Safety protection device for unloading crystal bar of single crystal furnace

Abstract

The utility model provides a safety protection device for unloading a crystal bar of a single crystal furnace, which comprises a single crystal furnace auxiliary chamber, a protection mechanism, a collet and a control mechanism, and is characterized in that the protection mechanism is arranged on the outer side of the single crystal furnace auxiliary chamber in a surrounding manner and at least comprises a protection rope, a plurality of protection sheets and a folding rope; the protection piece located at the topmost end is fixed to the side wall of the auxiliary chamber of the single crystal furnace, the protection piece located at the bottommost end is fixedly connected with the protection rope, the protection rope is sequentially connected with the multiple protection pieces in series, the folding rope is located between every two adjacent protection pieces, and the two ends of the folding rope are fixed to every two adjacent protection pieces respectively; the bottom support is detachably connected with the protection rope; the control mechanism at least comprises a winding and a driver which are connected, and the driver is used for controlling the winding to rotate so as to control the protection rope to be released or folded. The safety protection device for unloading the crystal bar of the single crystal furnace prevents the crystal bar from naturally falling in the process of unloading the crystal bar, and avoids the loss of the crystal bar and the occurrence of safety accidents.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a safety protection device for unloading crystal rods from a single crystal furnace. Background Art

[0002] With the technological advancement of CZ single crystal silicon growth equipment and processes, the diameter of single crystal silicon has gradually increased to 10 inches or 12 inches (over 300mm), and the length of the crystal rod has reached more than 2 meters. Even for CZ single crystal furnaces using a 36-40in heat field, the length of the single crystal rod reaches 4m-6m and the weight reaches 400kg-600kg.

[0003] Due to the inherent characteristics of the seeding process required for the growth of single crystal silicon, the crystal rod is completely supported by fine crystals during the growth process. After the seeding process, the diameter of the fine crystal is often only about 5mm, and the tensile stress it bears is very large. Once external interference introduces shear stress, it is very easy to induce fracture. In addition, the current single crystal furnace is usually a soft shaft, and the diameter is usually about 5mm. Due to the long-term tensile and rotational loads, the crystal pulling soft shaft is also subject to stress fatigue. Under the condition of bearing a large crystal rod weight, the soft shaft is at risk of sudden fracture.

[0004] Therefore, after the growth of the crystal ingot is completed, the seed crystal rope is connected to the seed crystal, and the single crystal ingot is gradually lowered from the single crystal furnace auxiliary chamber to the crystal ingot car. The breakage of the thin crystal and the seed crystal rope will cause the grown single crystal ingot to fall quickly to the ingot retrieval car under the action of gravity, which will not only damage the single crystal ingot, but also cause significant economic losses. At the same time, the falling of hundreds of kilograms of crystal ingots also poses a potential major safety risk to the surrounding workers and cause serious safety accidents.

[0005] In view of this, there is an urgent need for a safety protection device that can prevent the crystal rod from falling during the process of unloading the single crystal furnace. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the utility model is to provide a safety protection device for unloading crystal rods in a single crystal furnace, which is used to solve the problem of safety accidents caused by crystal rods falling during unloading of single crystal furnaces in the prior art.

[0007] In order to achieve the above-mentioned purpose and other related purposes, the utility model provides a safety protection device for unloading crystal rods in a single crystal furnace, comprising:

[0008] Single crystal furnace auxiliary chamber;

[0009] A protection mechanism is disposed around the outer side of the single crystal furnace auxiliary chamber, and the protection mechanism at least comprises a protection rope, a plurality of protection sheets and a plurality of folding ropes, wherein the protection sheet at the top is fixed to the side wall of the single crystal furnace auxiliary chamber, and the protection sheet at the bottom is fixedly connected to the protection rope, and the protection rope sequentially connects a plurality of protection sheets in series, and the folding rope is located between two adjacent protection sheets, and the two ends of the folding rope are respectively fixed to the two adjacent protection sheets;

[0010] A bottom support, detachably connected to the protective rope;

[0011] The control mechanism at least comprises a connected winding and a driver, wherein the driver is used to control the rotation of the winding to control the release or retraction of the protective rope.

