Laser direct writing device

Abstract

The utility model discloses a laser direct writing device. The laser direct writing device comprises a base; the cross beam is connected to the base; the air floating motion platform is arranged on the face, facing the cross beam, of the base, and the air floating motion platform can move relative to the cross beam; the adsorption seat is arranged on one surface, facing the cross beam, of the air floatation motion platform; the first movement mechanism is arranged on the cross beam; the shooting mechanism is arranged on the first movement mechanism, and the first movement mechanism can drive the shooting mechanism to move relative to the cross beam; the second movement mechanism is arranged on the cross beam; the exposure mechanism is arranged on the second movement mechanism, and the second movement mechanism can drive the exposure mechanism to move relative to the cross beam. According to the utility model, air flotation movement along the Y-axis direction and the X-axis direction can be realized, zero friction is realized, a higher line width grade is achieved, the PCB processing precision is improved, the two Z-axis linear motors are adopted to drive the exposure head to move up and down, the precision is high, the straightness reaches 1 [mu] m, and the yaw angle is within 1.5 arcsec; the two Z-axis movement assemblies are adopted to drive the two cameras to move up and down respectively, and the detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of PCB processing, in particular to a laser direct writing device. Background Art

[0002] LDI, the full name of which is laser direct imaging in English, is used in the exposure process of PCB technology. LDI laser digital imaging technology, the data file is directly read by DPX, converted into an image, and the laser beam is transmitted to the board through DMD and lens. It is applied to carrier boards, flexible boards, HDI boards, multi-layer boards, and has fine resolution quality.

[0003] The current LDI exposure machine structure has the following defects: (1) The line width level is mostly 50um, which is low and has poor precision; (2) The horizontal movement uses a slider and a slide rail. When the size is relatively large, it is easy to have angle changes, resulting in large deformation, which makes the product precision low; (3) The exposure lifting platform is often stacked and placed above the scanning axis. The horizontal movement is converted into vertical movement by a lead screw and a linear guide rail. However, the lead screw cannot achieve high precision due to its own reverse clearance. Therefore, it is costly to achieve higher precision; (4) The suction cup structure for fixing the product is made of metal parts, such as aluminum parts, but it is difficult to achieve high precision in metal processing. Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a laser direct writing device.

[0005] In order to achieve the above purpose, the technical solution provided by an embodiment of the present utility model is as follows:

[0006] A laser direct writing device, comprising:

[0007] Base;

[0008] A crossbeam connected to the base;

[0009] An air-floating motion platform is provided on a side of the base facing the crossbeam, and the air-floating motion platform can move relative to the crossbeam;

[0010] An adsorption seat, arranged on a side of the air-floating motion platform facing the crossbeam;

[0011] A first motion mechanism, disposed on the crossbeam;

[0012] A shooting mechanism, provided on the first motion mechanism, wherein the first motion mechanism can drive the shooting mechanism to move relative to the crossbeam;

[0013] A second motion mechanism is provided on the crossbeam;

[0014] The exposure mechanism is arranged on the second motion mechanism, and the second motion mechanism can drive the exposure mechanism to move relative to the crossbeam.

[0015] As a further improvement of the present invention, the air-floating motion platform includes a Y-direction air-floating guide rail, a Y-direction moving seat matched with the Y-direction air-floating guide rail, a Y-direction driving mechanism for driving the Y-direction moving seat to move along the Y-direction, an X-direction moving seat matched with the Y-direction moving seat, and an X-direction driving mechanism for driving the X-direction moving seat to move along the X-direction, and the Y-direction air-floating guide rail is fixed on the base.

[0016] As a further improvement of the present invention, the Y-axis driving mechanism comprises two Y-axis linear motors, and the two Y-axis linear motors are respectively connected to the Y-axis moving seat; and / or

[0017] The X-direction driving mechanism comprises two X-direction linear motors, and the two X-direction linear motors are respectively connected to the X-direction moving seats.

[0018] As a further improvement of the present invention, the Y-direction moving seat includes a Y-direction upward moving seat, two Y-direction side moving seats connected to the Y-direction upward moving seat, and two Y-direction downward moving seats respectively connected to the two Y-direction side moving seats, and the X-direction moving seat moves in an X-direction air-floating manner relative to the Y-direction upward moving seat.

