Reaction chamber top cover plate and waste gas treatment device

Abstract

The utility model provides a top cover plate of a reaction cavity and a waste gas treatment device, a hollow cooling cavity is formed in the top cover plate of the reaction cavity, a plurality of flow guide fins for limiting a fluid outlet channel are arranged in the cooling cavity, and an inlet and an outlet which are in fluid communication with the cooling cavity are formed in the top cover plate. The low-temperature fluid is continuously introduced into the cooling cavity, and the low-temperature fluid is dispersed and guided through the guide fins, so that the low-temperature fluid can fully absorb heat of the top cover plate of the reaction cavity, the top cover plate of the reaction cavity is effectively cooled, and potential safety hazards caused by over-high temperature of the top cover plate of the reaction cavity are avoided.

Description

Technical Field

[0001] The present application relates to the technical field of waste gas treatment, and in particular to a waste gas treatment device for performing combustion treatment on waste gas discharged from a manufacturing device for manufacturing semiconductor devices, etc. to render it harmless. Background Art

[0002] The combustion and water-washing type waste gas treatment device is a local waste gas treatment equipment (Local Scrubber), which is used to purify the process waste gas (such as silane, hydrogen, hydrochloric acid and other gases) discharged from the manufacturing equipment such as semiconductor devices. The working principle of the combustion and water-washing type waste gas treatment device is to pass the fuel gas (such as methane) and the combustion-supporting gas (such as oxygen-containing gas) into the reaction chamber to mix and burn the fuel to form a flame, so that the temperature of the reaction chamber rises (up to 1300°C) to form a high-temperature environment, and the process waste gas passed into the reaction chamber is burned in the flame or decomposed at high temperature, converted into non-toxic and harmless high-temperature gas to achieve purification. In the prior art, in order to prevent the side wall of the reaction chamber from being thermally damaged by the flame burning, a water film is formed on the side wall of the reaction chamber to reduce the temperature of the side wall of the reaction chamber. However, the high temperature in the reaction chamber will also cause the temperature of the top cover plate covering the top of the reaction chamber to rise through heat conduction. If it is not handled, it is easy to cause damage to equipment and devices and burns to personnel, and there are great safety hazards. Therefore, it is also necessary to perform a cooling treatment on the top cover plate of the reaction chamber. Summary of the invention

[0003] The purpose of the present application is to provide a reaction chamber top cover plate to solve the problem in the prior art that the high temperature in the reaction chamber causes the reaction chamber top cover plate to be over-temperatured through heat conduction, thus creating a potential safety hazard.

[0004] On one hand, the present application proposes a reaction chamber top cover plate, wherein a hollow cooling chamber is formed inside the top cover plate, a plurality of guide fins defining a fluid channel are arranged in the cooling chamber, and an inlet and an outlet connected to the cooling chamber fluid are arranged on the top cover plate.

[0005] The cryogenic fluid is continuously introduced into the cooling chamber through the above-mentioned inlet, and the cryogenic fluid exchanges heat with the reaction chamber top cover plate to achieve cooling of the reaction chamber top cover plate, thereby preventing the outer surface temperature of the reaction chamber top cover plate from being too high and causing safety hazards. The guide fins define a fluid channel in the cooling chamber to disperse and guide the cryogenic fluid, so as to avoid the generation of vortices in the cooling chamber, thereby improving the heat absorption efficiency of the cryogenic fluid, thereby better meeting the cooling requirements of the top cover plate.

[0006] Furthermore, the top cover plate includes an upper cover plate and a lower cover plate, the upper cover plate is sealed and fixedly connected to the lower cover plate, and the upper cover plate and the lower cover plate are combined to form the cooling cavity. The inlet and the outlet are spaced apart and arranged on the upper surface of the upper cover plate.

[0007] Further, the guide fins include a plurality of first guide fins and a plurality of second guide fins; the plurality of first guide fins are fixedly connected to the upper cover plate and extend downward in a direction toward the lower cover plate; the plurality of second guide fins are fixedly connected to the lower cover plate and extend upward in a direction toward the upper cover plate; there is a first gap between the first guide fins and the lower cover plate, and there is a second gap between the second guide fins and the upper cover plate; the first guide fins and the second guide fins are alternately arranged along the direction of the line connecting the inlet and the outlet to define the fluid channel.

