High-speed-ratio revolution and rotation vacuum coating rotating stand structure
By designing a modular high-speed ratio, the mass rotation vacuum coating rotary frame structure and using multi-stage gear sets to improve the mass rotation speed ratio, the problems of difficult to ensure coating consistency and film formation quality in the prior art are solved, and high-efficiency coating and improvement are achieved Productivity.
Patent Information
- Application Number
- CN202421216988.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-30
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-05-30
AI Technical Summary
Among the existing vacuum coating equipment, the male self-rotation speed is relatively low, the workpiece rotation number is small during the coating process, the rotary frame structure is complex, and the source base distance is unstable, which makes it difficult to guarantee the consistency of the coating and the film formation quality, and the space utilization rate is low. , resulting in waste of membrane material.
A high-speed, male-rotation vacuum-coated rotary rotary frame structure with a modular design is designed, including power input device, rotary rotary device, rotary first-stage transmission gear set, rotary second-stage transmission gear set, and three-stage transmission gear set. The rotary rotary rotary device increases the male rotation speed ratio through a multi-stage gear set, ensures the multi-turn rotation of the workpiece in the coating area, and increases the clamping amount of the rotary rotary.
It realizes efficient rotation of the workpiece during the coating process, ensures the quality and uniformity of the coating, reduces waste of film materials, improves production efficiency, and simplifies the installation and maintenance of equipment.
Smart Images
Figure CN222499349U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of vacuum coating equipment, in particular to a high-speed rotation vacuum coating rotating frame structure. Background Art
[0002] At present, most of the rotating turrets on the market have relatively low rotation speeds. The workpieces rotate relatively few times during the coating process or the turret structure is complex. At the same time, the source-base distance varies, and the coating consistency between individual workpieces and the film quality of each workpiece cannot be guaranteed. At the same time, the turret space utilization rate is relatively low, and the number of workpieces clamped at one time is small, which easily leads to waste of film materials. In the coating process of shaft parts on the market, some often need to deposit multiple coating layers, so it is necessary to design a coating turret that can be used in a coating system with multiple coating sources, so that the workpiece can rotate more times in the effective coating area to ensure the quality and uniformity of the coating. At the same time, the turret is required to clamp as many parts as possible in the effective coating area to avoid wasting coating targets and improve production efficiency. Utility Model Content
[0003] In view of the above problems, the utility model provides a high-speed self-rotating vacuum coating rotating frame structure which adopts modular design as a whole and can greatly improve the installation and maintenance efficiency of the equipment.
[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: a high-speed ratio rotary vacuum coating turret structure, which consists of six parts, namely a power input device, a turret revolution device, a primary rotation transmission gear set, a secondary rotation transmission gear set, a third rotation transmission gear set and a turret rotation device. The power input device is fixedly installed on the vacuum chamber. The power input device provides revolution and support for the workpiece through the turret revolution device. The primary rotation transmission gear set, the secondary rotation transmission gear set and the third rotation transmission gear set together constitute a gear train. The power input device includes a vacuum sealing transmission device, a driving gear, a diaphragm coupling, a worm gear reducer and a three-phase asynchronous motor. The input end of the worm gear reducer is connected to the three-phase asynchronous motor, and the output end is equipped with an insulating adapter sleeve, which is then connected to the input shaft of the vacuum sealing transmission device through a diaphragm coupling. The output end of the vacuum sealing transmission device is fixedly equipped with a driving gear.
[0005] The rotating frame revolution device is composed of a turntable support seat, a turntable gear, a revolution transmission shaft, and a transmission gear. The outer sleeve of the revolution transmission shaft is provided with a thrust ball bearing and two sets of deep groove ball bearings, and a bearing spacer is installed between the two sets of deep groove ball bearings. The revolution transmission shaft is installed in the turntable support seat, and the upper end face is fixedly connected with the turntable gear, and the lower shaft end is connected with the transmission gear to transmit power by a flat key and fixed with a retaining ring. The revolution transmission shaft, the turntable gear, and the transmission gear are assembled to form a rigid whole. The gear pair composed of the driving gear of the power input device and the turntable gear drives the whole to rotate through gear meshing;
[0006] The self-rotating first-stage transmission gear set is composed of a first-stage gear, a fixed seat, and a fixed shaft. The inner hole of the first-stage gear is installed on the fixed shaft, and the fixed shaft is fixedly installed on the fixed seat to form a rotating idler. The first-stage gear is meshed with the transmission gear.
