Bar body bearing mechanism and crystal bar ruling machine

Abstract

The utility model discloses a bar body bearing mechanism and a crystal bar ruling machine, the bar body bearing mechanism comprises a mounting base and n bearing assemblies, the n bearing assemblies are mounted on the mounting base at intervals in the first direction, and the distance between every two adjacent bearing assemblies is adjustable in the first direction; the bearing assembly is configured to bear a rod body extending in the first direction and drive the rod body to rotate; each set of bearing assembly comprises a rotating assembly and a first driving assembly, the rotating assembly is used for bearing a rod body, the rotating assembly is connected to the driving end of the first driving assembly, and the first driving assembly is configured to drive the rotating assembly to rotate so as to drive the borne rod body to rotate. The n sets of bearing assemblies are arranged to bear different parts of the rod body, and reliable supporting of the rod body is achieved; when operation such as detection or scribing is carried out on the rod body, the bearing assembly is driven by the arranged rotating assembly to drive the borne rod body to automatically rotate, manual operation is not needed, the working efficiency is improved, and manpower is saved.

Description

Technical Field

[0001] The present application belongs to the field of silicon wafer production equipment manufacturing, and in particular relates to a rod bearing mechanism and a crystal rod scribing machine. Background Art

[0002] In the production process of silicon wafers, the crystal rods generated by the crystal pulling process need to be inspected so that the crystal rods can be scribed according to the inspection results. The subsequent cutting process uses the scribed lines as the basis for cutting the crystal rods.

[0003] When performing the marking operation, the existing crystal rod marking machine usually rotates the crystal rod on the supporting component manually, which has the disadvantages of low working efficiency and time-consuming and labor-intensive. Utility Model Content

[0004] The purpose of the present application is to provide a rod supporting mechanism to solve the shortcomings of low work efficiency and time-consuming and labor-intensive process in the prior art when manually rotating the crystal rod during marking. In addition, the present application also provides a crystal rod marking machine including the above-mentioned rod supporting mechanism.

[0005] To achieve the above purpose, the embodiment of the present application adopts the following technical solution:

[0006] In a first aspect, the present application provides a crystal rod bearing mechanism, which includes a mounting seat and n sets of bearing components, wherein:

[0007] n sets of bearing assemblies are installed on the mounting seat at intervals along the first direction, the spacing between two adjacent sets of bearing assemblies along the first direction is adjustable, the bearing assemblies are configured to carry a rod extending along the first direction and drive the rod to rotate, and n is a positive integer not less than 2;

[0008] Each set of bearing components includes a rotating component and a first driving component. The rotating component is used to bear the rod body. The rotating component is connected to the driving end of the first driving component. The first driving component is configured to drive the rotating component to rotate so as to drive the carried rod body to rotate.

[0009] By setting n sets of bearing components to bear different parts of the rod in the extension direction of the rod, reliable support for the rod is achieved; when the rod is inspected or marked, the bearing components are driven by the provided rotating components to drive the carried rod to rotate automatically, without manual operation, thus improving work efficiency and saving manpower; at the same time, the spacing between two adjacent sets of bearing components is adjustable to adapt to rods of different lengths, thereby improving the compatibility of the rod bearing mechanism.

[0010] Optionally, the bearing assembly further includes a mounting member, and the rotating assembly and the first driving assembly are arranged on the mounting member;

[0011] The mounting member of each set of bearing components can be mounted on the mounting seat so as to be reciprocatingly movable along a first direction;

[0012] Alternatively, at least one set of mounting components of the bearing assembly is fixed on the mounting seat, and the mounting components of the remaining bearing assemblies are mounted on the mounting seat so as to be reciprocatingly movable along the first direction.

[0013] By arranging the mounting parts to mount each set of bearing components, the spacing between two adjacent sets of bearing components along the first direction can be adjusted to accommodate rods of different lengths.

[0014] Optionally, the rotating assembly includes a first rotating shaft and a second rotating shaft, both of which are rotatably mounted on the mounting member, the first driving assembly is configured to drive the first rotating shaft and the second rotating shaft to rotate synchronously, the first rotating shaft and the second rotating shaft are arranged in parallel and spaced apart and extend along a first direction, a plurality of supporting wheels are arranged on the first rotating shaft and the second rotating shaft along the first direction, and the supporting wheels on the first rotating shaft and the second rotating shaft jointly support the rod body.