[0012] Optionally, a damping bearing is further provided in the control mechanism, and the damping bearing is used to control the winding to rotate at a speed lower than a preset rotation speed.

[0013] Optionally, when the protection mechanism is in working state, a plurality of protection sheets are arranged at intervals in the vertical direction.

[0014] Optionally, the spacing distance between two adjacent protection sheets ranges from 1 mm to 1000 mm.

[0015] Optionally, two protection ropes are provided in the protection device, and the two protection ropes are symmetrically arranged about the center line of the single crystal furnace sub-chamber.

[0016] Optionally, the weight that a single protective rope can bear is greater than 100 kg.

[0017] Optionally, the protective sheet is further provided with a penetration hole, and the penetration holes on each of the protective sheets are arranged correspondingly in the vertical direction, and the protective rope connects a plurality of the protective sheets in series through the penetration holes.

[0018] Optionally, the shape of the protection sheet includes a ring shape, and the size of the inner surrounding area of ​​the protection sheet is larger than the cross-sectional size of the single crystal furnace sub-chamber.

[0019] Optionally, the base support is also provided with a connection hole for connecting the protective rope.

[0020] Optionally, the shape of the base includes a ring shape, and the size of the inner surrounding area of ​​the base is smaller than the maximum cross-sectional size of the crystal rod and larger than the minimum cross-sectional size of the crystal rod.

[0021] As described above, the safety protection device for unloading crystal rods in a single crystal furnace of the utility model has the following beneficial effects: by arranging the protection mechanism outside the auxiliary chamber of the single crystal furnace, and arranging the bottom bracket detachably connected to the protection rope and the control mechanism for controlling the release or retraction of the protection rope on the protection mechanism, the protection mechanism can be stacked outside the auxiliary chamber of the single crystal furnace when not in operation, which is convenient for storage and subsequent use; when the protection mechanism is in operation, the bottom bracket drives the protection rope and the folding parts between adjacent protection sheets to move. The rope extends in the descending direction of the crystal rod, so that the protection machine and the bottom support form a protection net for the crystal rod. The crystal rod hardly needs to bear the weight of the crystal rod itself during the descent process, thereby protecting the crystal rod from being safely descended to the crystal rod car and preventing the crystal rod from falling naturally. In addition, by arranging a device in the control mechanism to control the winding to rotate the damping bearing at a speed lower than a preset speed, the protection mechanism can also protect the crystal rod in time during the disconnection process of the seed crystal rope or the seed crystal, thereby avoiding the loss of the crystal rod and the occurrence of safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It shows a schematic structural diagram of the safety protection device for unloading crystal rods in a single crystal furnace of the utility model in a working state.

[0023] Figure 2 It shows a schematic structural diagram of the safety protection device for unloading crystal rods in a single crystal furnace of the present invention in a non-working state.

[0024] Component number description

[0025] 1 Single crystal furnace auxiliary chamber

[0026] 11 Seed rope

[0027] 12 Seed crystal tray

[0028] 13 Seed Crystal

[0029] 2 Protection mechanism

[0030] 21. Protective rope

[0031] 22 Protective sheet

[0032] 221 penetration hole

[0033] 23 Folding rope

[0034] 3. Bottom bracket

[0035] 31 Connection hole

[0036] 4 Control mechanism

[0037] 41 Driver

[0038] 42 Winding

[0039] 5 Crystal rod DETAILED DESCRIPTION

[0040] The following is a description of the implementation of the present invention by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0041] See also Figure 1-Figure 2 It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no substantial technical significance. Any modification of the structure, change in the proportion relationship, or adjustment of the size should still fall within the scope of the technical content disclosed by the utility model without affecting the effects and purposes that can be achieved by the utility model. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the utility model. The change or adjustment of their relative relationship should also be regarded as the scope of the implementation of the utility model without substantially changing the technical content.

