Waste gas collecting device for assisting in cleaning heavy doping single crystal furnace

Abstract

A waste gas collecting device for auxiliary cleaning of a heavy doping single crystal furnace relates to the technical field of waste gas collection and comprises a collecting barrel and a conveying pipe hermetically communicated with the collecting barrel, the collecting barrel is in clearance fit with a butt-joint port of a main furnace chamber of a single crystal furnace body, and the conveying pipe is used for communicating the collecting barrel with a waste gas treatment system. The conveying pipe is connected with a bearing frame used for stabilizing the position of the collecting barrel, the bearing frame is fixed to a vertical telescopic piece used for adapting to vertical displacement of the main furnace chamber, the vertical telescopic piece is fixedly connected to the base, and the bearing frame is fixed to the base. Rollers are arranged at the bottom of the base. The preparation efficiency of the heavily doped single crystal is maintained under the condition of ensuring the production safety.

Description

Technical Field

[0001] The utility model relates to the technical field of waste gas collection, in particular to a waste gas collection device for assisting in cleaning a heavily doped single crystal furnace. Background Art

[0002] In the CZ method, the N-type heavily doped single crystal dopants are mainly phosphorus, arsenic and antimony. The solid solubility of antimony in the silicon lattice is much smaller than that of arsenic and phosphorus, so antimony is destined to be unable to make the silicon single crystal have a particularly low resistivity value, so arsenic and phosphorus are needed to reduce the resistivity value of the silicon single crystal. However, arsenic oxide is a highly toxic substance, and excessive phosphorus can cause various hazards to the human body. Therefore, in order to obtain low-resistivity silicon single crystals, certain protection must be carried out when pulling silicon single crystals doped with phosphorus and arsenic.

[0003] In actual workshop production, the main body of the single crystal furnace is divided into an upper furnace chamber and a lower furnace chamber, also called an auxiliary furnace chamber and a main furnace chamber. Usually, due to the large amount of volatiles in the silicon single crystal pulling process, the auxiliary furnace chamber is designed with a flat door structure to better clean the volatiles. The main body of the single crystal furnace uses a vacuum system to remove the impurity volatiles and oxides in the heavily doped single crystal furnace such as arsenic and phosphorus, and enter the exhaust gas treatment system through the vacuum pipe. At the same time, in order to efficiently collect the exhaust gas in the single crystal furnace body, increase the heat dissipation efficiency of the single crystal furnace body to a certain extent and reduce the energy consumption caused by long-term use of the vacuum system, and also to avoid direct contact between the main furnace chamber and the outside world, causing structural damage to the single crystal furnace body, and personnel injuries caused by excessive residual temperature in the single crystal furnace body during the separation of the auxiliary furnace chamber and the main furnace chamber, so after using the vacuum system to extract most of the exhaust gas, the swing door of the auxiliary furnace chamber is opened to expose the inlet and outlet and directly connect to the exhaust gas treatment system, so as to achieve the purpose of efficiently collecting exhaust gas and assisting the heat dissipation of the single crystal furnace body to a certain extent, that is, maintaining a stable and high efficiency of heavily doped single crystal preparation.

[0004] However, in the process of collecting exhaust gas from the auxiliary furnace chamber, the temperature in the main furnace chamber will drop slowly due to the separation of the auxiliary furnace chamber. Therefore, continuously collecting exhaust gas from the swing door inlet and outlet of the auxiliary furnace chamber will undoubtedly affect the preparation efficiency of heavily-doped single crystals. Therefore, after collecting exhaust gas at the swing door inlet and outlet of the auxiliary furnace chamber and the temperature drops to a certain extent, it is necessary to separate the auxiliary furnace chamber from the main furnace chamber to expose the docking interface between the main furnace chamber and the auxiliary furnace chamber, so as to carry out more efficient heat dissipation and subsequent cleaning work. Moreover, after exposing the docking interface of the auxiliary furnace chamber, in order to further accelerate the heat dissipation of the auxiliary furnace chamber, it is also necessary to move the auxiliary furnace chamber vertically to expose more of the auxiliary furnace chamber surface from the main body of the single crystal furnace, so as to further improve the heat dissipation efficiency, thereby maintaining the preparation efficiency of heavily-doped single crystals.

