Visual inspection device

Abstract

The utility model relates to the technical field of visual inspection, and discloses a visual inspection device which comprises an inspection platform and a plurality of visual inspection mechanisms. The detection platform comprises an object placing table, the object placing table is connected with a three-axis driving mechanism, and the three-axis driving mechanism is suitable for driving the object placing table to move in the X direction, the Y direction and the Z direction; the multiple visual detection mechanisms are arranged on the periphery of the object placing table at intervals and used for conducting visual detection on the surfaces of the silicon wafers or the battery pieces located on the object placing table. According to the visual detection device provided by the utility model, the detection platform is arranged, and the object placing table of the detection platform can be used for placing a silicon wafer or a battery piece to be detected. The detection platform is further provided with a three-axis driving mechanism, and the three-axis driving mechanism can drive the object placing table to move in the X direction, the Y direction and the Z direction, so that the positions of the object placing table and the silicon wafer or the battery piece on the object placing table can be adjusted, the distance between the silicon wafer or the battery piece and the visual detection mechanism is adjusted, and the detection precision is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of visual detection, in particular to a visual detection device. Background Art

[0002] Currently in the photovoltaic industry, the cells selected by the sorting machine are stacked one by one. Because the cells are not stacked evenly and separated in a disorderly manner, the whole stack of cells needs to be shaped and straightened.

[0003] During the production process, the battery cells need to be visually inspected after they are shaped and straightened, including the number of cells, thickness, corner chips, broken edges, and cracks.

[0004] The current visual inspection equipment in the industry transports silicon wafers or battery cells through a conveying device, and performs visual inspection on the silicon wafers or battery cells through a visual inspection mechanism arranged on both sides of the conveying device. However, silicon wafers or battery cells of different specifications have different sizes and shapes, which results in different detection distances of the visual inspection mechanism for silicon wafers or battery cells of different specifications, affecting the inspection accuracy. Utility Model Content

[0005] In view of this, the utility model provides a visual inspection device to solve the problem that the existing viewing angle inspection device can only inspect silicon wafers or battery wafers of a single specification.

[0006] In the first aspect, the utility model provides a visual inspection device, including an inspection platform and a plurality of visual inspection mechanisms. The inspection platform includes a placement table, the placement table is connected to a three-axis drive mechanism, and the three-axis drive mechanism is suitable for driving the placement table to move along three directions of X, Y and Z; a plurality of visual inspection mechanisms are arranged at intervals around the placement table, and are used to perform visual inspection on the surface of a silicon wafer or a battery cell located on the placement table.

[0007] Beneficial effects: The visual inspection device provided by the utility model is provided with an inspection platform, and the storage platform of the inspection platform can be used to place silicon wafers or battery cells waiting for inspection. The inspection platform is also provided with a three-axis driving mechanism, which can drive the storage platform to move along the three directions of X, Y and Z, so that the position of the storage platform and the silicon wafer or battery cell thereon can be adjusted, thereby adjusting the distance between the silicon wafer or battery cell and the visual inspection mechanism to ensure the inspection accuracy.

[0008] In an optional embodiment, the three-axis drive mechanism includes an X-axis drive component, a Y-axis drive component and a Z-axis drive component, the storage table is connected to the X-axis drive component, the X-axis drive component is connected to the Y-axis drive component, and the Y-axis drive component is connected to the Z-axis drive component.

[0009] Beneficial effect: This arrangement enables the placement table to move in three directions, X, Y and Z, that is, the placement table can drive the silicon wafer or battery cell thereon to achieve front-to-back, left-to-right and up-and-down displacement, so as to move the silicon wafer or battery cell on the placement table to a suitable position, facilitating photo inspection by the visual inspection mechanism.

[0010] In an optional embodiment, the visual inspection mechanism includes four first inspection mechanisms, which are respectively arranged on four sides of the storage table and are used to perform visual inspection on the sides of the silicon wafer or the battery cell.

[0011] Beneficial effect: The four first detection mechanisms correspond to detecting the four sides of the silicon wafer or battery cell respectively, and can detect the surface data of the four sides of the silicon wafer or battery cell, the surface data including the thickness of the wafer and cracks and hidden cracks.

[0012] In an optional embodiment, it further includes a frame and a moving module arranged on the frame, the first detection mechanism is connected to the moving module, and the moving module is suitable for driving the first detection mechanism to move in the XY plane along a direction parallel to the side of the storage table.

