Safety protection tool for single crystal feeder
By designing a safety protection tool for single crystal feeder, including protective plugs, feed ports, vacuum suction pipe placement ports and lifting rod placement ports, the feed ports in the prior art are solved by solving the inability to close the feed ports, dust overflow and lack of dust absorption in the prior art. The problem of pipe through holes achieves efficient dustproof effect and convenient user experience.
Patent Information
- Application Number
- CN202420215551.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-30
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-01-30
AI Technical Summary
The prior art has problems in the dustproof design of single crystal feeder, such as the inability to close the feed port, dust overflow and lack of through-holes of the vacuum pipe, resulting in poor dustproof effect and affecting the convenience and safety of the tooling.
Design a safety protection tool for single crystal feeder, including protective plug, feed port, vacuum pipe placement port and lifting rod placement port. The protective plug is made of polytetrafluoroethylene material, which has good sealing and guiding functions. The baffle realizes the function of a one-way valve through a coil spring to ensure that silicon dust does not float out during feeding.
It effectively avoids the floating and overflow of silicon dust, improves dust protection effect, ensures the convenience and safety of the tooling, and improves feeding efficiency and sealing.
Smart Images
Figure CN222476833U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a safety protection tool, in particular to a safety protection tool used for a single crystal feeder, and belongs to the technical field of feeders. Background Art
[0002] Silicon - a relatively active non-metallic element crystal, is an important component of crystal materials and is at the forefront of new material development. Monocrystalline silicon itself is non-toxic and generally does not cause harm to the human body, but during the preparation of monocrystalline silicon, powder is produced during the filling of monocrystalline silicon. If inhaled too much, it may cause diseases such as pneumoconiosis and silicosis.
[0003] In the application of silicon materials, the most upstream application is polysilicon, which is then prepared and produced into monocrystalline silicon from polysilicon materials. In the process of preparing monocrystalline silicon, there is a process for loading - unpacking the plastic bags of polysilicon materials in the finished product packaging, and manually filling all the polysilicon materials in the bags into cylindrical barrels. At present, there are many types of polysilicon materials, such as blocks, crushed materials, powder materials, flake materials, crucible materials, etc. Depending on the type of raw materials, the size of the raw materials is also different. During the filling process, small particles of silicon atoms will be generated. The diameter of silicon atoms is about 0.23 nanometers (1 micron = 1000 nanometers). Small particles of dust are extremely harmful to the health of the loaders; in terms of medicine, dust with a diameter of 5-10 microns can directly enter the deep lungs, reach the terminal bronchioles, alveolar ducts and alveoli, and cause inflammatory reactions of the lungs; dust with a diameter of 2.5-5 microns can pass through the gas-blood barrier and enter the blood circulation, so silicon atoms are very easy to damage the health of people. Therefore, an occupational disease - silicosis - is currently forming in the monocrystalline silicon production industry. The cause of silicosis is the inhalation of high content of silica dust.
[0004] Employees who work in a single crystal silicon production environment for a long time may inhale too much dust containing silicon dioxide or other harmful substances, which may cause lung lesions and diseases such as silicosis. Symptoms such as coughing, chest tightness, and chest pain may occur. In severe cases, respiratory failure and persistent high fever may occur. Therefore, it is very necessary to take strict protective measures, such as wearing dust masks, protective clothing and gloves. If an employee develops silicosis due to the environment, there is currently no effective treatment. Oxygen inhalation therapy can only be used to help patients relieve symptoms of dyspnea. Although personnel have protective masks and dust-proof clothing, these are difficult to block the dispersion of silicon dust, and personnel are at risk of close contact. Therefore, when loading, a protective tooling is designed on the feeder to reduce the floating of silicon dust, which can effectively protect physical health.