[0005] However, after the docking port of the main furnace chamber is exposed, the main furnace chamber will still emit exhaust gas due to the residual heat of the main furnace chamber and the contact of volatiles with the outside world, thereby polluting the working environment and causing physical harm to the staff. Utility Model Content

[0006] The utility model aims to provide a waste gas collecting device for assisting in cleaning a heavily-doped single crystal furnace, so as to maintain the preparation efficiency of the heavily-doped single crystal while ensuring production safety.

[0007] In order to solve the above technical problems, the specific solution adopted by the utility model is: a waste gas collection device for auxiliary cleaning of a heavily doped single crystal furnace, comprising a collecting tube and a conveying pipe sealed and connected to the collecting tube, the collecting tube and the main furnace chamber of the single crystal furnace body have a clearance fit at the docking interface, the conveying pipe is used to connect the collecting tube with the waste gas treatment system, so that the suction force of the waste gas treatment system is transmitted to the collecting tube, thereby improving the efficiency of the collecting tube in collecting harmful impurity waste gas in the main furnace chamber, the conveying pipe is connected to a supporting frame for stabilizing the position of the collecting tube, the supporting frame is fixed on a vertical telescopic member for adapting to the vertical displacement of the main furnace chamber, the vertical telescopic member is fixedly connected to the base, and a roller is provided at the bottom of the base.

[0008] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily doped single crystal furnace of the utility model, the collection tube is in a conical cylinder shape, the flared end of the collection tube is used to match the clearance with the main furnace chamber interface, and the narrowed end of the collection tube is used to be sealed and connected with the delivery pipe.

[0009] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily-doped single crystal furnace of the utility model, the conveying pipe is composed of a fixed connecting pipe and an elastic tube. One end of the fixed connecting pipe is fixedly connected to the collecting tube, and the other end of the fixed connecting pipe is sealed and connected to the elastic tube. The fixed connecting pipe is clamped with the supporting frame to position the collecting tube and facilitate quick disassembly and assembly. The elastic tube is used to telescopically cooperate with the fixed connecting pipe to connect the collecting tube with the waste gas treatment system.

[0010] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily doped single crystal furnace of the utility model, the vertical telescopic member includes a telescopic cylinder fixedly connected to the supporting frame, a fixed column is slidably connected inside the telescopic cylinder, and the fixed column is arranged on a bottom frame fixedly connected to the base.

[0011] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily-doped single crystal furnace of the utility model, a reinforcement rod is provided between the base and the bottom frame, and the reinforcement rod is used to cooperate with the base and the bottom frame to form a triangle to maintain a stable connection between the bottom frame and the base.

[0012] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily doped single crystal furnace of the utility model, the supporting frame includes a supporting plate fixedly connected to the telescopic cylinder in the vertical telescopic member, a contraction frame is slidably connected in the supporting plate, and a restraining hoop cooperating with the conveying pipe is fixed on the contraction frame.

[0013] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily doped single crystal furnace of the utility model, a plurality of adjustment holes are evenly opened on the shrinkage frame, the adjustment holes are adapted to the locking holes opened on the supporting plate, and a locking pin is slidably connected in the locking hole for cooperating with the adjustment hole to position the shrinkage frame.

[0014] As a further optimization of the waste gas collection device for assisting in cleaning a heavily-doped single crystal furnace of the utility model, a clamping tube is fixed to the end of the base away from the collecting tube, and the clamping tube is clamped with a pushing handle for assisting in pushing the displacement of the collecting tube.

[0015] As a further optimization of the waste gas collection device for auxiliary cleaning of a heavily-doped single crystal furnace of the utility model, the roller is a universal wheel with a locking structure.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] The utility model provides a docking connection between the collection tube and the main furnace chamber, and at the same time connects the delivery pipe to the exhaust gas collection system interface to cooperate with the exhaust gas treatment system's suction force to efficiently extract the exhaust gas, thereby avoiding the pollution of the working environment and the injury of the staff by harmful impurity exhaust gas, and avoiding the long-term exhaust gas collection and waste heat dissipation work to hinder the subsequent preparation of heavily doped single crystals, that is, maintaining the preparation efficiency of heavily doped single crystals. Thus, the preparation efficiency of heavily doped single crystals is maintained while ensuring production safety.