[0013] Beneficial effect: With this arrangement, the first detection mechanism can change its position by moving the module, thereby being able to adapt to the visual inspection of the side surfaces of silicon wafers or battery cells of different sizes.

[0014] In an optional embodiment, the movable module includes a linear slide rail arranged on a frame, a sliding seat slidably connected to the linear slide rail, and a driving mechanism connected to the sliding seat, the linear slide rail is parallel to the side of the storage table, the first detection mechanism is arranged on the sliding seat, and the driving mechanism is suitable for driving the first detection mechanism to move along the linear slide rail.

[0015] Beneficial effect: The linear guide rail can play a guiding role when the first detection mechanism moves, thereby improving the displacement accuracy of the first detection mechanism. The positions of the first detection mechanism in the Y and Z directions are determined, and when the first detection mechanism is displaced, only the position in the X direction changes. Therefore, it is only necessary to determine the position in the X direction.

[0016] In an optional embodiment, four mobile modules are provided, which are respectively arranged on four sides of the storage table, and the four first detection mechanisms are connected to the four mobile modules in a one-to-one correspondence.

[0017] Beneficial effect: With such an arrangement, the four first detection mechanisms around the storage table can all be displaced to adjust the position of the first detection mechanism relative to the storage table.

[0018] In an optional embodiment, the driving mechanism includes a synchronous wheel rotatably connected to the frame, a synchronous belt connected to the synchronous wheel, and a driving motor driving the synchronous wheel to rotate. The synchronous belt is provided with a connecting piece, and the connecting piece is connected to the first detection mechanism.

[0019] Beneficial effects: With this arrangement, the rotation of the drive motor can drive the synchronous wheel to rotate, the rotation of the synchronous wheel can drive the synchronous belt to move, and the synchronous belt drives the first detection mechanism to move through the connecting piece. The drive mechanism uses a drive motor, a synchronous belt and a synchronous wheel, has a simple structure, is easy to assemble, and has stable and reliable transmission.

[0020] In an optional embodiment, synchronous wheels are provided at the four corners of the frame, and the driving motor is connected to any synchronous wheel; the synchronous belt forms a closed loop around the synchronous wheel, and the synchronous belt between two adjacent synchronous wheels is connected to a connecting piece, and the connecting piece is connected to the first detection mechanism on the corresponding side.

[0021] Beneficial effect: By setting synchronous wheels at the four corners of the frame, the synchronous belt forms a closed loop around the synchronous wheels. Only one driving motor is needed to drive any one of the synchronous wheels to rotate, so as to drive the synchronous belt to move, thereby realizing the synchronous displacement of the four first detection mechanisms in their respective directions around the same rotation direction. This arrangement makes the structure simpler, and one driving motor can synchronously drive the displacement of the four first detection mechanisms, which is low in cost.

[0022] In an optional embodiment, the visual inspection mechanism includes four second inspection mechanisms, which are respectively arranged at four corners of the storage table, and the second inspection mechanisms are used to perform visual inspection on the chamfers of silicon wafers or battery cells.

[0023] Beneficial effect: With this arrangement, the four second detection mechanisms can perform visual inspection on the four corners of the storage table, thereby detecting whether the silicon wafer or battery cell has defects such as edge cracking.

[0024] In an optional embodiment, the visual inspection mechanism includes a mounting seat, and a camera lens and a detection light source disposed on the mounting seat, the camera lens and the detection light source are coaxially arranged, and the detection light source is disposed toward the storage table.

[0025] Beneficial effects: The detection light source is irradiated toward the silicon wafer or battery cell on the storage table to provide light source, and the camera lens is used to photograph the silicon wafer or battery cell to obtain surface data of the silicon wafer or battery cell and detect the surface of the silicon wafer or battery cell.

[0026] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a structural schematic diagram of a visual inspection device according to an embodiment of the utility model;

[0029] Figure 2 for Figure 1 A schematic diagram of the structure of the detection platform in the visual detection device shown;

[0030] Figure 3 for Figure 1 A schematic diagram of the structure of a mobile module in a visual inspection device shown;

[0031] Figure 4 for Figure 1 A schematic structural diagram of a first detection mechanism in the visual detection device shown;

[0032] Figure 5 for Figure 1 A schematic structural diagram of the second detection mechanism in the visual detection device shown.