[0008] Such arrangement makes the flow direction of the low-temperature fluid the same as the arrangement direction of the guide fins. Through the first and second guide fins that are staggered up and down and spaced left and right, a fluid channel is defined in the cooling cavity, so as to force the low-temperature fluid to flow in an "S"-shaped zigzag manner along the above fluid channel inside the cooling cavity, extend the movement trajectory of the low-temperature fluid in the cooling cavity, evenly absorb the heat on the top cover plate, and improve the heat exchange effect between the low-temperature fluid and the top cover plate, thereby effectively improving the cooling effect of the top cover plate.

[0009] Furthermore, in order to detect the temperature of the outer surface of the top cover plate of the reaction chamber, a temperature sensor is provided on the upper surface of the top cover plate. Based on the detection result of the temperature sensor, the flow rate of the cryogenic fluid entering the cooling chamber can be adjusted to prevent the temperature of the top cover plate from exceeding the safe temperature range.

[0010] Furthermore, in order to ensure the one-way flow of the cryogenic fluid, the inlet is connected to a first pipeline, and a first one-way valve is arranged on the first pipeline. The first one-way valve ensures that the first pipeline can only flow the cryogenic fluid into the cooling chamber.

[0011] Furthermore, in order to prevent the high-temperature fluid flowing out of the outlet from flowing back into the cooling chamber, the outlet is connected to a second pipeline, and a second one-way valve is arranged on the second pipeline.

[0012] Furthermore, a first flow regulating valve is provided on the first pipeline, and the first flow regulating valve is provided upstream of the first one-way valve; a second flow regulating valve is provided on the second pipeline, and the second flow regulating valve is provided downstream of the second one-way valve. According to the temperature value of the outer surface of the top cover plate of the reaction chamber detected by the temperature sensor, the opening of the first and second flow regulating valves can be adjusted to maintain the temperature of the top cover plate within a safe temperature range.

[0013] Furthermore, the inlet and the outlet are both provided with ferrule external thread terminal connectors, which are respectively connected to the first pipeline and the second pipeline through the above connectors to facilitate connection and disassembly.

[0014] Furthermore, the low-temperature fluid introduced into the cooling chamber through the inlet is compressed air or cooling liquid.

[0015] On the other hand, the present application further proposes an exhaust gas treatment device, comprising a reaction chamber and the reaction chamber top cover plate, wherein the reaction chamber top cover plate is fixedly installed above the reaction chamber.

[0016] Compared with the prior art, the reaction chamber top cover plate provided in the present application has a hollow cooling chamber formed inside the top cover plate, and a plurality of guide fins are arranged in the cooling chamber to define a fluid channel. By continuously introducing a low-temperature fluid into the cooling chamber, the low-temperature fluid is dispersed and guided through the guide fins, so that the low-temperature fluid can fully absorb the heat of the top cover plate, effectively cool the top cover plate, and avoid safety hazards caused by excessive temperature of the reaction chamber top cover plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 This is a front view of the exhaust gas treatment device in the embodiment of the present application;

[0019] Figure 2 A top view of the exhaust gas treatment device in an embodiment of the present application;

[0020] Figure 3 for Figure 2 Sectional view along line AA;

[0021] Reference numerals:

[0022] 100- Waste gas treatment device;

[0023] 10- reaction chamber;

[0024] 20-top cover plate; 21-inlet; 22-outlet; 23-cooling chamber; 24-guide fin; 241-first guide fin; 242-second guide fin; 27-temperature sensor; fluid channel 28;

[0025] 30-flame head assembly; 40-viewing window assembly; 50-inlet for waste gas to be treated DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0028] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0029] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0030] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0031] The reaction chamber top cover plate 20 and the exhaust gas treatment device 100 equipped with the reaction chamber top cover plate 20 according to an embodiment of the present application will be described below with reference to the accompanying drawings.

