and the number of the second air intake pipe 12 are both at least two, and the first air intake pipe 11 corresponds to the first through hole 21 one-to-one, and the second air intake pipe 12 corresponds to the second through hole 22 one-to-one. With such a configuration, the exhaust gas can first enter the connecting seat 2 through the first air intake pipe 11 and the second air intake pipe 12, and then enter the combustion chamber 3 through the first through hole 21 and the second through hole 22 in the connecting seat 2. The diameter of the first through hole 21 is greater than the diameter of the second through hole 22. Preferably, the diameter of the first through hole 21 is one to two times the diameter of the second through hole 22, taking into account the tolerable gas volume of the combustion chamber 3, the structure of the detoxification equipment, and the characteristics of the exhaust gas. In this embodiment, the diameter of the first through hole 21 is 1.5 times the diameter of the second through hole 22. Taking the diameter of the second through hole 22 as 16 mm as an example, the diameter of the first through hole 21 is 24 mm. In this embodiment, the diameter of the first air intake pipe 11 and the diameter of the second air intake pipe 12 can be the same. In other embodiments, depending on the specific circumstances, the diameter of the first air intake pipe 11 and the diameter of the second air intake pipe 12 can also be different; the diameter of the second air intake pipe 12 can be the same as or different from the diameter of the second through hole 22.

[0029] Further, the first air intake pipe 11 is connected to the first through hole 21 via a first pipe connector 31, and the second air intake pipe 12 is connected to the second through hole 22 via a second pipe connector 32. Both the first pipe connector 31 and the second pipe connector 32 may be quick connectors.

[0030] Figure 2 This is a schematic diagram of a connection base of a combustion-type pest removal device according to an embodiment of the present invention, with reference to Figure 2 All the first through holes 21 and the second through holes 22 are evenly distributed in a ring shape on the connecting base 2. The utility model does not limit how the first through holes 21 and the second through holes 22 are specifically distributed on the connecting base 2. Figure 2 This is just an example case.

[0031] For example, each device of the preceding process is connected to two combustion-type pest removal devices, that is, the device of the preceding process is connected to one pest removal device through the first air intake pipe 11, and is connected to another pest removal device (as a standby machine) through the second air intake pipe 12. A switch valve may be provided on the second air intake pipe 12, and the switch valve remains normally closed during normal operation. When the pest removal device connected to the first air intake pipe 11 is down, the switch valve on the second air intake pipe 12 is opened, and the exhaust gas enters another pest removal device from the second air intake pipe 12. It is understandable that the two pest removal devices can serve as standby machines for each other.

[0032] As configured above, the utility model is provided with a first through hole 21 and a second through hole 22 as an airway for gas to enter the combustion chamber 3. In order to improve the stability and reliability of the exhaust gas treatment system and ensure that the exhaust gas treatment can be carried out continuously, each device of the previous process is connected to two combustion-type pest removal devices, so that when one of the pest removal devices is down, the exhaust gas can enter the other pest removal device for continued treatment, and the second through hole 22 is used to receive the exhaust gas that cannot be treated when the other pest removal devices are down. Therefore, the second through hole 22 does not have exhaust gas continuously entering, and only when Other pest control equipment will only allow gas to enter when it is shut down, and the gas flow rate is small, so it is not easy to cause gas blockage, condensation and agglomeration. However, the first through hole 21 continuously allows waste gas to enter, and the gas flow rate is large. Therefore, the diameter of the first through hole 21 is designed to be larger than the diameter of the second through hole 22 to withstand a larger flow of gas, avoid gas blockage, condensation and agglomeration inside or at the mouth of the first through hole 21, and prevent the gas pressure from being too high from the first through hole 21 to the combustion chamber 3, so that the gas can continue to and smoothly enter the combustion chamber 3 and the subsequent processing steps, and maintain the combustion efficiency of the combustion chamber 3. The utility model improves the stability and reliability of the waste gas treatment system by using the second through hole 22 to receive waste gas that cannot be processed when other pest control equipment is shut down, and ensures that waste gas treatment can be carried out continuously. In addition, by increasing the diameter of the first through hole 21, gas blockage, condensation and agglomeration are avoided inside or at the mouth of the first through hole 21, which greatly reduces the frequency and workload of stopping equipment for maintenance, ensures production efficiency, and reduces failure rate and production cost.

[0033] The combustion system of the present invention also includes a pressure detector, which is located in the combustion chamber 3. Generally speaking, the pressure detector is located close to the entrance of the combustion chamber 3, that is, the pressure detector is located close to the mouth of the first through hole 21. In this embodiment, the combustion chamber 3 is located below the connecting seat 2, and the pressure detector is located in the upper half of the combustion chamber 3, which is used to detect the gas pressure and issue an alarm when the pressure exceeds a preset value.