[0019] As a further improvement of the present invention, the X-direction moving seat includes an X-direction upward moving seat, two X-direction side moving seats connected to the X-direction upward moving seat, and two X-direction downward moving seats respectively connected to the two X-direction side moving seats, the adsorption seat is fixed to the X-direction upward moving seat, and the Y-direction upward moving seat includes a first Y-direction upward moving seat and a second Y-direction upward moving seat fixed and stacked along the Z direction.

[0020] As a further improvement of the present invention, the shooting mechanism includes at least one camera, the first motion mechanism includes an X-axis motion component and at least one Z-axis motion component arranged on the X-axis motion component, the X-axis motion component is installed on one side of the beam, and the at least one camera is connected to the at least one Z-axis motion component in a one-to-one correspondence.

[0021] As a further improvement of the present invention, the second motion mechanism includes at least one Z-axis linear motor, the exposure mechanism includes at least one exposure head, and at least one of the exposure heads is connected to the at least one Z-axis linear motor.

[0022] As a further improvement of the present invention, at least one magnetic spring is further provided, the stator portion of the magnetic spring is fixed to the cross beam, and the mover portion of the magnetic spring is connected to the Z-axis linear motor.

[0023] As a further improvement of the present invention, the adsorption seat is a marble adsorption seat.

[0024] As a further improvement of the utility model, a plurality of air springs are arranged at the bottom of the base.

[0025] The beneficial effects of the utility model are:

[0026] (1) It can realize air floating motion along the Y-axis and X-axis directions, with zero friction, and can achieve higher line width levels and improve PCB processing accuracy.

[0027] (2) Two Z-axis linear motors are used to drive the exposure head to move up and down. The structure is simple and compact with high precision. The straightness reaches 1um and the yaw angle is within 1.5arcsec.

[0028] (3) Two Z-axis motion components are used to drive the two cameras to move up and down respectively, thereby improving detection efficiency.

[0029] (4) A marble adsorption seat is used to adsorb the product, and the marble adsorption seat achieves a full-width flatness within 5um.

[0030] (5) The magnetic springs arranged on both sides can be used to balance the weight of the Z-axis linear motor and the exposure head, thereby improving the linearity of the exposure head movement.

[0031] (6) The base adopts air spring to achieve environmental vibration isolation, so that the laser direct writing device can run more smoothly.

[0032] (7) It can achieve a large stroke along the Y-axis direction and can be connected to other machines to realize automatic loading and unloading processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 A three-dimensional diagram of a preferred embodiment of the utility model;

[0035] Figure 2 for Figure 1 A is an enlarged schematic diagram;

[0036] Figure 3 for Figure 1 A magnified schematic diagram of B;

[0037] Figure 4 A three-dimensional diagram of another preferred embodiment of the utility model;

[0038] Figure 5 for Figure 4 A magnified schematic diagram of middle C;

[0039] Figure 6 for Figure 1 Right view of;

[0040] Figure 7 for Figure 1 The main view;

[0041] Figure 8 for Figure 1 Rear view of

[0042] Fig. 9 This is a schematic diagram of the structure of the cooperation between the Y-direction moving seat and the X-direction moving seat in the preferred embodiment of the utility model;

[0043] In the figure: 1, base, 2, beam, 3, air floating motion platform, 31, Y-direction air floating guide rail, 32, Y-direction moving seat, 321, Y-direction upward moving seat, 3211, first Y-direction upward moving seat, 3212, second Y-direction upward moving seat, 322, Y-direction side moving seat, 323, Y-direction downward moving seat, 33, X-direction moving seat, 331, X-direction upward moving seat, 332, X-direction side moving seat, 333, X-direction downward moving seat, 34, Y-direction linear motor, 341, Y-direction magnetic steel , 342, Y-axis coil, 35, X-axis linear motor, 351, X-axis magnetic steel, 352, X-axis coil, 4, adsorption seat, 41, upper adsorption seat, 411, micropore, 42, lower adsorption seat, 5, first motion mechanism, 51, X-axis motion assembly, 52, Z-axis motion assembly, 6, shooting mechanism, 61, camera, 71, Z-axis linear motor, 8, exposure mechanism, 81, exposure head, 9, magnetic spring, 91, stator part, 92, mover part, 10, air spring. DETAILED DESCRIPTION