[0018] As a further optimization of the present invention, by setting the cooperation of the telescopic cylinder, the fixed column and the bottom frame, the collection cylinder can be pulled to a suitable height according to the specific situation, so as to facilitate the staff to connect the collection cylinder with the main furnace chamber interface to achieve the purpose of collecting harmful impurities and exhaust gas, and at the same time, it can also adapt to the situation where the main furnace chamber moves up to accelerate heat dissipation. By setting the bearing plate and the retractable frame, the binding hoop can drive the collection cylinder to move the position, thereby avoiding the phenomenon that the base is affected by obstacles and the collection cylinder cannot cooperate with the main furnace chamber. At the same time, the position can be locked by the cooperation of the adjustment hole, the locking hole and the locking nail, which is convenient for the staff to use in a working environment with small environmental changes. And the provision of the binding hoop can facilitate the staff to disassemble, replace and repair the collection cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0020] Figure 2It is a schematic diagram of the first cross-sectional structure of the utility model;

[0021] Figure 3 It is a schematic diagram of the second cross-sectional structure of the utility model;

[0022] Figure numerals: 1. roller, 2. base, 3. clamping cylinder, 4. pushing handle, 5. vertical telescopic member, 51. bottom frame, 52. fixed column, 53. telescopic cylinder, 54. reinforcement rod, 6. supporting frame, 61. supporting plate, 62. locking nail, 63. locking hole, 64. retracting frame, 65. restraining hoop, 66. adjusting hole, 7. conveying pipe, 71. fixed connecting pipe, 72. elastic tube, 8. collecting cylinder. DETAILED DESCRIPTION

[0023] To prevent the exhaust gas in the main furnace room from volatilizing and causing harm to personnel after the main furnace room's docking port is exposed. Figure 1 As shown, a collecting tube 8 with a clearance fit with the main furnace chamber interface is provided, and a conveying pipe 7 sealed and connected to the collecting tube 8 is connected to the exhaust gas treatment system interface to collect and treat harmful impurity exhaust gas in the main furnace chamber.

[0024] like Figure 1 As shown, the collecting tube 8 is conical, and the tightening end of the collecting tube 8 is sealedly connected to the conveying pipe 7, and the flared end of the collecting tube 8 is gap-matched with the docking interface of the main furnace chamber, so that the main furnace chamber is connected to the outside air when docking with the flared end of the collecting tube 8, that is, the harmful impurity exhaust gas diffused in the main furnace chamber is collected while keeping the air pressure in the main furnace chamber stable.

[0025] When the gap between the collecting tube 8 and the main furnace chamber is matched, and the conveying pipe 7 and the waste gas treatment system are used to collect and treat harmful impurity waste gas, the temperature drop rate in the main furnace chamber will be increased to a certain extent, thereby reducing the cleaning cycle of the main furnace chamber, and further improving the preparation efficiency of heavily doped single crystals.

[0026] The delivery pipe 7 is composed of a fixed connecting pipe 71 and an elastic pipe 72. The fixed connecting pipe 71 is used to connect with the carrier frame 6 to position the collection tube 8. The fixed connecting pipe 71 is fixedly connected to the conical small diameter side of the upper end of the collection tube 8. The upper end of the fixed connecting pipe 71 is sealed and connected to one end of the elastic pipe 72. The other end of the elastic pipe 72 is used to connect with the exhaust gas treatment system. The elastic pipe 72 is a bellows, which can be stretched and connected to the exhaust gas treatment system at different positions when used by the staff, so that the collection tube 8 is connected to the exhaust gas treatment system for exhaust gas collection, and can be retracted for easy storage when not in use.

[0027] like Figure 3As shown, the support frame 6 includes a support plate 61 fixed on the vertical telescopic member 5, a contraction frame 64 slides inside the support plate 61, and the contraction frame 64 is fixedly connected to a binding hoop 65 connected to the fixed connecting pipe 71. The binding hoop 65 is a metal ring that is tightened by rotating a screw. When it is necessary to separate the binding hoop 65 from the fixed connecting pipe 71, the forward and reverse rotation of the screw can be used to achieve quick connection and separation, that is, the setting of the binding hoop 65 can facilitate the corresponding staff to disassemble and assemble the fixed connecting pipe 71, and then conveniently disassemble, clean, or replace and install the collection tube 8. The sliding fit between the contraction frame 64 and the support plate 61 can still facilitate the staff to fit the gap between the collection tube 8 and the main furnace chamber when the base 2 is restricted by the environment and cannot be close to the main furnace chamber, so as to collect and process harmful impurity waste gas.

