Plate rolling jig for neutralizer of photorelaxation coating machine
By designing an integrated rolling fixture in the neutralizer of the slack coating machine, the problem of rolling plates being easily deformed and gaps in the prior art is solved, and higher sealing and stability are achieved, and the service life of the equipment is extended. And reduce maintenance costs.
Patent Information
- Application Number
- CN202421196203.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-29
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-05-29
AI Technical Summary
The existing slack coating machine neutralizer rolling fixtures are thinner in thickness, and gaps are prone to occur after long use, resulting in the discharge chamber not being sealed, affecting product quality. Once the rolling plate is deformed, it needs to be repurchased, and it is added. Company costs.
Design a refrigeration coating machine neutralizer rolling fixture, in which the outer diameter of the first and second rolling plates are the same, and form an integrated rolling plate by concentric installation, increasing thickness, reducing the possibility of deformation and gaps, and through Specific hole positions and fixture design ensure sealing.
Through the design of the integrated roll plate, the thickness is increased, gaps and deformation are avoided, the sealing of the discharge chamber is ensured, the service cycle is extended, the repurchase cost is saved, and the stability of use is improved.
Smart Images
Figure CN222476738U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of neutralizers, and more specifically to a plate rolling fixture for a neutralizer of a Guangchi coating machine. Background Art
[0002] The first roll plate and the second roll plate are part of the accessories on the neutralizer of the coating machine. The two fixtures are assembled and installed in the middle of the neutralizer. The neutralizer is an electron emitter installed in the chamber of the coating machine. The function of the neutralizer is to ionize the argon gas and then emit electrons. The electrons then neutralize the ions emitted by the ion source and bombard the substrate to obtain qualified products related to the ion source. As mentioned above, the first roll plate and the second roll plate assembly are combined and used on the neutralizer, which is part of the accessories on the neutralizer. Then the neutralizer is used in the chamber of the coating machine.
[0003] The existing plate rolling jigs are composed of two plate rolling jigs, which are interlocked by two threaded stainless steel columns. However, the second plate rolling is thinner, and after a long time, a gap will appear under the squeezing of the ceramic cups above the two plates. When the gap is about 0.2 mm wide, the surrounding accessories, such as ceramic cups, insulators, etc., will become loose, causing the discharge chamber to be unsealed. The unsealed discharge chamber will cause abnormal ionization of the gas, which will eventually lead to abnormal product quality. Moreover, as long as one of the plates is deformed, a new plate must be purchased again, which increases the company's costs. Utility Model Content
[0004] In view of the problems existing in the prior art, the purpose of the utility model is to provide a plate rolling fixture for a neutralizer of a light-chi coating machine.
[0005] To solve the above problems, the utility model adopts the following technical solutions: A neutralizer roll plate fixture for a Guangchi coating machine, comprising a neutralizer body and a first roll plate and a second roll plate installed at the bottom of the neutralizer body, wherein the first roll plate and the second roll plate have the same outer diameter and are installed together concentrically to form an integrated roll plate.
[0006] Preferably, the cross section of the integrated coil is circular.
[0007] Preferably, the neutralizer body is provided with an air guide tube, and a central hole for the air guide tube to pass through insulated form is opened in the center of the integral rolled plate.
[0008] Preferably, the neutralizer body has a triangular fixing piece for fixing the air guide tube, and the integrated roll plate is provided with threaded holes distributed in a triangle with the center hole as the center, and the fixing piece is fixed to the integrated roll plate by bolts cooperating with the threaded holes.
[0009] Preferably, the neutralizer body has an RF radio frequency wire, and the integrated coil is provided with a connection hole for the RF radio frequency wire to pass through insulated.
[0010] Preferably, the neutralizer body has a ground wire, and the integral coil is provided with a through hole for the bottom wire insulation to pass through.
[0011] Preferably, the neutralizer body has a positive potential wire, and the integrated coil is provided with a ground wire hole for the positive potential wire to pass through insulated.
[0012] Preferably, the neutralizer body has a first fixture located below the integral rolling plate and a first pillar connected to the first fixture, and the integral rolling plate is provided with a first interlocking hole fixed to the first pillar and further connected to the first fixture.
[0013] Preferably, the neutralizer body has a second fixture located above the integral rolling plate and a second pillar connected to the second fixture, and the integral rolling plate is provided with a second interlocking hole fixed to the second pillar and further connected to the second fixture.
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] After the first roll and the second roll are integrated, the thickness increases, making it less likely to deform and without gaps, thereby ensuring the sealing with the discharge chamber, thereby ensuring the quality of the product, extending the service life of the integrated roll, saving repurchase costs, and increasing the stability of use. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the structure of the utility model;
[0017] Figure 2 This is a schematic diagram of an integrated coil.
[0018] Description of the numbers in the figure:
[0019] 1. One-piece rolled plate; 2. Center hole; 3. Connection hole; 4. Through hole; 5. Ground wire hole; 6. First interlocking hole; 7. Threaded hole; 8. Second interlocking hole; 9. Neutralizer body; 91. First fixture; 92. First pillar; 93. Second fixture; 94. Second pillar. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0021] A neutralizer roll jig for a Guangchi coating machine includes a neutralizer body 9 and a first roll and a second roll installed at the bottom of the neutralizer body 9, wherein the first roll and the second roll have the same outer diameter and are installed concentrically together to form an integrated roll 1. Furthermore, the cross-section of the integrated roll 1 is circular. It can be understood that the integrated roll 1 is integrally formed, and thus there is no gap on the integrated roll 1, so deformation problems are not likely to occur. Here, the outer diameters of the first roll and the second roll in the prior art are both 66 mm, and the thicknesses are 3.5 mm and 3 mm, respectively. Therefore, the thickness of the integrated roll 1 is 6.5 mm and the outer diameter is 66 mm. Of course, the outer diameter and thickness dimensions here can be changed according to the size of the entire neutralizer.
