Electrode protection sleeve and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, and discloses an electrode protective sleeve and a single crystal furnace, and the electrode protective sleeve comprises an insulating sheath and a supporting sheath. And the insulating sheath is of a cylindrical structure made of a high-temperature-resistant insulating material. The supporting sheath is also of a cylindrical structure and is provided with an interlayer capable of containing the insulating sheath, the lower end of the interlayer is closed and used for being arranged on the graphite electrode in a sleeving mode, and the insulating sheath is inserted into the interlayer of the supporting sheath. According to the electrode protection sleeve and the supporting protection sleeve, the insulation protection sleeve can be supported, and direct force application to the fragile insulation protection sleeve is avoided during disassembly and assembly, so that the insulation protection sleeve is prevented from being broken in the disassembly and assembly process, the use frequency of the insulation protection sleeve is increased, and the single crystal preparation cost is reduced. And scraps generated in the dismounting and mounting process of the insulating sheath can be received by the supporting sheath, so that the scraps are prevented from directly falling into the furnace bottom of the single crystal furnace, the cleanness of the furnace bottom of the single crystal furnace can be maintained, and the cleaning of the furnace bottom is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to an electrode protection sleeve and a single crystal furnace. Background Art

[0002] In the process of preparing single crystals, in order to ensure the normal operation of the heater in the furnace and avoid sparking, an insulating sheath needs to be installed outside the electrode. Traditional insulating sheaths are generally made of quartz. Under high temperature conditions, the quartz sheath will be severely deformed, resulting in the need for frequent replacement of the quartz sheath, which increases the preparation cost of single crystals. Although the use of high temperature resistant insulating materials to make insulating sheaths can solve the problem of deformation of the sheath under high temperature conditions, high temperature resistant insulating materials generally have poor toughness and are easy to crush, making disassembly and assembly difficult. The debris generated during disassembly and assembly is easy to accumulate at the bottom of the furnace, resulting in a poor environment at the bottom of the furnace. Utility Model Content

[0003] In order to overcome the shortcomings of the prior art, the purpose of the utility model is to provide an electrode protection cover, which can facilitate the disassembly and assembly of the insulating cover, prevent the slag dropped from the insulating cover during the disassembly and assembly process from falling into the furnace bottom, thereby avoiding contamination of the furnace bottom of the single crystal furnace, and at the same time can form a buffer for the insulating cover, increase the number of times the insulating cover is used, and reduce the preparation cost of the single crystal.

[0004] To solve the above problems, the technical solution adopted by the utility model is as follows: an electrode protection cover, comprising: an insulating cover, which is a tubular structure made of high-temperature resistant insulating material; a supporting cover, which is a tubular structure and is provided with an interlayer that can accommodate the insulating cover, the lower end of the interlayer is closed and is used to be sleeved on the graphite electrode, and the insulating cover is inserted into the interlayer of the supporting cover.

[0005] Compared with the prior art, the beneficial effect of the utility model is that by inserting the insulating sheath into the interlayer of the supporting sheath, the insulating sheath is supported and the strength of the insulating sheath is improved. When disassembling the insulating sheath, the entire protective sheath can be disassembled and assembled by applying force to the supporting sheath, avoiding directly applying force to the insulating sheath with poor toughness to cause the insulating sheath to break, increasing the number of times the insulating sheath is used, and reducing the preparation cost of single crystals. At the same time, during disassembly, the slag dust generated by the insulating sheath will fall into the interlayer of the supporting sheath, avoiding the dust generated by the insulating sheath falling to the bottom of the furnace and polluting the environment at the bottom of the furnace.

[0006] The above-mentioned electrode protection cover, the insulating cover is a multi-layer structure.

[0007] In the above-mentioned electrode protection sleeve, a plurality of sub-sandwiches are arranged in the sandwich layer of the supporting sleeve, and each layer of the insulating sleeve is inserted into each of the sub-sandwiches one by one.

[0008] In the above-mentioned electrode protection sleeve, the height of the layer wall of the sub-sandwich layer located inside is lower than the height of the layer wall of the outermost layer and the innermost layer of the support sleeve.

[0009] In the above-mentioned electrode protection sleeve, strip-shaped through openings are vertically arranged on the layer walls of the sub-sandwich layers inside the supporting sleeve.

[0010] In the above-mentioned electrode protection sleeve, there is a certain angle between the direction of the through hole and any plane passing through the central axis of the supporting sleeve.

[0011] In the electrode protection sleeve, the through-holes of the outer layer are staggered at a certain angle relative to the through-holes of the adjacent inner layer in the opposite direction of the through-holes.

[0012] The electrode protection cover mentioned above, wherein the support cover is made of cured felt.

[0013] In the above-mentioned electrode protection cover, the height of the supporting cover is higher than the height of the insulating cover.

