Quakeproof foundation

Abstract

The utility model provides a quakeproof foundation, which relates to the technical field of semiconductors, and comprises a top plate and a bottom plate, the top plate is arranged above the bottom plate, four bottom corners of the top plate are respectively provided with a first support rod, and four top corners of the bottom plate close to the first support rods are also correspondingly provided with four second support rods. Reinforcing rib oblique beams are further arranged between the top plate and the bottom plate, the reinforcing rib oblique beams are obliquely arranged, the tops of the reinforcing rib oblique beams are connected with the top plate by arranging energy dissipation beams, and a plurality of damping plates are arranged below the bottom plate. The first supporting rods and the second supporting rods are arranged, the connecting strength between the top plate and the bottom plate is enhanced, in addition, the reinforcing rib oblique beams and the energy dissipation beams jointly form a Y-shaped standard energy dissipation beam end, vibration is effectively absorbed through the design, meanwhile, the multiple vibration reduction plates at the bottom work cooperatively, the vibration is dissipated at the ground source, and the vibration reduction effect is improved. Therefore, the shock resistance and the safety of the whole structure are remarkably improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an earthquake-proof foundation. Background Art

[0002] With the development of semiconductor industry technology, lithography equipment needs higher exposure accuracy, which requires better control of the vibration level of the equipment. In the past, vibration reduction was performed inside the equipment, but it was impossible to eliminate all vibrations, resulting in limited exposure accuracy. Therefore, a seismic foundation that can eliminate vibrations at the source is needed. Utility Model Content

[0003] The purpose of the utility model is to solve the shortcomings existing in the prior art. The existing semiconductor vibration reduction design is mostly designed inside the device. This design cannot eliminate all vibrations, resulting in limited exposure accuracy.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an earthquake-proof foundation, including a top plate and a bottom plate, the top plate is arranged above the bottom plate, the four bottom corners of the top plate are each provided with a first support rod, and four second support rods are also installed correspondingly at the four top corners of the bottom plate near the first support rod, a reinforcing rib oblique beam is also provided between the top plate and the bottom plate, the reinforcing rib oblique beam is obliquely arranged, and the top is connected to the top plate by an energy dissipation beam, and a plurality of shock-absorbing plates are provided under the bottom plate.

[0005] Optionally, the shock-absorbing plate includes a shock-absorbing plate bottom, a shock-absorbing plate top and a pressure-bearing portion, the width and thickness of the shock-absorbing plate bottom are greater than the shock-absorbing plate top, and the backs of both are attached to the bottom of the base plate, and the pressure-bearing portion is located at the lowest point of the shock-absorbing plate bottom.

[0006] Optionally, the shock-absorbing plate is made of elastic shock-absorbing material.

[0007] Optionally, the bottom of the pressure-bearing part is covered with a rubber gasket.

[0008] Optionally, the reinforcing rib oblique beam and the energy dissipation beam are designed to be Y-shaped.

[0009] Optionally, a shock-absorbing pad is provided between the first support rod and the second support rod.

[0010] Optionally, a plurality of linearly arranged drain pipes are provided in the base plate, the water inlet holes of the drain pipes are located at the top of the base plate, and the drainage holes of the drain pipes are located on the outer peripheral frame of the base plate.

[0011] Optionally, a filter is provided inside the drain pipe.

[0012] Compared with the prior art, the advantages and positive effects of the utility model are:

[0013] 1. In the utility model, the connection strength between the top plate and the bottom plate is enhanced by configuring the first support rod and the second support rod. In addition, the reinforcing rib inclined beam and the energy dissipation beam together constitute a Y-shaped standard energy dissipation beam end. This design effectively absorbs vibrations. At the same time, multiple shock-absorbing plates at the bottom work together to dissipate vibrations at the source on the ground, thereby significantly improving the seismic resistance and safety of the overall structure.

[0014] 2. In the utility model, the shock-absorbing plates are arranged in pairs in opposite directions under the bottom plate to form a symmetrical layout, which enhances the overall stability and is beneficial to improving the earthquake resistance. In addition, these shock-absorbing plates are designed in a water drop shape, which not only effectively absorbs and disperses vibration energy, but also can effectively guide the fluid under the action of water flow, thereby further enhancing the stability of the foundation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A three-dimensional diagram of an earthquake-proof foundation provided by the utility model;

[0016] Figure 2 A front view of an earthquake-proof foundation provided by the utility model;

[0017] Figure 3 A bottom view of an earthquake-proof foundation provided by the utility model;

[0018] Figure 4 The utility model provides a schematic diagram of the cross-sectional structure of a bottom plate structure of an earthquake-proof foundation at a main viewing angle.