[0033] Description of reference numerals:

[0034] 1. Detection platform; 11. Storage table; 12. Three-axis drive mechanism; 121. X-axis drive assembly; 122. Y-axis drive assembly; 123. Z-axis drive assembly; 2. Visual detection mechanism; 21. Mounting seat; 22. Camera lens; 23. Detection light source; 201. First detection mechanism; 202. Second detection mechanism; 3. Rack; 4. Moving module; 41. Sliding seat; 42. Drive mechanism; 421. Synchronous wheel; 422. Synchronous belt; 423. Connector; 424. Drive motor; 43. Linear slide rail. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0036] The current visual inspection equipment in the industry transports silicon wafers or battery cells through a conveying device, and performs visual inspection on the silicon wafers or battery cells through a visual inspection mechanism 2 arranged on both sides of the conveying device. However, silicon wafers or battery cells of different specifications have different sizes and shapes, resulting in different detection distances of the visual inspection mechanism 2 for silicon wafers or battery cells of different specifications, affecting the inspection accuracy.

[0037] The utility model provides a visual inspection device to solve the above technical problems.

[0038] In addition, most equipment in the industry can only detect silicon wafers or battery cells of either 182 or 210 specifications, and the specifications for detection are subject to size restrictions. The visual inspection device has a small scope of application, so different equipment is required for visual inspection of silicon wafers or battery cells of different specifications, resulting in low inspection efficiency.

[0039] Therefore, the visual inspection device provided in this embodiment can also solve the problems of small application scope and low inspection efficiency.

[0040] Combine the following Figures 1 to 5 , describing an embodiment of the utility model.

[0041] According to an embodiment of the utility model, on the one hand, a visual inspection device is provided, comprising an inspection platform 1 and a plurality of visual inspection mechanisms 2. The inspection platform 1 comprises a placement table 11, the placement table 11 is connected to a three-axis driving mechanism 12, and the three-axis driving mechanism 12 is suitable for driving the placement table 11 to move along three directions of X, Y and Z; the plurality of visual inspection mechanisms 2 are arranged at intervals around the placement table 11, and are used to perform visual inspection on the surface of the silicon wafer or battery cell located on the placement table 11.

[0042] The visual inspection device provided in this embodiment is provided with an inspection platform 1, and the storage table 11 of the inspection platform 1 can be used to place silicon wafers or battery cells waiting for inspection. The inspection platform 1 is also provided with a three-axis driving mechanism 12, which can drive the storage table 11 to move along the three directions of X, Y and Z, so that the position of the storage table 11 and the silicon wafer or battery cell thereon can be adjusted, thereby adjusting the distance between the silicon wafer or battery cell and the visual inspection mechanism 2 to ensure the inspection accuracy.

[0043] The three directions of X, Y and Z are as follows: Figure 1 As shown. Figure 1 From the perspective shown, the plane shown by XY is a horizontal plane, the Z direction is a vertical direction, and the movement of the placement table 11 along the Z direction is to adjust the height of the placement table 11.

[0044] In one embodiment, the three-axis drive mechanism 12 includes an X-axis drive component 121, a Y-axis drive component 122 and a Z-axis drive component 123, the storage table 11 is connected to the X-axis drive component 121, the X-axis drive component 121 is connected to the Y-axis drive component 122, and the Y-axis drive component 122 is connected to the Z-axis drive component 123.

[0045] By setting an X-direction drive component 121, and connecting the storage table 11 to the X-direction drive component 121, the X-direction drive component 121 can drive the storage table 11 to move along the X direction; by setting a Y-direction drive component 122, and connecting the X-direction drive component 121 to the Y-direction drive component 122, the Y-direction drive component 122 can drive the X-direction drive component 121 to move along the Y direction; by setting a Z-direction drive component 123, and connecting the Y-direction drive component 122 to the Z-direction drive component 123, the Z-direction drive component 123 can drive the Y-direction drive component 122 to move along the Z direction, thereby realizing the movement of the storage table 11 in the three directions of X, Y and Z, that is, the storage table 11 can drive the silicon wafers or battery cells thereon to achieve front-to-back, left-to-right and up-and-down displacements, so as to move the silicon wafers or battery cells on the storage table 11 to a suitable position, so as to facilitate the photo detection by the visual detection mechanism 2. The silicon wafer or battery cell is placed on the storage table 11 through the handling assembly, and the Z-axis driving assembly 123 drives the silicon wafer or battery cell on the storage table 11 to fall to the height required for visual photography. The X-axis driving assembly 121 and the Y-axis driving assembly 122 drive the storage table 11 to move, and move the silicon wafer or battery cell to be inspected to the required visual photography position for photography inspection, and complete the required photography inspection in sequence.

