Low-pressure diffusion furnace tube

Abstract

The low-pressure diffusion furnace tube comprises a low-pressure diffusion furnace body and a tail gas tube, the tail gas tube is communicated with the low-pressure diffusion furnace body, a quartz tube is installed in the tail gas tube in a sliding mode, the outer side wall of the quartz tube is attached to the inner wall of the tail gas tube, and a connecting ring is fixedly installed at one end of the quartz tube. The device comprises a connecting ring, two through grooves are formed in the connecting ring, clamping blocks are slidably installed in the two through grooves, one side of each clamping block is arranged to be a wedge-shaped face, sliding rods are slidably installed on the two sides of the connecting ring, and the two sliding rods penetrate through the side wall of the connecting ring and are slidably connected with the connecting ring. According to the utility model, nondestructive fixation of the quartz tube can be realized, the effect of clamping after pushing can be realized under the condition that the quartz tube is not damaged, the corrosion prevention effect of the quartz tube is improved, the subsequent cleaning work is also facilitated, and residual harmful substance precipitates on the inner wall of the quartz tube can be cleaned through the ash scraping assembly in the quartz tube.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a low-pressure diffusion furnace tube. Background Art

[0002] The diffusion furnace is an indispensable key equipment in the semiconductor production line. It uses high temperature environment to diffuse specific substances on the surface of silicon wafers to form the required PN junction, providing important process support for the manufacture of electronic products such as integrated circuits and discrete devices. By precisely controlling the temperature, atmosphere and diffusion time, the diffusion furnace can ensure the high quality and high performance of semiconductor materials, and is an important driving force for the development of the semiconductor industry.

[0003] Diffusion furnaces do produce a large amount of waste gas during use. These waste gases mainly come from volatile substances produced during the combustion process, chemical reaction process and material heating process. During the operation of the diffusion furnace, especially under high temperature conditions, some substances such as fuel, reaction gas and raw materials may volatilize or decompose to produce waste gas. These waste gases may contain harmful chemicals such as metaphosphoric acid, sulfur dioxide, nitrogen oxides, smoke, volatile organic compounds and other toxic and harmful gases. These waste gases are generally discharged through the tail pipe.

[0004] At present, the quartz furnace tube tail gas pipe part of the low-pressure diffusion furnace of PERC solar cell production equipment is more easily corroded by the exhaust gas discharged during the production process. Since the exhaust gas discharged from the furnace tube tail gas pipe during the production process is rich in metaphosphoric acid, which is corrosive, the furnace tube tail gas pipe part is corroded, perforated or even broken, resulting in a large leakage rate and failure to meet the process production conditions.

[0005] At present, the main solution in the industry to extend the service life of the furnace tubes of low-pressure diffusion furnaces is to insert a quartz tail gas pipe inside the exhaust pipe of the diffusion furnace, and regularly maintain the exhaust pipe part to clean the metaphosphoric acid deposited in the exhaust pipe part and frequently replace the tail gas pipe to achieve the effect of extending the service life of the diffusion furnace tubes.

[0006] By installing a quartz tube inside the exhaust pipe, the quartz tube can be used to reduce the corrosion of the exhaust gas to the exhaust pipe due to the strong corrosion resistance of quartz material. However, the installation and fixation of the quartz tube is generally carried out by threaded connection, which requires opening a threaded groove on the outer wall of the quartz tube. The opening of the threaded groove on the side wall of the quartz tube will have many effects on the quartz tube. When the quartz tube is used in a high temperature environment, the presence of the threaded groove will cause thermal stress concentration in this area. This thermal stress concentration may make the quartz tube more susceptible to thermal cracks or thermal stress fractures when the temperature changes. Secondly, if the quartz tube is used in a corrosive environment, the threaded groove opened on the side wall may become a channel for the invasion of corrosive media, resulting in reduced corrosion resistance of the quartz tube. This may shorten the service life of the quartz tube, so the threaded connection method makes its service life and safety not high, and during the long-term use of the quartz tube, some exhaust gas sediments will adhere to the inside of the quartz tube, which needs to be cleaned regularly. Before cleaning, the quartz tube needs to be disassembled and then the sediments inside need to be cleaned. Since the quartz tube is threaded, the disassembly and installation process requires the use of special tools to ensure the smooth disassembly of the quartz tube. The process is relatively cumbersome, so a low-pressure diffusion furnace tube is needed to solve the above technical problems. Utility Model Content

[0007] The utility model aims to provide a low-pressure diffusion furnace tube to solve the above-mentioned deficiencies in the prior art.