[0007] The self-rotating secondary transmission gear set is composed of a fixed plate, a secondary gear, a secondary transmission shaft, a secondary transmission gear, and a secondary fixed shaft. The secondary gear is meshed with the primary gear. The secondary transmission shaft is sleeved on the secondary fixed shaft and is provided with secondary deep groove ball bearings in the inner holes at both ends. The secondary gear and the secondary transmission gear are respectively fixed at both ends of the secondary transmission shaft. The secondary fixed shaft is locked on the fixed plate.
[0008] The self-rotating three-stage transmission gear set is composed of a three-stage gear, a three-stage transmission shaft, and a three-stage transmission gear. The three-stage gear is meshed with the two-stage transmission gear. The two ends of the three-stage transmission shaft are respectively fixed with the three-stage gear and the three-stage transmission gear, and a three-stage deep groove ball bearing is installed in its inner hole;
[0009] The rotating frame self-rotation device is composed of a self-rotation gear, a self-rotation transmission shaft, and a self-rotation fixed seat. The self-rotation gear is meshed with the three-stage transmission gear. The inner ring of the self-rotation fixed seat is installed with a self-rotation deep groove ball bearing. One end of the self-rotation transmission shaft is installed with a self-rotation gear that transmits power by a flat key and is fixed with a locking bolt. The other end is provided with a U-shaped groove for installing a workpiece tooling, which passes through the opening on the turntable gear.
[0010] Furthermore, the vacuum sealing transmission device is sleeved with an insulating gasket and then installed and fixed on the bottom plate of the vacuum chamber, and is fixed to the bottom surface of the vacuum chamber by bolts with an insulating sleeve attached.
[0011] Furthermore, a bias access line is connected to a side of the vacuum sealing transmission device.
[0012] Furthermore, the turntable support seat is installed on the bottom plate of the vacuum chamber, and a turntable insulating gasket is arranged between the turntable support seat and the bottom plate of the vacuum chamber, and is fixed by bolts with a turntable insulating sleeve attached.
[0013] Furthermore, the first-stage self-rotating transmission gear set is integrally fixed to a fixing plate of the second-stage self-rotating transmission gear set by bolts.
[0014] Furthermore, the self-rotating secondary transmission gear set is provided with a secondary insulating pad below the fixed plate and is fixed to the bottom plate of the vacuum chamber.
[0015] Furthermore, the three-stage self-rotating transmission gear set is integrally mounted on the outer ring of the turntable support seat of the turntable revolution device, and rotates without interfering with the turntable revolution device through the thrust ball bearing mounted outside the revolution transmission shaft and two sets of deep groove ball bearings.
[0016] From the above description of the structure of the utility model, it can be seen that compared with the prior art, the utility model has the following advantages:
[0017] 1. The overall structure of this practical rotating frame adopts modular design, which can greatly improve the installation and maintenance efficiency of the equipment. The overall structure of the rotating frame is more compact, the workpiece loading capacity is large, and multiple groups of workpiece hangers can be installed at the same time, and multiple workpieces can be coated at the same time, thereby improving the coating efficiency.
[0018] 2. Introduce a multi-stage gear set in the rotation to improve the speed ratio, and the transmission ratio can be designed according to needs, so that the workpiece can achieve a larger number of rotations in the case of one revolution. The key is to meet the multiple rotations within a small angle range of the revolution, so that the workpiece can be subjected to multiple self-rotation coating after entering the coating area, which greatly improves the coating uniformity of the three-dimensional workpiece. This structure ensures that the source-base distance of each workpiece remains consistent each time it passes the coating source during the rotation coating process, avoiding the source-base distance from being too close or too far, which not only ensures the coating consistency performance between individuals but also improves the film formation quality of each workpiece coating.