[0032] Reference Figure 1-Figure 3The reaction chamber top cover plate 20 of the embodiment of the present application is applied to the waste gas treatment device 100, which covers the top of the reaction chamber 10 and is fixedly connected to the reaction chamber 10. The two cooperate to form a high-temperature working space for the waste gas to undergo chemical reactions under high temperature conditions and be converted into exhaustable gas. A hollow cooling chamber 23 is formed inside the reaction chamber top cover plate 10, and an inlet 21 and an outlet 22 connected to the fluid of the cooling chamber 23 are provided on the upper surface of the top cover plate 10; a plurality of guide fins 24 defining a fluid channel 28 are provided in the cooling chamber 23. The low-temperature fluid is introduced into the cooling chamber 23 from the inlet 21, flows in the cooling chamber along the fluid channel 28, and then is discharged from the outlet 22.

[0033] The cryogenic fluid passes through the cooling chamber 23 from the inlet 21 and is discharged from the outlet 22. The cryogenic fluid can be continuously introduced into the cooling chamber 23 through the inlet 21 and the outlet 22. The cryogenic fluid exchanges heat with the reaction chamber top cover plate 20 to cool the reaction chamber top cover plate 20 and prevent the outer surface temperature of the reaction chamber top cover plate 20 from being too high and causing safety hazards. The guide fins 24 can prevent the cryogenic fluid from generating vortices in the cooling chamber 23. The fluid velocity and pressure drop can be controlled by appropriately setting the arrangement position and spacing of the guide fins, thereby improving the heat absorption efficiency of the cryogenic fluid, thereby better meeting the cooling requirements of the top cover plate 20.

[0034] Further, the top cover plate 20 of the embodiment of the present application includes an upper cover plate and a lower cover plate, the upper cover plate is sealed and fixedly connected to the lower cover plate, and the upper cover plate and the lower cover plate are combined to form the above-mentioned cooling chamber 23. Optionally, the upper cover plate and the lower cover plate are integrally formed. The above-mentioned inlet 21 and outlet 22 are spaced apart and arranged on the upper surface of the upper cover plate.

[0035] In order to improve the heat exchange effect between the low-temperature fluid and the top cover plate 20, the arrangement position of the guide fins 24 arranged in the cooling chamber 23 is planned and designed in the embodiment of the present application. Specifically, the plurality of guide fins 24 include a plurality of first guide fins 241 and a plurality of second guide fins 242. The plurality of first guide fins 241 are fixedly connected to the upper cover plate and extend downward in the direction toward the lower cover plate; the plurality of second guide fins 242 are fixedly connected to the lower cover plate and extend upward in the direction toward the upper cover plate; at the same time, there is a first gap between the first guide fin 241 and the lower cover plate, and there is a second gap between the second guide fin 242 and the upper cover plate. Both the first gap and the second gap are for fluid to pass through. The first guide fin 241 and the second guide fin 242 are alternately arranged along the connecting line direction of the above-mentioned inlet 21 and the above-mentioned outlet 22 to define the above-mentioned fluid channel 28. Preferably, the first guide fin 241 and the second guide fin 242 are perpendicular to the lower cover plate.

[0036] Such arrangement makes the flow direction of the cryogenic fluid the same as the arrangement direction of the guide fins 24. Through the first and second guide fins staggered up and down and arranged at intervals left and right, a fluid channel 28 is defined in the cooling chamber 23, so as to force the cryogenic fluid to flow in an "S"-shaped zigzag manner along the above fluid channel inside the cooling chamber, extend the movement trajectory of the cryogenic fluid in the cooling chamber 23, evenly absorb the heat on the top cover plate 20, and improve the heat exchange effect between the cryogenic fluid and the top cover plate 20, thereby effectively improving the cooling effect of the top cover plate 20.