[0042] Embodiment 1

[0043] The utility model provides a safety protection device for unloading crystal rods in a single crystal furnace, such as Figure 1 and Figure 2 The figures are respectively a schematic diagram of the structure of the safety protection device in a working state and a schematic diagram of the structure of the safety protection device in a non-working state, comprising: a single crystal furnace sub-chamber 1, a protection mechanism 2, a bottom support 3 and a control mechanism 4, wherein the protection mechanism 2 is arranged around the outside of the single crystal furnace sub-chamber 1, the protection mechanism 2 at least comprises a protection rope 21, a plurality of protection sheets 22 and a folding rope 23, the protection sheet 22 at the top is fixed on the side wall of the single crystal furnace sub-chamber 1, the protection sheet 22 at the bottom is fixedly connected to the protection rope 21, the protection rope 21 is connected in series with a plurality of protection sheets 22 in sequence, the folding rope 23 is located between two adjacent protection sheets 22 and the two ends of the folding rope 23 are respectively fixed on two adjacent protection sheets 22; the bottom support 3 is detachably connected to the protection rope 21; the control mechanism 4 at least comprises a connected winding 42 and a driver 41, the driver 41 is used to control the rotation of the winding 42 to control the release or retraction of the protection rope 21.

[0044] Specifically, a seed crystal rope 11 , a seed crystal holder 12 and a seed crystal 13 which are connected in sequence are provided inside the single crystal furnace sub-chamber 1 , and the crystal rod 5 is located below the seed crystal 13 .

[0045] Specifically, the seed crystal 13 is made of single crystal silicon or other suitable materials.

[0046] Specifically, the seed crystal 13 is a seed material for growing the crystal rod 5 .

[0047] Specifically, the seed crystal rope 11 is used to fix the seed crystal 13 and suspend it in the single crystal furnace sub-chamber 1 .

[0048] Specifically, the seed crystal holder 12 is a device for supporting the seed crystal 13 to ensure the correct position of the seed crystal 13 during the growth process.

[0049] As an example, a damping bearing (not shown) is further provided in the control mechanism 4, and the damping bearing is used to control the winding 22 to rotate at a speed lower than a preset rotation speed.

[0050] As an example, when the rotation speed of the winding 22 exceeds the preset rotation speed, the damping bearing is automatically locked.

[0051] Specifically, under the condition that the performance of the safety protection device is met, the preset speed can be set according to actual conditions and is not limited here.

[0052] As an example, two protection ropes 21 are provided in the protection mechanism 2 , and the two protection ropes 21 are symmetrically arranged about the center line of the single crystal furnace auxiliary chamber 1 .

[0053] As an example, the weight that a single protective rope 21 can bear is greater than 100 kg.

[0054] Specifically, the protection mechanism 2 is provided with two windings 22 , and the two windings 22 are used to control the two protection ropes 21 respectively.

[0055] Specifically, the material of the protection rope 21 includes metal material, polymer material or other suitable materials.

[0056] Specifically, when the protection mechanism 2 is in a non-working state, the protection mechanism 2 is stacked and arranged outside the single crystal furnace auxiliary chamber 1 and is spaced apart from the bottom of the single crystal furnace auxiliary chamber 1 by a preset distance.

[0057] Specifically, when the protection mechanism 2 is in a non-working state, the protection rope 21 is retracted, and the plurality of protection sheets 22 connected in series by the protection rope 21 and the folding rope 23 located between two adjacent protection sheets 22 are stacked and arranged outside the single crystal furnace sub-chamber 1 .

[0058] Specifically, a snap-fit ​​device (not shown) is further provided at the bottom end of the protection mechanism 2 , and the snap-fit ​​device is used to stack the protection mechanism 2 after work on the outside of the single crystal furnace sub-chamber 1 .

[0059] As an example, when the protection mechanism 2 is in working state, a plurality of protection sheets 22 are arranged at intervals in the vertical direction.

[0060] As an example, the interval distance between two adjacent protection sheets 22 ranges from 1 mm to 1000 mm. In this embodiment, the optimal interval distance between two adjacent protection sheets 22 ranges from 200 mm to 500 mm.

[0061] Specifically, the folding rope 23 is used to control the spacing distance between two adjacent protective sheets 22 in the working state to remain fixed, and to maintain the stability of the protective mechanism 2 during the working process.

[0062] As an example, the protective sheet 22 is further provided with a through hole 221 , and the through holes 221 on each of the protective sheets 22 are arranged correspondingly in the vertical direction, and the protective rope 21 connects a plurality of the protective sheets 22 in series through the through holes 221 .