[0019] 3. The workpiece bias installation is simpler, safer and more reliable, ensuring the firmness of the product coating and improving the coating quality. Insulating washers and insulating sleeves are used in multiple places, and insulating adapter sleeves are introduced to effectively ensure the overall insulation of the vacuum chamber and the rotating frame. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:
[0021] Figure 1 This is a main cross-sectional view of a high-speed self-rotating vacuum coating rotating frame structure of the utility model;
[0022] Figure 2 This is an AA cross-sectional view of a high-speed self-rotating vacuum coating rotating frame structure of the utility model. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0024] Example
[0025] refer to Figure 1 , Figure 2 A high-speed ratio rotary vacuum coating turret structure is composed of six parts, namely a power input device A, a turret revolution device B, a self-rotation primary transmission gear set C, a self-rotation secondary transmission gear set D, a self-rotation third-stage transmission gear set E and a turret rotation device F. The power input device A is fixedly mounted on a vacuum chamber G. The power input device A provides revolution and support for the workpiece through the turret revolution device B. The self-rotation primary transmission gear set C, the self-rotation secondary transmission gear set D, and the self-rotation third-stage transmission gear set E together form a gear train. The self-rotation primary transmission gear set C, the self-rotation secondary transmission gear set D, and the self-rotation third-stage transmission gear set E together form a gear train for transmitting power and changing the direction of movement. Compared with the absence of the self-rotation primary transmission gear set, the introduction of the self-rotation primary transmission gear set ensures that the revolution direction of the turret is opposite to the gear direction input to the turret rotation device, thereby greatly increasing the rotation speed. The turret rotation device F is used to transmit power to drive the workpiece hanger to rotate, and the workpiece rotates accordingly.
[0026] The power input device A includes a vacuum sealing transmission device A1, a driving gear A2, a diaphragm coupling A5, a worm gear reducer A7, and a three-phase asynchronous motor A8. The vacuum sealing transmission device A1 is sleeved with an insulating gasket A3 and then installed and fixed on the bottom plate of the vacuum chamber G, and is fixed to the bottom surface of the vacuum chamber G by bolts with an insulating sleeve A4. The input end of the worm gear reducer A7 is connected to the three-phase asynchronous motor A8, and the output end is installed with an insulating adapter sleeve A6, and then connected to the input shaft of the vacuum sealing transmission device A1 through the diaphragm coupling A5. The output end of the vacuum sealing transmission device A1 is fixedly installed with a driving gear A2, and the side of the vacuum sealing transmission device A1 is connected with a bias access line A9 to improve the coating quality of the workpiece;
[0027] The rotating frame revolution device B is composed of a turntable support seat B1, a turntable gear B2, a revolution transmission shaft B3, and a transmission gear B4. The turntable support seat B1 is installed on the bottom plate of the vacuum chamber G. A turntable insulation gasket B9 is arranged between the turntable support seat B1 and the bottom plate of the vacuum chamber G, and is fixed by bolts with a turntable insulation sleeve B10 attached. The outer sleeve of the revolution transmission shaft B3 is provided with a thrust ball bearing B5 and two groups of deep groove ball bearings B6, and a bearing spacer sleeve B7 is installed between the two groups of deep groove ball bearings B6. The revolution transmission shaft B3 is installed in the turntable support seat B1, and the upper end face is fixedly connected to the turntable gear B2. The lower shaft end is connected to the transmission gear B4 by a flat key to transmit power and is fixed by a retaining ring B8. The revolution transmission shaft B3, the turntable gear B2, and the transmission gear B4 are assembled to form a rigid whole. The gear pair composed of the driving gear A2 of the power input device and the turntable gear B2 drives the whole to rotate through gear meshing;
[0028] The self-rotating primary transmission gear set C is composed of a primary gear C1, a fixed seat C2, and a fixed shaft C3. The primary gear C1 is mounted on the fixed shaft C3, and the fixed shaft C3 is fixedly mounted on the fixed seat C2 to form a rotating gear. The primary gear C1 is meshed with the transmission gear B4.
[0029] The self-rotating secondary transmission gear set D is composed of a fixed plate D1, a secondary gear D2, a secondary transmission shaft D3, a secondary transmission gear D4, and a secondary fixed shaft D6. The secondary gear D2 is meshed with the primary gear C1. The self-rotating secondary transmission gear set D is provided with a secondary insulating pad D7 below the fixed plate D1 and is fixed to the bottom plate of the vacuum chamber G. The secondary transmission shaft D3 is sleeved on the secondary fixed shaft D6 and is provided with secondary deep groove ball bearings D5 in the inner holes at both ends. The secondary gears D2 and the secondary transmission gears D4 are respectively fixed at both ends of the secondary transmission shaft D3. The secondary fixed shaft D6 is locked on the fixed plate D1. The self-rotating primary transmission gear set C is fixed as a whole to the fixed plate D1 of the self-rotating secondary transmission gear set by bolts.