[0014] A single crystal furnace, wherein the graphite electrode jacket of the heater is provided with the electrode protection sleeve mentioned above.

[0015] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the graphite electrode protection cover according to an embodiment of the utility model;

[0017] Figure 2 A top view of a graphite electrode protection cover according to an embodiment of the utility model;

[0018] Figure 3 It is a cross-sectional view of the support sleeve according to an embodiment of the utility model.

[0019] Description of Figure Numbers:

[0020] 100 graphite electrode, 200 insulating sheath, 210 supporting sheath, 211 sub-layer, 212 through-hole, 213 flange. DETAILED DESCRIPTION

[0021] The embodiments of the present invention are described in detail below. Figure 1 and Figure 2The embodiment of the utility model provides an electrode protection sleeve, which is sleeved on the outside of the graphite electrode 100 of the heater of the single crystal furnace, and includes a cylindrical insulating sleeve 200 made of a high temperature resistant insulating material, and a cylindrical supporting sleeve 210 for supporting the insulating sleeve 200. The supporting sleeve 210 is provided with an interlayer, the lower end of the interlayer is closed, and the insulating sleeve 200 can be inserted into the interlayer of the supporting sleeve 210. The electrode protection sleeve of the embodiment of the utility model is formed by inserting the insulating sleeve 200 into the supporting sleeve 210 first, and then sleeve the supporting sleeve 210 on the outer peripheral surface of the graphite electrode 100, so as to form insulation protection for the graphite electrode 100. The support sheath 210 can support the insulating sheath 200 and form a buffer for the insulating sheath 200. At the same time, the protective sheath can be disassembled and assembled by applying force to the support sheath 210, thereby avoiding direct force on the fragile insulating sheath 200 during the disassembly and assembly of the protective sheath, causing the insulating sheath 200 to be broken due to force during the disassembly and assembly process, thereby increasing the number of times the insulating sheath 200 is used, thereby reducing the production cost in the single crystal preparation process. In addition, during the disassembly and assembly process, most of the debris that falls off the insulating sheath 200 will be caught by the support sheath 210, thereby avoiding the debris of the insulating sheath 200 from falling directly into the bottom of the single crystal furnace when the protective sheath is disassembled and assembled, thereby affecting the environment of the bottom of the furnace.

[0022] It is understandable that the insulating sheath 200 can be made of materials such as polytetrafluoroethylene, modified polyoxymethylene, polyetheretherketone or soft ceramics, and the supporting sheath 210 can be made of cured felt made of graphite or carbon.

[0023] Reference Figure 2 In some embodiments, in order to improve the insulation protection effect, the insulating jacket 200 is a multi-layer structure. Accordingly, a plurality of sub-sandwiches 211 are arranged in the interlayer of the supporting jacket 210. The plurality of sub-sandwiches 211 are divided by layer walls. Each layer of the insulating jacket 200 is inserted into each sub-sandwich 211 one by one, so as to form a good buffer for each layer structure of the insulating jacket 200 and to form a good protection for each layer structure of the insulating jacket 200. The thickness of the layer wall of each sub-sandwich 211 of the supporting jacket 210 needs to be designed according to the spacing between each layer structure of the insulating jacket 200. The height of the supporting jacket 210 and the insulating jacket 200 needs to be designed according to the height of the graphite electrode 100. The height of the supporting jacket 210 is preferably higher than the height of the insulating jacket 200, so as to further form a good protection for the insulating jacket 200.

[0024] Reference Figure 3In some embodiments, in order to facilitate the insertion of the multi-layer insulating sheath 200 into the supporting sheath 210, the height of the layer wall of the inner sub-sandwich 211 is preferably lower than the layer wall height of the outermost layer and the innermost layer of the supporting sheath 210, so that the inner layer structure of the insulating sheath 200 shorter than the supporting sheath 210 can be inserted into the inner sub-sandwich 211. The height of the layer wall inside the supporting sheath 210 is preferably about half of the height of the outermost and innermost layer walls.

[0025] Reference Figure 2 In this embodiment, the multi-layer structure of the insulating sheath 200 is formed by winding a strip of insulating material, and a strip-shaped opening 212 is vertically provided on the wall of the inner sub-layer 211. After each layer of insulating material is wound, it passes through the opening 212 on the wall to enter the next layer and continue to be wound until all the sub-layers 211 of the supporting sheath 210 are filled. The width and height of the opening 212 need to be designed according to the thickness and width of the insulating material. The wider the width of the opening 212, the smaller the angle that the insulating material needs to be bent when passing through the opening 212, and the less likely it is to break. Figure 2 In this embodiment, in order to further facilitate the winding of the insulating sheath 200, the direction of the through-hole 212 has a certain angle with any plane passing through the central axis of the supporting sheath 210, so that the insulating material can more easily pass through the through-hole 212 to enter the next layer when winding clockwise or counterclockwise. At the same time, the through-holes 212 on the adjacent layer walls should be staggered at a certain angle in the direction opposite to the direction of the through-hole 212 to give the insulating material more space, further facilitating the insulating material to bend through the through-hole 212 to enter the next layer. Figure 2 In this embodiment, since the through openings 212 face in the clockwise direction, the through openings 212 on adjacent layer walls are staggered at a certain angle in the counterclockwise direction.