[0005] At present, patent CN210856404U discloses a dust cover for a feeder of a Czochralski single crystal furnace, comprising a dust cover body, a feeding port is arranged on the top of the dust cover body, an exhaust hole is arranged on the top of the left side of the dust cover body, a feeding funnel is arranged on the top of the feeding port, a funnel pressure ring is arranged on the top of the feeding funnel, and the cylindrical dust cover body can prevent dust from being dispersed on the feeder to avoid a large amount of silicon material dust from being scattered when the silicon material is poured into the feeder, polluting the inner wall of the single crystal furnace and causing the product quality to decline, thereby ensuring the life and health of the staff, and the feeding port is designed to facilitate the feeding operation, and the exhaust hole is designed to facilitate the discharge of gas, thereby improving the dust prevention effect and solving the problem of poor dust prevention effect in the prior art; however, the feeding port of the device cannot be closed when no material is added, and dust overflows, and there is no through hole for the dust suction pipe, which is not convenient for dust suction;
[0006] Patent CN217869180U discloses a flange protection device for a quartz feeder of a single crystal furnace. The upper part of the quartz tube is also provided with a protective cover that cooperates with the upper flange. The left and right structures are designed to be symmetrical and interchangeable. The structure is simple and the installation is convenient. However, the protective cover is a simple cover, which has poor silicon dust barrier performance and is not conducive to guiding the silicon material. It is inconvenient to open it when adding materials.
[0007] Therefore, developing a safety protection tooling for a single crystal feeder that can overcome the above defects has become a technical problem that needs to be solved urgently by technical personnel in this field. Utility Model Content
[0008] The technical problem to be solved by the utility model is to overcome the shortcomings of the prior art and provide a safety protection tool for a single crystal feeder. The tool has a simple structure and is easy to use. It can effectively prevent silicon dust from floating and effectively handle dust without affecting loading and dust collection.
[0009] In order to solve the above technical problems, the utility model provides a safety protection tool for a single crystal feeder, which is arranged in the top end of a feeding barrel and includes a protection plug, and the surface of the protection plug is provided with a feeding port, a dust suction pipe placement port and a lifting rod placement port;
[0010] The protective plug includes a protective plug body and a protective edge extending vertically upward along the circumferential direction of the protective plug body. The middle part of the protective plug body protrudes upward to form a truncated cone structure. A material storage space is formed between the protective edge and the protective plug body. The protective edge is closely attached to the inner wall of the feeding barrel.
[0011] A lifting rod placement port is provided on the raised middle part of the protective plug body for the insertion of the lifting rod. A dust suction tube placement port and a feeding port are provided on the protective plug body. A baffle is movably provided in the feeding port. The baffle is in a closed state to block the feeding port. The silicon material is pressurized by gravity, and the baffle is opened to add material, forming a one-way valve.
[0012] The technical solution further defined in the utility model is:
[0013] Furthermore, in the aforementioned safety protection tooling for the single crystal feeder, one end of the baffle is arranged in the feeding port through a spiral spring.
[0014] Technical effect: the baffle of the utility model is provided with a feeding port by a spiral spring, so that when the filling is completed and the material is not poured out, the baffle in the feeding port is in a closed state under the action of the spiral spring, preventing small silicon atomic particles from directly floating out of the upper caliber of the barrel during feeding, and affecting the health of the pouring personnel. When feeding, the silicon material opens the baffle according to its own weight for feeding, which ensures smooth feeding while preventing silicon powder from floating out, effectively reducing the harm of silicon powder to personnel. The spiral spring has a simple structure and is easy to operate, and does not require other large opening and closing devices to achieve.
[0015] In the aforementioned safety protection tooling for the single crystal feeder, two feeding ports are provided, which are symmetrically arranged on the protective plug body.
[0016] Technical effect: materials can be added on both sides at the same time, which improves the feeding efficiency and shortens the feeding time.
[0017] In the aforementioned safety protection tooling for the single crystal feeder, the protection plug is matched with the top end of the feeding barrel, and the outer diameter of the protection plug is consistent with the inner diameter of the feeding barrel.