[0046] Furthermore, the three-axis driving mechanism 12 also includes a first guide mechanism arranged along the X direction, a second guide mechanism arranged along the Y direction, and a third guide mechanism arranged along the Z direction. The storage table 11 is connected to the first guide mechanism, the first guide mechanism is connected to the second guide mechanism, and the second guide mechanism is connected to the third guide mechanism.

[0047] By setting the first guide mechanism, when the platform 11 is displaced in the X direction under the drive of the X-direction driving mechanism 42, the first guide mechanism can guide the movement of the platform 11; correspondingly, setting the second guide mechanism can guide the movement of the platform 11 along the Y direction, and setting the third guide mechanism can guide the movement of the platform 11 along the Z direction.

[0048] Specifically, the first guide mechanism includes a first guide rail and a first slider slidably connected to the first guide rail, and the storage platform 11 is slidably connected to the first guide rail through the first slider.

[0049] Specifically, the second guide mechanism includes a second guide rail and a second slider slidably connected to the second guide rail, and the X-axis driving assembly 121 is slidably connected to the second guide rail via the second slider.

[0050] Specifically, the third guide mechanism includes a third guide rail and a third slider slidably connected to the third guide rail, and the Y-axis driving assembly 122 is slidably connected to the third guide rail via the third slider.

[0051] In one embodiment, the X-axis driving assembly 121 , the Y-axis driving assembly 122 , and the Z-axis driving assembly 123 all include cylinders.

[0052] In one embodiment, the visual inspection mechanism 2 includes four first inspection mechanisms 201 , which are respectively disposed on four sides of the storage platform 11 for visual inspection of the sides of the silicon wafer or battery cell.

[0053] The visual inspection mechanism 2 is provided with four first inspection mechanisms 201, and the four first inspection mechanisms 201 are respectively arranged on the four sides of the storage platform 11, that is, the four first inspection mechanisms 201 correspond to the four sides of the silicon wafer or battery cell, respectively, and can detect the surface data of the four sides of the silicon wafer or battery cell, and the surface data includes the number of slices, thickness, cracks, etc. Specifically, the side here refers to the side corresponding to the four sides of the storage platform 11.

[0054] In one embodiment, it also includes a frame 3 and a movable module 4 arranged on the frame 3, the first detection mechanism 201 is connected to the movable module 4, and the movable module 4 is suitable for driving the first detection mechanism 201 to move in the XY plane along a direction parallel to the side of the storage table 11.

[0055] By setting the moving module 4, the first detection mechanism 201 can move in the XY plane in a direction parallel to the side of the storage platform 11 under the drive of the moving module 4. In this way, the first detection mechanism 201 can change its position by moving the module 4, so as to adapt to the visual inspection of the side of silicon wafers or battery cells of different sizes.

[0056] In one embodiment, the movable module 4 includes a linear slide rail 43 arranged on the frame 3, a sliding seat 41 slidably connected to the linear slide rail 43, and a driving mechanism 42 connected to the sliding seat 41. The linear slide rail 43 is parallel to the side of the storage table 11. The first detection mechanism 201 is arranged on the sliding seat 41. The driving mechanism 42 is suitable for driving the first detection mechanism 201 to move along the linear slide rail 43.

[0057] By providing the linear slide rail 43, the sliding seat 41 can slide along the linear slide rail 43, so that the first detection mechanism 201 provided on the sliding seat 41 can slide along the linear slide rail 43. The linear slide rail 43 can play a guiding role when the first detection mechanism 201 moves, thereby improving the displacement accuracy of the first detection mechanism 201. The positions of the first detection mechanism 201 in the Y direction and the Z direction are determined, and when the first detection mechanism 201 is displaced, only the position in the X direction changes, so it is only necessary to determine the position in the X direction.

[0058] In one embodiment, four movable modules 4 are provided, which are respectively disposed on four sides of the storage platform 11 , and the four first detection mechanisms 201 are connected to the four movable modules 4 in a one-to-one correspondence.

[0059] There are four first detection mechanisms 201 and four mobile modules 4, and the four first detection mechanisms 201 are connected one by one with the four mobile modules 4. In this way, the four first detection mechanisms 201 around the storage platform 11 can all be displaced to adjust the position of the first detection mechanism 201 relative to the storage platform 11.

[0060] Specifically, the four first detection mechanisms 201 are arranged opposite to each other in pairs, two of which can move along the X direction to perform visual inspection on the sides of silicon wafers or battery cells of different lengths, and the remaining two first detection mechanisms 201 can move along the Y direction to perform visual inspection on the sides of silicon wafers or battery cells of different widths.

