Water cooling device of vacuum coating machine

Abstract

The utility model discloses a vacuum coating machine water cooling device which comprises a vacuum coating machine, a coating cavity is arranged in the vacuum coating machine, two round rods are rotatably mounted in the vacuum coating machine, a plurality of rolling blades are fixedly sleeved on the two round rods, and linkage gears are fixedly sleeved at the top ends of the two round rods. A mounting plate is fixedly mounted at the top of the vacuum coating machine, a fixing plate is fixedly mounted at the front end of the vacuum coating machine, a motor is fixedly mounted at the top of the fixing plate, a worm is rotatably mounted on the side, close to the motor, of the mounting plate, and two movable grooves are formed in the side, close to the motor, of the mounting plate. The water cooling device of the vacuum coating machine is simple in structure and convenient to use, and can quickly cool the internal space of the coating cavity of the vacuum coating machine through reciprocating liquid cooling stirring heat dissipation.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machines, in particular to a water cooling device for a vacuum coating machine. Background Art

[0002] When the coating is done, the substrate is called the substrate, and the material to be coated is called the target. The substrate and the target are in the same vacuum chamber. Evaporation coating generally heats the target so that the surface components are evaporated in the form of atomic groups or ions. And they settle on the surface of the substrate to form a coating.

[0003] During the coating process, the temperature inside the vacuum coating machine cavity is relatively high. The reason is that during use, the intermediate frequency equipment used for coating will generate a lot of heat. Since the coating machine is sealed inside, it will damage the internal parts of the coating machine and affect its use. Therefore, cooling measures are needed to cool it down to ensure the stable use of the coating cavity.

[0004] Therefore, in the patent document, "a vacuum coating machine cavity cooling device" is provided with cooling through semiconductor refrigeration sheets, and the rotation of the motor drives the rotating fan to rotate, blowing cold air to the direction of the workpiece disk, and with the setting of the arc filter plate, the cold air flow is buffered by the arc filter plate, making the cold air flow more gentle and uniform, thereby cooling the substrate on the workpiece disk.

[0005] In this technical solution, semiconductor cooling will also dissipate huge amounts of heat, but the internal space of the coating cavity cannot be relatively small, and the required cooling capacity is large. However, the use of semiconductor cooling will generate huge amounts of heat, which is not conducive to the cooling of the cavity.

[0006] The above patent document is a Chinese patent with publication number CN216838154U.

[0007] Based on this, this scheme proposes a water cooling device for a vacuum coating machine. Utility Model Content

[0008] The purpose of the utility model is to provide a water cooling device for a vacuum coating machine to solve the problems raised in the above background technology.

[0009] To achieve the above purpose, the utility model provides the following technical solution: a water cooling device for a vacuum coating machine, comprising a vacuum coating machine,

[0010] The vacuum coating machine is provided with a coating cavity and two round rods are rotatably installed in the vacuum coating machine, a plurality of tumbling blades are fixedly sleeved on the two round rods and linkage gears are fixedly sleeved on the top ends of the two round rods;

[0011] A mounting plate is fixedly installed on the top of the vacuum coating machine and a fixing plate is fixedly installed on the front end of the vacuum coating machine, a motor is fixedly installed on the top of the fixing plate, a worm is rotatably installed on one side of the mounting plate close to the motor and two movable grooves are provided on one side of the mounting plate close to the motor, movable rods are movably installed in the two movable grooves, double-sided racks are fixedly installed on one end of the two movable rods, a second sprocket is fixedly sleeved on one end of the worm, a first sprocket is fixedly sleeved on the output shaft of the motor, and the same chain is sleeved between the first sprocket and the second sprocket;

[0012] The top of the vacuum coating machine is rotatably mounted with two rotating shafts, on which worm wheels and sector gears are fixedly sleeved, the two worm wheels are meshed with the worm, the two sector gears are respectively meshed with the corresponding double-sided racks, and the two linkage gears are respectively meshed with the corresponding double-sided racks.

[0013] Preferably, a plurality of heat conducting sheets are fixedly installed at equal distances on the outside of the coating cavity.

[0014] By adopting the above technical solution, the heat in the coating cavity can be quickly absorbed and discharged outwards through the heat conductive sheet, thereby increasing the heat dissipation effect of the coating cavity.

[0015] Preferably, a water inlet pipe and a water outlet pipe are fixedly installed on one side of the vacuum coating machine, and valves are provided on the water inlet pipe and the water outlet pipe.

[0016] By adopting the above technical solution, the exchange of cooling water can be conveniently controlled through the water inlet pipe and the water outlet pipe.

[0017] Preferably, the two sector gears are symmetrically arranged.

[0018] Preferably, the two movable rods are sleeved with return springs, one end of the two return springs is fixed to the corresponding movable rod, and the other end is fixed to the inner wall of the corresponding movable groove.

[0019] By adopting the above technical solution, the movable rod can be easily reset by the reset spring.

[0020] Preferably, the heat conducting sheet is made of copper.

