Anti-falling sucker manipulator

Abstract

The utility model provides an anti-falling suction cup manipulator which comprises a suction cup body, a moving mechanism used for driving the suction cup body to move between stations and at least one pair of supporting claws used for being horizontally close to each other so as to just support a plate body on two symmetrical edges of the lower side of the plate body sucked by the suction cup body. The supporting claws are driven by a driving mechanism, and the driving mechanism is fixed to the upper surface of the suction cup body. The anti-falling suction cup manipulator is provided with the supporting claws, in the moving process, a sucked plate body can be prevented from falling, the situation that in the prior art, the fallen plate body is manually processed is not needed, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to an anti-drop suction cup manipulator. Background Art

[0002] In the field of semiconductor processing, the cleaning of the wafer (usually refers to the substrate of silicon wafer or other semiconductor materials) is a crucial step. This process ensures that the surface of the wafer will not be contaminated during subsequent processing, such as lithography, etching, chemical vapor deposition (CVD), etc., thus ensuring the performance and reliability of semiconductor devices.

[0003] In order to support and fix the blank and ensure that the blank is not mechanically damaged during the cleaning process, the blank needs to be fixed in a carrier (composed of a download plate and a cover plate) before cleaning.

[0004] In the prior art, the blanks need to be assembled into the carrier manually, which is inefficient and costly.

[0005] In order to automatically load the blanks into the carrier, a suction cup robot is required to move the download plate or cover plate between the workstations. In actual applications, vacuum failure or other reasons may cause the sucked plate to fall from the suction cup robot. At this time, manual intervention is required to deal with the fallen plate, affecting production efficiency. Utility Model Content

[0006] Based on this, in order to solve the above technical problems, a kind of anti-drop suction cup manipulator is provided.

[0007] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0008] A suction cup manipulator to prevent falling includes a suction cup body and a moving mechanism for driving the suction cup body to move between workstations. The invention is characterized in that the manipulator also includes at least one pair of supporting claws for horizontally approaching each other so as to hold the plate body at two symmetrical edges on the lower side of the plate body sucked by the suction cup body. The pair of supporting claws are driven by a driving mechanism, and the driving mechanism is fixed to the upper surface of the suction cup body.

[0009] The utility model discloses an anti-drop suction cup manipulator which is provided with a supporting claw, which can prevent the sucked plate from falling during the moving process, and does not need manual intervention to handle the fallen plate as in the prior art, thereby improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 The three-dimensional structure of the utility model is shown in FIG. Figure 1 ;

[0011] Figure 2 The three-dimensional structure of the utility model is shown in FIG. Figure 2 ;

[0012] Figure 3 This is a schematic structural diagram of the guiding mechanism of the present utility model. Specific embodiments

[0013] The following will describe the embodiments of the present utility model with reference to the accompanying drawings of the specification. It should be noted that the embodiments described in this specification are not exhaustive and do not represent the only embodiments of the present utility model. The following corresponding embodiments are only for clearly explaining the content of the present utility model of the patent of the present utility model, and do not limit its embodiments. For those of ordinary skill in the art, various changes and modifications can be made on the basis of the description of this embodiment. Any changes or modifications that belong to the technical concept and content of the present utility model and are obvious are also within the protection scope of the present utility model.

[0014] As Figure 1 and Figure 2 shown, this embodiment provides an anti-drop suction cup manipulator for sucking the download board or cover board of a carrier, which includes a suction cup body 1221, two pairs of claws 1222, two driving mechanisms 1223, and a moving mechanism 1224.

[0015] As Figure 1 shown, the suction cup body 1221 includes a vacuum plate 1221a, a plurality of vacuum pumping joints 1221b, and a plurality of vacuum suction heads 1221c.

[0016] The vacuum plate 1221a has two rectangular holes spaced front and rear, so that the vacuum plate 1221a is in an overall shape of a Chinese character 'Ri'. The vacuum plate 1221a has a vacuum pumping cavity inside. A plurality of vacuum pumping joints 1221b are evenly distributed on the upper surface of the vacuum plate 1221a and communicate with the vacuum pumping cavity. A plurality of vacuum suction heads 1221c are evenly distributed on the lower surface of the vacuum plate 1221a and communicate with the vacuum pumping cavity.