[0028] The shrinking frame 64 is provided with a plurality of adjustment holes 66, which are matched with the locking holes 63 provided on the carrier plate 61, and the same locking pin 62 is slidably connected in the locking hole 63 and any of the adjustment holes 66. This facilitates the staff to lock the sliding amount of the shrinking frame 64 relative to the carrier plate 61, thereby preventing the shrinking frame 64 from sliding easily, and assisting the staff to quickly match the collection tube 8 with the clearance of the main furnace chamber interface in a fixed working environment.

[0029] The vertical telescopic member 5 is fixedly connected to the base 2 with rollers 1 at the four corners of the bottom surface. The vertical telescopic member 5 can be vertically telescopic and slidable to adapt to the vertical displacement of the main furnace chamber for heat dissipation. Two clamping tubes 3 are fixed on the base 2, and the two clamping tubes 3 are clamped with the two ends of the push handle 4, so that it is convenient for the staff to push the base 2 to cooperate with the rollers 1 to move the position of the collection tube 8 to correspond to the main furnace chamber at different positions.

[0030] The roller 1 is a universal wheel with a locking structure, which makes it easier for the staff to move and position the collecting tube 8, and also helps the staff to effortlessly fit the collecting tube 8 with the clearance of the main furnace chamber interface.

[0031] like Figure 2 As shown, the vertical telescopic member 5 includes a bottom frame 51 fixed on the base 2, one end of a reinforcing rod 54 is fixedly connected to the bottom frame 51, and the other end of the reinforcing rod 54 is fixed to the base 2 to form a triangle, thereby maintaining the stability of the connection between the bottom frame 51 and the base 2. A fixed column 52 is fixed to the bottom frame 51, and the fixed column 52 is slidably connected to a telescopic cylinder 53 fixed on the bearing plate 61. Thus, the bearing frame 6 can cooperate with the vertical telescopic member 5 to make the fixed connecting pipe 71 drive the collection cylinder 8 to move up and down, thereby facilitating the staff to match the gap between the collection cylinder 8 and the main furnace chamber interface, and can also cooperate with the situation where the main furnace chamber moves upward to accelerate the cooling.

[0032] The flexible tube 72 and the roller 1 provided in this embodiment can be replaced with other structural shapes as long as they can meet the use requirements.

[0033] After the auxiliary furnace chamber is connected to the waste gas treatment system through the swing door inlet and outlet, and then the waste gas collection and waste heat dissipation work is carried out for a period of time, that is, about three hours, the staff can operate the auxiliary furnace chamber to separate from the main furnace chamber, so that the docking interface of the main furnace chamber is exposed. At the same time, the staff will push the base 2 by pushing the handle 4 in conjunction with the clamping tube 3. When the base 2 is pushed, it will be assisted by the roller 1. After moving to the appropriate position, it can be positioned by the self-locking structure of the roller 1, and then the collection tube 8 can be moved to the appropriate position. After that, the collection tube 8 can be moved up by holding the fixed connecting pipe 71 to match the clearance of the docking interface of the main furnace chamber. In this process, the support frame 6 and the vertical telescopic member 5 will be used for cooperation and assistance, so as to assist the staff to match the clearance of the collection tube 8 with the docking interface of the main furnace chamber. After that, the delivery pipe 7 can be connected to the exhaust gas treatment system interface. After the gap between the collecting tube 8 and the main furnace chamber interface is matched, the connection between the exhaust gas treatment system interface and the delivery pipe 7 will transmit the suction force generated by the exhaust gas treatment system to the collecting tube 8. Then, the harmful impurity exhaust gas diffused from the main furnace chamber interface can be sucked into the exhaust gas treatment system through the collecting tube 8, and then the exhaust gas is treated by the exhaust gas treatment system. This prevents the harmful impurity exhaust gas from diffusing into the air and polluting the working environment, and also avoids the harmful impurity exhaust gas from causing harm to the workers. After the temperature in the main furnace chamber drops to room temperature, it can be cleaned. This maintains the heat dissipation efficiency of the main furnace chamber to maintain the efficiency of the preparation of heavily doped single crystals, and also avoids the pollution of the environment by harmful impurity exhaust gas and the harm to the workers.