[0021] Compared with the prior art, the beneficial effects of the utility model are:

[0022] When it is necessary to dissipate heat and cool down the inside of the coating chamber, cooling water is injected into the vacuum coating machine through the water inlet pipe, and then the first sprocket is driven to rotate by the starting motor, and the first sprocket drives the second sprocket through the chain, and the second sprocket drives the worm, and the worm drives the two worm wheels to rotate, which can drive the two rotating shafts to rotate, and the two rotating shafts drive the two sector gears to rotate, and the two sector gears indirectly mesh with the corresponding double-sided racks, which can drive the reciprocating movement of the two double-sided racks, and the two double-sided racks drive the back and forth rotation of the two linkage gears, which can drive the back and forth rotation of the two round rods, which can drive the back and forth rotation of the tumbling blades on the two round rods, and the cooling water in the vacuum coating machine can be tumbled and stirred back and forth, thereby increasing the contact area of ​​the cooling water in the vacuum coating machine, facilitating the cold and heat exchange of the coating chamber, and the heat in the coating chamber can be quickly absorbed and discharged outwards through the heat conducting sheet, thereby increasing the heat dissipation effect of the coating chamber and facilitating the rapid cooling of the coating chamber. The utility model has a simple structure and is easy to use. The water cooling device for a vacuum coating machine can quickly dissipate heat and cool down the internal space of a coating cavity of the vacuum coating machine by reciprocating liquid cooling and stirring to dissipate heat. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a side perspective view of the utility model;

[0024] Figure 2 This is a schematic diagram of the structure of part A of the utility model;

[0025] Figure 3 It is a three-dimensional diagram of the internal structure of the utility model.

[0026] In the figure: 1. Vacuum coating machine; 2. Water inlet pipe; 3. Chain; 4. Fixed plate; 5. Motor; 6. First sprocket; 7. Second sprocket; 8. Mounting plate; 9. Worm; 10. Return spring; 11. Linkage gear; 12. Double-sided rack; 13. Worm wheel; 14. Fan gear; 15. Water outlet pipe; 16. Rotating shaft; 17. Movable rod; 18. Coating cavity; 19. Tumbling blade; 20. Heat conducting plate; 21. Round rod. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0028] See also Figure 1-3The utility model provides a technical solution: a water cooling device for a vacuum coating machine, comprising a vacuum coating machine 1, a coating chamber 18 is provided in the vacuum coating machine 1 and two round rods 21 are rotatably installed in the vacuum coating machine 1, a plurality of tumbling blades 19 are fixedly sleeved on the two round rods 21 and a linkage gear 11 is fixedly sleeved on the top of the two round rods 21, a mounting plate 8 is fixedly installed on the top of the vacuum coating machine 1 and a fixing plate 4 is fixedly installed at the front end of the vacuum coating machine 1, a motor 5 is fixedly installed on the top of the fixing plate 4, and the mounting plate 8 is close to the motor 5. A worm 9 is rotatably installed on one side, and two movable grooves are provided on the side of the mounting plate 8 close to the motor 5. Movable rods 17 are movably installed in the two movable grooves. Double-sided racks 12 are fixedly installed on one end of the two movable rods 17. A second sprocket 7 is fixedly sleeved on one end of the worm 9. A first sprocket 6 is fixedly sleeved on the output shaft of the motor 5. The same chain 3 is sleeved between the first sprocket 6 and the second sprocket 7. Two rotating shafts 16 are rotatably installed on the top of the vacuum coating machine 1. A worm wheel 13 and a sector gear 14 are fixedly sleeved on the two rotating shafts 16. The worm gears 13 are meshed with the worm 9, the two sector gears 14 are meshed with the corresponding double-sided racks 12, the two linkage gears 11 are meshed with the corresponding double-sided racks 12, the two sector gears 14 are symmetrically arranged, and the two movable rods 17 are sleeved with return springs 10, one end of the two return springs 10 is fixed on the corresponding movable rod 17, and the other end is fixed on the inner wall of the corresponding movable groove. Through the above-mentioned structural arrangement, the first sprocket 6 is driven to rotate by the starting motor 5, and the first sprocket 6 drives the second sprocket 7 to rotate through the chain 3. The second sprocket 7 drives the rotation of the worm 9, the worm 9 drives the rotation of the two worm wheels 13, which can drive the rotation of the two rotating shafts 16, the two rotating shafts 16 drive the rotation of the two sector gears 14, the two sector gears 14 indirectly mesh with the corresponding double-sided racks 12, which can drive the reciprocating movement of the two double-sided racks 12, the two double-sided racks 12 drive the back and forth rotation of the two linkage gears 11, which can drive the back and forth rotation of the two round rods 21, and the back and forth rotation of the tumbling blades 19 on the two round rods 21.