[0044] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0045] See also Figure 1-Figure 5 The embodiment of the present application discloses a laser direct writing device, comprising: a base 1; a beam 2, connected to the base 1; an air-floating motion platform 3, arranged on a side of the base 1 facing the beam 2, the air-floating motion platform 3 can move relative to the beam 2, and is used to perform air-floating motion to drive the PCB board to be exposed to move along the Y direction and the X direction; an adsorption seat 4, arranged on a side of the air-floating motion platform 3 facing the beam 2, and is used to adsorb the PCB board to be exposed; a first motion mechanism 5, arranged on the beam 2; a shooting mechanism 6, arranged on the first motion mechanism 5, and the first motion mechanism 5 can drive the shooting mechanism 6 to move relative to the beam 2; a second motion mechanism, arranged on the beam 2; an exposure mechanism 8, arranged on the second motion mechanism, and the second motion mechanism can drive the exposure mechanism 8 to move relative to the beam 2.

[0046] The present invention realizes the air floating motion of the PCB to be exposed along the Y direction and the X direction by setting the air floating motion platform 3, with zero friction and high precision, ensuring the accuracy of the back and forth motion along the Y direction, thereby ensuring the processing accuracy of the PCB board. At the same time, through the high precision of the stepping motion along the X direction, it is ensured that the adjacent exposed images are perfectly bordered together, further ensuring the processing accuracy of the PCB and improving the processing quality of the product.

[0047] See also Figure 1 , Fig. 9 The air-floating motion platform 3 includes a Y-direction air-floating guide rail 31, a Y-direction moving seat 32 matched with the Y-direction air-floating guide rail 31, a Y-direction driving mechanism for driving the Y-direction moving seat 32 to move along the Y-direction, an X-direction moving seat 33 matched with the Y-direction moving seat 32, and an X-direction driving mechanism for driving the X-direction moving seat 33 to move along the X-direction, and the Y-direction air-floating guide rail 31 is fixed on the base 1. At this time, the Y-direction moving seat 32 also serves as an X-direction air-floating guide rail, reducing the intermediate superposition transmission error and improving the accuracy.

[0048] See also Figure 7 , Fig. 9 , the Y-direction driving mechanism includes two Y-direction linear motors 34, and the two Y-direction linear motors 34 are respectively connected to the Y-direction moving seat 32; and / or the X-direction driving mechanism includes two X-direction linear motors 35, and the two X-direction linear motors 35 are respectively connected to the X-direction moving seat 33. Specifically, the Y-direction linear motor 34 includes a Y-direction magnetic steel 341 fixed on the base 1 and a Y-direction coil 342 connected to the Y-direction moving seat 32, and the two Y-direction magnetic steels 341 are respectively located on both sides of the Y-direction air-floating guide rail 31. The X-direction linear motor 35 includes an X-direction magnetic steel 351 fixed on the Y-direction moving seat 32 and an X-direction coil 352 connected to the X-direction moving seat 33. The Y-direction linear motor 34 drives the Y-direction moving seat 32 to move along the Y-direction air-floating guide rail 31, and the X-direction linear motor 35 drives the X-direction moving seat 33 to move along the Y-direction moving seat 32.

[0049] Specifically, the Y-direction moving seat 32 includes a Y-direction upward moving seat 321, two Y-direction side moving seats 322 connected to the Y-direction upward moving seat 321, and two Y-direction downward moving seats 323 respectively connected to the two Y-direction side moving seats 322. The X-direction moving seat 33 moves in an air-floating manner along the X-direction relative to the Y-direction upward moving seat 321.

[0050] More specifically, the X-axis moving seat 33 includes an X-axis upward moving seat 331, two X-axis side moving seats 332 connected to the X-axis upward moving seat 331, and two X-axis downward moving seats 333 respectively connected to the two X-axis side moving seats 332. The adsorption seat 4 is fixed to the X-axis upward moving seat 331, and the Y-axis upward moving seat 321 includes a first Y-axis upward moving seat 3211 and a second Y-axis upward moving seat 3212 which are fixed and stacked along the Z direction.