[0008] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a low-pressure diffusion furnace tube, comprising a low-pressure diffusion furnace body and an exhaust pipe, the exhaust pipe is connected to the low-pressure diffusion furnace body, a quartz tube is slidably installed inside the exhaust pipe, the outer wall of the quartz tube is in contact with the inner wall of the exhaust pipe, a connecting ring is fixedly installed at one end of the quartz tube, two through grooves are provided inside the connecting ring, and blocks are slidably installed inside the two through grooves, one side of the blocks is set as a wedge-shaped surface, sliding rods are slidably installed on both sides of the connecting ring, the two sliding rods penetrate the side wall of the connecting ring and are slidably connected to the connecting ring, one end of the two sliding rods is fixedly connected to the block, the side wall of the exhaust pipe is provided with two slots, the two slots are adapted to each other, the side wall of the sliding rod is provided with a spring, one end of the spring is fixedly connected to the side wall of the connecting ring, and the other end of the spring is fixedly connected to the side wall of the sliding rod, and a scraping assembly is provided inside the quartz tube.

[0009] As a further description of the above technical solution: the scraping assembly includes a scraping ring, which is slidably connected to the quartz tube, the outer wall of the scraping ring is in contact with the inner wall of the quartz tube, the side wall of the scraping ring is rotatably installed with two screws, the inner wall of the quartz tube is fixedly installed with two fixing plates, and the two fixing plates are threadedly connected to the two screws.

[0010] As a further description of the above technical solution: a blocking ring is fixedly installed on the side wall of the scraper ring.

[0011] As a further description of the above technical solution: the side of the blocking ring close to the scraper ring is set to a narrow opening, and the other side of the blocking ring is set to a wide opening.

[0012] As a further description of the above technical solution: the side wall of the tail gas pipe is provided with a thickened layer.

[0013] As a further description of the above technical solution: a sealing ring is arranged between the tail gas pipe and the quartz tube.

[0014] As a further description of the above technical solution: a magnetic attraction layer is arranged inside the card slot, and the card slot is magnetically connected to the card block through the magnetic attraction layer.

[0015] The utility model provides a low-pressure diffusion furnace tube, which has the following beneficial effects: non-destructive fixation of the quartz tube is achieved, and the push-in and snap-in effect can be achieved without damaging the quartz tube, which increases the anti-corrosion effect of the quartz tube and facilitates subsequent cleaning work. The scraping assembly inside the quartz tube can clean the harmful substances remaining on the inner wall of the quartz tube.

[0016] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0017] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall three-dimensional structure of a low-pressure diffusion furnace tube proposed by the utility model;

[0019] Figure 2 For the utility model Figure 1 A schematic diagram of the enlarged structure at point A;

[0020] Figure 3 It is a schematic diagram of the three-dimensional explosion structure of the tail gas pipe and the quartz tube of the utility model;

[0021] Figure 4A schematic diagram of a three-dimensional explosion structure of the tail pipe and the quartz tube of the utility model from another perspective;

[0022] Figure 5 It is a three-dimensional structural schematic diagram of the screw, scraper ring and barrier ring of the utility model;

[0023] Figure 6 It is a schematic diagram of the three-dimensional cross-sectional structure inside the connecting ring of the utility model;

[0024] Figure 7 It is a schematic cross-sectional structure diagram of the card slot and the card block of the utility model;

[0025] Figure 8 It is a schematic diagram of the cross-sectional structure of the tail gas pipe of the utility model provided with a thickened layer.