[0063] Specifically, the plurality of protection sheets 22 are located between the winding 42 and the base 3 .

[0064] As an example, the shape of the protection sheet 22 includes a ring shape, and the size of the inner surrounding area of ​​the protection sheet 22 is larger than the cross-sectional size of the single crystal furnace sub-chamber 1.

[0065] Specifically, the material of the protection sheet 22 includes hard material, soft material or other suitable materials.

[0066] Specifically, under the condition that the performance of the safety protection device is met, the number of the protection sheets 22 can be selected according to actual conditions and is not limited here.

[0067] As an example, the shape of the base 3 includes a ring shape, and the size of the inner surrounding area of ​​the base is smaller than the maximum cross-sectional size of the crystal rod 5 and larger than the minimum cross-sectional size of the crystal rod 5 .

[0068] As an example, the base support 3 is further provided with a connection hole 31 for connecting the protection rope 21 .

[0069] Specifically, the separate design of the base support 3 and the protective rope 21 facilitates the replacement and disassembly of the base support 3 and facilitates the stacking of the protective mechanism 2 on the outside of the single crystal furnace sub-chamber 1 .

[0070] Specifically, when the crystal rod 5 descends to expose the bottom of the single crystal furnace sub-chamber 1, the bottom support 3 is mounted on the bottom of the crystal rod 5, and the bottom support 3 is connected to the protective rope 21, and the seed crystal rope 11 is controlled to control the crystal rod 5 to continue to descend. Under the action of the gravity of the crystal rod 5, the bottom support 3 controls the protective rope 21 to extend away from the single crystal furnace sub-chamber 1, and the folding rope 23 between the protective sheets 22 is gradually unfolded, so that the protective mechanism 2 forms a protective net for the crystal rod 5, thereby protecting the crystal rod 5 from safely descending to the crystal rod cart.

[0071] Specifically, after the crystal rod 5 is safely lowered to the crystal rod vehicle, the method further includes opening the buckle device at the bottom of the protection mechanism 2 and retracting the protection mechanism 2 .

[0072] Specifically, when the seed crystal 13 breaks or the seed crystal rope 11 breaks, the crystal rod 5 drives the base support 3 to descend rapidly, and the rotation speed of the winding 42 suddenly increases, exceeding the preset speed, triggering the damping bearing to automatically lock, the winding 42 stops rotating, the protective rope 21 stops moving downward, and the base support 3 and the protective sheet 22 completely support the crystal rod 5. After the staff confirms that the falling state is correct, the damping bearing is unlocked and the base support 3 continues to be driven to carry the crystal rod 5 down until it is safely lowered to the crystal rod cart and then put away.

[0073] Specifically, by arranging the protection mechanism 2 outside the single crystal furnace sub-chamber 1, the protection mechanism 2 is stacked and arranged outside the single crystal furnace sub-chamber 1 when not in operation and is spaced a preset distance from the bottom of the single crystal furnace sub-chamber 1, so as to be easy to store and use later; by arranging the bottom support 3 detachably connected to the protection rope 21 and the control mechanism for controlling the extension or contraction of the protection rope 21 on the protection mechanism 2, when the protection mechanism 2 is in operation, the bottom support 3 drives the protection rope 21 and the protection sheet 23 to extend in a direction away from the single crystal furnace sub-chamber 1, and hardly needs to bear the weight of the crystal rod 5 itself during the descent process, thereby protecting the crystal rod 5 from being safely descended to the crystal rod cart and preventing the crystal rod 3 from falling naturally. In addition, during the disconnection process of the seed crystal rope 11 or the seed crystal 13, the crystal rod 5 can also be protected in time, thereby avoiding the loss of the crystal rod 5 and the occurrence of safety accidents.