[0017] As Figure 1 and Figure 2 shown, the two pairs of claws 1222 are spaced front and rear. Each pair of claws 1222 can move horizontally and close to each other left and right, so as to exactly hold the plate body at the two symmetric edges (left and right edges) on the lower side of the plate body sucked by the suction cup body 1221. In this way, during the movement of the suction cup body 1221 after obtaining the plate body, the claws 1222 can prevent the plate body from falling due to a vacuum failure. In addition, when the suction cup body 1221 sucks the plate body, the claws 1222 simultaneously extend between the upper and lower plate bodies, facilitating the separation of the upper and lower plate bodies.

[0018] As Figure 2 shown, each pair of claws 1222 is driven by a driving mechanism 1223 respectively, and the driving mechanism 1223 is fixed on the upper surface of the suction cup body 1221.

[0019] The claw 1222 includes a claw portion 1222a and a connecting arm 1222b. The claw portion 1222a is L-shaped and is connected to the driving mechanism 1223 via the connecting arm 1222b.

[0020] The driving mechanism 1223 adopts a bidirectional cylinder, and the pistons at the left and right ends are respectively connected to a connecting arm 1222b of a claw 1222.

[0021] like Figure 1 As shown, the driving mechanism 1223 is protected by a cover 1223a, and the cover 1223a is fixed to the upper surface of the vacuum plate 1221a by bolts.

[0022] A guiding mechanism is provided between the suction cup body 1221 and the supporting claws 1222 for guiding the supporting claws 1222 when they are horizontally close to each other.

[0023] For example, Figure 3 As shown, the guide mechanism includes a guide rail 1221d formed on the upper surface of the vacuum plate 1221a of the suction cup body 1221 and a guide slide 1222c formed on the lower surface of the connecting arm 1222b of the claw 1222, and the guide slide 1222c is slidably disposed on the guide rail 1221d.

[0024] The moving mechanism 1224 is used to drive the suction cup body 1221 to move between workstations. Figure 1 As shown, the moving mechanism 1224 is composed of a linear module 1224a in the front-to-back direction and a linear module 1224b in the up-and-down direction. The linear module 1224b is arranged on the slide of the linear module 1224a. The suction cup body 1221 is fixed on the slide of the linear module 1224b. The vacuum generating device is fixed on the slide and connected to the vacuum extraction joint 1221b through a pipeline.

[0025] From the above, it can be seen that the anti-drop suction cup manipulator provided in this embodiment is provided with a supporting claw, which can prevent the sucked plate from falling during the movement. There is no need for manual participation in handling the fallen plate as in the prior art, thereby improving production efficiency. In addition, the supporting claw also helps to separate the upper and lower plates.

[0026] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present invention, and are not used to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. An anti-drop suction cup manipulator, comprising a suction cup body and a moving mechanism for driving the suction cup body to move between workstations, characterized in that: It also includes at least one pair of claws for horizontally approaching each other to hold the board body just at two symmetrical edges on the lower side of the board body sucked by the suction cup body, and the pair of claws are driven by a driving mechanism, and the driving mechanism is fixed to the upper surface of the suction cup body.

2. The anti-drop suction cup manipulator according to claim 1, characterized in that: The suction cup body includes a vacuum plate, a plurality of vacuum joints and a plurality of vacuum suction heads. The vacuum plate has a vacuum chamber inside. The plurality of vacuum joints are arranged on the upper surface of the vacuum plate and are connected to the vacuum chamber. The plurality of vacuum suction heads are evenly distributed on the lower surface of the vacuum plate and are connected to the vacuum chamber.

3. The anti-drop suction cup manipulator according to claim 1, characterized in that: A guiding mechanism is provided between the suction cup body and the supporting claws for guiding the supporting claws when they are horizontally close to each other.

4. The anti-drop suction cup manipulator according to claim 3, characterized in that: The guide mechanism comprises a guide slide rail formed on the upper surface of the suction cup body and a guide slide seat formed on the lower surface of the supporting claw, and the guide slide seat is slidably arranged on the guide slide rail.

5. The anti-drop suction cup manipulator according to claim 1, characterized in that: The supporting claw comprises a claw portion and a connecting arm, wherein the claw portion is L-shaped and is connected to the driving mechanism via the connecting arm.

6. The anti-drop suction cup manipulator according to claim 1, characterized in that: The driving mechanism is a bidirectional cylinder.

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