Cooling device of purification table
By installing an isolation net in front of the purification table or setting a blind seal in the rear, and setting a water-cooled radiator and fan on the top of the machine, the problem of insufficient heat exchange in the confined space is solved, and the heat dissipation efficiency and production efficiency are improved.
Patent Information
- Application Number
- CN202420130065.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-18
- Publication Date
- 2025-01-14
- Estimated Expiration
- 2034-01-18
AI Technical Summary
The existing purification table is a confined space, and only the acrylic door on the front of the purification table has an opening, resulting in limited heat exchange between the inside and outside of the machine, making it difficult to effectively dissipate heat, affecting production efficiency.
Design a purifying table heat dissipation device, including installing an isolation net in front of the machine frame or installing a first shutter sealing plate behind the machine frame to increase air intake, and installing a water-cooled radiator and fan on the top of the machine, in conjunction with the radiator box and exhaust air Pipeline to improve heat exchange and cooling efficiency.
It effectively improves heat exchange inside and outside the machine, shortens the cooling time of silicon wafers, improves production efficiency, and enhances heat dissipation capabilities while ensuring safety and structural strength.
Smart Images

Figure CN222352682U_ABST