[0051] See also Figure 1 , Figure 6 , the shooting mechanism 6 includes at least one camera 61, the first motion mechanism 5 includes an X-axis motion component 51 and at least one Z-axis motion component 52 arranged on the X-axis motion component, the X-axis motion component 51 is installed on one side of the beam 2, and at least one camera 61 is connected to at least one Z-axis motion component 52 in a one-to-one correspondence. The camera 61 is used to detect the PCB board after exposure, and the Z-axis motion component 52 is used to adjust the height of the camera 61. The camera 61 is driven to move along the X-axis direction by the X-axis motion component 51, and the camera 61 is driven to move along the Z-axis direction by the Z-axis motion component 52. The structure is simple and compact, and the detection accuracy is high. In this embodiment, the number of cameras 61 and Z-axis motion components 52 is two, which improves the detection efficiency. The X-axis motion component 51 can be a double mover driven by a linear motor, and the double movers drive the two cameras 61 to move along the X direction respectively, and the Z-axis motion component 52 can be a screw assembly driven by a servo motor.

[0052] See also Figure 5 , Figure 8 The second motion mechanism includes at least one Z-axis linear motor 71, and the exposure mechanism 8 includes at least one exposure head 81, and at least one exposure head 81 is connected to at least one Z-axis linear motor 71. The Z-axis linear motor 71 is used to drive multiple exposure heads 81 to achieve Z-axis movement, which has a simple and compact structure and high precision. The straightness can reach 1um and the yaw angle is within 1.5arcsec. Specifically, the number of exposure heads 81 is multiple, and the number of Z-axis linear motors 71 is two.

[0053] Preferably, at least one magnetic spring 9 is provided, a stator portion 91 of the magnetic spring 9 is fixed to the cross beam 2, a mover portion 92 of the magnetic spring 9 is connected to the Z-axis linear motor 71, and the magnetic spring 9 balances the gravity of the Z-axis linear motor 71 and the exposure head 81 through magnetic force, thereby reducing the thrust required for the Z-axis linear motor 71 and preventing it from falling due to power failure.

[0054] Preferably, the adsorption seat 4 is a marble adsorption seat. Since the adsorption seat 4 is made of marble, the flatness of the full-width 880×660 surface can reach within 5um. The structure of the adsorption seat 4 is divided into an upper adsorption seat 41 and a lower adsorption seat 42. The upper adsorption seat 41 and the lower adsorption seat 42 are combined to form a cavity in the middle. The upper adsorption seat 41 is set as the loading side, and a plurality of micropores 411 are arranged on the upper adsorption seat 41, and the lower adsorption seat 42 is the negative pressure side. Preferably, the aperture of the micropore 411 is 1.2mm. The vacuum pump is connected to the lower adsorption seat 42 to extract the air in the cavity, so that a vacuum negative pressure is formed at the micropore 411 of the upper adsorption seat 41, which is used to adsorb the PCB board to be exposed.

[0055] Preferably, a plurality of air springs 10 are provided at the bottom of the base 1 to achieve environmental vibration isolation, so that the laser direct writing device can run more smoothly.

[0056] When the utility model is used, the PCB board to be exposed is sent to the adsorption seat 4, and the PCB board to be exposed is adsorbed by vacuuming the adsorption seat 4 to generate negative pressure, and then the Y-direction moving seat 32 moves along the Y-direction air-floating guide rail 31 along the Y axis through the air-floating motion platform 3, and the X-direction moving seat moves along the Y-direction moving seat 32 along the X axis, driving the product on the adsorption seat 4 to move to the bottom of the crossbeam 2. According to the thickness of the product, the position of the exposure head 81 on the Z axis is adjusted by the Z-axis linear motor 71 to achieve the effect of precise focusing, and the position of the camera 61 on the Z axis is adjusted by the Z-axis motion component 52 to achieve precise focusing. After adjusting each axis, exposure begins, the Y-direction moving seat 32 moves along the Y-direction air-floating guide rail 31 to achieve movement along the Y axis, and multiple exposure heads 81 do not move at the adjusted position, and the laser captured by other mechanisms is used to etch the product, and the camera 6 moves back and forth along the X axis to collect the processed engraved line image, which is fed back to the control system to detect whether the processing meets the requirements. After a part of the product is engraved, the X-axis moving seat 33 moves a short distance along the X-axis direction through the Y-axis moving seat 32 as the X-axis air-floating guide rail, and then the Y-axis moving seat 32 moves along the Y-axis air-floating guide rail 31 to realize the movement of the product along the Y-axis and cooperate with the exposure head 81 to start etching the circuit on the other side of the product. The two parts of the circuit completed in steps are connected together to form a complete circuit strip. The above movement process is repeated to finally obtain a completely exposed PCB board. Finally, the exposed PCB board is sent to the next process by moving along the Y-axis direction.