[0074] The safety protection device of this embodiment is provided with the protection mechanism 2 outside the single crystal furnace auxiliary chamber 1, and the bottom support 3 which is detachably connected with the protection rope 21 and the control mechanism 2 which controls the extension or contraction of the protection rope 21 are provided on the protection mechanism 2. When the protection mechanism 2 is not in working state, it can be stacked and arranged outside the single crystal furnace auxiliary chamber 1, which is convenient for storage and subsequent use. When the protection mechanism 2 is in working state, the bottom support 3 drives the protection rope 21 and the folding rope 23 between the adjacent protection sheets 21 along the direction of the crystal rod 5 to descend. The protection mechanism 2 and the base 3 are extended so that they form a protection net for the crystal rod 5. The crystal rod 5 hardly needs to bear its own weight during the descent, thereby protecting the crystal rod 5 from being safely descended to the crystal rod car and preventing the crystal rod 5 from falling naturally. In addition, by setting a device in the control mechanism 4 for controlling the winding 42 to rotate the damping bearing at a speed lower than a preset speed, the protection mechanism 2 can also protect the crystal rod 5 in time during the disconnection process of the seed crystal rope 11 or the seed crystal 13, thereby avoiding the loss of the crystal rod 5 and the occurrence of safety accidents.

[0075] In summary, the safety protection device for unloading crystal rods in a single crystal furnace of the utility model is provided with a protection mechanism outside the auxiliary chamber of the single crystal furnace, and a bottom support detachably connected to the protection rope and a control mechanism for controlling the extension or contraction of the protection rope are provided on the protection mechanism. The protection mechanism can be stacked and arranged outside the auxiliary chamber of the single crystal furnace in a non-working state, which is convenient for storage and subsequent use; when the protection mechanism is in a working state, the bottom support drives the protection rope and the folding rope between the adjacent protection sheets to extend in the direction of the crystal rod descent, so that the protection mechanism and the bottom support form a protection net for the crystal rod, and the crystal rod hardly needs to bear the weight of the crystal rod itself during the descent process, which protects the crystal rod from safely descending to the crystal rod car and prevents the crystal rod from falling naturally. Moreover, by providing a damping bearing for controlling the winding to rotate at a speed lower than the preset speed in the control mechanism, when the seed crystal rope or seed crystal is disconnected, the protection mechanism can also protect the crystal rod in time, avoiding the loss of the crystal rod and the occurrence of safety accidents. Therefore, the utility model effectively overcomes various shortcomings in the prior art and has a high industrial utilization value.

[0076] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A safety protection device for unloading crystal rods in a single crystal furnace, characterized in that: include: Single crystal furnace auxiliary chamber; A protection mechanism is disposed around the outer side of the single crystal furnace auxiliary chamber, and the protection mechanism at least comprises a protection rope, a plurality of protection sheets and a plurality of folding ropes, wherein the protection sheet at the top is fixed to the side wall of the single crystal furnace auxiliary chamber, and the protection sheet at the bottom is fixedly connected to the protection rope, and the protection rope sequentially connects a plurality of protection sheets in series, and the folding rope is located between two adjacent protection sheets, and the two ends of the folding rope are respectively fixed to the two adjacent protection sheets; A bottom support, detachably connected to the protective rope; The control mechanism at least comprises a connected winding and a driver, wherein the driver is used to control the rotation of the winding to control the release or retraction of the protective rope.

2. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The control mechanism is also provided with a damping bearing, and the damping bearing is used to control the winding to rotate at a speed lower than a preset rotation speed.

3. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: When the protection mechanism is in working state, a plurality of protection sheets are arranged at intervals in the vertical direction.

4. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 3, characterized in that: The interval distance between two adjacent protection sheets ranges from 1 mm to 1000 mm.

5. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The protective device is provided with two protective ropes, and the two protective ropes are symmetrically arranged about the center line of the single crystal furnace sub-chamber.

6. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 5, characterized in that: The weight that a single protective rope can bear is greater than 100kg.

7. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The protective sheet is also provided with a penetration hole, and the penetration holes on each of the protective sheets are arranged correspondingly in the vertical direction, and the protective rope connects a plurality of the protective sheets in series through the penetration holes.

8. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The shape of the protection plate includes a ring shape, and the size of the inner surrounding area of ​​the protection plate is larger than the cross-sectional size of the single crystal furnace sub-chamber.

9. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The base is also provided with a connection hole for connecting the protection rope.

10. The safety protection device for unloading crystal rods in a single crystal furnace according to claim 1, characterized in that: The shape of the base includes a ring shape, and the size of the inner surrounding area of ​​the base is smaller than the maximum cross-sectional size of the crystal rod and larger than the minimum cross-sectional size of the crystal rod.

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