[0029] Combination Figure 1-3 As shown, a plurality of heat conducting plates 20 are fixedly installed at equal distances on the outside of the coating cavity 18. The heat conducting plates 20 are made of copper. Through the above-mentioned structural setting, the heat in the coating cavity 18 can be quickly absorbed and discharged outward through the heat conducting plates 20, thereby increasing the heat dissipation effect of the coating cavity 18 and facilitating rapid cooling in the coating cavity 18.

[0030] Combination Figure 1-3 As shown, a water inlet pipe 2 and a water outlet pipe 15 are fixedly installed on one side of the vacuum coating machine 1, and valves are provided on the water inlet pipe 2 and the water outlet pipe 15. Through the above-mentioned structural arrangement, the exchange of cooling water can be easily controlled through the water inlet pipe 2 and the water outlet pipe 15.

[0031] Working principle of the utility model: when it is necessary to dissipate heat and cool down the inside of the coating chamber 18, cooling water is injected into the vacuum coating machine 1 through the water inlet pipe 2, and then the first sprocket 6 is driven to rotate by the starting motor 5, and the first sprocket 6 drives the second sprocket 7 to rotate through the chain 3, and the second sprocket 7 drives the worm 9 to rotate, and the worm 9 drives the two worm wheels 13 to rotate, which can drive the two rotating shafts 16 to rotate, and the two rotating shafts 16 drive the two sector gears 14 to rotate, and the two sector gears 14 indirectly mesh with the corresponding double-sided racks 12, which can drive the two double-sided racks 12 to rotate. The reciprocating movement of the surface rack 12 and the two double-sided racks 12 drive the two linkage gears 11 to rotate back and forth, which can drive the two round rods 21 to rotate back and forth, which can drive the rolling blades 19 on the two round rods 21 to rotate back and forth, and the cooling water in the vacuum coating machine 1 can be rolled and stirred back and forth, increasing the contact area of ​​the cooling water in the vacuum coating machine 1, facilitating the cold and heat exchange of the coating cavity 18, and the heat in the coating cavity 18 can be quickly absorbed and discharged outward through the heat conductive sheet 20, increasing the heat dissipation effect of the coating cavity 18, and facilitating the rapid cooling of the coating cavity 18. The utility model has a simple structure and is easy to use. The water cooling device of the vacuum coating machine can quickly dissipate heat and cool the internal space of the coating cavity of the vacuum coating machine by reciprocating liquid cooling and stirring to dissipate heat.

[0032] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in the field. Although the embodiments of the utility model have been shown and described, it is understandable to those of ordinary skill in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principle and spirit of the utility model. The scope of the utility model is defined by the attached claims and their equivalents.

Claims

1. A water cooling device for a vacuum coating machine, comprising a vacuum coating machine (1), characterized in that: The vacuum coating machine (1) is provided with a coating cavity (18) and two round rods (21) are rotatably mounted in the vacuum coating machine (1), a plurality of tumbling blades (19) are fixedly sleeved on the two round rods (21) and linkage gears (11) are fixedly sleeved at the top ends of the two round rods (21); A mounting plate (8) is fixedly installed on the top of the vacuum coating machine (1) and a fixing plate (4) is fixedly installed at the front end of the vacuum coating machine (1); a motor (5) is fixedly installed on the top of the fixing plate (4); a worm (9) is rotatably installed on the side of the mounting plate (8) close to the motor (5) and two movable grooves are provided on the side of the mounting plate (8) close to the motor (5); movable rods (17) are movably installed in the two movable grooves; a double-sided rack (12) is fixedly installed on one end of the two movable rods (17); a second sprocket (7) is fixedly sleeved on one end of the worm (9); a first sprocket (6) is fixedly sleeved on the output shaft of the motor (5); and a same chain (3) is sleeved between the first sprocket (6) and the second sprocket (7); The top of the vacuum coating machine (1) is rotatably mounted with two rotating shafts (16), on which worm wheels (13) and sector gears (14) are fixedly sleeved, the two worm wheels (13) are meshed with the worm (9), the two sector gears (14) are respectively meshed with the corresponding double-sided racks (12), and the two linkage gears (11) are respectively meshed with the corresponding double-sided racks (12).

2. The water cooling device of a vacuum coating machine according to claim 1, characterized in that: A plurality of heat conducting sheets (20) are fixedly installed at equal distances on the outside of the coating cavity (18).

3. The water cooling device of a vacuum coating machine according to claim 1, characterized in that: A water inlet pipe (2) and a water outlet pipe (15) are fixedly installed on one side of the vacuum coating machine (1), and valves are provided on the water inlet pipe (2) and the water outlet pipe (15).

4. The water cooling device of a vacuum coating machine according to claim 1, characterized in that: The two sector gears (14) are symmetrically arranged.

5. The water cooling device of a vacuum coating machine according to claim 1, characterized in that: The two movable rods (17) are sleeved with a return spring (10), one end of the two return springs (10) is fixed on the corresponding movable rod (17), and the other end is fixed on the inner wall of the corresponding movable groove.

6. The water cooling device of a vacuum coating machine according to claim 2, characterized in that: The heat conducting sheet (20) is made of copper.

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