[0015] By providing the first rotating shaft and the second rotating shaft arranged in parallel and at intervals and the supporting wheels on the two rotating shafts, the rod body is supported, and the rod body is driven to rotate as the first rotating shaft and the second rotating shaft rotate synchronously in the same direction.

[0016] Optionally, the first drive assembly includes a first drive member, a drive shaft and a transmission assembly. The drive shaft is rotatably mounted on the mounting member. The drive shaft is transmission-connected to the first rotating shaft and the second rotating shaft through the transmission assembly. The first drive member is configured to drive the drive shaft to rotate. The drive shaft drives the first rotating shaft and the second rotating shaft to rotate synchronously in the same direction through the transmission assembly.

[0017] By setting a first driving member to drive the driving shaft to rotate, the driving shaft drives the first rotating shaft and the second rotating shaft to rotate synchronously through the transmission assembly, thereby realizing the driving of the rotating assembly to meet the requirements of bearing and rotating the rod body.

[0018] Optionally, the transmission assembly includes two sets of gear pairs, one set of gear pairs is arranged corresponding to the first rotating shaft, and the other set of gear pairs is arranged corresponding to the second rotating shaft, each set of gear pairs includes a first gear and a second gear, the first gear is installed on the driving shaft, and the second gear is installed on the corresponding first rotating shaft or the second rotating shaft, and the first gear and the second gear of the same set are meshed.

[0019] By arranging two sets of gear pairs corresponding to the first rotating shaft and the second rotating shaft for transmission, the requirement of synchronous rotation of the first rotating shaft and the second rotating shaft is met.

[0020] Optionally, the rod bearing mechanism further includes a second driving assembly, and the second driving assembly is configured to drive the mounting seat to move along a second direction.

[0021] By providing a second driving assembly, the bearing assembly can be moved in a second direction different from the first direction, thereby satisfying different usage scenarios.

[0022] Optionally, the second drive assembly includes a second drive member, a first drive gear and a first rack, the fixed end of the second drive member is mounted on the mounting seat, the driving end of the second drive member is mounted with the first drive gear, the second drive member is configured to drive the first drive gear to rotate, the first rack extends along the second direction, and the first drive gear is meshed with the first rack.

[0023] By setting a second driving member to drive the first driving gear to rotate, the first driving gear cooperates with the first rack arranged along the second direction for transmission, so that the mounting seat can reciprocate along the second direction, thereby meeting the transfer requirements of the rod body.

[0024] Optionally, a third drive assembly is provided at the movable mounting member, and the third drive assembly is configured to drive the mounting member to reciprocate along the first direction on the mounting seat. The third drive assembly includes a third drive member, a second drive gear and a second rack. The fixed end of the third drive member is mounted on the mounting member, and the second drive gear is mounted on the driving end of the third drive member. The third drive member is configured to drive the second drive gear to rotate, and the second rack is fixed on the mounting seat and extends along the first direction, and the second drive gear is meshed with the second rack.

[0025] By setting a third driving member to drive the second driving gear to rotate, the second driving gear cooperates with the second rack arranged along the first direction to transmit, so that the mounting member can reciprocate along the first direction, meeting the requirement that the spacing between two adjacent sets of bearing components can be adjusted.

[0026] In a second aspect, the present application proposes a crystal ingot scribing machine, comprising the above-mentioned ingot bearing mechanism, detection mechanism and scribing marking mechanism, wherein the ingot is a crystal ingot, and the detection mechanism and the scribing marking mechanism are configured to be movable along the length direction of the crystal ingot, wherein:

[0027] The rod body supporting mechanism is configured to support the crystal rod and drive the crystal rod to rotate;

[0028] The detection mechanism is configured to detect the crystal rod;

[0029] The scribing and marking mechanism is configured to scribing or marking corresponding positions of the crystal rod according to the detection result of the detection mechanism.

[0030] By providing a rod body carrying mechanism to carry the crystal rod and realize automatic rotation of the crystal rod, by providing a detection mechanism to detect various parts of the crystal rod, and by providing a marking or scribing mechanism to mark or mark the target position on the crystal rod, automatic detection, marking and marking of the crystal rod are realized, thereby improving the processing efficiency and degree of automation of the crystal rod.