[0022] In some embodiments, the neutralizer body 9 has an air duct, and the center of the integrated coil 1 is provided with a center hole 2 for the air duct insulation to pass through. Further, the neutralizer body 9 has a triangular fixing piece for fixing the air duct, and the integrated coil 1 is provided with threaded holes 7 distributed in a triangle with the center hole 2 as the center, and the fixing piece is fixed to the integrated coil 1 by bolts and threaded holes 7. Here, the fixing piece is installed on the integrated coil 1 to press the air duct, thereby playing a role in fixing the air duct. The fixing piece is also connected to a negative potential wire. Further, the neutralizer body 9 has an RF radio frequency wire, which plays the role of transmitting RF radio frequency energy, and the integrated coil 1 is provided with a connection hole 3 for the RF radio frequency wire insulation to pass through. Further, the neutralizer body 9 has a ground wire, one end of which is connected to the coil of the neutralizer body 9. The other end is grounded, and the integrated coil 1 is provided with a through hole 4 for the bottom line insulation to pass through. Furthermore, the neutralizer body 9 has a positive potential wire, and the integrated coil 1 is provided with a ground wire hole 5 for the positive potential wire to pass through insulated.
[0023] The insulation penetration mentioned above is to separate the air pipe, RF radio frequency wire, ground wire, positive potential wire from the integrated coil 1 for insulation treatment. Insulation sleeves can be installed in the center hole 2, the connection hole 3, the penetration hole 4, and the ground wire hole 5. Since the temperature of the discharge chamber reaches about 1000°C during operation, the insulation sleeve needs to be made of high-temperature insulating materials, such as ceramics. The opening of each hole mentioned above can organize and constrain each wire, making it stable and orderly.
[0024] In some embodiments, the neutralizer body 9 has a first fixture 91 located below the integral coil 1 and a first pillar 92 connected to the first fixture 91, and the integral coil 1 is provided with a first interlocking hole 6 fixed to the first pillar 92 and connected to the first fixture 91. Further, the neutralizer body 9 has a second fixture 93 located above the integral coil 1 and a second pillar 94 connected to the second fixture 93, and the integral coil 1 is provided with a second interlocking hole 8 fixed to the second pillar 94 and connected to the second fixture 93. It can be understood that a plurality of first interlocking holes 6 and second interlocking holes 8 can be provided, and a plurality of first pillars 92 and second pillars 94 can be installed. The cooperation between the first pillar 92 and the first interlocking hole 6, and the cooperation between the second pillar 94 and the second locking hole can be connected by bolts, or by bolts and nuts and other connecting parts.
[0025] The above is only a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and improved ideas of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model.
Claims
1. A plate rolling fixture for a neutralizer of a Guangchi coating machine, comprising a neutralizer body (9) and a first plate rolling and a second plate rolling installed at the bottom of the neutralizer body (9), characterized in that: The first roll plate and the second roll plate have the same outer diameter and are integrally and concentrically mounted together to form an integral roll plate (1).
2. According to claim 1, a plate rolling fixture for a neutralizer of a light-chi coating machine is characterized in that: The cross section of the integrated rolled plate (1) is circular.
3. According to claim 1, a plate rolling fixture for a neutralizer of a light-chi coating machine is characterized in that: The neutralizer body (9) is provided with an air guide tube, and the center of the integral rolled plate (1) is provided with a center hole (2) for the air guide tube to pass through insulated form.
4. A plate rolling fixture for a neutralizer of a light-chi coating machine according to claim 3, characterized in that: The neutralizer body (9) has a triangular fixing piece for fixing the air guide tube, and the integrated roll plate (1) is provided with threaded holes (7) distributed in a triangle with the center hole (2) as the center, and the fixing piece is fixed to the integrated roll plate (1) by bolts in cooperation with the threaded holes (7).
5. The plate rolling fixture for neutralizer of a light-chi coating machine according to claim 1 is characterized by: The neutralizer body (9) has an RF radio frequency wire, and the integrated coiled plate (1) is provided with a connection hole (3) for the RF radio frequency wire to pass through insulated form.
6. The plate rolling fixture for neutralizer of a light-chi coating machine according to claim 1, characterized in that: The neutralizer body (9) has a ground wire, and the integral coil (1) is provided with a through hole (4) for the bottom wire insulation to pass through.
7. The plate rolling fixture for neutralizer of a light-chi coating machine according to claim 1, characterized in that: The neutralizer body (9) has a positive potential conductor, and the integral coil (1) is provided with a ground wire hole (5) for the positive potential conductor to pass through insulated form.
8. The plate rolling fixture for neutralizer of a light-chi coating machine according to claim 1, characterized in that: The neutralizer body (9) comprises a first fixture (91) located below the integral roll plate (1) and a first support column (92) connected to the first fixture (91); the integral roll plate (1) is provided with a first interlocking hole (6) fixed to the first support column (92) and further connected to the first fixture (91).
9. The plate rolling fixture for the neutralizer of the optical coating machine according to claim 1, characterized in that: The neutralizer body (9) comprises a second fixture (93) located above the integral roll plate (1) and a second support column (94) connected to the second fixture (93); the integral roll plate (1) is provided with a second interlocking hole (8) fixed to the second support column (94) and further connected to the second fixture (93).