[0034] The water washing system is connected to the combustion system, and is used to receive the gas after combustion in the combustion chamber 3 and perform water washing treatment; the water washing system of the present embodiment includes a primary water washing component, a secondary water washing component and a tertiary water washing component connected in sequence, and the primary water washing component, the secondary water washing component and the tertiary water washing component are located between the combustion system and the exhaust system. Specifically, the primary water washing component is responsible for water washing and cooling the gas, the secondary water washing component also plays a role in precipitating impurities while washing and cooling, and the tertiary water washing component includes a filtering device, and the tertiary water washing component also plays a role in filtering while washing. Then, the gas treated by the water washing system is discharged to the outside of the combustion-type pest control equipment through the exhaust system. It can be understood that the exhaust system includes an exhaust pipe, and the gas treated by the water washing system is discharged to the equipment of the next process or directly discharged into the atmosphere through the exhaust pipe.

[0035] It should be noted that references to "one embodiment", "an embodiment", "a specific embodiment", "some embodiments", etc. in the specification only indicate that the described embodiment may include a particular feature, structure or characteristic. Moreover, such phrases do not necessarily refer to the same embodiment. In addition, when a particular feature, structure or characteristic is described in conjunction with an embodiment, whether or not explicitly described, it is within the knowledge of a person skilled in the relevant art to implement such feature, structure or characteristic in conjunction with other embodiments.

[0036] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the system disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0037] It should also be noted that, although the present invention has been disclosed as a preferred embodiment, the above embodiment is not intended to limit the present invention. For any technician familiar with the art, without departing from the scope of the technical solution of the present invention, the above disclosed technical content can be used to make many possible changes and modifications to the technical solution of the present invention, or modified into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the scope of protection of the technical solution of the present invention.

[0038] It should also be understood that, unless otherwise specified or indicated, the terms "first", "second", "third", etc. in the specification are merely used to distinguish between the various components, elements, steps, etc. in the specification, and are not used to indicate the logical relationship or sequential relationship between the various components, elements, steps, etc.

[0039] It should also be recognized that the terms described herein are only used to describe specific embodiments and are not used to limit the scope of the utility model. It must be noted that the singular forms "one" and "a kind" used herein and in the appended claims include plural references unless the context clearly indicates the opposite meaning. For example, a reference to "a step" or "a device" means a reference to one or more steps or devices, and may include secondary steps and secondary devices. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood to have a logical "or" definition, rather than a logical "exclusive or" definition, unless the context clearly indicates the opposite meaning. In addition, the implementation of the method and / or device in the embodiment of the utility model may include performing the selected task manually, automatically, or in combination.

Claims

1. A combustion type pest control device, characterized in that: include: An air intake system, the air intake system comprising a first air intake pipe, a second air intake pipe and a connecting seat, the connecting seat being provided with a first through hole and a second through hole, the first air intake pipe being in communication with the first through hole, the second air intake pipe being in communication with the second through hole, and the diameter of the first through hole being greater than the diameter of the second through hole; A combustion system, the combustion system comprising a combustion chamber, the first through hole and the second through hole both being in communication with the combustion chamber; A water washing system, the water washing system is connected to the combustion system and is used to receive the gas after combustion in the combustion chamber and perform water washing treatment; An exhaust system, through which the gas treated by the water washing system is discharged to the outside of the combustion-type harm removal equipment.

2. The combustion type pest control equipment according to claim 1, characterized in that: The diameter of the first air intake pipe is the same as the diameter of the second air intake pipe.

3. The combustion type pest control equipment according to claim 1, characterized in that: The diameter of the second air inlet pipe is the same as the diameter of the second through hole.

4. The combustion type pest control equipment according to claim 1, characterized in that: The combustion system further includes a pressure detector located within the combustion chamber.

5. The combustion type pest control equipment according to claim 1, characterized in that: The diameter of the first through hole is one to two times the diameter of the second through hole.

6. The combustion type pest control equipment according to claim 1, characterized in that: The water washing system includes a primary water washing component, a secondary water washing component and a tertiary water washing component which are connected in sequence, and the primary water washing component, the secondary water washing component and the tertiary water washing component are located between the combustion system and the exhaust system.

7. The combustion type pest control equipment according to claim 6, characterized in that: The tertiary water washing assembly includes a filtering device.

8. The combustion type pest control equipment according to claim 1, characterized in that: The number of the first air inlet pipes and the number of the second air inlet pipes are both at least two, the first air inlet pipes correspond to the first through holes in a one-to-one manner, and the second air inlet pipes correspond to the second through holes in a one-to-one manner.

9. The combustion type pest control equipment according to claim 8, characterized in that: All of the first through holes and the second through holes are evenly distributed in a ring shape on the connecting seat.

10. The combustion type pest control equipment according to claim 1, characterized in that: The first air intake pipe is connected to the first through hole through a first pipe connector, and the second air intake pipe is connected to the second through hole through a second pipe connector.

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