[0026] Reference Figure 2 and Figure 3In this embodiment, the insulating sheath 200 includes four layers, and correspondingly, four interlayers are arranged in the supporting sheath 210. In order to further improve the convenience of winding the insulating material, the inner wall of the sub-interlayer 211 closest to the graphite electrode 100 is removed, and the lower edge of the innermost layer wall of the entire supporting sheath 210 is provided with a flange 213 extending toward the center to support the innermost layer of the insulating sheath 200 and catch the debris of the innermost insulating sheath 200. When winding the insulating sheath 200, the head of the insulating material starts from the clockwise side of the opening 212 on the innermost layer wall of the supporting sheath 210, moves clockwise along the innermost layer wall of the supporting sheath 210 for one circle, and then enters the next sub-layer 211 of the supporting sheath 210 through the opening 212 on the innermost layer wall. Then, the head of the insulating material moves clockwise along the second sub-layer 211 of the supporting sheath 210 for one circle, and enters the third sub-layer 211 through the opening 212 on the outer wall of the second sub-layer 211. The above process is repeated until the insulating material fills all four sub-layers 211 of the supporting sheath 210.

[0027] In the single crystal furnace of the embodiment of the utility model, the graphite electrode 100 of the heater is sleeved with the above-mentioned electrode protection sleeve, and the protective sleeve can be disassembled and assembled without directly applying force to the insulating sleeve 200, so that fragile insulating materials can be used for 3-4 furnaces, reducing the manufacturing cost of single crystals. At the same time, the debris generated by the insulating sleeve 200 during disassembly and assembly will be caught by the support sleeve 210, avoiding the debris generated during disassembly and assembly of the protective sleeve from falling directly into the furnace bottom of the single crystal furnace, and the furnace bottom of the single crystal furnace can be kept clean.

[0028] It should be noted that in the description of the present invention, if there are any orientation descriptions, such as up, down, front, back, left, right, etc., the orientations or positional relationships indicated are all based on the orientations or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed or operated in a specific orientation, and cannot be understood as a limitation on the present invention.

[0029] In the description of the present utility model, "several" means one or more, "more" means two or more, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0030] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0031] The above-mentioned implementation modes are only preferred implementation modes of the present invention, and cannot be used to limit the protection scope of the present invention. Any non-substantial changes and substitutions made by technicians in this field on the basis of the present invention shall fall within the scope of protection required by the present invention.

Claims

1. An electrode protective cover, characterized in that: include: The insulating sheath (200) is a tubular structure made of high temperature resistant insulating material; The support sleeve (210) is a cylindrical structure, provided with an interlayer capable of accommodating the insulating sleeve (200), the lower end of the interlayer being closed and being used for being sleeved on the graphite electrode (100), and the insulating sleeve (200) being inserted into the interlayer of the support sleeve (210).

2. The electrode protective cover according to claim 1, characterized in that: The insulating sheath (200) is a multi-layer structure.

3. The electrode protection cover according to claim 2, characterized in that: A plurality of sub-sandwiches (211) are arranged in the sandwich of the supporting jacket (210), and each layer of the insulating jacket (200) is inserted into each of the sub-sandwiches (211) in a one-to-one correspondence.

4. The electrode protection cover according to claim 3, characterized in that: The height of the layer wall of the sub-sandwich layer (211) located inside is lower than the height of the layer wall of the outermost layer and the innermost layer of the supporting sheath (210).

5. The electrode protection cover according to claim 3, characterized in that: Strip-shaped openings (212) are vertically arranged on the wall of the sub-sandwich layer (211) inside the supporting sheath (210).

6. The electrode protection cover according to claim 5, characterized in that: There is a certain angle between the direction of the through opening (212) and any plane passing through the central axis of the supporting sleeve (210).

7. The electrode protection cover according to claim 5, characterized in that: The through openings (212) of the outer layer are staggered at a certain angle relative to the through openings (212) of the adjacent inner layer in a direction opposite to the orientation of the through openings (212).

8. The electrode protection cover according to claim 1, characterized in that: The support sheath (210) is made of cured felt.

9. The electrode protection cover according to claim 1, characterized in that: The height of the supporting sheath (210) is higher than the height of the insulating sheath (200).

10. A single crystal furnace, characterized in that: A graphite electrode (100) of a heater is sheathed with an electrode protection sleeve according to any one of claims 1 to 9.

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