[0031] Optionally, the detection mechanism includes a visual detection mechanism, a diameter detection mechanism and a resistivity detection mechanism, wherein:

[0032] The visual inspection mechanism is configured to photograph and inspect the crystal ingot to inspect the appearance of the crystal ingot;

[0033] The diameter detection mechanism is configured to detect the diameter of the crystal rod;

[0034] The resistivity detection mechanism is configured to detect the resistivity of the crystal rod.

[0035] By setting up a visual inspection mechanism, a diameter inspection mechanism and a resistivity inspection mechanism, the appearance, diameter and resistivity of the crystal rod are inspected respectively, and then the target position of marking and marking is determined according to the inspection results to improve the marking accuracy and the subsequent processing quality of the crystal rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present application, the following briefly introduces the background technology of the present application and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present application and these drawings without paying any creative work.

[0037] Figure 1 It is a schematic diagram of the three-dimensional structure of the rod bearing mechanism provided in the embodiment of the present application;

[0038] Figure 2 It is a structural schematic diagram of a bearing assembly in a rod bearing mechanism provided in an embodiment of the present application;

[0039] Figure 3 is a structural schematic diagram of a second driving assembly in a rod bearing mechanism provided in an embodiment of the present application;

[0040] Figure 4 It is a schematic diagram of the three-dimensional structure of the crystal rod scribing machine provided in an embodiment of the present application.

[0041] Figures 1 to 4 The following reference numerals are included:

[0042] Mounting seat 1;

[0043] The bearing assembly 2, the rotating assembly 21, the first rotating shaft 211, the second rotating shaft 212, the supporting wheel 213, the first driving assembly 22, the first driving member 221, the driving shaft 222, the first gear 223, the second gear 224, and the mounting member 23;

[0044] A second driving assembly 3, a second driving member 31, a first driving gear 32, and a first rack 33;

[0045] A third driving assembly 4, a third driving member 41, a second driving gear 42, and a second rack 43;

[0046] Rod body supporting mechanism 100;

[0047] Detection mechanism 200, visual detection mechanism 210, diameter detection mechanism 220, resistivity detection mechanism 230;

[0048] Marking and marking mechanism 300;

[0049] Crystal rod 400. DETAILED DESCRIPTION

[0050] In order to make the technical problems solved by this application, the technical solutions adopted, and the technical effects achieved more clearly, the technical solutions of the embodiments of this application will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

[0051] In the existing silicon wafer production process, the crystal ingot generated by the crystal pulling process is inspected, and the crystal ingot is scribed according to the inspection results. The subsequent cutting process uses the scribe line as the basis for cutting the crystal ingot. When the crystal ingot is scribed, the crystal ingot on the supporting component is usually rotated manually, which has the disadvantages of low work efficiency and time-consuming and labor-intensive.

[0052] In this regard, in the first aspect, the present application provides a rod bearing mechanism, which realizes the functions of bearing a crystal rod and driving the rod to rotate, thereby reducing manual input. Figures 1 to 3 As shown, the rod bearing mechanism provided in the embodiment of the present application includes a mounting seat 1 and n sets of bearing components 2.

[0053] Among them, n sets of bearing components 2 are installed on the mounting seat 1 at intervals along the first direction, the spacing between two adjacent sets of bearing components 2 along the first direction is adjustable, the bearing components 2 are configured to carry a rod extending along the first direction and drive the rod to rotate, and n is a positive integer not less than 2.

[0054] Each set of supporting components 2 includes a rotating component 21 and a first driving component 22. The rotating component 21 is used to support the rod body. The rotating component 21 is connected to the driving end of the first driving component 22. The first driving component 22 is configured to drive the rotating component 21 to rotate so as to drive the supported rod body to rotate.

[0055] The rod bearing mechanism 100 proposed in the present application realizes reliable support of the rod by setting n sets of bearing components 2 to bear different parts of the rod in the extension direction of the rod, and at the same time, the spacing between two adjacent sets of bearing components 2 is adjustable to adapt to rods of different lengths, thereby improving the compatibility of the rod bearing mechanism 100, and according to rods of different lengths, a suitable number of bearing components 2 can be selected. Furthermore, when the rod is inspected or marked, the bearing component 2 is driven by the rotating component 21 to drive the carried rod to rotate automatically, without manual operation, thereby improving work efficiency and saving manpower.