[0061] In one embodiment, the driving mechanism 42 includes a synchronous wheel 421 rotatably connected to the frame 3, a synchronous belt 422 connected to the synchronous wheel 421, and a driving motor 424 that drives the synchronous wheel 421 to rotate. The synchronous belt 422 is provided with a connecting member 423, and the connecting member 423 is connected to the first detection mechanism 201.

[0062] By arranging a synchronous wheel 421 and a synchronous belt 422 on the frame 3, the synchronous wheel 421 is driven to rotate by the driving motor 424, and the synchronous belt 422 is connected to the first detection mechanism 201 through the connecting piece 423, so that the rotation of the driving motor 424 can drive the synchronous wheel 421 to rotate, and the rotation of the synchronous wheel 421 can drive the synchronous belt 422 to move, and the synchronous belt 422 drives the first detection mechanism 201 to move through the connecting piece 423. Since the first detection mechanism 201 moves along the linear slide rail 43, the synchronous belt 422 and the linear slide rail 43 are parallel.

[0063] The driving mechanism 42 adopts a driving motor 424, a synchronous belt 422 and a synchronous wheel 421, has a simple structure, is easy to assemble, and has stable and reliable transmission.

[0064] In one embodiment, synchronous wheels 421 are provided at the four corners of the frame 3, and the driving motor 424 is connected to any synchronous wheel 421; the synchronous belt 422 forms a closed loop around the synchronous wheel 421, and the synchronous belt 422 between two adjacent synchronous wheels 421 is connected to a connecting piece 423, and the connecting piece 423 is connected to the first detection mechanism 201 on the corresponding side.

[0065] Since four first detection mechanisms 201 are correspondingly arranged on the four sides of the storage table 11, in order to realize the automatic movement of the first detection mechanisms 201 on each side, a separate driving mechanism 42 can be arranged, that is, the four first detection mechanisms 201 are driven to move by four motors respectively. In this embodiment, by respectively arranging synchronous wheels 421 at the four corners of the frame 3, the synchronous belt 422 is formed into a closed loop around the synchronous wheel 421, and only one driving motor 424 is needed to drive any one of the synchronous wheels 421 to rotate, so as to drive the synchronous belt 422 to move, thereby realizing the synchronous displacement of the four first detection mechanisms 201 in their respective directions around the same rotation direction. With such an arrangement, the structure is simpler, and one driving motor 424 can synchronously drive the four first detection mechanisms 201 with the synchronous belt 422 to displace, and the cost is low.

[0066] In one embodiment, the visual inspection mechanism 2 includes four second inspection mechanisms 202 , which are respectively disposed at four corners of the storage platform 11 , and the second inspection mechanisms 202 are used to perform visual inspection on the chamfers of silicon wafers or battery cells.

[0067] By setting up four second detection mechanisms 202, the four second detection mechanisms 202 are respectively located at the four corners of the storage table 11. In this way, the four second detection mechanisms 202 can perform visual inspection on the four corners of the storage table 11, so as to detect whether the silicon wafer or battery cell has defects such as edge chipping.

[0068] The visual inspection device provided in this embodiment includes four first inspection mechanisms 201 located on the sides of the storage table 11, and second inspection mechanisms 202 located at the four corners of the storage table 11. It can realize all-round visual inspection of silicon wafers or battery cells located on the storage table 11, and complete visual inspection of different product sizes of silicon wafers or battery cells of specifications of 182 or 210 through combined position movement and composite inspection.

[0069] The visual inspection device provided in this embodiment can achieve displacement in the X, Y and Z directions because the placement table 11 is connected to the three-axis driving mechanism 12. At the same time, the first inspection mechanism 201 is connected to the moving module 4, so that the first inspection mechanism 201 can move along the X or Y direction. Therefore, it can adapt to the visual inspection of silicon wafers or battery cells of different specifications. For silicon wafers or battery cells of different specifications, there is no need to convert equipment, which can realize large-scale product inspection, shorten the inspection time, and improve the inspection efficiency.

[0070] In one embodiment, the visual inspection mechanism 2 includes a mounting base 21 , and a camera lens 22 and a detection light source 23 disposed on the mounting base 21 . The camera lens 22 and the detection light source 23 are coaxially arranged, and the detection light source 23 is disposed toward the storage table 11 .