[0034] The parts not explained in the above embodiments, such as how the exhaust gas treatment system performs exhaust gas treatment, how the exhaust gas treatment system sets the exhaust gas treatment system interface, how the exhaust gas treatment system generates suction force, how the delivery pipe 7 is connected to the exhaust gas treatment system interface, the shape connection method of the main furnace chamber and the auxiliary furnace chamber and how to connect and separate, how the self-locking structure of the roller 1 is self-locked and unlocked, the composition of the self-locking structure of the roller 1, and the shape structure of the bellows, should be understood as the prior art known or should be known to those skilled in the art.

Claims

1. An exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace, characterized in that: The invention comprises a collecting tube (8) and a conveying pipe (7) which is sealed and connected to the collecting tube (8); the collecting tube (8) is gap-matched with a main furnace chamber interface of a single crystal furnace body; the conveying pipe (7) is used to connect the collecting tube (8) with a waste gas treatment system so that the suction force of the waste gas treatment system is transmitted to the collecting tube (8), thereby improving the efficiency of the collecting tube (8) in collecting harmful impurity waste gas in the main furnace chamber; the conveying pipe (7) is connected to a supporting frame (6) for stabilizing the position of the collecting tube (8); the supporting frame (6) is fixed on a vertical telescopic member (5) for adapting to the vertical displacement of the main furnace chamber; the vertical telescopic member (5) is fixedly connected to a base (2); and a roller (1) is provided at the bottom of the base (2).

2. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 1, characterized in that: The collecting tube (8) is in the shape of a conical tube. The flared end of the collecting tube (8) is used to be clearance-matched with the interface of the main furnace chamber, and the narrowed end of the collecting tube (8) is used to be sealed and connected with the conveying pipe (7).

3. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 1, characterized in that: The delivery pipe (7) is composed of a fixed connecting pipe (71) and an elastic pipe (72). One end of the fixed connecting pipe (71) is fixedly connected to the collecting tube (8), and the other end of the fixed connecting pipe (71) is sealedly connected to the elastic pipe (72). The fixed connecting pipe (71) is clamped with the supporting frame (6) to position the collecting tube (8) and facilitate quick disassembly and assembly. The elastic pipe (72) is used to telescopically cooperate with the fixed connecting pipe (71) to connect the collecting tube (8) to the exhaust gas treatment system.

4. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 1, characterized in that: The vertical telescopic member (5) comprises a telescopic cylinder (53) fixedly connected to the bearing frame (6), a fixed column (52) is slidably connected inside the telescopic cylinder (53), and the fixed column (52) is arranged on a bottom frame (51) fixedly connected to the base (2).

5. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 4, characterized in that: A reinforcing rod (54) is provided between the base (2) and the bottom frame (51), and the reinforcing rod (54) is used to cooperate with the base (2) and the bottom frame (51) to form a triangle, so as to maintain a stable connection between the bottom frame (51) and the base (2).

6. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 4, characterized in that: The bearing frame (6) comprises a bearing plate (61) fixedly connected to the telescopic cylinder (53) in the vertical telescopic member (5), a contraction frame (64) slidably connected inside the bearing plate (61), and a restraining hoop (65) matched with the conveying pipe (7) is fixed on the contraction frame (64).

7. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 6, characterized in that: The shrinkage frame (64) is evenly provided with a plurality of adjustment holes (66), the adjustment holes (66) being adapted to the locking holes (63) provided on the bearing plate (61), and the locking pins (62) for cooperating with the adjustment holes (66) to position the shrinkage frame (64) are slidably connected in the locking holes (63).

8. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 1, characterized in that: A clamping cylinder (3) is fixed to one end of the base (2) facing away from the collecting cylinder (8), and the clamping cylinder (3) is clamped with a pushing handle (4) for assisting in pushing the collecting cylinder (8) to move.

9. The exhaust gas collection device for auxiliary cleaning of a heavily doped single crystal furnace according to claim 1, characterized in that: The roller (1) is a universal wheel with a locking structure.

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