Single crystal furnace cavity furnace cover and pressure container

Abstract

The utility model discloses a single crystal furnace cavity furnace cover and a pressure vessel, the single crystal furnace cavity furnace cover comprises a furnace cover body, the furnace cover body comprises an outer shell, an inner shell and waterproof strips, a cooling space is arranged between the outer shell and the inner shell, each waterproof strip divides the cooling space into a plurality of cooling water cavities in the transverse direction, and the shell is provided with a plurality of water inlet pipes and water outlet pipes which are respectively communicated with the cooling water cavities. The furnace cover of the single crystal furnace cavity is divided into different heated areas through the water-proof strips in a transverse division mode, and the temperature of the furnace cover can be well reduced by cooling water by detecting the temperature of inlet and outlet water and adjusting the connection mode of the water inlet and outlet pipes, so that the temperature of a crystal bar is reduced, and the service life of the crystal bar is prolonged. In practical application, the connection mode of the water inlet pipe and the water outlet pipe can be rapidly adjusted, and cooling water can be conveniently saved.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure vessels, in particular to a single crystal furnace cavity cover and a pressure vessel. Background Art

[0002] The Czochralski growth method is currently the most widely used technology for producing single crystal silicon. When producing single crystal silicon by the Czochralski method, the single crystal furnace is one of the core production equipment. The single crystal furnace is a device that uses a graphite heater to melt the crystalline silicon material in an environment of inert gas such as helium, and produces single crystal rods by Czochralski growth. The single crystal rod is cooled during its upward movement, and the waste gas generated during the production process is taken away by helium to improve the quality of the crystal rod. As the crystal rod rises or production proceeds, heat will be radiated to the furnace cover, causing the furnace cover to also have a higher temperature. Generally, a cooling water channel will be set inside the furnace cover to cool the furnace cover to prevent the furnace cover from leaking due to thermal expansion and contraction, resulting in the installation gap between the related accessories on it, or even damaging the furnace cover.

[0003] In the prior art, the cooling water channel is to arrange the water-blocking strips spirally along the furnace cover, with water entering from the bottom and exiting from the top, such as the arrangement of the water-blocking strips in the furnace cover of patent CN2017104137U. If the temperature of the furnace cover is high, it is necessary to increase the water delivery speed to adjust the temperature of the furnace cover. However, when the temperature of the top of the furnace cover is still high, it is difficult to control the water temperature. Due to the difficulty in controlling the water temperature, it is difficult to make a specific judgment when studying the factors affecting the quality of the crystal rod by controlling the water temperature of the furnace cover. For example, whether the quality of the crystal rod is due to the problem of temperature control of the furnace cover or due to insufficient inert gas introduction, the quality of the crystal rod does not meet the requirements, which seriously affects the research progress of the quality of the crystal rod. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, one of the objectives of the present invention is to provide a single crystal furnace chamber cover to solve the above-mentioned traditional problems.

[0005] The second purpose of the utility model is to provide a pressure vessel using the single crystal furnace cavity cover, such as a single crystal furnace, which can also be applied to the fields of double crystal furnaces, gemstone furnaces, etc.

[0006] One of the purposes of the utility model is achieved by the following technical solution:

[0007] A single crystal furnace chamber furnace cover, comprising a furnace cover body with a top opening, the furnace cover body comprising an outer shell, an inner shell and a plurality of water baffles arranged between the outer shell and the inner shell, a cooling space is provided between the outer shell and the inner shell, each of the water baffles divides the cooling space into a plurality of cooling water chambers in the lateral direction, the outer shell is provided with a plurality of water inlet pipes and water outlet pipes respectively connected to each of the cooling water chambers, the water inlet pipes are arranged at the bottom of the cooling water chamber, and the water outlet pipes are arranged at the top of the cooling water chamber.

[0008] Preferably, the water barrier strips include a first water strip, a second water strip, a third water strip and a fourth water strip, the first water strip and the third water strip are axially symmetrically arranged, and the second water strip and the fourth water strip are axially symmetrically arranged.

[0009] Preferably, the first water bar, the second water bar, the third water bar and the fourth water bar respectively divide the cooling space into a first cooling water chamber, a second cooling water chamber, a third cooling water chamber, a fourth cooling water chamber and a fifth cooling water chamber, and at least 4 water outlet pipes and 2 water inlet pipes are arranged on the top of the third cooling water chamber.

[0010] Preferably, the contact surface between the water barrier strip and the inner shell is fixed by argon arc welding, and the contact surface between the water barrier strip and the outer shell is fixed by fusion welding by resistance welding.

[0011] Preferably, the top opening is provided with at least one accommodating cavity for placing a sealing ring and a plurality of bolt mounting holes, and the bolt mounting holes are located on the outside of the accommodating cavity.