[0019] Legend:

[0020] 1. Top plate; 2. Bottom plate; 3. First support rod; 4. Second support rod; 5. Shock-absorbing pad; 6. Reinforcement rib inclined beam; 7. Water inlet hole; 8. Drain hole; 9. Shock-absorbing plate; 91. Bottom of shock-absorbing plate; 92. Top of shock-absorbing plate; 93. Pressure-bearing part; 10. Rubber gasket; 11. Filter screen; 12. Energy dissipation beam. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example

[0023] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the utility model provides a technical solution: an earthquake-proof foundation, including a top plate 1 and a bottom plate 2, the top plate 1 is arranged above the bottom plate 2, the four bottom corners of the top plate 1 are each provided with a first support rod 3, and four second support rods 4 are also correspondingly installed at the four top corners of the bottom plate 2 close to the first support rod 3, a reinforcing rib oblique beam 6 is also provided between the top plate 1 and the bottom plate 2, the reinforcing rib oblique beam 6 is obliquely arranged, and the top is connected to the top plate 1 by arranging an energy dissipation beam 12, a plurality of shock-absorbing plates 9 are provided under the bottom plate 2, and the reinforcing rib oblique beam 6 and the energy dissipation beam 12 are designed to be Y-shaped.

[0024] In this embodiment, the connection strength between the top plate 1 and the bottom plate 2 is enhanced by configuring the first support rod 3 and the second support rod 4. In addition, the reinforcing rib inclined beam 6 and the energy dissipation beam 12 together form a Y-shaped standard energy dissipation beam end. This design effectively absorbs vibrations. At the same time, the multiple shock-absorbing plates 9 at the bottom work together to dissipate the vibrations at the source on the ground, thereby significantly improving the seismic resistance and safety of the overall structure.

[0025] The shock-absorbing plate 9 includes a shock-absorbing plate bottom 91, a shock-absorbing plate top 92 and a pressure-bearing portion 93. The width and thickness of the shock-absorbing plate bottom 91 are greater than those of the shock-absorbing plate top 92, and the backs of both are attached to the bottom of the base plate 2. The pressure-bearing portion 93 is located at the lowest point of the shock-absorbing plate bottom 91. The shock-absorbing plate 9 is made of elastic shock-absorbing material, and the bottom of the pressure-bearing portion 93 is covered with a rubber gasket 10.

[0026] In this embodiment, the shock-absorbing plates 9 are arranged in pairs in opposite directions under the base plate 2 to form a symmetrical layout, which enhances the overall stability and is beneficial to improving the earthquake resistance. In addition, these shock-absorbing plates 9 are designed in a water drop shape, which not only effectively absorbs and disperses vibration energy, but also can effectively guide the fluid under the action of water flow, thereby further enhancing the stability of the foundation.

[0027] A shock-absorbing pad 5 is provided between the first support rod 3 and the second support rod 4. A plurality of linearly arranged drain pipes are opened in the base plate 2. The water inlet 7 of the drain pipe is located at the top of the base plate 2. The drainage hole 8 of the drain pipe is located on the outer peripheral frame of the base plate 2. A filter screen 11 is provided inside the drain pipe.

[0028] In this embodiment, the shock-absorbing pad 5 plays a certain shock-absorbing role. By setting up a drain pipe, the water flow on the earthquake-proof foundation can be quickly discharged from the foundation, thereby reducing the foundation liquefaction phenomenon and further improving the earthquake resistance. The filter 11 plays the role of filtering impurities in the flowing water.

[0029] The above description is only a preferred embodiment of the present invention and does not limit the present invention in other forms. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims

1. An earthquake-proof foundation, comprising a top plate (1) and a bottom plate (2), wherein the top plate (1) is arranged above the bottom plate (2), and characterized in that: The top plate (1) is provided with a first support rod (3) at each of the four bottom corners, and four second support rods (4) are correspondingly installed near the first support rods (3) at the four top corners of the bottom plate (2). A reinforcing rib inclined beam (6) is also provided between the top plate (1) and the bottom plate (2). The reinforcing rib inclined beam (6) is arranged in an oblique direction and is connected to the top plate (1) at the top by an energy dissipation beam (12). A plurality of shock absorbing plates (9) are provided below the bottom plate (2).

2. The earthquake-proof foundation according to claim 1, characterized in that: The damping plate (9) comprises a damping plate bottom (91), a damping plate top (92) and a pressure-bearing portion (93); the damping plate bottom (91) is wider and thicker than the damping plate top (92); the backs of the two are both attached to the bottom of the base plate (2); and the pressure-bearing portion (93) is located at the lowest point of the damping plate bottom (91).

3. The earthquake-proof foundation according to claim 1, characterized in that: The shock absorbing plate (9) is made of elastic shock absorbing material.

4. The earthquake-proof foundation according to claim 2, characterized in that: The bottom of the pressure-bearing portion (93) is covered with a rubber gasket (10).

5. The earthquake-proof foundation according to claim 1, characterized in that: The reinforcing rib inclined beam (6) and the energy dissipation beam (12) are designed to be Y-shaped.

6. The earthquake-proof foundation according to claim 1, characterized in that: A shock-absorbing pad (5) is provided between the first support rod (3) and the second support rod (4).

7. The earthquake-proof foundation according to claim 1, characterized in that: A plurality of linearly arranged drain pipes are provided in the bottom plate (2); the water inlet holes (7) of the drain pipes are located at the top of the bottom plate (2); and the drainage holes (8) of the drain pipes are located on the outer peripheral frame of the bottom plate (2).

8. The earthquake-proof foundation according to claim 7, characterized in that: A filter screen (11) is arranged inside the drainage pipe.

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