[0056] Optionally, the bearing assembly 2 also includes a mounting member 23, wherein the mounting member 23 is preferably a base plate, and the rotating assembly 21 and the first driving assembly 22 are arranged on the mounting member 23, and the mounting members 23 of each set of bearing assemblies 2 can be mounted on the mounting seat 1 for reciprocating movement along the first direction; or, at least one set of mounting members 23 of the bearing assembly 2 is fixed on the mounting seat 1, and the mounting members 23 of the remaining bearing assemblies 2 can be mounted on the mounting seat 1 for reciprocating movement along the first direction.

[0057] It can be seen that by setting the mounting parts 23 to install each set of bearing components 2, and setting one or more of the mounting parts 23 to be fixed or movable, the spacing between two adjacent sets of bearing components 2 along the first direction can be adjusted to adapt to rods of different lengths, thereby improving the versatility of the bearing components 2.

[0058] For details, see Figure 2 The rotating assembly 21 includes a first rotating shaft 211 and a second rotating shaft 212, and the first rotating shaft 211 and the second rotating shaft 212 are both rotatably mounted on the mounting member 23. The first driving assembly 22 is configured to drive the first rotating shaft 211 and the second rotating shaft 212 to rotate synchronously. The first rotating shaft 211 and the second rotating shaft 212 are arranged in parallel and spaced apart and extend along the first direction. A plurality of supporting wheels 213 are arranged on the first rotating shaft 211 and the second rotating shaft 212 at intervals along the first direction, and the supporting wheels 213 on the first rotating shaft 211 and the second rotating shaft 212 jointly support the rod body.

[0059] It can be seen that by providing the first rotating shaft 211 and the second rotating shaft 212 arranged in parallel and spaced apart and the supporting wheels 213 on the two rotating shafts, effective support is achieved for the rod body, and the rod body is driven to rotate by synchronously rotating in the same direction with the first rotating shaft 211 and the second rotating shaft 212. The supporting wheel 213 is a rubber-coated wheel, which can increase the friction between the supporting wheel 213 and the rod body, prevent the rod body from slipping on the supporting wheel 213, and ensure that the supporting wheel 213 effectively drives the rod body to rotate.

[0060] Optionally, the first drive assembly 22 includes a first drive member 221, a drive shaft 222 and a transmission assembly. The drive shaft 222 is rotatably mounted on the mounting member 23. The drive shaft 222 is transmission-connected to the first rotating shaft 211 and the second rotating shaft 212 through the transmission assembly. The first drive member 221 is configured to drive the drive shaft 222 to rotate. The first drive member 221 is preferably a motor. The drive shaft 222 drives the first rotating shaft 211 and the second rotating shaft 212 to rotate synchronously in the same direction through the transmission assembly.

[0061] It can be seen that by setting the first driving member 221 to drive the driving shaft 222 to rotate, the driving shaft 222 drives the first rotating shaft 211 and the second rotating shaft 212 to rotate clockwise or counterclockwise at the same time through the transmission assembly, thereby realizing the driving of the rotating assembly 21 and meeting the requirements of bearing and rotating the rod body.

[0062] Optionally, the transmission assembly includes two sets of gear pairs, one set of gear pairs is set corresponding to the first rotating shaft 211, and the other set of gear pairs is set corresponding to the second rotating shaft 212, each set of gear pairs includes a first gear 223 and a second gear 224, the first gear 223 is installed on the driving shaft 222, and the second gear 224 is installed on the corresponding first rotating shaft 211 or the second rotating shaft 212, and the first gear 223 and the second gear 224 of the same set are meshed.

[0063] It can be seen that by providing two sets of gear pairs corresponding to the first rotating shaft 211 and the second rotating shaft 212 for transmission, the requirement of synchronous rotation of the first rotating shaft 211 and the second rotating shaft 212 is met, thereby realizing the rotation of the rod body.

[0064] Optionally, the rod supporting mechanism 100 also includes a second driving component 3, which is configured to drive the mounting base 1 to move along a second direction. By setting the second driving component 3, the supporting component 2 is moved along a second direction different from the first direction, thereby meeting different usage scenarios. The second direction is perpendicular to the first direction.