[0030] The self-rotating three-stage transmission gear set E is composed of a three-stage gear E1, a three-stage transmission shaft E2, and a three-stage transmission gear E3. The three-stage gear E1 is meshed with a two-stage transmission gear D4. The two ends of the three-stage transmission shaft E2 are respectively fixed with the three-stage gear E1 and the three-stage transmission gear E3, and a three-stage deep groove ball bearing E4 is installed in its inner hole;
[0031] The rotating frame self-rotating device F is composed of a self-rotating gear F1, a self-rotating transmission shaft F2, and a self-rotating fixed seat F3. The self-rotating gear F1 is meshed with the three-stage transmission gear E3. The inner ring of the self-rotating fixed seat F3 is installed with a self-rotating deep groove ball bearing F4. One end of the self-rotating transmission shaft F2 is installed with the self-rotating gear F1, which transmits power by a flat key and is fixed with a locking bolt. The other end is provided with a U-shaped groove for installing a workpiece tooling, which passes through the opening on the turntable gear B2. The workpiece tooling can be inserted into the U-shaped groove, thereby driving the workpiece to rotate.
[0032] The three-stage self-rotating transmission gear set E is integrally mounted on the outer ring of the turntable support seat B1 of the turntable revolution device, and rotates without interfering with the turntable revolution device B through the thrust ball bearing B5 and two sets of deep groove ball bearings B6 mounted on the outside of the revolution transmission shaft B3.
[0033] The overall structure of the practical rotating frame adopts a modular design, which can greatly improve the installation and maintenance efficiency of the equipment. The overall structure of the rotating frame is more compact, the workpiece loading capacity is large, and multiple groups of workpiece hangers can be installed at the same time, and multiple workpieces can be coated at the same time, thereby improving the coating efficiency.
[0034] A multi-stage gear set is introduced in the rotation to improve the speed ratio, and the transmission ratio can be designed according to the needs, so that the workpiece can achieve a larger number of rotations in the case of one revolution of the orbit. The key point is to meet the multiple rotations within a small angle range of the revolution, so that the workpiece can be subjected to multiple self-rotation coating after entering the coating area, which greatly improves the coating uniformity of the three-dimensional workpiece. This structure ensures that the source-base distance of each workpiece remains consistent each time it passes the coating source during the rotation coating process, avoiding the source-base distance from being too close or too far, which not only ensures the coating consistency performance between individuals but also improves the film formation quality of each workpiece coating.
[0035] The workpiece bias installation is simpler, safer and more reliable, ensuring the firmness of the product coating and improving the coating quality. Insulating washers and insulating sleeves are used in multiple places, and insulating adapter sleeves are introduced to effectively ensure the overall insulation of the vacuum chamber and the rotating frame.
[0036] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A high-speed self-rotating vacuum coating rotating frame structure, characterized in that: The invention is composed of six parts, namely a power input device (A), a rotating frame revolution device (B), a self-rotation first-stage transmission gear set (C), a self-rotation second-stage transmission gear set (D), a self-rotation third-stage transmission gear set (E) and a rotating frame rotation device (F). The power input device (A) is fixedly mounted on the vacuum chamber (G). The power input device (A) provides revolution and support for the workpiece through the rotating frame revolution device (B). The self-rotation first-stage transmission gear set (C), the self-rotation second-stage transmission gear set (D) and the self-rotation third-stage transmission gear set (E) are used together. The power input device (A) comprises a vacuum sealing transmission device (A1), a driving gear (A2), a diaphragm coupling (A5), a worm gear reducer (A7), and a three-phase asynchronous motor (A8); the input end of the worm gear reducer (A7) is connected to the three-phase asynchronous motor (A8); the output end is provided with an insulating adapter sleeve (A6), and then connected to the input shaft of the vacuum sealing transmission device (A1) through the diaphragm coupling (A5); the output end of the vacuum sealing transmission device (A1) is fixedly provided with a driving gear (A2); The rotating frame revolution device (B) is composed of a rotating disk support seat (B1), a rotating disk gear (B2), a revolution transmission shaft (B3), and a transmission gear (B4); the rotating disk transmission shaft (B3) is provided