[0071] Specifically, since the visual inspection mechanism 2 includes a first inspection mechanism 201 and a second inspection mechanism 202, the first inspection mechanism 201 includes a first mounting seat, a first camera lens and a first inspection light source; the second inspection mechanism 202 includes a second mounting seat, a second camera lens and a second inspection light source.

[0072] The detection light source 23 is directed toward the silicon wafer or battery cell on the storage table 11 to provide light source, and the camera lens 22 is used to photograph the silicon wafer or battery cell to obtain surface data of the silicon wafer or battery cell and to inspect the surface of the silicon wafer or battery cell. During the visual inspection process, the required number of wafers, thickness, corner chipping, edge collapse, cracks, etc. are inspected by scanning and photographing the side of the silicon wafer or battery cell for analysis.

[0073] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A visual inspection device, characterized in that: include: A detection platform (1), the detection platform (1) comprising a storage platform (11), the storage platform (11) being connected to a three-axis driving mechanism (12), the three-axis driving mechanism (12) being suitable for driving the storage platform (11) to move along three directions, namely, X, Y and Z; A plurality of visual inspection mechanisms (2) are arranged at intervals around the storage platform (11) and are used to perform visual inspection on the surface of a silicon wafer or a battery wafer located on the storage platform (11).

2. The visual inspection device according to claim 1, characterized in that: The three-axis driving mechanism (12) comprises an X-axis driving component (121), a Y-axis driving component (122) and a Z-axis driving component (123); the storage platform (11) is connected to the X-axis driving component (121), the X-axis driving component (121) is connected to the Y-axis driving component (122), and the Y-axis driving component (122) is connected to the Z-axis driving component (123).

3. The visual inspection device according to claim 1, characterized in that: The visual inspection mechanism (2) comprises four first inspection mechanisms (201), which are respectively arranged on four sides of the storage platform (11) and are used to inspect the side surfaces of silicon wafers or battery wafers.

4. The visual inspection device according to claim 3, characterized in that: It also includes a frame (3) and a movable module (4) arranged on the frame (3), the first detection mechanism (201) is connected to the movable module (4), and the movable module (4) is suitable for driving the first detection mechanism (201) to move in an XY plane along a direction parallel to the side of the storage platform (11).

5. The visual inspection device according to claim 4, characterized in that: The movable module (4) comprises a linear slide rail (43) arranged on the frame (3), a sliding seat (41) slidably connected to the linear slide rail (43), and a driving mechanism (42) connected to the sliding seat (41), wherein the linear slide rail (43) is parallel to the side of the storage platform (11), the first detection mechanism (201) is arranged on the sliding seat (41), and the driving mechanism (42) is suitable for driving the first detection mechanism (201) to move along the linear slide rail (43).

6. The visual inspection device according to claim 4 or 5, characterized in that: There are four movable modules (4), which are respectively arranged on four sides of the storage platform (11), and the four first detection mechanisms (201) are connected to the four movable modules (4) in a one-to-one correspondence.

7. The visual inspection device according to claim 4 or 5, characterized in that: The driving mechanism (42) comprises a synchronous wheel (421) rotatably connected to the frame (3), a synchronous belt (422) connected to the synchronous wheel (421), and a driving motor (424) for driving the synchronous wheel (421) to rotate; a connecting piece (423) is provided on the synchronous belt (422); and the connecting piece (423) is connected to the first detection mechanism (201).

8. The visual inspection device according to claim 7, characterized in that: Synchronous wheels (421) are provided at the four corners of the frame (3); the driving motor (424) is connected to any of the synchronous wheels (421); the synchronous belt (422) forms a closed loop around the synchronous wheels (421); the synchronous belt (422) between two adjacent synchronous wheels (421) is connected to the connecting piece (423); the connecting piece (423) is connected to the first detection mechanism (201) on the corresponding side.

9. The visual inspection device according to claim 3, characterized in that: The visual inspection mechanism (2) comprises four second inspection mechanisms (202), the four second inspection mechanisms (202) being respectively arranged at four corners of the storage platform (11), and the second inspection mechanisms (202) being used for visual inspection of the chamfers of silicon wafers or battery wafers.

10. The visual inspection device according to any one of claims 3 to 5, characterized in that: The visual detection mechanism (2) comprises a mounting seat (21), and a camera lens (22) and a detection light source (23) arranged on the mounting seat (21); the camera lens (22) and the detection light source (23) are coaxially arranged, and the detection light source (23) is arranged toward the storage table (11).

Images