[0065] For details, see Figure 1 The second driving assembly 3 includes a second driving member 31, a first driving gear 32 and a first rack 33. The fixed end of the second driving member 31 is mounted on the mounting base 1. The second driving member 31 is preferably a motor. The driving end of the second driving member 31 is mounted with the first driving gear 32. The second driving member 31 is configured to drive the first driving gear 32 to rotate. The first rack 33 extends along the second direction, and the first driving gear 32 is meshed with the first rack 33.

[0066] It can be seen that by setting the second driving member 31 to drive the first driving gear 32 to rotate, the first driving gear 32 cooperates with the first rack 33 arranged along the second direction for transmission, so that the mounting seat 1 can reciprocate along the second direction, so as to synchronously transfer n sets of bearing components to the loading and unloading stations to receive the rod body to be inspected, and transfer the received rod body to the inspection station, thereby meeting the transfer requirements of the rod body.

[0067] For details, see Figure 1 and Figure 3 , wherein a third driving assembly 4 is correspondingly provided at the movable mounting member 23, and the third driving assembly 4 is configured to drive the mounting member 23 to reciprocate along the first direction on the mounting seat 1, and the third driving assembly 4 includes a third driving member 41, a second driving gear 42 and a second rack 43, and the fixed end of the third driving member 41 is mounted on the mounting member 23, and the third driving member 41 is preferably a motor, and the driving end of the third driving member 41 is installed with the second driving gear 42, and the third driving member 41 is configured to drive the second driving gear 42 to rotate, and the second rack 43 is fixed on the mounting seat 1 and extends along the first direction, and the second driving gear 42 is meshed with the second rack 43.

[0068] It can be seen that by setting the third driving member 41 to drive the second driving gear 42 to rotate, the second driving gear 42 cooperates with the second rack 43 arranged along the first direction to transmit, thereby realizing the reciprocating motion of the mounting member 23 along the first direction, thereby meeting the requirement that the spacing between two adjacent sets of bearing components 2 can be adjusted.

[0069] It should be noted that the above-mentioned optional implementation modes can be combined in any combination, and the combined implementation modes all fall within the protection scope of this application.

[0070] The rod bearing mechanism proposed in this application has the following advantages over the prior art:

[0071] 1) When the rod is inspected, marked, or coded, the rod can be automatically rotated, saving manpower and improving work efficiency. At the same time, the spacing of the bearing components is adjustable, which can be applied to rods of different lengths and has good compatibility.

[0072] 2) The overall structure of the load-bearing component is compact and occupies little space.

[0073] 3) The same driving shaft is used in conjunction with a gear pair to drive the first rotating shaft and the second rotating shaft to rotate synchronously, with a simple structure and precise and efficient transmission.

[0074] 4) It realizes the synchronous transfer of n sets of bearing components to the loading and unloading stations to receive the rod bodies to be inspected, and the transfer of the received rod bodies to the inspection station, which meets the transfer requirements for the rod bodies and further improves work efficiency.

[0075] The rod bearing mechanism 100 can be applied to any occasions where the rod has bearing and rotation requirements, such as being used in the process of scribing the crystal rod 400. In this regard, in a second aspect, the present application also proposes a crystal rod scribing machine. Figure 4 The crystal rod scribing machine includes the above-mentioned rod body supporting mechanism 100, detection mechanism 200 and scribing marking mechanism 300, the rod body in the rod body supporting mechanism 100 is the crystal rod 400, and the detection mechanism 200 and the scribing marking mechanism 300 are configured to be able to move along the length direction of the crystal rod 400.

[0076] The rod-carrying mechanism 100 is configured to carry the crystal rod 400 and drive the crystal rod 400 to rotate;

[0077] The detection mechanism 200 is configured to detect the crystal rod 400;

[0078] The scribing and marking mechanism 300 is configured to scribing or marking corresponding positions of the crystal ingot 400 according to the detection result of the detection mechanism 200 .