[0018] Technical effect: the protective plug is adapted to the top of the feeding barrel, so that the protective plug can fit tightly on the top of the feeding barrel, thereby improving the sealing performance and effectively blocking silicon dust.
[0019] In the aforementioned safety protection tooling for the single crystal feeder, the silicon material added to the feed port includes block material, crushed material, flake material or crucible material.
[0020] Technical effect: the recycled silicon materials are all relatively heavy materials, and there is no light material. The design of the baffle in the feeding port of the utility model is suitable, and the baffle can be opened smoothly by the weight of the silicon material to add materials.
[0021] In the aforementioned safety protection tooling for the single crystal feeder, the diameter of the feed port does not exceed 70 mm.
[0022] The technical effect is to limit the size of the feeding port to a maximum of 70mm. The feeding port can also be used as a double inspection device for the size of the silicon material to avoid adding too much silicon material and prevent the material blocks from being too large, resulting in cheap silicon being discharged.
[0023] In the aforementioned safety protection tooling for the single crystal feeder, the protection plug is made of polytetrafluoroethylene.
[0024] Technical effect: The utility model adopts polytetrafluoroethylene to make the protective plug, which has good insulation and is not affected by the environment and frequency. The volume resistance can reach 1018 ohm cm, the dielectric loss is small, and the breakdown voltage is high; it has good high and low temperature resistance, and the influence of temperature does not change much, the temperature range is wide, and the usable temperature is -190~260℃; it has good self-lubrication and has the smallest friction coefficient among plastics, and is an ideal oil-free lubricating material; it has good surface non-stickiness, and no known solid materials can adhere to the surface. It is a solid material with the smallest surface energy, which is convenient for silicon powder to slide off; it has good atmospheric aging resistance, radiation resistance and low permeability: it is exposed to the atmosphere for a long time, and the surface and performance remain unchanged. The use of polytetrafluoroethylene material prolongs its service life, reduces costs, and is also convenient for collecting silicon powder.
[0025] The beneficial effects of the utility model are:
[0026] The protective plug of the utility model is not arranged outside the feeding barrel for fear of affecting the flange outside the original feeding barrel, but is arranged on the inner wall of the feeding barrel without affecting the original design. The protective plug is provided with a feeding port, a dust suction pipe placement port and a lifting rod placement port, which does not affect the original lifting rod, loading and dust collection, and further prevents silicon dust from floating.
[0027] The protective plug body of the utility model is a truncated cone structure and the protective edge forms a silicon material storage space. The inclined setting is convenient for guiding the silicon material and adding the silicon material. At the same time, the inclined structure forms a guiding passage for silicon dust, which is convenient for dust adsorption and processing.
[0028] The utility model provides a baffle in the feeding port, which is closed on the feeding port by a swing spring and can be closed when no material is added to prevent silicon dust from floating out. When adding material, the weight of the silicon material itself presses the baffle open and falls down to allow normal feeding, effectively preventing silicon dust from floating.
[0029] The utility model provides an extended protective edge on the protective plug, which can facilitate the close sealing between the protective plug and the inner wall of the feeding tube without moving up and down or causing air leakage, and also form a feeding space with the protrusion of the protective plug body, which is convenient for smooth feeding.
[0030] When pouring from the material bag into the feeding barrel, it is inevitable that the fine materials and dust in the material bag will be poured into the barrel together. When the material blocks and dust are poured in together, under the action of gravity, the block materials fall to the bottom of the feeding barrel at an acceleration of a=mg=9.8m, while the dust is lighter. When the dust drops by 10cm, the material blocks fall to the bottom quickly due to their large mass, which forms air pressure on the air at the bottom. The material blocks pressurize the air, and the air releases pressure upwards. The air pressure acts on the dust that has dropped 10cm, and the dust begins to float upwards under the pressure difference between the air force and gravity. After the sealing PTFE protective plug is installed on the feeding barrel, the silicon material dust encounters the PTFE feeding port on its upward floating trajectory. All the material blocks have been added and the baffle of the feeding port has been closed, blocking the silicon material dust from floating out of the feeding port. The dust moves upward and reaches the opening of the dust suction pipe. It can directly enter the dust suction pipe, and all the dust generated during the pouring process enters the dust suction pipe according to a directional trajectory for post-processing.