with a thrust ball bearing (B5) and two groups of deep groove ball bearings (B6) on the outer sleeve, and a bearing spacer (B7) is installed between the two groups of deep groove ball bearings (B6); the rotating disk transmission shaft (B3) is installed in the rotating disk support seat (B1); the upper end surface is fixedly connected with the rotating disk gear (B2); the lower shaft end is connected with the transmission gear (B4) by a flat key to transmit power and is fixed by a retaining ring (B8); the rotating disk gear (B2) and the transmission gear (B4) are assembled to form a rigid whole; the gear pair composed of the driving gear (A2) of the power input device and the rotating disk gear (B2) drives the whole to rotate through gear meshing; The self-rotating first-stage transmission gear set (C) is composed of a first-stage gear (C1), a fixed seat (C2), and a fixed shaft (C3). The first-stage gear (C1) is installed on the fixed shaft (C3), and the fixed shaft (C3) is fixedly installed on the fixed seat (C2) to form a rotating idler. The first-stage gear (C1) is meshed with the transmission gear (B4); The self-rotating secondary transmission gear set (D) is composed of a fixed plate (D1), a secondary gear (D2), a secondary transmission shaft (D3), a secondary transmission gear (D4), and a secondary fixed shaft (D6); the secondary gear (D2) is meshed with the primary gear (C1); the secondary transmission shaft (D3) is sleeved on the secondary fixed shaft (D6) and is provided with secondary deep groove ball bearings (D5) in the inner holes at both ends; the secondary gear (D2) and the secondary transmission gear (D4) are respectively fixed at both ends of the secondary transmission shaft (D3); and the secondary fixed shaft (D6) is locked on the fixed plate (D1); The self-rotating three-stage transmission gear set (E) is composed of a three-stage gear (E1), a three-stage transmission shaft (E2), and a three-stage transmission gear (E3); the three-stage gear (E1) is meshed with a two-stage transmission gear (D4); the three-stage gear (E1) and the three-stage transmission gear (E3) are respectively fixed at both ends of the three-stage transmission shaft (E2), and a three-stage deep groove ball bearing (E4) is installed in the inner hole thereof; The rotating frame self-rotating device (F) is composed of a self-rotating gear (F1), a self-rotating transmission shaft (F2), and a self-rotating fixed seat (F3). The self-rotating gear (F1) is meshed with the three-stage transmission gear (E3). The inner ring of the self-rotating fixed seat (F3) is installed with a self-rotating deep groove ball bearing (F4). One end of the self-rotating transmission shaft (F2) is installed with a self-rotating gear (F1) to transmit power by a flat key and is fixed with a fixing bolt. The other end is provided with a U-shaped groove for installing a workpiece tool and passes through the opening on the turntable gear (B2).
2. According to claim 1, a high-speed self-rotating vacuum coating rotating frame structure is characterized in that: The vacuum sealing transmission device (A1) is sleeved with an insulating gasket (A3) and then fixed on the bottom plate of the vacuum chamber (G), and is fixed to the bottom surface of the vacuum chamber (G) by bolts with an insulating sleeve (A4) attached.
3. According to claim 1, a high-speed self-rotating vacuum coating rotating frame structure is characterized in that: The vacuum sealing transmission device (A1) is connected to a bias access line (A9) on the side.
4. According to claim 1, a high-speed self-rotating vacuum coating rotating frame structure is characterized in that: The turntable support seat (B1) is installed on the bottom plate of the vacuum chamber (G), and a turntable insulating gasket (B9) is arranged between the turntable support seat (B1) and the bottom plate of the vacuum chamber (G), and is fixed by bolts with a turntable insulating sleeve (B10) attached.
5. According to claim 1, a high-speed self-rotating vacuum coating rotating frame structure is characterized in that: The first-stage self-rotating transmission gear set (C) is integrally fixed to the fixing plate (D1) of the second-stage self-rotating transmission gear set by means of bolts.
6. The high-speed self-rotating vacuum coating rotating frame structure according to claim 1, characterized in that: The self-rotating secondary transmission gear set (D) is provided with a secondary insulating pad (D7) below the fixed plate (D1) and is fixed on the bottom plate of the vacuum chamber (G).
7. The high-speed self-rotating vacuum coating rotating frame structure according to claim 1, characterized in that: The self-rotating three-stage transmission gear set (E) is integrally mounted on the outer ring of the turntable support seat (B1) of the turntable revolution device, and rotates without interfering with the turntable revolution device (B) through the thrust ball bearing (B5) mounted on the outside of the revolution transmission shaft (B3) and two sets of deep groove ball bearings (B6).