[0079] The specific working process of the crystal rod scribing machine is as follows:

[0080] 1) After the mounting seat 1 of the rod body bearing mechanism 100 is driven by the second driving assembly 3 to move along the second direction to the loading and unloading station to receive the crystal ingot 400, the bearing assembly 2 of the rod body bearing mechanism 100 returns to the inspection station with the crystal ingot 400 to wait for subsequent actions;

[0081] 2) The detection mechanism 200 detects the crystal rod 400. During the process, the rotating component 21 of the supporting component 2 drives the crystal rod 400 to rotate a certain angle so that the undetected surface and edge line face upward, until all the peripheral surfaces and edge lines of the crystal rod 400 are detected, and the detection results are transmitted to the upper system;

[0082] 3) The marking mechanism 300 marks or scribes the corresponding position of the crystal ingot 400 according to the detection result. When marking, the support wheel 213 of the rotating assembly 21 drives the crystal ingot 400 to rotate, so that the marking mechanism 300 can mark along the circumference of the crystal ingot 400, so that the subsequent process uses the marked line as a reference for truncation;

[0083] 4) The rod body supporting mechanism 100 moves the crystal rod 400 to the loading and unloading station for unloading and entering the subsequent process.

[0084] It can be seen that by providing a rod body carrying mechanism 100 to carry the crystal rod 400 and realize automatic rotation of the crystal rod 400, by providing a detection mechanism 200 to detect various parts of the crystal rod 400, and then by providing a marking or scribing mechanism 300 to scribe or mark the target position on the crystal rod 400, automatic detection and marking of the crystal rod 400 are realized, thereby improving the processing efficiency and degree of automation of the crystal rod 400.

[0085] Optionally, the detection mechanism 200 includes a visual detection mechanism 210, a diameter detection mechanism 220, and a resistivity detection mechanism 230. In actual use, the visual detection mechanism 210, the diameter detection mechanism 220, the resistivity detection mechanism 230, and the marking mechanism 300 need to be equipped with a transverse driving mechanism respectively, so as to be able to independently control the visual detection mechanism 210, the diameter detection mechanism 220, the resistivity detection mechanism 230, and the marking mechanism 300 to move along the length direction of the crystal rod 400. The transverse driving mechanism can be a linear module, a mechanism in which a motor cooperates with a gear rack, etc.

[0086] Among them, the visual inspection mechanism 210 is configured to photograph and inspect the crystal rod 400 to inspect the appearance of the crystal rod 400. It can detect whether there are cracks on the surface of the crystal rod 400 and detect the position of the broken edge of the crystal rod 400. A normal crystal rod 400 has four edges, each of which extends continuously along the length direction of the crystal rod 400. The four edges are evenly spaced along the circumference of the crystal rod 400. If the edge is disconnected, a break occurs, indicating that the crystal rod 400 at this broken section is unqualified, and it is necessary to draw a line at the broken section to cut off this unqualified section.

[0087] Among them, the diameter detection mechanism 220 is configured to detect the diameter of the crystal rod 400. The diameter detection mechanism 220 moves along the length direction of the crystal rod 400 and can detect the diameter of each part of the crystal rod 400. If the diameter of a certain section is unqualified, it is necessary to draw a line at both ends of the unqualified section, and then cut off the unqualified section.

[0088] Among them, the resistivity detection mechanism 230 is configured to detect the resistivity of the crystal rod 400. The resistance testing mechanism moves along the length direction of the crystal rod 400 to test the resistivity everywhere. If the resistivity of a certain section is unqualified, it is necessary to draw a line at both ends of the unqualified section, and then cut off the unqualified section.

[0089] In addition, when marking the crystal rod 400, only one spot of the crystal rod 400 may be marked, or each segment divided by the marking line may be marked. The specific number of markings and the marking positions are determined according to actual needs. The marking and scribing mechanism 300 may use a laser device for marking and scribing.

[0090] It can be seen that by setting up the visual inspection mechanism 210, the diameter inspection mechanism 220 and the resistivity inspection mechanism 230 to inspect the appearance, diameter and resistivity of the crystal rod 400 respectively, and then determining the target position of the marking according to the inspection results, the marking accuracy and the subsequent processing quality of the crystal rod 400 are improved.

[0091] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above embodiments. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A rod bearing mechanism, characterized in that: The rod bearing mechanism comprises a mounting seat and n sets of bearing components, wherein: The n sets of bearing assemblies are installed on the mounting seat at intervals along a first direction, and the spacing between two adjacent sets of bearing assemblies along the first direction is adjustable. The bearing assemblies are configured to carry a rod extending along the first direction and drive the rod to rotate, and n is a positive integer not less than 2; Each set of the supporting components includes a rotating component and a first driving component. The rotating component is used to support the rod body. The rotating component is connected to the driving end of the first driving component. The first driving component is configured to drive the rotating component to rotate so as to drive the supported rod body to rotate.