[0031] The utility model has the advantages of simple structure and convenient use. A feeding person stands on a material platform and slowly pours silicon material into a vertical feeder. The silicon material falls into the feeder from a feeding buckle. Dust rising from the inside of the feeder rises and enters the dust suction pipe for processing. The person and the silicon dust are isolated from the generating port, thereby avoiding contact between the person and the silicon dust. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] Figure 1 This is a schematic structural diagram of a safety protection tooling for a single crystal feeder according to an embodiment of the utility model;
[0033] Figure 2 for Figure 1 Another perspective structural diagram of ;
[0034] Figure 3 for Figure 1 A top view of
[0035] Figure 4 for Figure 1 A cross-sectional view of
[0036] Figure 5 This is a schematic structural diagram of a safety protection tooling for a single crystal feeder installed in a feeding barrel according to an embodiment of the utility model;
[0037] Figure 6 for Figure 5 A partial enlarged view of
[0038] In the figure: 1-feeding cylinder, 2-protective plug, 21-protective plug body, 22-protective edge, 23-feeding storage space, 3-feeding port, 4-dust suction pipe placement port, 5-lifting rod placement port, 6-baffle, 7-revolving spring. DETAILED DESCRIPTION Example 1
[0039] This embodiment provides a safety protection tool for a single crystal feeder, the structure of which is as follows Figure 1-6 As shown, it includes a protective plug 2, and the surface of the protective plug 2 is provided with a feeding port 3, a dust suction pipe placement port 4 and a lifting rod placement port 5;
[0040] The protective plug 2 is made of polytetrafluoroethylene, and is matched with the top of the feeding barrel 1. The outer diameter of the protective plug 2 is consistent with the inner diameter of the feeding barrel 1. The protective plug 2 is arranged in the top of the feeding barrel 1. The protective plug 2 includes a protective plug body 21 and a protective edge 22 extending vertically upward along the circumferential direction of the protective plug body 21. The middle part of the protective plug body 21 protrudes upward to form a truncated cone structure. A feeding storage space 23 is formed between the protective edge 22 and the protective plug body 21, and the protective edge 22 is closely attached to the inner wall of the feeding barrel 1.
[0041] A lifting rod placement port 5 is provided on the raised middle part of the protective plug body 21 for the insertion of the lifting rod. A dust suction tube placement port 4 and two feeding ports 3 are provided on the protective plug body 21. The two feeding ports 3 are symmetrically arranged on the protective plug body 21. One end of the baffle 6 is arranged in the feeding port 3 through a swing spring 7. The baffle 6 is in a closed state to block the feeding port 3. The silicon material is pressurized by gravity, and the baffle 6 is opened to add material, forming a one-way valve.
[0042] In this embodiment, the silicon material added to the feeding port 3 includes block material, crushed material (diameter 3-10 mm), flake material (3-70 mm) or crucible material.
[0043] In this embodiment, the diameter of the feed port 3 does not exceed 70 mm, and the lower limit is determined according to the silicon material to ensure smooth entry of the silicon material.