[0037] Further, the inlet 21 is connected to a first pipeline, and a first one-way valve is provided on the first pipeline. The first one-way valve ensures that the first pipeline can only pass low-temperature fluid into the cooling chamber 23. Correspondingly, the outlet 22 is connected to a second pipeline, and a second one-way valve is provided on the second pipeline. The second one-way valve prevents the high-temperature fluid in the second pipeline from flowing back into the cooling chamber 23. Preferably, both the inlet 21 and the outlet 22 are provided with a ferrule external thread terminal connector, which is respectively connected to the first pipeline and the second pipeline through the connector to facilitate connection and disassembly.

[0038] The first pipeline continuously introduces low-temperature fluid into the cooling chamber 23 to absorb the heat transferred to the top cover plate 20 during the operation of the exhaust gas treatment device, cool the top cover plate 20, and ensure that the temperature of the outer surface of the top cover plate 20 does not exceed the safe temperature range to avoid damage to the device caused by high temperature or burns caused by contact with personnel. At the same time, the high-temperature fluid in the cooling chamber is discharged in time through the second pipeline.

[0039] Furthermore, in order to maintain the pressure balance in the cooling chamber 23, a first flow regulating valve is provided on the first pipeline, and the first flow regulating valve is provided upstream of the first one-way valve; a second flow regulating valve is provided on the second pipeline, and the second flow regulating valve is provided downstream of the second one-way valve. The first flow regulating valve and the second flow regulating valve are adjusted in linkage, and the openings of the two are adjusted in the same proportion.

[0040] Furthermore, in order to detect the temperature of the outer surface of the top cover plate 20 of the reaction chamber, a temperature sensor 27 is also provided on the upper surface of the upper cover plate. Based on the detection result of the temperature sensor 27, the flow rate of the low-temperature fluid entering the cooling chamber 23 is controlled to prevent the temperature of the top cover plate 20 from exceeding the safe temperature range. Specifically, the temperature value of the outer surface of the top cover plate 20 of the reaction chamber is detected and fed back in real time or at a set time interval by the temperature sensor 27. Based on the comparison between the detected temperature value and the safe temperature range, the opening of the first flow regulating valve and the second flow regulating valve can be adjusted. When the detected temperature value exceeds the safe temperature range, the opening of the first and second flow regulating valves is increased to allow more low-temperature fluid to flow through the cooling chamber 23 along the fluid channel to quickly take away the heat of the top cover plate 20, until the detected temperature value falls back to the safe temperature range, and the opening of the first and second flow regulating valves is gradually reduced to ensure that the detected temperature value is stable within the safe temperature range.

[0041] In the embodiment of the present application, the low-temperature fluid introduced into the cooling chamber 23 through the inlet 21 may be compressed air or cooling liquid. When the low-temperature fluid introduced into the cooling chamber 23 is cooling liquid, a recovery and processing device (not shown) may be configured to recover and cool the cooling liquid flowing out of the outlet 22, thereby realizing the recycling and reuse of the cooling liquid.

[0042] In summary, according to the reaction chamber top cover plate 20 of the embodiment of the present application, a hollow cooling chamber 23 is formed inside the top cover plate 20, a plurality of guide fins 24 are arranged in the cooling chamber 23 to define a fluid channel 28, and an inlet 21 and an outlet 22 connected to the fluid of the cooling chamber 23 are provided; thus, during the operation of the exhaust gas treatment device, a low-temperature fluid is continuously introduced into the cooling chamber 23 from the inlet 21, and the low-temperature fluid is dispersed by the guide fins 24, so that when the same flow rate of low-temperature fluid is introduced, the low-temperature fluid can fully absorb the heat of the top cover plate 20, so as to effectively cool the top cover plate 20.