[0057] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0058] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A laser direct writing device, characterized in that: include: Base; A crossbeam connected to the base; An air-floating motion platform is provided on a side of the base facing the crossbeam, and the air-floating motion platform can move relative to the crossbeam; An adsorption seat, arranged on a side of the air-floating motion platform facing the crossbeam; A first motion mechanism, disposed on the crossbeam; A shooting mechanism, provided on the first motion mechanism, wherein the first motion mechanism can drive the shooting mechanism to move relative to the crossbeam; A second motion mechanism is provided on the crossbeam; The exposure mechanism is arranged on the second motion mechanism, and the second motion mechanism can drive the exposure mechanism to move relative to the crossbeam.

2. The laser direct writing device according to claim 1, characterized in that: The air-floating motion platform includes a Y-direction air-floating guide rail, a Y-direction moving seat matched with the Y-direction air-floating guide rail, a Y-direction driving mechanism for driving the Y-direction moving seat to move along the Y-direction, an X-direction moving seat matched with the Y-direction moving seat, and an X-direction driving mechanism for driving the X-direction moving seat to move along the X-direction. The Y-direction air-floating guide rail is fixed on the base.

3. The laser direct writing device according to claim 2, characterized in that: The Y-axis driving mechanism comprises two Y-axis linear motors, and the two Y-axis linear motors are respectively connected to the Y-axis moving seat; and / or The X-direction driving mechanism comprises two X-direction linear motors, and the two X-direction linear motors are respectively connected to the X-direction moving seats.

4. The laser direct writing device according to claim 2 or 3, characterized in that: The Y-direction moving seat comprises a Y-direction upward moving seat, two Y-direction side moving seats connected to the Y-direction upward moving seat, and two Y-direction downward moving seats respectively connected to the two Y-direction side moving seats. The X-direction moving seat moves in an X-direction air-floating manner relative to the Y-direction upward moving seat.

5. The laser direct writing device according to claim 4, characterized in that: The X-direction moving seat includes an X-direction upward moving seat, two X-direction side moving seats connected to the X-direction upward moving seat, and two X-direction downward moving seats respectively connected to the two X-direction side moving seats. The adsorption seat is fixed to the X-direction upward moving seat, and the Y-direction upward moving seat includes a first Y-direction upward moving seat and a second Y-direction upward moving seat fixed and stacked along the Z direction.

6. The laser direct writing device according to claim 1, characterized in that: The shooting mechanism includes at least one camera, the first motion mechanism includes an X-axis motion component and at least one Z-axis motion component arranged on the X-axis motion component, the X-axis motion component is installed on one side of the beam, and the at least one camera is connected to the at least one Z-axis motion component in a one-to-one correspondence.

7. The laser direct writing device according to claim 1, characterized in that: The second motion mechanism includes at least one Z-axis linear motor, and the exposure mechanism includes at least one exposure head, and at least one of the exposure heads is connected to the at least one Z-axis linear motor.

8. The laser direct writing device according to claim 7, characterized in that: At least one magnetic spring is also provided, the stator portion of the magnetic spring is fixed to the cross beam, and the mover portion of the magnetic spring is connected to the Z-axis linear motor.

9. The laser direct writing device according to claim 1, characterized in that: The adsorption seat is a marble adsorption seat.

10. The laser direct writing device according to claim 1, characterized in that: A plurality of air springs are arranged at the bottom of the base.

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