[0044] In the specific implementation, a polyfluoro protective plug with an outer diameter consistent with the inner diameter of the barrel is designed by using the inner diameter of the feeder. The internal structure of the protective plug is designed as a truncated cone surface model with a raised middle, which has a guiding effect on the material block, and falls into it according to the feeding port, and forms a guiding passage for the silicon dust, which is beneficial to dust treatment; two holes are opened on the side of the truncated cone as feeding holes, and a baffle and a swing spring are set below the feeding hole. Only under the action of the swing spring, the baffle is in a closed state, and the silicon material is pressed by gravity, and the baffle is opened to form a simple one-way valve; a hole is opened near the top of the center cone for inserting a dust suction pipe to form a one-way valve. The upper end passage is a dust suction pipe to absorb dust and impurities. According to the above structure, the PTFE plug is designed, drawn, and purchased. The PTFE protective plug after delivery is assembled (the baffle and the PTFE protective plug are assembled), and the assembled PTFE protective plug is assembled with the feeder. The protective plug is tightly matched with the feeding barrel. The protective plug is fixed after the feeding barrel is installed, and the contact surface is sealed, which will not move up and down and will not cause air leakage; the feeding personnel stand on the material platform and slowly pour silicon material into the vertical feeder. The material block falls into the feeder from the feeding buckle, and the dust inside the feeder rises into the dust suction pipe for treatment. The personnel and silicon dust are isolated from the generation port to avoid contact between personnel and silicon dust.
[0045] At present, there is no protection for the upper diameter of the barrel. The actual operation process is to extend the vacuum tube into the feeder and fill the silicon material in the other direction. When pouring the material, a large number of small silicon atom particles will be generated inside the barrel and float outward until the upper diameter is reached. The personnel then add material at the upper diameter. Although the personnel have protective masks and dust-proof clothing, it is difficult to block the dispersion of silicon dust, and there is a risk of close contact between personnel.
[0046] The utility model designs a polyfluoro protective plug on the upper diameter of the feeding barrel, opens a hole in the polyfluoro protective plug according to the use requirements of the upper diameter, and then positions the polyfluoro protective plug into the upper diameter of the feeder according to the hole position, outer diameter and related dimensions, so as to seal and shield the entire upper diameter; at the feeding port, a baffle and a swing spring are used, and when the filling is completed and the material is not poured, the feeding port baffle is in a closed state under the action of the swing spring, so as to prevent small silicon atom particles from directly floating out of the upper diameter of the feeding barrel during feeding, so as to affect the health of the pouring personnel.
[0047] In addition to the above embodiments, the present invention may also have other implementations. Any technical solution formed by equivalent replacement or equivalent transformation falls within the protection scope required by the present invention.
Claims
1. A safety protection tool for a single crystal feeder, arranged in the top end of a feeding barrel (1), characterized in that: It comprises a protective plug (2), the surface of which is provided with a feeding port (3), a dust suction pipe placement port (4) and a lifting rod placement port (5); The protective plug (2) comprises a protective plug body (21) and a protective edge (22) extending vertically upward along the circumferential direction of the protective plug body (21); the middle portion of the protective plug body (21) protrudes upward to form a truncated cone structure; a material storage space (23) is formed between the protective edge (22) and the protective plug body (21); and the protective edge (22) is closely attached to the inner wall of the feeding barrel (1); The raised middle portion of the protective plug body (21) is provided with the lifting rod placement opening (5) for the insertion of the lifting rod, the protective plug body (21) is provided with the dust suction pipe placement opening (4) and the feeding opening (3), a baffle (6) is movably provided in the feeding opening (3), the baffle (6) is in a closed state to block the feeding opening (3), and the baffle (6) is opened to feed material due to the gravity pressure of the silicon material, forming a one-way valve.
2. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: One end of the baffle (6) is arranged in the feed port (3) via a spiral spring (7).
3. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: The feed ports (3) are provided with two, which are symmetrically arranged on the protective plug body (21).
4. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: The protective plug (2) is matched with the top end of the feeding barrel (1), and the outer diameter of the protective plug (2) is consistent with the inner diameter of the feeding barrel (1).
5. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: The silicon material added to the feeding port (3) includes block material, crushed material, flake material or crucible material.
6. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: The diameter of the feeding port (3) does not exceed 70 mm.
7. The safety protection tooling for a single crystal feeder according to claim 1, characterized in that: The protective plug (2) is made of polytetrafluoroethylene.