[0012] Preferably, the furnace cover body is also provided with a temperature sensor installation port, a pressure sensor installation port, a safety valve installation port, a feeding port, a sight glass observation port, a CCD camera installation port and two spare installation ports.

[0013] Preferably, a chamfered blunt edge is reserved at the bottom of the furnace cover body, and the chamfered blunt edge is 6-8 mm.

[0014] The second purpose of the utility model is achieved by the following technical solution:

[0015] A pressure vessel comprises the above-mentioned single crystal furnace cavity cover.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] The single crystal furnace cavity cover of the utility model is divided into different heating areas in a transverse direction by water-isolating strips. The temperature of the inlet and outlet water is detected and the connection mode of each inlet and outlet water pipe is adjusted so that the cooling water can better reduce the temperature of the furnace cover, thereby reducing the temperature of the crystal rod, making it easy to study the influence of the temperature condition on the furnace cover on the growth of the crystal rod. In actual applications, the connection mode of the inlet and outlet water pipes can also be quickly adjusted to save cooling water. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the structure of the single crystal furnace cavity cover of the utility model;

[0019] Figure 2 for Figure 1 The schematic diagram of the structure of the water barrier strip inside the single crystal furnace chamber cover is shown;

[0020] Figure 3 for Figure 2 A structural schematic diagram of one of the connection modes between the inlet and outlet water pipes shown.

[0021] In the figure: 10, furnace cover body; 11, top opening; 110, accommodating chamber; 12, water barrier; 13, water inlet pipe; 14, water outlet pipe; 15, blunt edge of groove; 20, first cooling water chamber; 21, second cooling water chamber; 22, third cooling water chamber; 23, fourth cooling water chamber; 24, fifth cooling water chamber. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0023] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0024] In the description of the present utility model, it is necessary to understand that when an element is considered to be "connected" to another element, it may be directly connected to another element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0025] See also Figure 1-Figure 2 , which is a single crystal furnace cavity furnace cover of a preferred embodiment of the utility model, is used to be installed on a pressure vessel such as a single crystal furnace, is equipped with a cooling water channel to cool it, and can study the degree of influence of the cooling of the furnace cover on the crystal rod by adjusting the water distribution structure of the cooling water channel. Specifically, the single crystal furnace cavity furnace cover includes a furnace cover body 10 with a top opening 11, the furnace cover body 10 includes an outer shell, an inner shell and a plurality of water barrier strips 12 arranged between the outer shell and the inner shell, and a cooling space is provided between the outer shell and the inner shell, each water barrier strip 12 divides the cooling space into a plurality of cooling water chambers in the horizontal direction, and the outer shell is provided with a plurality of water inlet pipes 13 and water outlet pipes 14 respectively connected with each cooling water chamber, the water inlet pipe 13 is arranged at the bottom of the cooling water chamber, and the water outlet pipe 14 is arranged at the top of the cooling water chamber.

[0026] The above-mentioned single crystal furnace cavity furnace cover is divided into different heating areas in the horizontal direction by the water-blocking strips 12. By detecting the temperature of the inlet and outlet water, the connection method of each inlet and outlet water pipe 14 is adjusted so that the cooling water can better reduce the temperature of the furnace cover, thereby reducing the temperature of the crystal rod, which is convenient for studying the influence of the temperature conditions on the furnace cover on the growth of the crystal rod. In actual applications, the connection method of the inlet and outlet water pipes 14 can also be quickly adjusted to save cooling water.

[0027] For example Figure 2 As shown, the water barrier 12 includes a first water barrier, a second water barrier, a third water barrier and a fourth water barrier, the first water barrier and the third water barrier are arranged axially symmetrically, and the second water barrier and the fourth water barrier are arranged axially symmetrically. It can be understood that the water barrier 12 divides different heating areas in the transverse direction according to the top installation opening of the furnace cover, and adopts different cooling water supply methods according to the damage of the heating area.

[0028] In one embodiment, the first water strip, the second water strip, the third water strip, and the fourth water strip respectively divide the cooling space into the first cooling water chamber 20, the second cooling water chamber 21, the third cooling water chamber 22, the fourth cooling water chamber 23, and the fifth cooling water chamber 24. The top of the third cooling water chamber 22 is provided with at least 4 water outlet pipes 14 and 2 water inlet pipes 13. An additional water outlet pipe 14 is provided on the third cooling water chamber 22 in the middle, which is convenient for accelerating the outflow of water flow, and also convenient for diverting the water in the third cooling water chamber 22 to other cooling water chambers or other places, so as to quickly reduce the temperature of the crystal rod in the middle. It is understandable that on the opposite sides of the furnace cover body, different cooling water chambers can be provided with multiple inlet and outlet water pipes as needed.

