Method for decreasing error measurement in on-line scanning electronic microscope

Abstract

In the advanced semiconductor manufacturing technique, the control of bar width is more important; a scanning electronic microscope is used as on-line bar width measuring equipment and is required that false measurement can be reduced furthest so as to ensure true and reliable data; but in actual operation, false measurement is hard to be avoided, especially when measuring thinner dense lines, the condition that the adjacent spacing is measured instead of the lines needed to be measured is easy to occur. The invention provides a method for reducing false measurement of the on-line scanning electronic microscope; a method that a secondary electronic signal of the measured structure is analyzed when in measurement is used for judging that the measured structure is lines or spacing; compared with the structure required by measuring documents, that whether the two are consistent is judged, and if the two are not consistent, half space period is moved towards left or right automatically so as to measure correct structure, thus reducing false measurement effectively.

Description

technical field [0001] The invention relates to a scanning electron microscope measurement method in semiconductor manufacturing process technology, in particular to a method for reducing online scanning electron microscope error measurement in integrated circuit technology. Background technique [0002] Strip width control has always been a top priority in advanced semiconductor manufacturing processes. As an online line width measurement device, a scanning electron microscope is required to minimize mismeasurement and ensure that the data is true and reliable. However, in actual operation, mismeasurement is unavoidable. Especially when measuring thin dense lines, it is easy to appear that the adjacent spacing is measured when the line is intended to be measured. Because in the traditional method, the scanning electron microscope only performs a single operation on the captured secondary electron signal to obtain a value after initially finding the measurement position, a...

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