[0043] like Figure 1 and Figure 2As shown, the waste gas treatment device 100 equipped with the reaction chamber top cover plate 20 in the embodiment of the present application also includes: a flame head assembly 30, a viewing window assembly 40 and a plurality of waste gas inlets 50 to be treated. Among them, the flame head assembly 30 extends into the reaction chamber 10 through the top cover plate 20 and is sealed and fixedly connected to the top cover plate 20. The flame head assembly 30 provides a high temperature within a preset temperature range for the reaction chamber 10 by adjusting the size of the flame to meet the high temperature conditions required for waste gas treatment. The viewing window assembly 40 also extends into the reaction chamber 10 through the top cover plate 20 and is sealed and fixedly connected to the top cover plate 20. The flame combustion in the reaction chamber can be observed through the viewing window assembly 40. Multiple waste gas inlets 50 to be treated are evenly distributed around the reaction chamber 10 to pass the waste gas to be treated into the reaction chamber 10. When the waste gas treatment device 100 is working, the flame head assembly 30 generates a high-temperature flame, and the flame causes the temperature in the reaction chamber 10 to rise to the high temperature conditions required for waste gas treatment. The waste gas to be treated enters the reaction chamber 10 through the inlet 50 and undergoes a chemical reaction to be converted into an exhaustable gas that meets the emission standards. When the waste gas treatment device 100 starts working, a low-temperature fluid is continuously introduced into the cooling chamber 23 of the top cover plate 20. Under the action of the guide fins, the low-temperature fluid is dispersed and flows along the fluid channel 28, which increases the residence time of the low-temperature fluid in the cooling chamber, improves the heat adsorption efficiency, and takes away the heat conducted to the top cover plate during combustion in the reaction chamber. After the waste gas treatment device 100 stops running, the low-temperature fluid is still continuously introduced into the above-mentioned cooling chamber to achieve the purpose of rapid cooling. This not only reduces the long cooling time required for restarting after temporary shutdown, but also reduces a series of failures caused by overheating of the equipment.

[0044] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A reaction chamber top cover plate, characterized in that: A hollow cooling cavity is formed inside the reaction chamber top cover plate, a plurality of guide fins defining a fluid channel are arranged in the cooling cavity, and an inlet and an outlet in fluid communication with the cooling cavity are arranged on the top cover plate.

2. The reaction chamber top cover plate according to claim 1, characterized in that: The top cover plate comprises an upper cover plate and a lower cover plate, the upper cover plate is sealed and fixedly connected to the lower cover plate, and the upper cover plate and the lower cover plate are combined to form the cooling cavity; the inlet and the outlet are spaced apart and arranged on the upper surface of the upper cover plate.

3. The reaction chamber top cover plate according to claim 2, characterized in that: The guide fins include a plurality of first guide fins and a plurality of second guide fins; the plurality of first guide fins are fixedly connected to the upper cover plate and extend downward in a direction toward the lower cover plate; the plurality of second guide fins are fixedly connected to the lower cover plate and extend upward in a direction toward the upper cover plate; a first gap is provided between the first guide fin and the lower cover plate, and a second gap is provided between the second guide fin and the upper cover plate; the first guide fins and the second guide fins are alternately arranged along a line connecting the inlet and the outlet to define the fluid channel.

4. The reaction chamber top cover plate according to claim 2, characterized in that: A temperature sensor is arranged on the upper surface of the upper cover plate.

5. The reaction chamber top cover plate according to claim 1, characterized in that: The inlet is connected to a first pipeline, and a first one-way valve is arranged on the first pipeline.

6. The reaction chamber top cover plate according to claim 5, characterized in that: The outlet is connected to a second pipeline, and a second one-way valve is arranged on the second pipeline.

7. The reaction chamber top cover plate according to claim 6, characterized in that: The first pipeline is also provided with a first flow regulating valve, which is arranged upstream of the first one-way valve; the second pipeline is also provided with a second flow regulating valve, which is arranged downstream of the second one-way valve.

8. The reaction chamber top cover plate according to claim 6, characterized in that: The inlet and the outlet are both provided with ferrule external thread terminal joints, which are respectively connected to the first pipeline and the second pipeline through the ferrule external thread terminal joints.

9. The reaction chamber top cover plate according to claim 1, characterized in that: The low-temperature fluid introduced into the cooling cavity through the inlet is compressed air or cooling liquid.

10. An exhaust gas treatment device, characterized in that: It comprises a reaction chamber and a reaction chamber top cover plate as claimed in any one of claims 1 to 9, wherein the reaction chamber top cover plate is fixedly installed above the reaction chamber.

Images