[0026] Legend:

[0027] 1. Low-pressure diffusion furnace body; 2. Thickening layer; 3. Tail gas pipe; 4. Connecting ring; 5. Quartz tube; 6. Through groove; 7. Sliding rod; 8. Spring; 9. Block; 10. Slot; 11. Sealing ring; 12. Screw; 13. Fixed plate; 14. Blocking ring; 15. Magnetic layer; 16. Wedge surface; 17. Scraper ring. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0029] Reference Figure 1-8A low-pressure diffusion furnace tube comprises a low-pressure diffusion furnace body 1 and a tail gas pipe 3, wherein the tail gas pipe 3 is connected to the low-pressure diffusion furnace body 1, a quartz tube 5 is slidably installed inside the tail gas pipe 3, the outer wall of the quartz tube 5 is in contact with the inner wall of the tail gas pipe 3, a connecting ring 4 is fixedly installed at one end of the quartz tube 5, two through grooves 6 are provided inside the connecting ring 4, a block 9 is slidably installed inside the two through grooves 6, one side of the block 9 is set as a wedge-shaped surface 16, and the connecting ring 4 Slide rods 7 are slidably installed on both sides of the connecting ring 4. The two slide rods 7 penetrate the side walls of the connecting ring 4 and are slidably connected to the connecting ring 4. One end of the two slide rods 7 is fixedly connected to the card block 9. The side wall of the exhaust pipe 3 is provided with two card slots 10. The two card slots 10 and the card block are adapted to each other. The side wall of the slide rod 7 is provided with a spring 8. One end of the spring 8 is fixedly connected to the side wall of the connecting ring 4, and the other end of the spring 8 is fixedly connected to the side wall of the slide rod 7. The interior of the quartz tube 5 is provided with a plaster scraping group When the quartz tube 5 needs to be inserted into the tail pipe 3, one end of the quartz tube 5 is inserted into the tail pipe 3. When the quartz tube 5 is about to be inserted into the end of the tail pipe 3, the wedge-shaped surface 16 of the block 9 contacts the edge of the inner wall of the tail pipe 3. At this time, the two blocks 9 slide in the through groove 6 toward a position away from the axis of the connecting ring 4, and the slide bar 7 slides outward. When the block 9 moves to the position of the slot 10, the block 9 is reset under the elastic action of the spring 8, and the block 9 is smoothly inserted into the slot. 10, and realizes the non-destructive fixation of the quartz tube 5. Without damaging the quartz tube 5, the effect of push-in and snap-in can be achieved, which increases the anti-corrosion effect of the quartz tube 5 and facilitates the subsequent cleaning work. The harmful sediments remaining on the inner wall of the quartz tube 5 can be cleaned through the scraping assembly inside the quartz tube 5. It should be noted that when the quartz tube 5 needs to be disassembled, it is only necessary to pull out the two sliding rods 7, and the block 9 leaves the card slot 10 to slide the quartz tube 5 out to complete the disassembly work.

[0030] As the preferred technical solution of this embodiment, the scraping assembly includes a scraping ring 17, which is slidably connected to the quartz tube 5, and the outer wall of the scraping ring 17 is in contact with the inner wall of the quartz tube 5. Two screws 12 are rotatably installed on the side wall of the scraping ring 17, and two fixing plates 13 are fixedly installed on the inner wall of the quartz tube 5. The two fixing plates 13 are threadedly connected to the two screws 12; the scraping ring 17 can be moved by rotating the two screws 12, and while moving outside the quartz tube 5, the sediment on the side wall of the tube can be scraped off, and it can be cleaned without disassembly.

[0031] As a preferred technical solution of this embodiment, a blocking ring 14 is fixedly installed on the side wall of the scraper ring 17 .

[0032] As the preferred technical solution of this embodiment, the side of the blocking ring 14 close to the scraper ring 17 is set to a narrow mouth, and the other side of the blocking ring 14 is set to a wide mouth; since the exhaust pipe 3 is arranged on the diffusion furnace in a horizontal arrangement on the side wall, when the scraper ring 17 is used to scrape off the precipitate, the precipitate above the scraper ring 17, the setting of the blocking ring 14 can prevent the precipitate from falling in large quantities while being scraped off by the scraper ring 17, and the two ends of the precipitate of the blocking ring 14 are respectively set to a narrow mouth and a wide mouth, so that the scraped precipitate will not fall into the position scraped by the scraper ring 17, and will be retained between the scraper ring 17 and the blocking ring 14 as much as possible.