[0029] For example Figure 3 As shown, one of the connection modes between the inlet and outlet water pipes 14 is provided (this connection mode has the slowest water flow and is the most water-saving mode). The outlet pipe 14 on the third cooling water chamber 22 is connected to the inlet pipes 13 of the adjacent second cooling water chamber 21 and the fourth cooling water chamber 23, and the water of the third cooling water chamber 22 is led into them, and then connected to the inlet pipe 13 of the first cooling water chamber 20 through the outlet pipe 14 of the second cooling water chamber 21, and connected to the inlet pipe 13 of the fifth cooling water chamber 24 through the outlet pipe 14 of the fourth cooling water chamber 23, that is, the high-temperature water of the third cooling water chamber 22 is gradually distributed to other cooling water chambers, so that the overall furnace cover temperature can be balanced, or each cooling water chamber can be cooled separately according to research requirements. Other connection modes are not described here.

[0030] In this embodiment, the contact surface between the water barrier 12 and the inner shell is fixed by argon arc welding, and the contact surface between the water barrier 12 and the outer shell is fixed by fusion welding by resistance welding. This welding method can improve the sealing between the water barrier 12 and the furnace cover body 10, and avoid the phenomenon of water seepage due to weld defects after welding. The welding method adopts the welding process of CN116604163A for welding. Please refer to the technical content for details, which will not be repeated here. The top opening 11 is provided with at least one accommodating cavity 110 for placing a sealing ring and a plurality of bolt mounting holes, and the bolt mounting holes are located on the outside of the accommodating cavity.

[0031] For example Figure 1 The furnace cover body 10 is also provided with a temperature sensor mounting port, a pressure sensor mounting port, a safety valve mounting port, a feeding port, a sight glass observation port, a CCD camera mounting port and two spare mounting ports. Each mounting port can be connected by threaded connection, flange structure, quick connection structure and other connection structures with good sealing properties. The specific settings are based on the situation and will not be repeated here. It is convenient to install temperature sensors, pressure sensors, safety valves, sight glasses and CCD cameras. An installation port is also provided so that the equipment can be installed on the spare installation port for other reasons.

[0032] In one embodiment, a groove blunt edge 15 is reserved at the bottom of the furnace cover body 10, and the groove blunt edge 15 is 6-8 mm, so as to facilitate welding between the furnace cover and the lower furnace body.

[0033] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0034] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A single crystal furnace cavity cover, characterized in that: It includes a furnace cover body with a top opening, the furnace cover body includes an outer shell, an inner shell and a plurality of water-blocking strips arranged between the outer shell and the inner shell, a cooling space is provided between the outer shell and the inner shell, each of the water-blocking strips divides the cooling space into a plurality of cooling water chambers in the transverse direction, the outer shell is provided with a plurality of water inlet pipes and water outlet pipes respectively connected with each of the cooling water chambers, the water inlet pipes are arranged at the bottom of the cooling water chamber, and the water outlet pipes are arranged at the top of the cooling water chamber.

2. The single crystal furnace chamber cover according to claim 1, characterized in that: The water barrier strips include a first water strip, a second water strip, a third water strip and a fourth water strip. The first water strip and the third water strip are axially symmetrically arranged, and the second water strip and the fourth water strip are axially symmetrically arranged.

3. The single crystal furnace chamber cover according to claim 2, characterized in that: The first water strip, the second water strip, the third water strip and the fourth water strip respectively divide the cooling space into a first cooling water chamber, a second cooling water chamber, a third cooling water chamber, a fourth cooling water chamber and a fifth cooling water chamber. At least four water outlet pipes and two water inlet pipes are arranged on the top of the third cooling water chamber.

4. The single crystal furnace chamber cover according to claim 1, characterized in that: The contact surface between the water barrier strip and the inner shell is fixed by argon arc welding, and the contact surface between the water barrier strip and the outer shell is fixed by fusion welding by resistance welding.

5. The single crystal furnace chamber cover according to claim 1, characterized in that: The top opening is provided with at least one accommodating cavity for placing a sealing ring and a plurality of bolt mounting holes, and the bolt mounting holes are located outside the accommodating cavity.

6. The single crystal furnace chamber cover according to claim 1, characterized in that: The furnace cover body is also provided with a temperature sensor installation port, a pressure sensor installation port, a safety valve installation port, a feeding port, a sight glass observation port, a CCD camera installation port and two spare installation ports.

7. The single crystal furnace chamber cover according to claim 1, characterized in that: The bottom of the furnace cover body is reserved with a chamfered blunt edge, and the chamfered blunt edge is 6-8 mm.

8. A pressure vessel, characterized in that: It comprises a single crystal furnace chamber cover as described in any one of claims 1 to 7.

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