2. The rod supporting mechanism according to claim 1, characterized in that: The bearing assembly further comprises a mounting member, and the rotating assembly and the first driving assembly are arranged on the mounting member; Each set of mounting parts of the bearing assembly can be mounted on the mounting seat so as to be reciprocatingly movable along the first direction; Alternatively, at least one set of mounting components of the bearing assembly is fixed on the mounting seat, and the remaining mounting components of the bearing assembly are mounted on the mounting seat so as to be reciprocatingly movable along the first direction.

3. The rod supporting mechanism according to claim 2, characterized in that: The rotating assembly includes a first rotating shaft and a second rotating shaft, and the first rotating shaft and the second rotating shaft are both rotatably mounted on the mounting member. The first driving assembly is configured to drive the first rotating shaft and the second rotating shaft to rotate synchronously. The first rotating shaft and the second rotating shaft are arranged in parallel and spaced apart and extend along the first direction. A plurality of supporting wheels are arranged on the first rotating shaft and the second rotating shaft at intervals along the first direction, and the supporting wheels on the first rotating shaft and the second rotating shaft jointly support the rod body.

4. The rod supporting mechanism according to claim 3, characterized in that: The first driving assembly includes a first driving member, a driving shaft and a transmission assembly. The driving shaft is rotatably mounted on the mounting member. The driving shaft is connected to the first rotating shaft and the second rotating shaft through the transmission assembly. The first driving member is configured to drive the driving shaft to rotate. The driving shaft drives the first rotating shaft and the second rotating shaft to rotate synchronously in the same direction through the transmission assembly.

5. The rod supporting mechanism according to claim 4, characterized in that: The transmission assembly includes two sets of gear pairs, one set of gear pairs is arranged corresponding to the first rotating shaft, and the other set of gear pairs is arranged corresponding to the second rotating shaft. Each set of gear pairs includes a first gear and a second gear. The first gear is installed on the driving shaft, and the second gear is installed on the corresponding first rotating shaft or the second rotating shaft. The first gear and the second gear of the same set are meshed.

6. The rod supporting mechanism according to claim 1, characterized in that: The rod supporting mechanism further includes a second driving assembly, and the second driving assembly is configured to drive the mounting seat to move along a second direction.

7. The rod supporting mechanism according to claim 6, characterized in that: The second driving assembly includes a second driving member, a first driving gear and a first rack. The fixed end of the second driving member is mounted on the mounting seat. The driving end of the second driving member is mounted with the first driving gear. The second driving member is configured to drive the first driving gear to rotate. The first rack extends along the second direction. The first driving gear is meshed with the first rack.

8. The rod supporting mechanism according to claim 2, characterized in that: A third driving component is correspondingly provided at the movable mounting member, and the third driving component is configured to drive the mounting member to reciprocate along the first direction on the mounting seat. The third driving component includes a third driving member, a second driving gear and a second rack. The fixed end of the third driving member is mounted on the mounting member, and the driving end of the third driving member is mounted on the second driving gear. The third driving member is configured to drive the second driving gear to rotate, and the second rack is fixed on the mounting seat and extends along the first direction, and the second driving gear is meshed with the second rack.

9. A crystal rod scribing machine, characterized in that: The crystal ingot scribing machine comprises a rod body carrying mechanism, a detection mechanism and a scribing and marking mechanism as claimed in any one of claims 1 to 8, wherein the rod body is a crystal ingot, and the detection mechanism and the scribing and marking mechanism are configured to be movable along the length direction of the crystal ingot, wherein: The rod-carrying mechanism is configured to carry the crystal rod and drive the crystal rod to rotate; The detection mechanism is configured to detect the crystal rod; The scribing and marking mechanism is configured to scribing or marking corresponding positions of the crystal rod according to the detection result of the detection mechanism.

10. The crystal ingot scribing machine according to claim 9, characterized in that: The detection mechanism includes a visual detection mechanism, a diameter detection mechanism and a resistivity detection mechanism, wherein: The visual inspection mechanism is configured to photograph and inspect the crystal ingot to inspect the appearance of the crystal ingot; The diameter detection mechanism is configured to detect the diameter of the crystal rod; The resistivity detection mechanism is configured to detect the resistivity of the crystal rod.

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