[0033] As the preferred technical solution of this embodiment, the side wall of the tail gas pipe 3 is provided with a thickened layer 2; the outer wall sealing part of the thickened layer 2 of the tail gas pipe 3 is ground and processed to increase the pressure resistance of the tail gas pipe 3, and after the furnace tube tail gas pipe 3 is partially thickened, the life of the quartz tube 5 arranged inside can be greatly extended, and the strength of the corresponding position is also improved. During the later maintenance operation, the risk of the tail gas pipe 3 being broken and scrapped due to improper operation by personnel is also reduced accordingly.

[0034] As a preferred technical solution of this embodiment, a sealing ring 11 is provided between the tail gas pipe 3 and the quartz tube 5; the provision of the sealing ring 11 can increase the sealing performance between the tail gas pipe 3 and the quartz tube 5 to prevent tail gas leakage.

[0035] As a preferred technical solution of this embodiment, a magnetic attraction layer 15 is provided inside the card slot 10, and the card slot 10 is magnetically connected to the card block 9 through the magnetic attraction layer 15; the connection between the card block 9 and the card slot 10 is tighter, making the fixation more firm and increasing the stability of the fixation.

[0036] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A low-pressure diffusion furnace tube, comprising a low-pressure diffusion furnace body (1) and a tail gas pipe (3), wherein the tail gas pipe (3) is connected to the low-pressure diffusion furnace body (1), a quartz tube (5) is slidably mounted inside the tail gas pipe (3), and the outer wall of the quartz tube (5) is in contact with the inner wall of the tail gas pipe (3), characterized in that: A connecting ring (4) is fixedly installed on one end of the quartz tube (5), and two through grooves (6) are provided inside the connecting ring (4). Blocks (9) are slidably installed inside the two through grooves (6), and one side of the block (9) is set as a wedge-shaped surface (16). Slide rods (7) are slidably installed on both sides of the connecting ring (4). The two slide rods (7) penetrate the side wall of the connecting ring (4) and are slidably connected to the connecting ring (4). One end of the two slide rods (7) is fixedly connected to the block (9). The side wall of the exhaust pipe (3) is provided with two card grooves (10), and the two card grooves (10) are adapted to the card fasteners. A spring (8) is provided on the side wall of the slide rod (7), and one end of the spring (8) is fixedly connected to the side wall of the connecting ring (4), and the other end of the spring (8) is fixedly connected to the side wall of the slide rod (7). A dust scraping assembly is provided inside the quartz tube (5).

2. A low-pressure diffusion furnace tube according to claim 1, characterized in that: The scraping assembly comprises a scraping ring (17), the scraping ring (17) is slidably connected to the quartz tube (5), the outer wall of the scraping ring (17) is in contact with the inner wall of the quartz tube (5), two screw rods (12) are rotatably mounted on the side wall of the scraping ring (17), and two fixing plates (13) are fixedly mounted on the inner wall of the quartz tube (5), and the two fixing plates (13) are threadedly connected to the two screw rods (12).

3. A low-pressure diffusion furnace tube according to claim 2, characterized in that: A blocking ring (14) is fixedly mounted on the side wall of the scraper ring (17).

4. A low-pressure diffusion furnace tube according to claim 3, characterized in that: The side of the blocking ring (14) close to the scraper ring (17) is configured as a narrow opening, and the other side of the blocking ring (14) is configured as a wide opening.

5. The low-pressure diffusion furnace tube according to claim 1, characterized in that: The side wall of the tail gas pipe (3) is provided with a thickened layer (2).

6. The low-pressure diffusion furnace tube according to claim 1, characterized in that: A sealing ring (11) is provided between the tail gas pipe (3) and the quartz tube (5).

7. The low-pressure diffusion furnace tube according to claim 1, characterized in that: A magnetic attraction layer (15) is provided inside the card slot (10), and the card slot (10) is magnetically connected to the card block (9) via the magnetic attraction layer (15).

Images